Diaphragm Patents (Class 73/715)
  • Patent number: 6267159
    Abstract: A method of filling a measuring chamber of a transducer measuring a pressure or a pressure differential with a pressure transmission fluid through a filling channel is described. In this method, a filling pin having a longitudinal channel over part of its total length is inserted into the filling channel to the extent that there remains an open connection of the measuring chamber to the outside. After evacuating, the pressure transmission fluid which is under vacuum is introduced into the measuring chamber through the longitudinal channel under the influence of gravity, and then a supplementary amount of pressure transmission fluid is introduced into the measuring chamber by pushing the filling pin beyond the end of its longitudinal channel.
    Type: Grant
    Filed: November 2, 2000
    Date of Patent: July 31, 2001
    Assignee: Siemens Aktiengesellschaft
    Inventors: Sven Adolf, Hans-Michael Metschke
  • Patent number: 6263741
    Abstract: A micromechanically produced flow-restriction device has a first passage opening formed in a first main surface of a substrate. A channel is formed in a second main surface of the substrate and one end thereof is in fluid communication with the first passage opening. A second passage opening is in fluid communication with a second end of the channel. The first passage opening, the channel and the second passage opening define a flow path. A membrane is formed in the substrate and is in fluid communication with the first passage opening. A membrane electrode is formed at least on the membrane.
    Type: Grant
    Filed: June 1, 1999
    Date of Patent: July 24, 2001
    Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
    Inventor: Peter Woias
  • Patent number: 6263739
    Abstract: A membrane pressure sensor has a hollow space formed between a housing (1) and a cover (2), which is subdivided by two membranes (6; 61, 62) parallel to each other into a pressure sensing space (24) for impingement with a fluid with a pressure to be measured, into an air evacuation space between the membranes (6; 61, 62), and into a measurement fluid filled pressure output space (13) to forward the pressure to a pressure measurement arrangement (10), wherein the membranes (6; 61, 62) are made of a perfluoroalkoxy copolymer (PFA) and are designed shaped and congruent with the interposition of a plastic fiber insert (63). In this pressure sensor, the membrane (61) on the pressure sensing side is in direct contact with the cover (2), and an O-ring (3) is provided to seal the air evacuation space between the housing (1) and the cover (2). The housing (1) and cover (2) are made of a fluoropolymer.
    Type: Grant
    Filed: December 22, 1999
    Date of Patent: July 24, 2001
    Assignee: Wika Alexander Wiegand GmbH & Co.
    Inventors: Thorsten Seefried, Joachim Gareus, Udo Hörning
  • Patent number: 6255609
    Abstract: Sensors for mounting in fluid chambers respond electrically to low pressures in the fluid, while resisting damage or leakage at high pressures. A flexible diaphragm, mounted at one end of a housing, is sandwiched between first and second annuli, leaving a center portion free to move in response to fluid pressure changes. The diaphragm moves a cylinder, which reciprocates in the second annulus against an adjustable spring bias. Travel of the cylinder away from the fluid is limited by a stop. Once the stop is reached, increased pressure on the diaphragm forces it against a fixed wall composed of a face of the second annulus and a face of the cylinder. The forces on the diaphragm are then all compressive. This enables the use of an easily flexed diaphragm for low pressure sensitivity, while resisting damage from high pressures. The moving cylinder is used to move a magnet that actuates a Hall effect switch, a Hall effect analog output transducer, or a reed switch.
    Type: Grant
    Filed: June 26, 2000
    Date of Patent: July 3, 2001
    Assignee: Predator Systems, Inc.
    Inventors: Duane Samuelson, Stephen Kaylor, Gordon Yowell, Alvin S. Blum
  • Patent number: 6238142
    Abstract: An apparatus for erecting a foundation element in a ground surface including a drilling device, a pumping device, a pressure transducer and a control unit. The drilling device includes a hollow core tube and an auger bit adapted to drill a hole in the ground surface while the pumping device is adapted to pump a solidifying suspension material under pressure through the hollow core tube and into the hole in the ground surface. In addition, the pressure transducer is mounted on the core tube and is adapted to provide a pressure signal indicative of a pressure of the solidifying suspension material in the core tube while the control unit is adapted to control the pressure of the solidifying suspension material.
    Type: Grant
    Filed: March 4, 1999
    Date of Patent: May 29, 2001
    Assignee: Bauer Spezialtiebau GmbH
    Inventor: Christoph Alois Harsch
  • Patent number: 6227055
    Abstract: An improved, low-cost, back-side sensing pressure sensor assembly having a high integrity seal between the sensor element and the pressure port. The pressure port has a stud portion at an inboard end for attachment to a pressure vessel wall, and a cup portion at an outboard end for housing the sensor and interface circuitry. A central well extends inward from an inboard face of the cup portion, and a central axial bore in the stud portion opens into the well. A planar carrier disc carrying the sensor element closes the outboard end of the well. The sensor element comprises a silicon diaphragm formed on the outboard end of a glass pedestal that passes through a complementary opening formed in the carrier disc, and the inboard end of the pedestal includes an integral radially extending rim or shoulder that seats on the inboard face of the carrier disc about the opening.
