Diaphragm Patents (Class 73/715)
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Patent number: 6966227Abstract: A tire condition monitoring apparatus has a pressure sensor that measures air pressure in a tire of a vehicle. The apparatus also has a transmitter that transmits pressure data measured by the pressure sensor, and a receiver that receives and processes data transmitted by the transmitter. The pressure sensor has a diaphragm exposed to air of the tire, and metallic material covering the diaphragm. The transmitter has a power supply circuit and a connecting member. The power supply circuit supplies electricity for activating the transmitter. The connecting member connects the power supply circuit with the metallic material such that the potential of the metallic material is the same as the potential of the power supply circuit.Type: GrantFiled: December 5, 2003Date of Patent: November 22, 2005Assignee: Pacific Industrial Co., Ltd.Inventors: Youichi Okubo, Takashi Nunami, Kazunori Sawafuji
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Patent number: 6962084Abstract: A diaphragm cover apparatus and method for a sensor are disclosed. A sensor cover is located proximate to a base. A dimple can be located centrally within the cover, wherein the dimple comprises a component that is separate from the sensor cover and diaphragm. The dimple contacts a sense element of the sensor. Additionally, a foil can be adapted for use in blocking air permeation through the sensor diaphragm, when the sensor experiences pressure. An over mold diaphragm is generally located as part of the sensor cover. The dimple itself comprises a highly polished surface to reduce stress concentrators from contacting the sense element. The dimple can be formed from materials such as stainless steel, ceramic and the like to optimize the performance of the sensor.Type: GrantFiled: August 6, 2003Date of Patent: November 8, 2005Assignee: Honeywell International Inc.Inventor: Kenneth E. Gall
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Patent number: 6955089Abstract: A pressure sensor includes a casing having a pressure detection chamber, a diaphragm for receiving pressure of a measuring object and disposed on the casing, and a pressure detection element. The pressure detection chamber is filled with a liquid, and the diaphragm contacts the liquid. The pressure detection element is disposed in the pressure detection chamber to receive the pressure of the liquid. The diaphragm has a plate shape with a radius of R and includes a circumference and a center of the plate. The circumference is fixed to the casing. The diaphragm further includes a corrugate disposed concentrically with the center of the diaphragm and having a half circular cross-section and a top of the half circle. The top of the corrugate is disposed within a distance of 0.6 R from the center of the diaphragm.Type: GrantFiled: October 8, 2003Date of Patent: October 18, 2005Assignee: Denso CorporationInventors: Takeshi Otsuka, Seiichirou Ootake
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Patent number: 6955090Abstract: A pressure transducer for a hydrogen reciprocating compressor in a sour gas environment includes a sensor head including a diaphragm mounted on a free end of the sensor head. The diaphragm is constructed of a nickel-based alloy with gold plating on an exposed side thereof. A method of monitoring line pressure in a reciprocating hydrogen compressor in a sour gas environment includes a) providing a pressure transducer having a sensor head and a diaphragm located flush with a free end of the sensor head composed of a nickel-based alloy; b) applying a noble metal plating to one side of the diaphragm; and c) mounting the pressure transducer in a reciprocating compressor with the one side exposed to the sour gas.Type: GrantFiled: November 20, 2003Date of Patent: October 18, 2005Assignee: General Electric CompanyInventor: Ronald Wayne Wilson
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Patent number: 6952042Abstract: A microelectromechanical device and method of fabricating the same, including a layer of patterned and deposited metal or mechanical-quality, doped polysilicon inserted between the appropriate device element layers, which provides a conductive layer to prevent the microelectromechanical device's output from drifting. The conductive layer may encapsulate of the device's sensing or active elements, or may selectively cover only certain of the device's elements. Further, coupling the metal or mechanical-quality, doped polysilicon to the same voltage source as the device's substrate contact may place the conductive layer at the voltage of the substrate, which may function as a Faraday shield, attracting undesired, migrating ions from interfering with the output of the device.Type: GrantFiled: June 17, 2002Date of Patent: October 4, 2005Assignee: Honeywell International, Inc.Inventors: Thomas G. Stratton, Gary R. Gardner, Curtis H. Rahn
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Patent number: 6948373Abstract: A pressure sensing section and a sensor element are provided in a housing. A pair of coupling ports 12a and 12b are formed at both ends of the housing so as to be aligned with the piping section. A flow path is formed in approximate convex such that the first flow path which switches the flowing direction of the liquid member from an aligned piping section to the pressure sensing section, the second flow path through which the liquid member flows along the pressure sensing section, and the third flow path 13c which switches the flowing direction of the liquid member from the pressure sensing section to the aligned piping section are connected. By doing this, it is possible to provide an inline pressure sensor in which a dead volume as an undesirable liquid pool can be minimized.Type: GrantFiled: June 18, 2004Date of Patent: September 27, 2005Assignee: Surpass Industry Co., Ltd.Inventor: Hiroshi Imai
