Diaphragm Patents (Class 73/715)
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Publication number: 20020152816Abstract: Disclosed herein is an apparatus for filling gauge and sensor protectors with pressure transmitting fluid, diaphragm housing used therefor and method using such an apparatus. The apparatus includes tubing. A connector is connected to the inner end of the first side of the tubing. A syringe is filled with filling fluid and connected to the outer end of a first branch of the second side of the tubing. A vacuum pump is connected to the outer end of the second branch of the second side of the tubing. A fluid trap container is situated at a position of the tubing between both ends of the second branch of the second side of the tubing.Type: ApplicationFiled: March 4, 2002Publication date: October 24, 2002Inventor: Chul-Won Kim
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Patent number: 6467354Abstract: Glass with metal deposited on it in a pattern which is slightly larger than the cavity area of the corresponding silicon wafer. The metal layer has a thickness such that the glass can deform sufficiently to allow bonding of the glass to the silicon. The metal is then compressively bonded to the silicon in a rim area around the edge of the cavity. The metal provides a barrier to helium which can leak through the glass, but is stopped by the metal barrier.Type: GrantFiled: October 23, 2000Date of Patent: October 22, 2002Assignee: Silicon Microstructures, Inc.Inventor: Henry V. Allen
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Patent number: 6461301Abstract: The invention relates to a resonance based pressure transducer system, insertable into a living body for the in vivo measurement of pressure. It comprises a pressure sensor (2) having a mechanical resonator (16), the resonance frequency of which is pressure dependent; and a source of ultrasonic energy (4). The sensor (2) is mechanically coupled to said source (4) of ultrasonic energy, and the sensor and the source of ultrasonic energy are provided on a common, elongated member (6) at the distal end thereof. A system for pressure measurement comprises an AC power supply, a resonance based pressure transducer system, and a control unit for controlling the supply mode of the AC power, and for analyzing a resonance signal emitted from the resonance based pressure transducer system.Type: GrantFiled: March 19, 2001Date of Patent: October 8, 2002Assignee: Radi Medical Systems ABInventor: Leif Smith
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Publication number: 20020134163Abstract: The present invention provides a differential-pressure transducer having two sensors cross-coupled and independently excited. A first Wheatstone Bridge pressure sensor has a first sensitivity and is excited by a first voltage. A second Wheatstone Bridge pressure sensor has a second sensitivity and is independently excited by a second voltage different from said first voltage. The excitation voltages are independently adjusted to increase or decrease the sensitivities of the sensors to substantially match. The outputs of the sensors are cross-coupled to each other to reduce the offset difference errors between the pressure sensors. Sensitive electronics are isolated within the sealed housing to protect them from harsh surrounding media. The transducer is configured to provide either a four pressure differential pressure measurement or a three pressure gauge differential pressure measurement.Type: ApplicationFiled: March 22, 2001Publication date: September 26, 2002Applicant: Kavlico CorporationInventor: Mark J. Clifford
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Patent number: 6453747Abstract: A port fitting (12, 42) is formed with a closed, pedestal end forming a diaphragm (12a, 42b) on which a strain gauge sensor (22) is mounted. A support member (16, 44) is received on the pedestal end and is formed with a flat end wall (16a, 44a) having an aperture (16c, 44c) aligned with the sensor. A portion of a flexible circuit assembly (24a, 58a) is bonded to the flat end wall. An electronics chamber is formed in a connector (18, 46) which is inverted and maintained at a selected height adjacent to the flat end wall of the support member to facilitate soldering of the flexible circuit to terminals (20, 48) in the connector and electronic components to the flexible circuit. The port fitting, when assembled to the support member, is also maintained at the selected height adjacent to the inverted connector to facilitate wire bonding the sensor to the bonded portion of the flexible circuit.Type: GrantFiled: November 27, 2000Date of Patent: September 24, 2002Inventors: Peter A. Weise, Chris D. Wagner, Thomas R. Maher
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Publication number: 20020124655Abstract: A pressure sensor is mounted upon a hydraulic valve body. The sensor has a base which extends into a bore formed in the valve body. The valve body bore is in communication with a pressurized hydraulic fluid. A cover that is removably attached to the valve body encloses the pressure sensor. A circuit substrate is disposed within the cover and electrically connected to the pressure sensor.Type: ApplicationFiled: January 31, 2002Publication date: September 12, 2002Inventors: Michael Babala, Marc Bolitho, Thomas Baron, Helmut Gegalski
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Patent number: 6443015Abstract: A baffle is positioned near a diaphragm of a capacitive pressure sensor to have a small volume therebetween. The baffle creates a high aspect ratio path to create molecular flow for molecules to travel before reaching the diaphragm. The path encourages contaminants to stick to the baffle or housing before reaching the diaphragm. The sensor further includes a particle trap between an inlet and the baffle.Type: GrantFiled: September 10, 1999Date of Patent: September 3, 2002Assignee: MKS Instruments, Inc.Inventors: James Poulin, Luke D. Hinkle, Chris P. Grudzien