    Type: Grant
    Filed: November 1, 1999
    Date of Patent: May 8, 2001
    Assignee: Delphi Technologies, Inc.
    Inventor: Paul Joseph Pitzer
  • Patent number: 6214634
    Abstract: A sensor device (20) comprises a sensor package (22) having a cavity (24) formed therein, a sensor die (26) mounted on a bottom surface (28) of the cavity (24) and a protective coating (30) formed over the sensor die in the cavity. The protective coating (30) is formed from a material, preferably a polymer material, which is arranged to have a graduated cross-linking density such that the material at the top of the cavity (24) has a high density of cross-linking and the material at the bottom of the cavity (24), which material is in contact with the sensor die, has a low density of cross-linking.
    Type: Grant
    Filed: February 7, 2000
    Date of Patent: April 10, 2001
    Assignee: Motorola, Inc.
    Inventors: Marc Osajda, Eric Perraud
  • Patent number: 6182513
    Abstract: A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.
    Type: Grant
    Filed: December 23, 1998
    Date of Patent: February 6, 2001
    Assignee: Radi Medical Systems AB
    Inventors: Goeran Stemme, Edvard Kaelvesten
  • Patent number: 6173617
    Abstract: A cell for converting a differential pressure into an electric signal, which comprises two chambers and a sensor. The two chambers are filled with an incompressible fluid and each are closed by a respective membrane suitable for deforming under the action of an external pressure. The chambers are separated from each other by a rigid wall. The sensor associated with the wall and responsive to the pressure difference exerted across the wall, delivers an electric signal in response thereto. At least one passage is formed between the two chambers and possesses appropriate dimensions firstly for at least attenuating a parasitic pressure difference existing across the wall at a frequency that is low or zero, and secondly for allowing the sensor to detect the pressure difference exerted across the wall at higher frequencies.
    Type: Grant
    Filed: March 29, 1999
    Date of Patent: January 16, 2001
    Assignee: Schlumberger Industries, S.A.
    Inventor: Alain Zarudiansky
  • Patent number: 6168566
    Abstract: A pressure sensing device includes a housing having an interior sized for containing a flexible diaphragm, the deflection of which causes subsequent movement of a movement mechanism relative to an indicating dial face. The diaphragm is nonfixedly attached to the bottom side of a support plate disposed within the housing interior, in which the plate includes a center opening sized to support the movement mechanism and position an input member of the movement mechanism adjacently to the flexible diaphragm. A pressure chamber is established between the bottom of the housing and the diaphragm such that air or other fluid entering the chamber causes deflection of the diaphragm and subsequent movement of the input member. Preferably, the diaphragm is retained within a slot formed in the housing and clamped into contact with a flexible gasket and the bottom surface of the support plate.
    Type: Grant
    Filed: October 14, 1998
    Date of Patent: January 2, 2001
    Assignee: Welch Allyn, Inc.
    Inventors: Raymond A. Lia, James M. Baxter, Robert L. Vivenzio
  • Patent number: 6132513
    Abstract: A manometer resistant to chemical change caused by process chemistry used in a plasma processing chamber is provided. The manometer includes a pressure sensitive diaphragm attached to a housing wherein at least a portion of the pressure sensitive diaphragm is rendered resistant to chemical change caused by process chemistry.
    Type: Grant
    Filed: March 31, 1999
    Date of Patent: October 17, 2000
    Assignee: Lam Research Corporation
    Inventors: Babak Kadkhodayan, Andreas Fischer, Tienyu T. Sheng, Gregory A. Tomasch
  • Patent number: 6131465
    Abstract: Spark plug (20) integrated fiber optic combustion pressure sensors (30, 36) are configured to decrease heat and fatigue damage to the critical diaphragm (40) and fiber tip (37). A cup-shaped diaphragm (40) having non-uniform thickness reduces stress on the diaphragm and increases the reliability of the sensor. The effects of overpressure on the sensor are reduced by providing an angled portion (42) on the ferrule.
    Type: Grant
    Filed: March 17, 1999
    Date of Patent: October 17, 2000
    Inventors: Marek T. Wlodarczyk, Jerzy A Kabala, Andrzej Mendak
  • Patent number: 6122974
    Abstract: A pressure sensor superior in pressure resistance and capable of covering from a low to high pressure range as a measuring range is to be provided. Plural pressure sensing sections for high and low pressures are formed on a silicon board, the pressure sensing sections each com ing an outer frame portion, a diaphragm portion, a strain gauge portion and an electrode portion. The silicon board side with the strain gauge portions formed thereon and an insulating substrate having electrode take-out portions are bonded together in such a manner that the strain gauge portions are hermetically sealed and that the electrode portions on the silicon board and the electrode take-out portions of the insulating substrate are electrically connected with each other, to constitute a pressure sensing unit.