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Patent number: 6941813Abstract: An optical noninvasive pressure sensing assembly capable of accurately indicating relatively minute pressure changes. The present invention generally includes a light source, such as a Light Emitting Diode (LED) or normal room illumination, positioned to reflected light off of a surface of a membrane. The membrane is in contact with the fluid in which the pressure is to be measured so that changes in the pressure in the fluid cause movement of the membrane. A charge coupling device (CCD) camera captures light reflected off of the membrane and the reflected light is analyzed to determine the relative movement of the membrane based on the change in the pattern of the reflected light.Type: GrantFiled: June 30, 2003Date of Patent: September 13, 2005Assignee: Alcon, Inc.Inventors: Mikhail Boukhny, Xiaoxiao Zhang
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Patent number: 6935180Abstract: The present invention concerns a sensor diaphragm comprising a plurality of diaphragm layers which are arranged in sandwich-like mutually superposed relationship and which include a conveyor or separating diaphragm (1), a first electrically conductive diaphragm layer (2) arranged therebeneath, an electrically insulating diaphragm layer (3) arranged therebeneath and a second electrically conductive diaphragm layer (4) arranged therebeneath, wherein the first and second conductive diaphragm layers (2, 4) are separated from each other and electrically insulated by the electrically insulating diaphragm layer (3) and the second electrically conductive diaphragm layer (4) has portions (7) which engage through openings (5) in the electrically insulating diaphragm layer (3) and through openings (6) in the first electrically conductive diaphragm layer (2) and the electrically insulating diaphragm layer (3) has portions (12) which engage through the openings (5) in the first conductive diaphragm layer.Type: GrantFiled: May 19, 2004Date of Patent: August 30, 2005Assignee: Prominent Dosiertechnik GmbHInventor: Rainer Weisbrodt
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Patent number: 6931934Abstract: A sensor apparatus and method are disclosed herein, including a sensor element located on a base and a cover located proximate to the base. The cover generally includes a sensor diaphragm and a dimple that can form a part of the cover. A flanged area or flanged portion can also be connected to the bottom portion of the cover. The flanged area provides a surface for contacting a fixture to which the sensor apparatus attaches and holding the sensor apparatus to the fixture in a manner which prevents the sensor diaphragm from contacting the fixture and inducing errors during sensor operations thereof. The cover also can include a flanged or brim-shaped portion which is connected to and surrounds the bottom portion of the cover. The flanged portion can be positioned parallel to the sensor diaphragm.Type: GrantFiled: September 10, 2003Date of Patent: August 23, 2005Assignee: Honeywell International Inc.Inventors: Kenneth E. Gall, James D. Cook, Brian J. Marsh, Richard L. Dale
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Patent number: 6925885Abstract: A pressure sensor includes a sensor element, and a resin package member that holds the sensor element. The sensor element is constructed by a semiconductor, and is capable of externally outputting an electric signal in accordance with strain generated when force is applied thereto. The sensor element is directly adhered to the package member via an adhesive layer that has Young's modulus in a range between 2.45×103 Pa and 2.06×104 Pa. Further the adhesive layer has a thickness equal to or more than 110 ?m. Accordingly, the pressure sensor effectively restricts a variation in a sensor characteristic due to a thermal change.Type: GrantFiled: December 5, 2002Date of Patent: August 9, 2005Assignee: Denso CorporationInventors: Seiichiro Ishio, Yasutoshi Suzuki
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Patent number: 6915698Abstract: A small-sized pressure sensor having smaller numbers of parts and assembling steps, a simple structure, a high assembly precision, and little dispersion in the operation characteristics, and a method for manufacturing the pressure sensor. The pressure sensor comprises: a base member; a stationary electrode molded so integrally as is exposed from the bottom face of a recess formed in the upper face of the base member; moving electrode receiving portions and molded so integrally in the bottom face of the recess of the base members as are arranged in the periphery of the stationary electrode and as are higher by a predetermined inter-electrode gap than the upper face of the stationary electrode; a moving electrode opposed to the upper face of the stationary electrode through a predetermined inter-electrode gap; and a diaphragm fixed of the open edge portion of the recess of the base member and adhered integrally at the central portion of its lower face to the upper face of the moving electrode.Type: GrantFiled: August 7, 2003Date of Patent: July 12, 2005Assignee: Omron CorporationInventors: Yasushi Shimomoto, Kenji Shinohara, Osamu Kishimoto, Kazuhira Izawa
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Patent number: 6912909Abstract: A diaphragm-type sensor arrangement to measure the flow pressure in a main pipe. The arrangement includes a connecting line in fluid communication with the main line and a housing with a chamber. The chamber is isolated from fluid communication with the connecting line by a flexible diaphragm and filled with a second fluid. In use, the diaphragm is displaced by pressure changes in the connecting line which in turn displaces the second fluid in the housing chamber to activate a pressure reading device. The sensor arrangement is particularly adapted for use with slurry flows of particulate solids in a liquid carrier and further includes a reaming member to breakup any consolidated plugs or clogs of solid particles in the connecting line.Type: GrantFiled: July 22, 2004Date of Patent: July 5, 2005Assignee: APPCOR at Prindle StationInventors: Allan J. Meacham, Peter C Wilson