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Patent number: 6443014Abstract: In a proportioner for proportioning a fluid flow (&phgr;) from an input side of a first proportioning element (10) to an output side of a second proportioning element (10), the first and second proportioning elements comprise a membrane (12) provided with at least one opening (16) acting as a flow resistor for a medium to be proportioned, and a pressure sensor (14) integrated in the membrane (12) and used for detecting a pressure difference between the input side and the output side of the proportioning element (10). The proportioner comprises a pressure transducer for input-side application of a pressure to the medium to be proportioned. The first and the second proportioning element (10) are arranged in succession so as to permit, on the basis of the pressure drop across the membranes (12) of the two proportioning elements (10), the detection of clogging or blocking of the respective flow resistor provided in these membranes (12).Type: GrantFiled: October 22, 1999Date of Patent: September 3, 2002Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E. V.Inventor: Martin Richter
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Patent number: 6441451Abstract: A pressure transducer designed to transform static pressure or dynamic pressure applied to a diaphragm into a corresponding electrical signal and a method of manufacturing the same are provided. The transducer includes a fixed electrode formed in an upper surface of a substrate and a moving electrode provided in the diaphragm disposed above the fixed electrode through a cavity. The substrate has formed in the bottom thereof at least one hole which is used in a manufacturing process for removing a sacrificial layer formed between the diaphragm and the upper surface of the substrate in dry etching to form the cavity.Type: GrantFiled: June 29, 1999Date of Patent: August 27, 2002Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Masaharu Ikeda, Masayoshi Esashi
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Patent number: 6439057Abstract: A pressure sensor in a pressure container is introduced to detect pressure difference by comparing an unknown internal pressure with a predetermined pressure of an air-tight chamber. Upon the existence of the pressure difference, a signal to show whether the inside pressure is higher or lower than the predetermined one can be provided for taking further relative measures.Type: GrantFiled: September 27, 2000Date of Patent: August 27, 2002Inventors: Ming Che Lu, Kuen Tai Liu
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Patent number: 6439856Abstract: A novel method for counting pump cycles of an air pump by detecting the air pressure differential of the air pump cycle with a differential pressure switch and attaching an electronic counter to the pressure switch to count the number of openings and /or closings detected by the pressure switch.Type: GrantFiled: November 1, 2000Date of Patent: August 27, 2002Assignee: SEH America, Inc.Inventor: Kenneth C. Ivey
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Publication number: 20020100330Abstract: A pressure sensor includes a housing, an interior chamber of which is sealed by a diaphragm, and a flexible measuring element, which is positioned separately. In addition, the pressure sensor includes a transmission element, which is formed as a chip and is used to transmit force from the diaphragm to the measuring element. In response to a selected deformation of the measuring element, a stop element comes into contact with a region of the transmission element and opposes the applied force. Therefore, it forms an overload protection. The stop element may be configured as a bending bar and/or form a second measuring element, the first measuring element being configured to measure relatively low pressures, and the second measuring element or stop element being configured to measure relatively high pressures. The pressure sensor thus provides a plurality of measuring ranges.Type: ApplicationFiled: July 13, 2001Publication date: August 1, 2002Inventors: Martin Eickhoff, Gerhard Krotz, Christoph Richter, Claudio Cavalloni, Marco Gnielka
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Patent number: 6425289Abstract: A capacitive sensor is described which includes a first electrode remote from a second electrode, wherein the first electrode and the second electrode form a measurement capacitance. The first electrode is arranged on a first substrate member and the second electrode is arranged on a second substrate member. At least one of the electrodes has a spatially resolved structure which allows a spatially resolved measurement of the capacitance. The spatial structure of the electrode may be implemented in form of several mutually parallel stripe-shaped elements or in form of a plurality of spaced-apart elements that are arranged in a two-dimensional pattern. Associated with the electrodes are electronic processing units integrated in the substrate members.Type: GrantFiled: April 16, 1999Date of Patent: July 30, 2002Assignee: Micronas GmbHInventors: Guenter Igel, Ulrich Sieben, Juergen Giehl
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Patent number: 6425290Abstract: A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.Type: GrantFiled: February 9, 2001Date of Patent: July 30, 2002Assignee: Rosemount Inc.Inventors: Charles R. Willcox, Mark A. Lutz, Mark G. Romo, Stanley E. Rud, Jr.