    Type: Grant
    Filed: August 25, 1998
    Date of Patent: September 26, 2000
    Assignees: Hitachi, Ltd., Hitachi Car Engineering Co., Ltd.
    Inventors: Shinya Sato, Seikou Suzuki, Shinichi Yamaguchi, Yoshiyuki Sasada, Masayuki Miki, Masanori Kubota, Atsushi Miyazaki
  • Patent number: 6120458
    Abstract: A pressure sensitive device includes a housing having an interior cavity and a narrow downwardly extending portion. A support plate is disposed within the housing cavity along with a flexible diaphragm which is sealingly mounted to a bottom facing side of the support plate. A movement mechanism interconnected to the diaphragm includes a pressure sensitive element which is responsive to the impingement of incoming fluid on the sealed diaphragm. The movement mechanism is disposed within a narrow extending portion of the housing to assume a compact and shallow profile which facilitates direct attachment to existing devices, such as blood pressure sleeves. In a preferred version, the movement mechanism is disposed within a cavity defined by the diaphragm.
    Type: Grant
    Filed: January 7, 1999
    Date of Patent: September 19, 2000
    Assignee: Welch Allyn, Inc.
    Inventors: Raymond A. Lia, Robert L. Vivenzio, Scott S. Stearns, Dominick A. Danna, Raymond P. Dromms, James M. Baxter
  • Patent number: 6116092
    Abstract: A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manufacturing process and providing high accuracy pressure detection. The passive-state film is formed on the gas-contact face of the diaphragm when the diaphragm is mounted on a diaphragm base. The diaphragm base is then fixedly secured to a sensor base in which a sensor chip is housed and a pressure transmitting medium is sealed in a gap between the sensor base and the diaphragm base.
    Type: Grant
    Filed: August 28, 1997
    Date of Patent: September 12, 2000
    Assignee: Fujikin Incorporated
    Inventors: Tadahiro Ohmi, Ryosuke Dohi, Koji Nishino, Nobukazu Ikeda
  • Patent number: 6089106
    Abstract: Several force sensor assemblies are disposed within a vehicle seat to determine seat loading and assist in safety device activation. Each force sensor assembly has a sealed body filled with a liquid or a gel. A pressure transducer, together with a supporting integrated circuit, is positioned to respond to the pressure of the liquid or gel. Loads are applied to the pressure transducer through the gel by a piston riding within the body. Compressive loads are thereby transformed into a pressure on the sensor and its support electronics, resulting in a low cost, accurate, and durable sensor. The sensor functions well for relatively low loads of less than a few hundred pounds.
    Type: Grant
    Filed: September 4, 1998
    Date of Patent: July 18, 2000
    Assignee: Breed Automotive Technology, Inc.
    Inventors: Vihang C. Patel, Torbjorn Thuen, Jouni K. Hanninen, Heikki T. Kuisma
  • Patent number: 6085598
    Abstract: A pressure sensor portion having a pressure-responsive element for detecting gas pressure in reference to the atmospheric pressure is connected to a mounting body such as a canister mounted on a vehicle by means of a fragile connecting member. The connecting member breaks off to dismount the sensor device from the mounting body when a high impact due to an accidental collision or crash is imposed on the sensor device, and thereby an inlet port connected to the sensor portion for introducing gas pressure thereinto is prevented from being broken or damaged by such a collision impact. The fragile connecting member may include a tubular pipe formed integrally with a cover that hermetically closes an inner cavity of the sensor portion. A mounting bracket connected to the sensor portion via the fragile connecting member may be used to mount the sensor device on the mounting body.
    Type: Grant
    Filed: June 29, 1999
    Date of Patent: July 11, 2000
    Assignee: Denso Corporation
    Inventors: Hironobu Baba, Michitaka Hayashi, Masaki Takakuwa, Masahito Imai, Akiteru Takae, Tokuhisa Nomura, Akira Ishimaru
  • Patent number: 6083179
    Abstract: A medical apparatus (1) for detecting changes in the cross section of an elongate body cavity, for example, a human urinary tract. The apparatus includes a retainer portion (60) and a sensor portion (10) connected to the retainer portion and having a sensitive body (30) of flexible material. The sensor portion has a first end portion which is fixed to the retainer device (60). The sensitive body is designed as a catheter-like device projecting from the retainer portion (60) and provided at its free end (17) with a rigid closure (37). The sensitive body is hollow and its cavity varies according to the compression of the sensitive body due to cross-sectional changes of the elongated body being examined. A pressure-sensing device indicates the pressure in the cavity and thus the cross sectional changes of the elongated body.
    Type: Grant
    Filed: October 7, 1998
    Date of Patent: July 4, 2000
    Assignee: Formo Medical AB (Publ.)