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Patent number: 6901794Abstract: A flow sensor includes sensors connected to a flexible membrane. The sensors detect ambient temperature, pressure, and flow rate of a medium. A method of sensing flow rate includes providing the flexible membrane; coupling the plurality of sensors to the flexible membrane; and detecting ambient temperature, pressure, and flow rate of the medium by the sensors. A flow sensing system includes the flow sensor, an operational amplifier, and a closed loop controller. The sensors are connected in a Wheatstone bridge configuration. The operational amplifier is connected to the Wheatstone bridge and outputs a pressure signal representative of the pressure of the medium. The closed loop controller is connected to the operational amplifier and controls a current through a heating element for a resistor in the bridge such that a voltage across the operational amplifier is substantially zero. The output of the closed loop controller represents the flow rate.Type: GrantFiled: October 16, 2003Date of Patent: June 7, 2005Assignee: Festo CorporationInventors: Hans-Joerg Zobel, Karl-Heinz Förster, Josef Binder
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Patent number: 6892582Abstract: The object of the present invention is to propose an etch channel sealing structure characterized by excellent impermeability to moisture and resistance to temporal change of the diaphragm in the pressure sensor produced according to the sacrificial layer etching technique, and to provide a pressure sensor characterized by excellent productivity and durability. After a very small gap is formed by the sacrificial layer etching technique, silicon oxide film is deposited by the CVD technique or the like, thereby sealing the etch channel. Further, impermeable thin film of polysilicon or the like is formed to cover the oxide film. This allows an etch channel sealing structure to be simplified in the pressure sensor produced according to the sacrificial layer etching technique, and prevents entry of moisture into the cavity, thereby improving moisture resistance. Moreover, sealing material with small film stress reduces temporal deformation of the diaphragm.Type: GrantFiled: August 20, 1999Date of Patent: May 17, 2005Assignees: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.Inventors: Shinya Satou, Satoshi Shimada, Atsuo Watanabe, Yasuo Onose, Seiji Kuryu, Atsushi Miyazaki, Junichi Horie, Naohiro Momma
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Patent number: 6892583Abstract: An improved rheometer plate includes a smooth sensing surface with monolithically integrated miniature pressure sensors which do not interfere with the smooth surface. Pressure sensing diaphragms formed by the smooth surface deflect in response to local pressures against the surface to enable the measurement of unperturbed local pressures of materials sheared between plates. The pressure sensors are sufficiently small that measured pressures are considered to be significantly local properties compared to the size of the plate. Normal stress differences and viscosity of fluid are measured accordingly. The membrane covers a plurality of wells or recesses with pressure sensors located in the wells to measure the deflection of the membrane over the wells. Capacitive or other sensors may be used. The rheometer plate can be used as part of a slit rheometer with a slit of varying dimensions.Type: GrantFiled: October 31, 2002Date of Patent: May 17, 2005Assignee: Rheosense, Inc.Inventor: Seong-Gi Baek
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Patent number: 6886408Abstract: A pressure-measuring vessel system for microwave assisted chemical processes is disclosed. The vessel system includes a pressure resistant vessel that is otherwise transparent to microwave radiation, a pressure-resistant closure for the mouth of the vessel, with portions of the closure including a pressure resistant synthetic membrane, a pressure transducer external to the vessel, and a tube extending from the transducer, through the membrane and into the vessel for permitting the pressure inside the vessel to be applied against the transducer while the closure and membrane otherwise maintain the pressure resistant characteristics of the vessel.Type: GrantFiled: January 31, 2001Date of Patent: May 3, 2005Assignee: CEM CorporationInventors: William Edward Jennings, Wyatt Price Hargett, Jr., James Edward Thomas
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Patent number: 6883381Abstract: An acceleration sensor includes a deflectable pressure measuring diaphragm and a counter-structure, which is deflectable as against the pressure measuring diaphragm. The acceleration sensor includes a detection means for detecting a deflection of the pressure measuring diaphragm as against the counter-structure. Further, a test mass is connected to the pressure measuring diaphragm or the counter-structure in order to be deflected from an idle position depending on an acceleration applied. The deflection of the test mass results in a change of the distance between the pressure measuring diaphragm and the counter-structure, which is detectable by the detection means.Type: GrantFiled: June 4, 2003Date of Patent: April 26, 2005Assignee: Infineon Technologies AGInventors: Stefan Kolb, Wolfgang Werner
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Patent number: 6883380Abstract: A pressure sensing capsule includes a pressure sensor inside a capsule wall. The capsule wall includes a feedthrough opening. The pressure sensor is mounted to a stress isolation member with a feedthrough hole. The pressure sensor is mounted to the stress isolation member with the feedthrough hole overlying electrical contacts on the pressure sensor.Type: GrantFiled: May 16, 2003Date of Patent: April 26, 2005Inventor: Mark G. Romo