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Patent number: 6425294Abstract: A pressure sensor unit which comprises (i) a housing, (ii) pressure sensor members installed therein including a mount, the bottom of which is fixed to the inner base of the housing by means of an adhesive, a sensor chip firmly bonded to the top of the mount, terminals disposed on the inner base of the housing and bonding wires connecting the sensor chip to their respective terminals, and (iii) a sealant filling the housing so that all the pressure sensor members are completely buried therein; with the terminals being covered with a fluorinated polymer-containing composition functioning as adhesive in at least an upper part thereof and with the sealant being a fluorinated polymer-containing gel material, wherein the composition as adhesive is similar in fluorinated polymer to the gel material.Type: GrantFiled: May 19, 2000Date of Patent: July 30, 2002Assignee: Shin-Etsu Chemical Co., LtdInventors: Mikio Shiono, Kenichi Fukuda
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Patent number: 6422086Abstract: A pressure sensitive device includes a housing having an upper portion and a narrowed lower portion. The housing retains a pressure responsive element having a movable surface which responds to changes in fluid pressure. A movement mechanism interconnects the movable surface of the pressure responsive element with an indicator disposed in an upper portion of the housing wherein at least a portion of the movement mechanism and the pressure responsive element are situated within a narrow lower portion of the housing. The narrow portion includes a ball-shaped end which directly engages a socket of an inflatable sleeve, such as a blood pressure cuff. The interconnection between the ball-shaped end and the socket permits pivotal movement of the housing to facilitate reading of the indicator.Type: GrantFiled: September 25, 2000Date of Patent: July 23, 2002Assignee: Welch Allyn, Inc.Inventors: Raymond P. Dromms, Scott W. Osiecki, Richard L. Vivenzio, Raymond A. Lia, Scott S. Stearns, Dominick A. Danna, James M. Baxter
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Publication number: 20020083775Abstract: A method of forming a composite diaphragm for a pressure transducer is disclosed. The method comprises providing a substrate layer having a first conductivity type and a first surface. Positive implants are deposited in the first surface of the substrate layer, and an epitaxial layer is grown on the first surface of the substrate layer so that the positive implants form positive diffusions in the epitaxial layer. An oxide pattern is formed on the epitaxial layer, and a top layer is deposited over the epitaxial layer and oxide pattern. The substrate layer and positive diffusions of the epitaxial layer are then etched to form the composite diaphragm. The positive diffusions can be patterned so that the resulting etched structure has improved diaphragm performance characteristics. For example, the remaining pattern can include a plurality of bosses and interconnecting battens so that the diaphragm has a relatively high burst pressure and a high output signal with improved linearity at low pressures.Type: ApplicationFiled: January 3, 2001Publication date: July 4, 2002Inventors: Michael J. Haji-Sheikh, Gilberto Morales
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Publication number: 20020078754Abstract: A pressure gauge device comprises a gauge; a body including an inlet pipe coupled to an air supply line, an outlet pipe, a hole threadedly secured to the gauge and in communication with the outlet pipe, a control chamber between and in communication with-the inlet pipe and the outlet pipe, the control chamber including a pivot seat; a hose; a connector coupled to the hose; a union for preventing air from leaking; a handle having one end pivotably coupled the pivot seat; a check valve inserted through the control chamber, the check valve including a reduced diameter section at the bottom hole of the control chamber between the bottom and the stem thereof; a sealing means including a hollow gland on the handle for securing the bottom of the check value, an upper seal, and a lower seal; and an elastic means including a large spring biased against the upper seal and a small spring biased against the top of the check valve. Check valve is operable by pressing the handle for opening or closing the air supply line.Type: ApplicationFiled: December 22, 2000Publication date: June 27, 2002Inventor: Wan-Baq Chen
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Patent number: 6401545Abstract: Selective encapsulation of a micro electro-mechanical pressure sensor provides for protection of the wire bands (140) through encapsulation while permitting the pressure sensor diaphragm (121) to be exposed to ambient pressure without encumbrance or obstruction. Selective encapsulation is made possible by the construction of a protective dam (150) around the outer perimeter of a pressure sensor diaphragm (121) to form a wire bond cavity region between the protective dam (150) and the device housing (105). The wire bond cavity may be encapsulated with an encapsulation gel (160) or by a vent cap (170). Alternatively, the protective dam (150) may be formed by a glass frit pattern (152) bonding a cap wafer (151) to a device wafer (125) and then dicing the two-wafer combination into individual dies with protective dams attached.Type: GrantFiled: January 25, 2000Date of Patent: June 11, 2002Assignee: Motorola, Inc.Inventors: David J. Monk, Song Woon Kim, Kyujin Jung, Bishnu Gogoi, Gordon Bitko, Bill McDonald, Theresa A. Maudie, Dave Mahadevan