    Inventor: Bertil Oredsson
  • Patent number: 6070469
    Abstract: A pressure sensor includes a body, a pressure inlet tube housed in the body and having a pressure inlet opening defined therein for introducing oil pressure, and a pressure sensor unit affixed to a proximal end surface of the pressure inlet tube covering the pressure inlet opening to convert the oil pressure to an electrical signal. An oil flow decelerating structure is disposed to a distal end side of the pressure inlet tube for reducing the flow rate of oil.
    Type: Grant
    Filed: September 9, 1998
    Date of Patent: June 6, 2000
    Assignee: Matsushita Electric Works, Ltd.
    Inventors: Naohiro Taniguchi, Shuichi Katayama, Masami Hori
  • Patent number: 6058779
    Abstract: The pressure measurement system includes a diaphragm having a first and a second side and a chamber for exposing the diaphragm first side to a fluid. A force transducer is utilized for measuring force exerted by the fluid on the diaphragm first side. A plate and a captive portion of the diaphragm extending from the second side thereof and partially encasing a portion of the plate enables the plate to be secured to the force transducer with the use of a ferromagnetic plate and a magnet attached to the force transducer, the force transducer may be removably engaged with the plate.
    Type: Grant
    Filed: February 10, 1999
    Date of Patent: May 9, 2000
    Inventor: Mark S. Cole
  • Patent number: 6055865
    Abstract: A semiconductor pressure sensor having a sensor element including a sensor chip to which pressure from a pressure medium is applied, and a pedestal for supporting the sensor chip. The sensor element is bonded to a subplate at the pedestal, and the subplate is bonded to a main plate. The main plate includes an airtightness holding means for holding an airtight seal between the main plate and a sensor mounting part and disposed where pressure of a pressure medium can be detected.
    Type: Grant
    Filed: April 15, 1999
    Date of Patent: May 2, 2000
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Motomi Ichihashi
  • Patent number: 6050147
    Abstract: A pressure port for attaching a stainless steel high pressure sensor to an automotive pressure line includes a cold rolled steel ring having a hex-shaped perimeter and a central bore, and a stainless steel stud welded in the ring. A flange of the stud abuts one face of the ring and an interlocking feature between the stud and the ring relieves stress on the weld during installation and removal of the assembly. An end of the stud extends beyond the ring and is threaded for attachment to the housing of a pressure vessel.
    Type: Grant
    Filed: December 5, 1997
    Date of Patent: April 18, 2000
    Assignee: Delco Electronics Corp.
    Inventors: Andres Deogracias Viduya, Paul Joseph Pitzer
  • Patent number: 6003379
    Abstract: A pressure sensor device prevents foreign matters from reaching a pressure sensor at the back of a pressure introducing passage, is superior in resistance against both fouling and freezing, and includes a temperature sensor.
    Type: Grant
    Filed: November 19, 1997
    Date of Patent: December 21, 1999
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Junichi Ichikawa, Etsuo Nishimura
  • Patent number: 5997484
    Abstract: A probe for measuring epidural pressure and the elasticity of brain parenchyma includes first and second chambers both formed of a thin film with a bag-shape so that they can contract/expand in response to introduction of first and second pressure transmission mediums, respectively, wherein the first and second chambers are independent of each other and provided in a stack. Thus a probe capable of accurately measuring epidural pressure and the elasticity of brain parenchyma can be provided.
    Type: Grant
    Filed: January 13, 1998
    Date of Patent: December 7, 1999
    Assignee: Sugan Co., Ltd.
    Inventor: Tomio Sugahara
  • Patent number: 5996419
    Abstract: A pressure sensor package is claimed. The pressure sensor package includes a pressure sensor base having a cavity, a pressure sensor diaphragm positioned over the cavity, and a pressure sensor cap positioned over and secured to the pressure sensor base. The pressure sensor cap further includes a deformed portion securing the cap to the base, an engaging portion adapted to allow engagement of the cap when the deformed portion is being deformed around the base, an upper portion between the engaging portion and the diaphragm, and a lower portion between the engaging portion and the deformed portion, wherein the upper portion is longer than the lower portion. The engaging portion may extend radially outwardly from the cap, such as in the form of an annular ledge.
    Type: Grant
    Filed: April 30, 1998
    Date of Patent: December 7, 1999
    Assignee: SSI Technologies, Inc.
    Inventor: Erick Lee Sokn
  • Patent number: 5992239
    Abstract: A gauge is provided, preferably for patient use, in which a piston moves linearly within a gauge body against the force of a spring. A diaphragm separates the sensing side of the piston from the clean or atmosphere side of the piston. The diaphragm rolls against the piston and the wall of the chamber during changes in pressure, and does not interfere with accuracy of the readings. Dampening is provided out of the patient fluid stream. The sight glass through which measurements are read produces an optical magnification. A baffle prevents entrained particles from the patient from entering the gauge in significant amounts. A surface-to-surface seat enables the gauge to be mounted as a saddle seat on a duct, regulator or the like.