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Patent number: 6883378Abstract: A pressure sensor has a housing with an opening exposing a cavity, a barrier diaphragm across the opening, a pressure sensing element within the cavity, and a fill fluid within the cavity. The fill fluid comprises a fluid and a filler, the fluid has a TCE associated therewith, the housing has a TCE associated therewith, and the filler lowers the TCE of the fluid to a level matching the TCE of the housing. Accordingly, the housing and the fill fluid do not exhibit temperature induced dimensional changes relative to one another that cause plastic deformation of the barrier diaphragm.Type: GrantFiled: March 28, 2003Date of Patent: April 26, 2005Assignee: Honeywell International, Inc.Inventor: Thomas G. Stratton
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Patent number: 6880405Abstract: A differential pressure indicator has a housing with at least two ports in the housing. One port receives a first pressure, and the second port receives a second pressure. A pressure resistive device is placed between the first port and the second port. The pressure resistive device changes its position when the first pressure exceeds the second pressure by a predetermined amount. A magnet is coupled to the pressure resistive device. A digital displacement sensor senses the position of the magnet. The digital displacement sensor is in communication with an electronic indicator. The electronic indicator activates when the first pressure exceeds the second pressure by a predetermined amount.Type: GrantFiled: December 30, 2002Date of Patent: April 19, 2005Assignee: PTI Technologies, Inc.Inventors: Bijan Mouhebaty, Fermin Alejandro Sandoval Diaz, Daniel K. Moscaritolo
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Patent number: 6877380Abstract: A pressure sensor device for producing a signal indicative of a pressure of a fluid to be monitored, including a housing having a fluid conduit for receiving the fluid to be monitored and a diaphragm positioned at an end of the fluid conduit. The diaphragm includes at least first and second portions, wherein a thickness of the first portion is less than a thickness of the second portion. A transducer is bonded to a surface of the first portion of the diaphragm and including piezoresistive elements for sending the signal. Preferred is a circular second portion and an annular first portion around the outer edge of the second portion. The housing is preferably tubular and includes an annular shoulder for mounting the diaphragm, along with an annular groove on the outer surface of the first portion and connecting the first portion to the annular shoulder.Type: GrantFiled: September 30, 2003Date of Patent: April 12, 2005Assignee: Honeywell International Inc.Inventor: Brian D. Lewis
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Patent number: 6874367Abstract: A capacitive-type pressure sensor comprising a glass plate having an electrode formed thereon. A diaphragm is formed from a semiconductor material and bonded to the glass substrate to define an enclosed cavity containing at least a portion of the electrode, to thereby define a capacitive element, through which, in use, an electrical signal may be passed to determine a capacitance thereof which is indicative of the pressure to be determined.Type: GrantFiled: March 10, 2003Date of Patent: April 5, 2005Assignee: Sensonor ASAInventor: Henrik Jakobsen
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Patent number: 6871546Abstract: In a pressure sensor module according to the prior art, which is intended for detecting the pressure of a corrosive medium, the conventional sensor cell with a pressure sensor chip is modified in order to protect it from corrosion, which results in a large volume for a pressure-transmitting-fluid. This is disadvantageous for the calibration and for a high degree of measurement precision. In a pressure sensor module (1) according to the invention, a convention sensor cell (5) is used that has an adapter (21) connected to it, which has a very small volume for a pressure-transmitting medium.Type: GrantFiled: February 14, 2002Date of Patent: March 29, 2005Assignee: Robert Bosch GmbHInventors: Heiko Scheurich, Martin Mast, Berthold Rogge, Masoud Habibi
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Patent number: 6865950Abstract: A pressure monitoring device includes a rigid base (2) which has secured thereto a lid (5) to define a hermetically sealed chamber (6). The lid (5) is of flexible metal material and the major surface (5A) of the lid forms a diaphragm which will deflect in response to changes in the pressure surrounding the device. A substrate (7) upon which a plurality of SAW devices are laid down is supported on a rigid frame (3A) of the base so that the central region thereof is unsupported between edges (11, 12). A dimple (10) is formed in the lid (5) and presses on a central region of the substrate (7). Changes in pressure will accordingly cause distortion of the central region of the substrate. The end regions (8, 9) of the substrate (7) carry further SAW devices so that, by analyzing the changes in characteristics of all the SAW devices a temperature compensated indication of pressure change, together with an indication of absolute temperature, may be provided by interrogating the SAW devices.Type: GrantFiled: October 10, 2001Date of Patent: March 15, 2005Assignee: Transense Technologies PLCInventors: Graham Michael Freakes, David Daniel George Vile, Victor Alexandrovich Kalinin, Peter John Beckley, Arthur John Leigh