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Publication number: 20020062696Abstract: A pressure sensor element for mounting in an adapter element (40) comprises an isolator body (10) with a laterally protecting membrane (20). The membrane (20) covers an opening of a passage (12) through which the pressure present at the surface of the membrane (20) is conveyed to a pressure transducer element (30) by means of a hydraulic fluid (32). In order to mount the pressure sensor element, it is secured in a mounting aperture of the adapter element (40). The projecting perimeter of the membrane (20) is secured to the surface surrounding the mounting aperture of the adapter element (40) by means of a continous seam. A membrane type ring in combination with a conventional membrane may be substituted for the projecting membrane, wherein the membrane type ring covers the gap between the pressure sensor element and the adapter element.Type: ApplicationFiled: November 14, 2001Publication date: May 30, 2002Inventors: Dietfried Burczyk, Karl Flogel, Thomas Velten, Bernd Kastner, Wolfgang Woest
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Publication number: 20020062697Abstract: A pressure sensor has a joint (1) having a pressure port (13), a pressure detecting device (2) bonded to the joint (1) to convert fluid pressure to an electric signal and a housing (5) provided to an output side of the pressure detecting device (2), the pressure sensor further including a flange member (3) bonded to the joint (1) and having a through-hole (26) for the pressure detecting device (2) to be inserted and a connector (6) bonded to the flange member (3) to fix the housing (5).Type: ApplicationFiled: November 29, 2001Publication date: May 30, 2002Inventors: Kouzou Yamagishi, Yoshihiro Tomomatsu, Atsushi Imai
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Publication number: 20020059833Abstract: A pressure sensor is provided, in which dead space is not formed under the diaphragm so that air or fluid will not be remained in the dead space. The pressure sensor having a passage for flowing fluid from one end to the other end thereof comprises a sensor head having a pressure sensitive area responsive to the fluid pressure and a diaphragm having a pressure receiving surface for receiving the fluid pressure directly, wherein the pressure receiving surface is disposed so as to protrude to the inside of the passage, and the pressure sensitive area is disposed on the opposite surface from the pressure receiving surface of the diaphragm.Type: ApplicationFiled: October 30, 2001Publication date: May 23, 2002Applicant: SURPASS INDUSTRY CO., LTD.Inventor: Hiroshi Imai
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Publication number: 20020050171Abstract: A method for manufacturing a sensor component, in particular, a thin-film high-pressure sensor, as well as a sensor component, is described, in which at least one measuring element, in particular an expansion measuring strip is arranged on a membrane, and separated from the membrane through an electrically insulating film, the measuring element being arranged on an electrically insulating substrate, which is mounted in a subsequent step onto the membrane on the side that faces away from the measuring element, so that the electrically insulating substrate forms the electrically insulating film. The electrically insulating substrate performs both a carrier function during the application of the expansion measuring strip to the substrate as well as an insulation function after the mounting of the substrate onto the membrane. In this way, the application of a separate insulation film made of silicon dioxide becomes unnecessary.Type: ApplicationFiled: July 20, 2001Publication date: May 2, 2002Inventor: Joachim Gluck
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Publication number: 20020050170Abstract: A physical sensor component includes a housing (110) having a cavity (112), a pressure sensor device (120) mounted in the cavity of the housing, and a chemically selective and physically selective filter (153) overlying the cavity of the housing and separated from the pressure sensor device.Type: ApplicationFiled: October 28, 1999Publication date: May 2, 2002Inventors: SLOBODAN PETROVIC, HOLLY JEAN MILLER, DAVID J. MONK
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Patent number: 6374679Abstract: A pressure sensor is mounted integrally in a hydraulic valve body. The sensor has a base which extends into a bore formed in the valve body. The valve body bore is in communication with a pressurized hydraulic fluid. A first circumferential groove formed in the sensor base carries an O-ring which forms a seal between the sensor and the wall of the valve body bore. A second circumferential groove formed in the sensor base carries a spring ring which extends into a corresponding groove formed in the wall of the valve body groove. The spring ring cooperates with the sensor base and valve body bore grooves to retain the sensor in the valve body bore.Type: GrantFiled: December 27, 1999Date of Patent: April 23, 2002Assignee: Kelsey-Hayes CompanyInventors: Michael L. Babala, Marc Bolitho, Paul M. Schliebe, Thomas Baron, Helmut Gegalski
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Patent number: 6370959Abstract: A fuel pressure sensor 12 which receives air 62 from an intake manifold 58 and fuel 15 from a fuel rail 14 and which uses the received air 62 and fuel 15 to measure the fuel pressure within the fuel rail 14. The fuel pressure sensor 12 further including a semi-permeable membrane or member 60 which allows the air 62 to pass into the fuel pressure sensor 12 while concomitantly preventing the fuel 15 from passing into the intake manifold 58.Type: GrantFiled: December 21, 1999Date of Patent: April 16, 2002Assignee: Visteon Global Tech., Inc.Inventor: Bryce Andrew Schwager