    Type: Grant
    Filed: September 10, 1998
    Date of Patent: November 30, 1999
    Assignee: Boehringer Laboratories, Inc.
    Inventors: John R. Boehringer, John Karpowicz, Michael I. Hegedus
  • Patent number: 5987995
    Abstract: A fiber optic pressure catheter includes a light source, an optical fiber coupled to receive light from the light source and a sensor head that is optically coupled to the optical fiber. The sensor head has a housing defining a chamber coupled to an end of the optical fiber opposite the light source. The housing has an opening which is enclosed by a membrane. The membrane is responsive to pressure differentials between the chamber and outside the sensor head. A resilient ribbon is coupled within the chamber and has a first end fixedly coupled to a support. The ribbon has a second end that is movable in front of the optical fiber. The ribbon is mounted so that the middle portion of the ribbon touches the membrane and is biased by the membrane in response to various pressure differentials. Thus, various amounts of light are reflected back into the optical fiber based on the amount of pressure at the membrane.
    Type: Grant
    Filed: July 17, 1997
    Date of Patent: November 23, 1999
    Assignee: Sentec Corporation
    Inventors: Takeo Sawatari, Yuping Lin, Philip A. Gaubis
  • Patent number: 5970796
    Abstract: There is disclosed a pressure gauge construction in which a diaphragm assembly responsive to changing values of fluid pressure being supplied to the gauge is secured against an internal support surface of the casing by a combination of sealant and thermal staking.
    Type: Grant
    Filed: March 31, 1998
    Date of Patent: October 26, 1999
    Assignee: Dresser Industries, Inc.
    Inventors: Jeffrey T. Blake, Talivaldis I. Maidelis
  • Patent number: 5948169
    Abstract: Apparatus for reducing a material deposition in a housing is disclosed herein. The apparatus includes: a first pressure sensing device which senses a pressure in a reaction chamber, a pumping device for pumping the vapor from the reaction chamber to the pumping device, a valve that is opened when the pressure is larger than a first value and smaller than a second value, a bypass valve which is closed when the pressure is larger than the third value and smaller than the fourth value, a check valve that blocks a gas flow from the check valve to the bypass valve, and a pipe for connecting all of the above.
    Type: Grant
    Filed: March 11, 1998
    Date of Patent: September 7, 1999
    Assignee: Vanguard International Semiconductor Corporation
    Inventor: Wen-Kai Wu
  • Patent number: 5942694
    Abstract: An apparatus is provided for detecting the pressure of a fluid. The device includes a device for detecting the pressure of a fluid comprising (a) a housing; (b) a first conduit disposed within the housing, having an open inlet end, and an outlet end; (c) a second conduit disposed within the housing having an inlet end and an open outlet end; and (d) a pressure detector disposed within the housing in abutment with the outlet end of the first conduit and the inlet end of the second conduit, such that the pressure detector is in direct operative contact with a fluid flowing within the first and second conduits. Typically, the pressure detector is a pressure transducer. Preferably, the pressure transducer is located within the body, such that the first conduit is disposed at an angle with respect to the pressure sensitive surface of the transducer, the angle being between about 50.degree. and about 75.degree., most preferably between about 65.degree. and about 70.degree..
    Type: Grant
    Filed: November 12, 1996
    Date of Patent: August 24, 1999
    Assignee: Beckman Instruments, Inc.
    Inventors: William M. Robins, Donald P. Labriola, II, John W. Strom
  • Patent number: 5939637
    Abstract: An improved pressure sensor assembly includes a low-cost pressure port comprising a casing formed of cold rolled steel, a small stainless steel insert and an O-ring. The casing has a threaded slug at one end for attaching the sensor assembly to the wall of a pressure vessel and an annular cup at the other end. The annular cup has a hex-shaped periphery to facilitate installation and removal of the sensor assembly, and defines a cylindrical interior cavity including an annular recess in which the O-ring is disposed. The stainless steel insert has a base portion disposed within the cylindrical cavity atop the annular recess so as to compress the O-ring between the insert and casing, and a neck portion that extends out of the cavity to form a pedestal to which the stainless steel pressure sensor element is welded. The insert is retained relative to the casing by a staking operation in which a portion of the casing is deformed against the neck of the insert.
    Type: Grant
    Filed: February 26, 1998
    Date of Patent: August 17, 1999
    Assignee: Delco Electronics Corp.
    Inventors: Paul Joseph Pitzer, John Patrick Amos
  • Patent number: 5929330
    Abstract: A pressure gauge for a pressurized device is disclosed that provides a simple, efficient and highly visual indication of pressure change from a normal condition to various abnormal conditions. The pressure gauge includes a chamber, a pressure converter located within or operably associated with the chamber, a rotary member coupled to the converter and having an indicator pattern and a cap including at least one window through which at least a portion of the indicator pattern is viewable. Once the gauge is brought into fluid communication with a pressurized device, then the cap may be rotated or adjusted to align the windows with a desired marker type placing the gauge in a normal or first indicator data. A change in pressure in the chamber will cause the gauge to undergo a change to a new or different indicator state.