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Patent number: 6860154Abstract: It is an object of the present invention to provide a touch mode capacitive pressure sensor having higher pressure durability than conventional sensors. In this invention, a touch mode capacitive pressure sensor has a diaphragm made from boron-doped silicon, and the boron concentration at the top face of the diaphragm is equal to or greater than 1×1019 cm?3 and less than 9×1019 cm?3. Further, in this invention, a touch mode capacitive pressure sensor has a conductive diaphragm made by doping of an impurity and anisotropic etching, and the etch pit density on the top face of the diaphragm is equal to or less than five per ?m2, and preferably equal to or less than one per ?m2. As a result, the pressure durability of the diaphragm is greatly improved.Type: GrantFiled: January 14, 2002Date of Patent: March 1, 2005Assignee: Fujikura Ltd.Inventors: Satoshi Yamamoto, Osamu Nakao, Hitoshi Nishimura, Masahiro Sato
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Patent number: 6848318Abstract: A pressure sensor that is particularly suitable inter alia for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal (3, 45) with a separating diaphragm (7, 53) on which a pressure (P) to be measured acts and having a ceramic measuring cell (9, 57) which is connected to the diaphragm seal (3, 45) exclusively by inorganic materials, is provided, in which sensor the separating diaphragm (7, 53) and all further sensor components coming into contact during measurement with a medium of which the pressure (P) is to be measured are metallic.Type: GrantFiled: January 23, 2004Date of Patent: February 1, 2005Assignee: Endress + Hauser GmbH + Co.Inventors: Peter Gerst, Karlheinz Banholzer, Karl Flögel, Thomas Uehlin, Frank Hegner, Elke Schmidt, Ulfert Drewes, Rainer Martin
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Patent number: 6845674Abstract: Transfer fluid, in particular for electrical pressure transducers and pressure transmitters, that transfers deflections of a separating element between a substance to be measured and the transfer fluid to a pressure measurement arrangement, the transfer fluid comprising a polyalphaolefin (PAO 6).Type: GrantFiled: April 23, 2002Date of Patent: January 25, 2005Assignee: WIKA Alexander Wiegand GmbH & Co. KGInventors: Roman Becker, Albrecht Kalisch, Jürgen Pleyer, Peter Petter
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Patent number: 6843132Abstract: A pressure sensor is realized wherein output error of sensor element can be reduced even in the case where the pressure sensor is utilized in high temperature conditions. A pressure sensor is provided with a housing 20, a diaphragm 24 that partitions the interior and the exterior of the housing 20, a sensor element 54 provided within the housing 20, output value of the sensor element 54 varying in accordance with force exerted thereupon, and a force transmitting rod 52 provided within the housing, the force transmitting rod 52 moving downwardly when a pressure is exerted upon the diaphragm 24, the force transmitting rod 52 thereby exerting force upon the sensor element 54. The diaphragm 24 has a central region 26 contacting with the force transmitting rod 52, and a surrounding region 27 surrounding the periphery of the central region 26 and connecting the central region 26 with the housing 20.Type: GrantFiled: May 14, 2004Date of Patent: January 18, 2005Assignee: Kabushiki Kaisha Toyota Chuo KenkyushoInventors: Kentaro Mizuno, Kouji Tsukada, Yoshiteru Omura, Shoji Hashimoto, Jiro Sakata
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Publication number: 20040261536Abstract: The present invention concerns a sensor diaphragm comprising a plurality of diaphragm layers which are arranged in sandwich-like mutually superposed relationship and which include a conveyor or separating diaphragm (1), a first electrically conductive diaphragm layer (2) arranged therebeneath, an electrically insulating diaphragm layer (3) arranged therebeneath and a second electrically conductive diaphragm layer (4) arranged therebeneath, wherein the first and second conductive diaphragm layers (2, 4) are separated from each other and electrically insulated by the electrically insulating diaphragm layer (3) and the second electrically conductive diaphragm layer (4) has portions (7) which engage through openings (5) in the electrically insulating diaphragm layer (3) and through openings (6) in the first electrically conductive diaphragm layer (2) and the electrically insulating diaphragm layer (3) has portions (12) which engage through the openings (5) in the first conductive diaphragm layer.Type: ApplicationFiled: May 19, 2004Publication date: December 30, 2004Applicant: ProMinent Dosiertechnik GmbHInventor: Rainer Weisbrodt
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Publication number: 20040255682Abstract: Low pressure sensing and imperviousness to corrosion and to the effects of harsh environments are achieved in a pressure sensor that employs a flexible membrane supporting piezoresistive elements. A plurality of piezoresistive elements are aligned substantially collinearly across one surface of the flexible membrane. Innermost piezoresistive elements are disposed in such a way that they experience tension in response to an applied pressure, whereas outermost piezoresistive elements are disposed in such a way that they experience compression in response to the same applied pressure. Contact pads for each end of each piezoresistive element allow the elements to be configured in any number of desirable arrangements. In one exemplary embodiment, four piezoresistive elements are disposed along a main central axis of the membrane. The contacts of the elements are connected to form a Wheatstone bridge.Type: ApplicationFiled: June 16, 2004Publication date: December 23, 2004Inventors: Roumiana S. Petrova, Hee C. Lim