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Publication number: 20020040604Abstract: A pressure sensor is provided having a housing (3), a process connection (25) which is connected to the housing (3) and serves to feed a medium whose pressure (p) is to be measured to a membrane (7, 43) which is arranged in the housing (3), said membrane (7, 43), in operation, undergoing a deflection which depends on the pressure (p) which is to be measured, which pressure sensor can have a seal made of a chemically highly resistant material and in which the membrane can consist either of ceramic or metal, which pressure sensor has a seal (33) which seals a gap found between the housing (3) and the process connection (25) and/or the membrane (7), bears directly against the gap and covers the gap, and which is clamped between the housing (3) and the membrane (7, 43), and which pressure sensor has a spring (35) which is two-legged in cross section, whose first and second legs enclose an acute angle, whose first leg has a leg surface (37, 53) which faces away from the second leg, rests on a supporting surface anType: ApplicationFiled: August 14, 2001Publication date: April 11, 2002Applicant: Endress + Hauser GmbH + Co.Inventors: Frank Hegner, Karl Flgel, Karlheinz Banholzer, Bernd Rosskopf
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Publication number: 20020040605Abstract: A ceramic pressure measuring cell with a basic body (1, 3), a diaphragm (5) connected to the basic body (1, 3) to form a measuring chamber (7, 9), which during operation undergoes a deflection dependent on a pressure (p1-p2) to be measured and the deflection of which is registered by means of an electromechanical transducer and is made accessible for further evaluation and/or processing, and a bore (13, 17) which penetrates the basic body (1, 3) and into which a small pressure tube (15, 19) is soldered in a pressure-resistant and gastight manner, and via which a pressure (p1, p2) is introduced into the measuring chamber (7, 9), is provided, in which a volume inside the measuring cell and the small pressure tube is precisely known, since the mechanical stop (33, 35) fixes a depth of penetration of the small pressure tube (15, 19) into the basic body (1, 3).Type: ApplicationFiled: August 20, 2001Publication date: April 11, 2002Applicant: Endress + Hauser GmbH + Co.Inventors: Karlheinz Banholzer, Karl Flogel, Frank Hegner, Bernd Rosskopf
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Patent number: 6367333Abstract: A pressure sensor includes a tube for channeling a fluid therethrough. A notched seat is disposed in an outer surface of the tube and is open at circumferentially opposite ends, with a flexible diaphragm at the bottom thereof. The diaphragm is planar, and blends at its perimeter coextensively with an arcuate inner surface of the tube. A gauge is mounted in the seat above the diaphragm for measuring flexure thereof under pressure of the fluid inside the tube.Type: GrantFiled: November 30, 2000Date of Patent: April 9, 2002Assignee: APEX Medical, Inc.Inventors: Edward Theodore Bullister, Peter Richard d'Entremont, Sanford Reich, Neil Silverman
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Patent number: 6363790Abstract: The invention is concerned with a pressure sensor which avoids temperature hysteresis effects caused on account of heat-induced expansions as a result of stresses between a ceramic pressure-measuring cell and a metallic housing. The inventive pressure sensor (100) for determining the pressure of a process medium comprises a metallic housing (110), which is open to a process medium and has a continuous hole (111) for accommodating the ceramic pressure-measuring cell (120), the pressure-measuring cell (120) comprising a ceramic base body (122) and a ceramic diaphragm (121), which is fitted thereon and is exposed to the process medium, and also suitable means (124a, 124b, 130), which supply an electrical signal which can be picked off and corresponds to the process pressure acting on the diaphragm (121).Type: GrantFiled: October 15, 1999Date of Patent: April 2, 2002Assignee: Endress + Hauser GmbH + Co.Inventors: Karl Flögel, Thomas Uehlin
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Publication number: 20020029638Abstract: A method for fabricating a dielectrically isolated silicon carbide high temperature pressure transducer which is capable of operating at temperatures above 600° C. The method comprises applying a layer of beta silicon carbide of a first conductivity, on a first substrate of silicon. A layer of beta silicon carbide of a second conductivity is then applied on a second substrate. A layer of silicon is sputtered, evaporated or otherwise formed on the silicon carbide surfaces of each of the substrates of the beta silicon carbide. The sputtered silicon layer on each substrate is then completely oxidized forming a layer of SiO2 from the silicon. The first and second substrates are subsequently fusion bonded together along the oxide layers of the first and second substrate with the oxide layer providing dielectric isolation between the first and second wafers. This oxide layer, which is formed from the Si layer, has a much lower defect density than SiO2 formed directly from SiC.Type: ApplicationFiled: March 18, 1999Publication date: March 14, 2002Inventors: ANTHONY D. KURTZ, ALEXANDER A. NED