    Type: Grant
    Filed: April 28, 1998
    Date of Patent: July 27, 1999
    Inventor: Robert P. Ford
  • Patent number: 5891751
    Abstract: A reduced size, hermetically sealed semiconductor transducer and methods for fabricating the same. In a preferred embodiment, the transducer comprises a transducer wafer including a diaphragm which deflects upon the application of a force thereto. At least one semiconductor transducer element and one electrical contact are disposed on a top surface of the transducer wafer, with the electrical contact coupled to the semiconductor element and extending to a peripheral portion of the wafer. A cover member is provided that is dimensioned to surround the semiconductor element. A peripheral glass frit bond is formed between the cover member and the transducer wafer, and between the cover member and at least a portion of the electrical contact. An aperture is formed in a top portion of the cover member, positioned above a region bounded by the peripheral glass bond. This aperture functions to prevent air gap formation in the peripheral glass frit bond.
    Type: Grant
    Filed: September 9, 1996
    Date of Patent: April 6, 1999
    Assignee: Kulite Semiconductor Products, Inc .
    Inventors: Anthony D. Kurtz, Alexander Ned
  • Patent number: 5886266
    Abstract: A sensor chamber (7) is provided in a holder (5) of a tank insert (4), a pressure sensor (8) being inserted into said chamber. This pressure sensor (8) rests on a circumferential packing (9) of a shoulder (10) of the sensor chamber (7).
    Type: Grant
    Filed: January 14, 1998
    Date of Patent: March 23, 1999
    Assignee: VDO Adolf Schindling AG
    Inventors: Rudolf Stiller, Andreas Maennchen, Norbert Schmidt
  • Patent number: 5874679
    Abstract: A pressure sensor package and method for producing the same. The package includes a pressure sensor base, a pressure sensor diaphragm positioned over the pressure sensor base, and a pressure sensor cap positioned over the pressure sensor diaphragm and secured relative to the pressure sensor base such that a portion of the pressure sensor diaphragm is deformed between the pressure sensor cap and the pressure sensor base. The deformation can occur along a line of deformation, preferably to form a closed path adjacent a periphery of the pressure sensor diaphragm. In one embodiment, the pressure sensor diaphragm is deformed between an inner surface of the pressure sensor cap and an outer surface of the pressure sensor base along the line of deformation, and the inner surface and the outer surface diverge from each other when moving away from the line of deformation.
    Type: Grant
    Filed: April 4, 1996
    Date of Patent: February 23, 1999
    Assignee: SSI Technologies, Inc.
    Inventor: Erick L. Sokn
  • Patent number: 5869766
    Abstract: A non-contaminating pressure transducer module having an isolation member is disclosed. The isolation member isolates a pressure sensor within the transducer module from exposure to ultra high purity fluids flowing through a conduit in the module without significantly affecting the accuracy of the pressure measurement. The transducer module may be positioned within a fluid flow circuit carrying corrosive materials, wherein the pressure transducer module produces a control signal proportional to either a gauge pressure or an absolute pressure of the fluid flow circuit. The pressure transducer module of the present invention also avoids the introduction of particulate, unwanted ions, or vapors into the flow circuit.
    Type: Grant
    Filed: December 1, 1997
    Date of Patent: February 9, 1999
    Assignee: NT International, Inc.
    Inventors: Gerald R. Cucci, Diane L. Englund
  • Patent number: 5850778
    Abstract: Cookers working with an increasing internal pressure require a pressure indicator which can also adjust the internal pressure to a certain extent and, especially in the event of excessively high internal pressure, to release it by pressure equalization with the environment. Such pressure indicators consist of many parts and are complicated and not easily handlable for cleaning purposes. The invention proposes a pressure indicator which may consist of only a single component (2) besides the pressure indicator pin (1), being made of an elastic material and is multifunctional.
    Type: Grant
    Filed: July 24, 1997
    Date of Patent: December 22, 1998
    Assignee: Heinrich Baumgarten KG
    Inventor: Wolfgang Fischbach
  • Patent number: 5852244
    Abstract: A non-contaminating pressure transducer module having an isolation member is disclosed. The isolation member isolates a pressure sensor within the transducer module from exposure to fluids flowing through a conduit in the module. The transducer module may be positioned in-line within a fluid flow circuit carrying corrosive materials, wherein the pressure transducer module produces a control signal proportional to either a gauge pressure or an absolute pressure of the fluid flow circuit. The pressure transducer module of the present invention also avoids the introduction of particulate, unwanted ions, or vapors into the flow circuit.
    Type: Grant
    Filed: December 1, 1997
    Date of Patent: December 22, 1998
    Assignee: NT International, Inc.