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Publication number: 20040255681Abstract: A pressure sensor apparatus is disclosed herein, which generally includes a sensor element, a flexible sensor diaphragm in intimate contact with the sensor element at all pressure levels and temperatures, and a package base and a package cover for hermetically sealing the sensor element and the flexible sensor diaphragm within a hermetically sealed sensor package to provide pressure sensor data thereof. The sensor element can be implemented as a quartz sense element to produce a SAW pressures sensor. The pressure sensor apparatus can be alternatively based on other sensing technologies, such as silicon piezoresistive, ceramic capacitive and others.Type: ApplicationFiled: June 18, 2003Publication date: December 23, 2004Applicant: Honeywell International, Inc.Inventors: James D. Cook, Kenneth E. Gall, Kundan L. Malik, Brian J. Marsh
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Patent number: 6832522Abstract: An electronic detector configuration enables the accurate determination of pressure differences in scenarios in which conventional detectors and detector systems introduce inherent thermal inequalities at the interface with their immediate environs. A preferred embodiment of the present invention accurately measures snow water equivalent (SWE) while eliminating the need for fluid-filled pillows that contain environmentally hazardous fluids. By matching the thermal conductivity of)surrounding soil to a detector configuration having an inherently low specific heat, it minimizes effects of differences in thermal conductivity at the snow/soil interface that cause SWE pressure sensor measurement errors. Further, it minimizes thermal effects by keeping soil moisture under the configuration approximately the same as that of surrounding soil.Type: GrantFiled: August 5, 2002Date of Patent: December 21, 2004Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Garry L. Schaefer, Jonathan Alfred Holmgren, Jerome B. Johnson
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Patent number: 6823738Abstract: Compensation techniques for high temperature fiber-optic pressure sensors are aimed at correcting for the sensor sensitivity and offset dependence on temperature. By using materials of different thermal expansion coefficients for the sensor diaphragm, housing, ferrule and fiber-bonding compound and by optimizing the length of such parts, the relative distance of the fiber tip with respect to the sensing diaphragm changes in a manner that reduces sensor sensitivity and/or offset dependence on temperature. In the first embodiment, the distance change results from controlled fiber movement within the ferrule and is used to reduce the temperature sensitivity of dynamic sensors. In the second embodiment, an optimum selection of the diaphragm, housing, ferrule and bonding compound materials yields a stable fiber position within the ferrule but, instead, a well defined ferrule movement with respect to the diaphragm in response to temperature changes.Type: GrantFiled: October 15, 2003Date of Patent: November 30, 2004Inventors: Marek T. Wlodarczyk, Thomas J. Poorman
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Publication number: 20040231425Abstract: A pressure sensor is realized wherein output error of sensor element can be reduced even in the case where the pressure sensor is utilized in high temperature conditions. A pressure sensor is provided with a housing 20, a diaphragm 24 that partitions the interior and the exterior of the housing 20, a sensor element 54 provided within the housing 20, output value of the sensor element 54 varying in accordance with force exerted thereupon, and a force transmitting rod 52 provided within the housing, the force transmitting rod 52 moving downwardly when a pressure is exerted upon the diaphragm 24, the force transmitting rod 52 thereby exerting force upon the sensor element 54. The diaphragm 24 has a central region 26 contacting with the force transmitting rod 52, and a surrounding region 27 surrounding the periphery of the central region 26 and connecting the central region 26 with the housing 20.Type: ApplicationFiled: May 14, 2004Publication date: November 25, 2004Applicant: KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHOInventors: Kentaro Mizuno, Kouji Tsukada, Yoshiteru Omura, Shoji Hashimoto, Jiro Sakata
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Patent number: 6820490Abstract: Methods and systems for measuring the pressure of a fluid. A flexible barrier separates the fluid from the pressure receiving surface of a pressure sensing device. The pressure of the fluid is transferred through the flexible barrier to the pressure receiving surface. The flexible barrier may be in abutting juxtaposition with or may be spaced apart from the pressure sensing surface. In either case, the flexible barrier is coupled or held in defined relationship to the pressure sensing surface such that the pressure receiving surface will receive the substantially actual pressure of the fluid even when the pressure of the fluid is less than the ambient atmospheric pressure. Coupling of the flexible barrier to the pressure receiving surface may be achieved by any suitable means, including adhesive or the application of a full or partial vacuum between the flexible barrier and the pressure receiving surface.Type: GrantFiled: October 16, 2002Date of Patent: November 23, 2004Assignee: Neomedix CorporationInventors: Michael Mittelstein, John T. Sorensen, James B. Gerg, Soheila Mirhashemi
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Patent number: 6813953Abstract: A pressure sensor includes a sensor device and a diaphragm. The diaphragm is exposed to a fluid, a pressure relative to which is detected using the sensor device. The diaphragm is made of a material having a pitting index, which is defined by the equation, (Cr+3.3Mo+20N), of 50 or greater and Ni content of 30 weight % or greater to prevent the diaphragm from corroding due to the fluid.Type: GrantFiled: April 21, 2003Date of Patent: November 9, 2004Assignee: Denso CorporationInventors: Hironobu Baba, Yukihiro Kato, Hiroshi Nomura, Haruhisa Koike