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Publication number: 20020023500Abstract: A semiconductor sensor chip is interposed between a sensor case and a housing. A first pressure is introduced from the sensor case and applied to a rear surface of the sensor chip, while a second pressure is introduced from the housing and applied to a front surface of the sensor chip. The sensor chip detects a pressure difference between the first and the second pressures and converts it into an electrical signal. The sensor chip is hermetically mounted in a depressed portion formed in the sensor case by charging a sealing material from holes formed around the depressed portion. The charging holes are positioned between terminals electrically connecting the sensor chip to an outside circuit to avoid enlarging the pressure sensor size by forming the charging holes.Type: ApplicationFiled: July 16, 2001Publication date: February 28, 2002Inventors: Kenji Chikuan, Michitake Kuroda
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Publication number: 20020023499Abstract: The present invention pertains to a pressure-measurement device with a pressure sensor (1) for measuring the pressure of liquid or gaseous media and with a diaphragm seal (2) that subjects measuring diaphragm (11) of pressure sensor (1) to a pressure to be measured. Pressure sensor (1) has a connection part (12) made of a ceramic material which is connected to measuring diaphragm (11) on the diaphragm side via a joint (14) that is diffusion-tight towards the exterior, and is connected diffusion-tightly to diaphragm seal (2) on the diaphragm seal side. In this way, it is assured that no gases or water vapor can enter the pressure-transfer medium via pressure sensor (1). The operational mode of the pressure transducer remains functional over a long time, and particularly at high temperatures.Type: ApplicationFiled: June 25, 2001Publication date: February 28, 2002Inventors: Ewald Boehler, Joern Jacob, Manfred Liehr
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Publication number: 20020020222Abstract: A pressure sensor for a motor vehicle includes a sensor housing and a base. A pressure bore through the base leads to a pressure space delimited on one side by the base and on the opposite side by a diaphragm connected sealingly to the base. An actuating element is carried on a side of the diaphragm facing away from the pressure space. The actuating element actuates a sensor element in the sensor housing via a non-contact actuation. For protection against leakage due to a break in the diaphragm, a sealing cap surrounds the diaphragm and the actuating element and is sealingly connected to the base.Type: ApplicationFiled: August 3, 2001Publication date: February 21, 2002Applicant: Mannesmann VDO AGInventors: Norbert Schmidt, Joachim Acht
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Publication number: 20020020221Abstract: A pressure sensor configured to sense an applied pressure, comprising a diaphragm support structure, a diaphragm coupled to the diaphragm support structure and configured to deflect in response to applied pressure, a moveable member coupled to the diaphragm and configured to move in response to deflection of the diaphragm, and an optical interference element coupled to the moveable member and configured to interfere with incident light, wherein the interference is a function of position of the moveable member.Type: ApplicationFiled: February 9, 2001Publication date: February 21, 2002Inventors: Fred C. Sittler, Charles R. Willcox, Stanley E. Rud
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Publication number: 20020014123Abstract: A press-fit remote diaphragm assembly includes a diaphragm member and a mounting portion which can be press-fit assembled by hand and without the use of tools. The diaphragm member includes a flexible diaphragm and a first press-fit member receiving portion. The mounting portion includes a second press-fit member receiving portion. The first and second press-fit member receiving portions align to form a press-fit member cavity which contains a press-fit member. The press-fit member engages the first and second press-fit member receiving portions to couple the diaphragm member to the mounting portion.Type: ApplicationFiled: October 12, 2001Publication date: February 7, 2002Inventors: Olaiz A. Saenz, Jon R. Schroeder
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Publication number: 20020014122Abstract: The invention pertains to a pressure sensor for a pressure measuring transducer which contains a base body (3), and a pressure-sensitive measuring membrane (7). The membrane is located on the base body (3) and can be subjected to a measurable pressure. The first chamber (10) is arranged between the base body (3) and the measuring membrane (7) in order to protect the measuring membrane (7) if the pressure to be measured exceeds an upper pressure limit. A second chamber (11) is provided to protect the measuring membrane (7) if the pressure to be measured falls short of a lower pressure limit. The second chamber (11) is arranged between the measuring membrane (7) and a contact plate (5) The contact plate is situated on the side of the measuring membrane (7) opposite the base body (3). A bore (6) is provided for subjecting the measuring membrane (7) to pressure.Type: ApplicationFiled: June 25, 2001Publication date: February 7, 2002Inventors: Ewald Bohler, Jorn Jacob, Manfred Liehr