    Inventors: Diane L. Englund, Gerald R. Cucci
  • Patent number: 5831170
    Abstract: A pressure sensor package and a method of producing the same. The package includes a pressure sensor base, a pressure sensor diaphragm positioned over the base, and a sealing ring positioned over the pressure sensor diaphragm and creating an interference fit with the pressure sensor base. The sealing ring forms a mechanical interference with the pressure sensor base by either positioning the ring within an under cut in a sidewall of the base or deforming a portion of the base over the top of the ring. The pressure sensor base includes a recess having a bottom surface and a groove in the bottom surface, and the sealing ring and/or the pressure sensor diaphragm is positioned within the groove. The package further includes external threads for securing the package to a threaded orifice, the external threads being positioned on the output side of the package, as defined by the diaphragm.
    Type: Grant
    Filed: April 4, 1996
    Date of Patent: November 3, 1998
    Assignee: SSI Technologies, Inc.
    Inventor: Erick L. Sokn
  • Patent number: 5824910
    Abstract: An improved hydrostat constructed on a silicon wafer by microfabrication methods similar to those used for integrated circuits and other devices. A thin section of the wafer acts as a diaphragm, responsive to pressure of ambient water. A lever arm is affixed at its first end to one point on the surface of the wafer and extends over the diaphragm, so arranged that the lever arm will be forced away from the wafer when pressure is applied to the diaphragm. The second end of the lever arm is moved by the diaphragm so that it moves further from the wafer, by a factor of the mechanical advantage of the lever. When the second end moves away from the wafer, it mechanically releases a lock, allowing an ordnance device to which the hydrostat is attached to arm.
    Type: Grant
    Filed: April 16, 1997
    Date of Patent: October 20, 1998
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventors: Howard R. Last, Lawrence C. Fan, Ralph E. Balestrieri, Donald R. Garvick, Robert L. Wood
  • Patent number: 5811685
    Abstract: A variable capacitance fluid pressure sensor of the type which includes a deflectable member includes a contaminant exclusion system which protects the deflectable member from both solid and non-solid fluid-borne contaminants. A system of traps disposed between the fluid inlet to the sensor and the deflectable member prevents deposition of process vapors in the fluid on the deflectable member and collects a variety of sizes of fluid-borne solid contaminants remote from the deflectable member.
    Type: Grant
    Filed: December 11, 1996
    Date of Patent: September 22, 1998
    Assignee: MKS Instruments, Inc.
    Inventor: Christopher P. Grudzien, Jr.
  • Patent number: 5776276
    Abstract: In a method for producing a pressure sensor, a ceramic plate is joined to a shaped ceramic part. The shaped ceramic part has a depression. Around the depression there is provided a thick-layer paste which does not completely surround the depression. As a result, the air can escape from the depression during firing and a subatmospheric pressure can thus be enclosed in the depression.
    Type: Grant
    Filed: February 12, 1996
    Date of Patent: July 7, 1998
    Assignee: Robert Bosch GmbH
    Inventors: Ulrich Goebel, Andreas Thomae, Juergen Schwaiger, Rolf Becker, Andreas Fischer
  • Patent number: 5763769
    Abstract: A fiber optic spark plug integrated combustion pressure detector comprises the sensitive sensor head with "snap" action diaphragm to provide the temperature insensitivity to combustion temperature variations. The optical module is integrated into the electrical connector to eliminate open optical interfaces. The "snap" action and special diaphragm shape selectively increase detector knock and misfire discrimination. The pressure sensor can be made spark plug integrated or injected in block cylinder for combustion pressure sensing in engine.
    Type: Grant
    Filed: October 16, 1995
    Date of Patent: June 9, 1998
    Inventor: Michael Kluzner
  • Patent number: 5753821
    Abstract: A pressure gauge structure that consists of a gauge frame with a graduated gauge face at the top of a lower base at the bottom. Protruding from the circumference of the lower base is an annular seat and a guide pipe that provides for gaseous flow. A diaphragm is positioned on the lower base and on the diaphragm is a coil spring topped by a shaft sleeve for a pivoting needle shaft in the tube mount protruding from the gauge face, with the needle shaft o the gauge meter positioned in a coil spring. A calibration rod extends laterally from the needle shaft, the upper end of which is secured in a pivotal state to the gauge face by a mounting base. Around the needle shaft is a spiral spring, one end mounted to the gauge frame and the other end attached to the needle shaft. Under the gauge frame is a hoop flange and the lower base has a guide pipe for gaseous flow. The diaphragm is constructed out of metal with corrugations formed on the surface.
    Type: Grant
    Filed: January 2, 1997
    Date of Patent: May 19, 1998
    Assignee: Chin Ray Industrial Co., Ltd.