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Patent number: 6810746Abstract: A sensor arrangement has a housing, a pressure detector having a measuring diaphragm which is deflectable by a pressurized measurement medium, a sensor circuit attached directly to the measuring diaphragm, an electronic evaluation circuit connected to the sensor circuit and formed as a hybrid circuit, a connector contacted by an element selected from the group consisting of the sensor circuit, the evaluation circuit and both, the hybrid circuit being fastened directly to the measuring diaphragm by a conductive glue which produces electrical connections between the hybrid circuit and the sensor circuit fastened to the measuring diaphragm and produces a ground connection to the housing.Type: GrantFiled: December 9, 2002Date of Patent: November 2, 2004Assignee: Robert Bosch GmbHInventors: Erwin Naegele, Martin Knapp, Wolfgang E. Mueller, Andreas Fischer, Joerg Gebers
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Publication number: 20040211262Abstract: A pressure sensor includes a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conducting heat from the exterior heated body, maintaining the exterior heated body in direct contact with the getter for a predetermined period of time, and removing the exterior heated body.Type: ApplicationFiled: February 10, 2004Publication date: October 28, 2004Applicant: MKS Instruments Inc.Inventor: Staffan Jonsson
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Patent number: 6807865Abstract: A pressure sensor having a radially tensioned diaphragm for measuring fluid pressure. The pressure sensor includes a first generally concave metal body member and a second generally concave metal body member, and a radially tensioned flexible metal diaphragm located therebetween that is tensioned by heating the sensor. The first and second body members are formed from a material having a coefficient of thermal expansion in the range of approximately 0.0000056 inch/inch/° F. to 0.0000064 inch/inch/° F. The diaphragm is formed from a precipitation hardening metal material having a coefficient of thermal expansion of approximately 0.0000060 inch/inch/° F. The first body member and the second body member are formed from a ferromagnetic metal material such that the first and second body members shield the diaphragm from magnetic fields which may otherwise cause movement of the diaphragm.Type: GrantFiled: February 4, 2002Date of Patent: October 26, 2004Assignee: Dwyer Instruments, Inc.Inventor: Terrence J. Troyer
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Publication number: 20040200287Abstract: A ceramic pressure measurement cell for use in a sensor for static and/or dynamic monitoring of the pressure of a liquid or flowable medium which includes a base body and a membrane connected to the base body such that one side of the membrane is in contact with the medium to be monitored. The pressure measurement cell has high chemical resistance and high temperature resistance for a plurality of chemicals which is achieved by applying at least one plastic film on the side of the membrane in contact with the medium.Type: ApplicationFiled: February 27, 2004Publication date: October 14, 2004Applicant: i f m electronic gmbhInventors: Hans-Peter Mueller, Benno Kathan
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Publication number: 20040200286Abstract: A device for measuring pressure, e.g., for measuring high pressure, including a pressure transducer that is arranged in a housing and includes sensor elements and a sensor diaphragm on a first side, and on a second side opposite the first side is provided with a cutout that extends from the second side to the sensor diaphragm. The pressure transducer is formed as a semiconductor pressure transducer and, with an edge area of the second side surrounding the cutout, is directly soldered onto a support part, provided with a first pressure-channel section, with the aid of a solder layer in such a manner that the first pressure-channel section and the cutout are interconnected.Type: ApplicationFiled: May 27, 2004Publication date: October 14, 2004Inventor: Martin Mast
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Diaphragm-type semiconductor device and method for manufacturing diaphragm-type semiconductor device
Patent number: 6802222Abstract: A diaphragm-type semiconductor device includes a semiconductor substrate, a surface of which is substantially flat, a diaphragm, which covers a circular pressure reference space located on the surface, and a circular electrode layer, a middle part of which is embedded in the diaphragm. The electrode layer is larger than the space and is coaxial with the space. Therefore, internal stress is balanced between inner and outer sides of the diaphragm, and a step formed at the outer edge of the top electrode layer is separated from the diaphragm. The device also includes a step adjuster around the space on the surface. Therefore, another step formed at the outer edge of the space disappears, and a new step is formed separately from the diaphragm at the outer edge of the step adjuster. With this structure, the diaphragm has a desired flatness.Type: GrantFiled: May 10, 2002Date of Patent: October 12, 2004Assignee: Denso CorporationInventors: Seiichiro Ishio, Yasutoshi Suzuki, Keiichi Shimaoka, Hirofumi Funahashi -
Publication number: 20040187587Abstract: A pressure sensor includes a diaphragm for sealing liquid. The diaphragm includes a plurality of convexities, which are disposed concentrically on the diaphragm. Each convexity has a circular arc cross-section in a radial direction and has a ring shape. The sensor has a configuration factor. The configuration factor is in a range between 2.5 and 3.5. The diaphragm of the sensor has excellent deformability so that detection error of the sensor is reduced.Type: ApplicationFiled: March 18, 2004Publication date: September 30, 2004Applicant: DENSO CORPORATIONInventors: Hironobu Baba, Masatoshi Tokunaga