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Publication number: 20020005072Abstract: A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are electrically connected by face down bonding so that a surface of the sensor chip faces the surface of the stem. In this manner, bonding wires are unnecessary. Therefore, an area for disposing the bonding wires in the stem can be cut down, so that the pressure sensor can be miniaturized.Type: ApplicationFiled: June 29, 2001Publication date: January 17, 2002Inventors: Akira Nidan, Takafumi Taki, Hideaki Hara, Michihiro Masuda, Kaname Ban, Kazuo Tanaka, Yoshifumi Murakami
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Publication number: 20020003917Abstract: An optical fiber pressure sensor having a base layer 20 with an optical fiber hole, a fiber stop layer 28 and, optionally, an etch stop layer 24. The fiber stop layer optionally has a fiber stop hole 33 that is smaller than the optical fiber 22. A diaphragm cap layer 32 is bonded to the fiber stop layer 28. The diaphragm cap layer 32 has a diaphragm 34 spaced apart from the optical fiber. The optical fiber and diaphragm form an Etalon that changes cavity length with applied pressure. Optionally, the device is made almost entirely of silicon, and so has reduced mechanical stress problems caused by thermal expansion mismatches. This allows the present sensor to be used in high temperature environments such as internal combustion engines.Type: ApplicationFiled: March 22, 2001Publication date: January 10, 2002Inventors: David W. Sherrer, Don E. Leber, Dan A. Steinberg
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Publication number: 20010054314Abstract: In a pressure sensor, a first contact electrode is formed on a base board. A second contact electrode is formed on the base board such that a top face thereof is made flush with a top face of the first contact electrode. A deformable click rubber has a flat bottom face opposed to the first and second contact electrodes. The flat bottom face is in parallel with the top faces of the first and second contact electrodes. The sensor generates an output signal when the click rubber is brought into contact with the first contact electrode. A contact area between a bottom portion of the click rubber and the second contact electrode varies in accordance with the deformation of the click rubber to vary an amplitude of the output signal.Type: ApplicationFiled: June 6, 2001Publication date: December 27, 2001Inventor: Yoshihiro Hirao
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Publication number: 20010049963Abstract: A low cost air filter restriction indicator gauge for use in conjunction with an internal combustion engine can be achieved by both simplifying individual part configuration and reducing overall part count. More specifically, a simplified design can be achieved by utilizing a one piece base cap which includes a locking extension and reset button integral therewith. By having this part the injection moldable, it is easy to fabricate and lower in cost as a complex locking pin assembly can be eliminated. Further, the low cost device can be further enhanced by providing a two color visual indicator which displays one color when the device is in its reset position and a second color when the device is in its locked or set position.Type: ApplicationFiled: June 25, 1999Publication date: December 13, 2001Inventors: CHARLES HENRY BERRY, GREGORY MATTHEW FERRIS
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Patent number: 6328647Abstract: A differential pressure detecting system having a compliant first chamber, which is contained within a second environment, in combination with a sensor system for monitoring change in volume/shape of the compliant first chamber. In use the internal volume of the compliant first chamber is caused to access a first environment, so that pressure differences between the first and second environments can be detected via monitoring of change in volume/shape of the compliant first chamber. The compliant first chamber expands when the pressure therein is greater than that in the second environment, but does not expand, or decreases if already expanded, when the pressure in the second environment is equal to or greater than that inside the compliant first chamber. The detector system can be of any functional type that does not significantly affect the compliant first chamber volume/shape by its interrogation thereof in developing a signal.Type: GrantFiled: April 6, 2000Date of Patent: December 11, 2001Inventor: Jon E. Traudt
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Patent number: 6318183Abstract: A multiple element sensor for sensing pressure, the sensor has a substrate 201 with a diaphragm portion 203. Multiple sensing elements 205, 207, 209, 211 are each disposed on the diaphragm portion 203 of the substrate 201. These sensing elements 205, 207, 209, 211 each have output terminals 231, 232, 233, 234, 235, 236, 237, 238 providing signals 371, 373, 375, 377 indicative of the pressure. A combining circuit 217 has input terminals 337, 339, 341, 343 each coupled to the output terminals 231, 232, 233, 234, 235, 236, 237, 238 of each of the sensing elements 205, 207, 209, 211 respectively. The combining circuit 217 has a combined output terminal 219 for providing an output signal 345 dependent on the plurality of signals 371, 373, 375, 377. By fabricating this structure different pressure sensor ranges can be selected depending on how many of the sensing elements 205, 207, 209, 211 are selected by the combining circuit 217.Type: GrantFiled: December 22, 1998Date of Patent: November 20, 2001Assignee: Motorola, Inc.Inventor: Walter Czarnocki