    Inventor: Chiu-Sung Chou
  • Patent number: 5734109
    Abstract: The invention relates to an indicator device 1, especially for use as a manometer, with a housing 2 provided with an inlet for the pressurized medium to be measured and a spring-loaded piston 13 which can come into contact with the pressurized medium. The precision of the pressures indicated can be increased and the size can be made especially compact when the piston is designed as a control piston 13 and is in a working connection with an indicator element 5 via a groove and projection combination 39, 40 which translates the stroke of the control piston 13 into a rotating movement of the indicator element 5.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: March 31, 1998
    Assignee: itm, Ute Thanscheidt
    Inventor: Gunter Thanscheidt
  • Patent number: 5722399
    Abstract: A liquid treatment apparatus includes a sensor which is sensitive to a variation in gas pressure and which generates signals indicative of sensed pressures. The apparatus also included a casing divided into a first compartment and a second compartment by a flexible membrane, the first compartment having at least one orifice for the introduction of the liquid, and the second compartment being connectable in a leaktight manner to the pressure sensor. A pump is provided to vary a quantity of gas in the second compartment, and a controller is provided to regulate the pump as a function of variations in pressure generated in the second compartment. The controller is configured to receive signals from the sensor and to cause, through the pump, at least two successive pressure variations, having opposite directions, in the second compartment so as to adjust said position of the membrane between a wall of the casing bounding the first compartment and a wall of the casing bounding the second compartment.
    Type: Grant
    Filed: June 6, 1995
    Date of Patent: March 3, 1998
    Assignee: Hospal Industrie
    Inventors: Jacques Chevallet, Alain Frugier, Eric Louvet
  • Patent number: 5716342
    Abstract: An adapter assembly for a pressure sensor. The adapter includes a sensor housing that has a first port and a second port that are both in fluid communication with an inner chamber of the housing. The assembly further includes a membrane housing that is pressed into the first port of the sensor housing and connected to a fluid line. Extending from the membrane housing is a membrane which separates the sensor housing inner chamber into a first subchamber and a second subchamber. The first subchamber is in fluid communication with the fluid line. The second subchamber is in fluid communication with a pressure transducer which is pressed into the second port of the sensor housing. Any variation of pressure within the fluid line will cause a change in the volume of the first subchamber. The change in the first subchamber volume will deflect the membrane and vary the volume of the second subchamber.
    Type: Grant
    Filed: October 10, 1995
    Date of Patent: February 10, 1998
    Assignee: Circuit Tree Medical, Inc.
    Inventors: Gheorghe Dumbraveanu, Alex Urich, Michael Curtis
  • Patent number: 5714693
    Abstract: There are dynamic sensors whose plunger is seated in the center of at least one diaphragm. In certain instances of use it is not possible to protect the sensitive diaphragms against inappropriate handling. For example, dynamic sensors are employed in the textile industry as yarn tensile force sensors. The diaphragm in which the yarn feeler is seated, which faces the yarn travel path, cannot be protected by means of a cover against unintentional touching, since dust accumulations between the cover and the diaphragm can hamper its function. For protecting the diaphragm it is therefore proposed in accordance with the invention that a support body is disposed a short distance behind the diaphragm and that the side of the support body facing the diaphragm has a support contour which is essentially matched to the contour on the side of the diaphragm facing the support body.
    Type: Grant
    Filed: August 23, 1996
    Date of Patent: February 3, 1998
    Assignee: W. Schlafhorst AG & Co.
    Inventor: Christian Sturm
  • Patent number: 5712428
    Abstract: The invention provides a pressure detector which has a small temperature-related measurement error, can be used in particular for small measurement ranges and has a sensor element (1), a sensor diaphragm (11) secured at its border, the non-secured parts of which sensor diaphragm can be deflected on account of the pressure which is to be measured, a housing (2), fastening means (3) for fixing the border of the sensor diaphragm (11) in the housing (2), a diaphragm (4) which closes off the housing (2) and is to be supplied with a pressure which is to be measured, and a solid body (5) with a modulus of elasticity which is suitable for minimizing the temperature-related measurement error, which solid body is arranged between the diaphragm (4) and the deflectable part of the sensor diaphragm (11) and which solid body transmits the pressure from the diaphragm (4) to the sensor diaphragm (11).
    Type: Grant
    Filed: June 18, 1996
    Date of Patent: January 27, 1998
    Assignee: Endress & Hauser GmbH
    Inventor: Detlef Schleiferbock
  • Patent number: 5706372
    Abstract: A pressure port has a diaphragm at one end for exposure to combustion pressure, an electrical connector attached to the other end, terminal blades and a lead frame molded in the connector and carrying an optoelectronic circuit, and a fiber optic assembly between the circuit and the diaphragm. The fiber optic assembly illuminates the diaphragm which reflects light according to its deflection to two fiber elements that carry reflected light to the circuit. The assembly includes a high temperature plastic body and a ceramic tip for temperature isolation to protect the plastic body and the optoelectronic circuit.
    Type: Grant
    Filed: August 12, 1996
    Date of Patent: January 6, 1998
    Assignee: Delco Electronics Corporation
    Inventor: Andres Deogracias Viduya