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Publication number: 20040187586Abstract: A pressure sensor has a housing with an opening exposing a cavity, a barrier diaphragm across the opening, a pressure sensing element within the cavity, and a fill fluid within the cavity. The fill fluid comprises a fluid and a filler, the fluid has a TCE associated therewith, the housing has a TCE associated therewith, and the filler lowers the TCE of the fluid to a level matching the TCE of the housing. Accordingly, the housing and the fill fluid do not exhibit temperature induced dimensional changes relative to one another that cause plastic deformation of the barrier diaphragm.Type: ApplicationFiled: March 28, 2003Publication date: September 30, 2004Applicant: Honeywell International Inc.Inventor: Thomas G. Stratton
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Patent number: 6796185Abstract: The differential pressure/pressure transmitter of the present invention detects overpressures by using pre-loading diaphragms. The differential pressure/pressure transmitter of the present invention is provided with a high pressure-side diaphragm assembly 24 having a high pressure-side process diaphragm 34, which transfers high pressure from a process to the high pressure-side transfer oil, and a high pressure-side pre-loading diaphragm 32. The differential pressure/pressure transmitter is also provided with a low pressure-side diaphragm assembly 25 having a low pressure-side process diaphragm 38 and a low pressure-side pre-loading diaphragm 36. A differential pressure sensor assembly is provided to detect the pressure difference between the high pressure-side transfer oil from the high pressure-side diaphragm assembly and the above low pressure-side transfer oil from the low pressure-side diaphragm assembly.Type: GrantFiled: March 28, 2003Date of Patent: September 28, 2004Assignee: Yokogawa Electric CorporationInventors: Ryou Kurosawa, Mamoru Aizawa
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Publication number: 20040177697Abstract: A pressure sensor includes a sensor chip for detecting pressure; a casing for accommodating the sensor chip; and an atmosphere introduction port for introducing an atmosphere pressure as a reference pressure into the sensor chip. The atmosphere introduction port is disposed on the casing. The casing includes a groove for discharging a water drop adhering around the atmosphere introduction port to an outside of the casing. The sensor without any filter can prevent the water drop from penetrating into the atmosphere introduction port.Type: ApplicationFiled: March 4, 2004Publication date: September 16, 2004Inventor: Minoru Tokuhara
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Patent number: 6776046Abstract: A pressure-measuring device with monitoring for diaphragm fracture comprises a housing with a passage whose two openings at the end faces of the housing are closed by a first deformation body and a second deformation body. The passage is completely filled with a transmission liquid in order to transmit the process pressure from the first deformation body to the second deformation body. The device has components for monitoring a material property of the transmission liquid. A change in the material property indicates contamination by the process medium and thus a fracture of the first deformation body. The material property monitored is preferably the relative dielectric constant.Type: GrantFiled: July 11, 2002Date of Patent: August 17, 2004Assignee: Endress & Hauser GmbH & Co. KGInventor: Stefan Pistorius
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Patent number: 6772788Abstract: The present invention relates to a pressure control valve, in particular for electrohydraulic brake systems, including a valve member arranged in a valve housing and a sensor element for determining the fluid pressure that prevails in the valve housing. The fluid pressure in the valve housing is indirectly determined by the sensor element by way of the deformation of the valve housing.Type: GrantFiled: February 20, 2002Date of Patent: August 10, 2004Assignee: Continental Teves AG & Co., OHGInventor: Andreas Klein
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Patent number: 6769308Abstract: An improved low-cost pressure sensor assembly incorporates a stainless steel sensor element welded to an outboard face of a stainless steel insert captured in a low-cost metal pressure port adapted for attachment to a pneumatic valve. The pressure port includes outboard and inboard cavities separated by neck portion; the stainless steel insert is captured in the outboard cavity, while the inboard cavity is adapted for attachment to the pneumatic valve. The stainless steel insert includes a base portion that seats against an O-ring in a floor of the outboard cavity, and a stem portion within the O-ring that extends axially through the neck portion of the pressure port and into its inboard cavity. The insert has a first bore that extends axially from its outboard face into, but not through, the stem portion, and a second bore that intersects the first bore and opens into the inboard cavity of the pressure port.Type: GrantFiled: September 22, 2000Date of Patent: August 3, 2004Assignee: Delphi Technologies, Inc.Inventor: Paul J. Pitzer
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Publication number: 20040144179Abstract: The apparatus is connected by tubing to a patient. The apparatus has a manometer on one side in communication with an entrance port conveying ambient air to the patient. A spring loaded cap is depressed to block air inspired by the patient and cause such air to move a diaphragm in the manometer so that the inspired negative air pressure of the patient can be recorded. As soon as the cap is released a spring opens the entrance port to continue normal flow of ambient air to the patient.Type: ApplicationFiled: January 28, 2003Publication date: July 29, 2004Applicant: MERCURY ENTERPRISES, INC.Inventor: Jeffrey B. Ratner