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Publication number: 20010039837Abstract: A pressure detecting apparatus has a single-crystal semiconductor sensor chip disposed on a metallic diaphragm through a low melting point glass. The sensor chip has a planar shape selected from a circular shape, a first polygonal shape having more than five sides and having interior angles all less than 180°, and a second polygonal shape having a ratio of a circumscribed circle diameter relative to an inscribed circle diameter being less than 1.2. Four strain gauge resistors are disposed on X, Y axes passing through a center point O of the sensor chip in parallel with <110> directions. Accordingly, thermal stress is reduced not to adversely affect a detection error and simultaneously high sensitivity is provided.Type: ApplicationFiled: January 27, 2000Publication date: November 15, 2001Inventors: Yukihiko Tanizawa, Kazuaki Hamamoto, Inao Toyoda, Hiroaki Tanaka, Yasutoshi Suzuki
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Patent number: 6313729Abstract: A semiconductor component is fashioned of a chip carrier comprising an approximately planar chip carrier surface on which chip carrier surface a semiconductor chip with a pressure sensor is secured, and composed of electrode terminals penetrating the chip carrier and electrically connected to the semiconductor chip, with a surface-mounted arrangement. The chip overlapping the chip carrier.Type: GrantFiled: November 2, 1998Date of Patent: November 6, 2001Assignee: Siemens AktiengesellschaftInventors: Jürgen Winterer, Gottfried Beer
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Publication number: 20010032515Abstract: A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.Type: ApplicationFiled: February 9, 2001Publication date: October 25, 2001Inventors: Charles R. Willcox, Mark A. Lutz, Mark G. Romo, Stanley E. Rud
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Patent number: 6289726Abstract: A fuel filter restriction indicating device communicating with the supply of fuel passing from a fuel tank to an internal combustion engine. The indicating device senses a decrease in the supply of fuel drawn through the fuel filter by the engine based upon changes in the amount of vacuum in the negative side of the fuel supply, the amount of restriction being indicated by the movement of an indicating device. A mechanism included in the indicating device senses the movement of the indicating device and progressively locks the indicating device into various indicating positions as the vacuum increases due to an increased restriction of the filter, so that the maximum reading of restriction achieved during engine operation remains visible to the operator or maintenance personnel even after the engine is turned off.Type: GrantFiled: June 30, 1999Date of Patent: September 18, 2001Assignee: Engineered Products Co.Inventors: Gregory Matthew Ferris, Jerry Lee Manross, Charels Henry Berry, III, Michael Dean Metcalf, Laverne Lee Sidler
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Patent number: 6286372Abstract: A pressure differential measuring transducer has measuring membranes arranged side by side on one side of a membrane disk and a common fluid space allocated to them. To obtain a measured electric quantity which is proportional to a pressure difference and is independent of changes in static pressure with such a measuring transducer, a part of the membrane disk carrying a first measuring membrane is accommodated from the side in the interior of a tube with a seal, said tube being acted upon by a first pressure at its one end and at its other open end. Another part of the membrane disk having a second measuring membrane extends into an interior space of a container adjacent to the tube to which a second pressure can be applied.Type: GrantFiled: January 12, 2000Date of Patent: September 11, 2001Assignee: Siemens AktiengesellschaftInventor: Moriz Von Rauch
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Patent number: 6282966Abstract: A pressure sensor unit 1 is provided, specifically for automotive engineering applications. A pressure measuring cell 5 is disposed within a main body housing 3, the main body housing having a recess 17 holding a pressure sensor 21 and a pressure transmission medium 27. A separation membrane 31 is disposed between the pressure transmission medium and a supply opening 15 formed in the housing 3, the separation membrane separating the sensed pressure medium from the pressure transmission medium and also closing off and admission opening 29 in the measuring cell housing.Type: GrantFiled: November 10, 1999Date of Patent: September 4, 2001Assignee: TRW Automotive Electronics & Components GmbH & Co. KGInventors: Uwe Probst, Robert Skofljanec
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Publication number: 20010015105Abstract: A pressure sensor that is particularly suitable inter alia for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal (3, 45) with a separating diaphragm (7, 53) on which a pressure (P) to be measured acts and having a ceramic measuring cell (9, 57) which is connected to the diaphragm seal (3, 45) exclusively by inorganic materials, is provided, in which sensor the separating diaphragm (7, 53) and all further sensor components coming into contact during measurement with a medium of which the pressure (P) is to be measured are metallic.Type: ApplicationFiled: December 13, 2000Publication date: August 23, 2001Applicant: Endress + Hauser GmbH + Co.Inventors: Peter Gerst, Karlheinz Banholzer, Karl Flogel, Thomas Uehlin, Frank Hegner, Elke Schmidt, Ulfert Drewes, Rainer Martin