Atomic Force Microscopy [afm] Or Apparatus Therefor, E.g., Afm Probes(epo) Patents (Class 850/33)
  • Patent number: 8003283
    Abstract: This invention provides the user the ability to accurately nanomachine surfaces with reduced tip induced errors. Nanomaching has two types of errors, a first type of error is brought about by the tip's shape and its aspect ratio. A second type of error due to the tip's deflection as it works the material. Therefore, embodiments of the present invention minimizes tip deflection errors allowing allow high aspect Nano-bits to reliably and accurately nanomachine small high aspect three dimensional structures to repair and rejuvenate photomasks.
    Type: Grant
    Filed: June 18, 2009
    Date of Patent: August 23, 2011
    Assignee: Rave LLC
    Inventor: Tod Evan Robinson
  • Patent number: 8001830
    Abstract: An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that cab be made generally available to the scientific community.
    Type: Grant
    Filed: May 15, 2007
    Date of Patent: August 23, 2011
    Assignee: Anasys Instruments, Inc.
    Inventors: Alexandre Dazzi, Rui Prazeres, Kevin Kjoller, Michael Reading
  • Patent number: 7977636
    Abstract: A method for performing sub-micron optical spectroscopy, using a heated SPM probe and far-field collection optics is described. The enhanced emission characteristics at a sharp heated tip constitute a highly localized wideband IR source. Thus the IR absorption and emission properties of a sample surface adjacent can be observed and measured in the farfield even though the interaction region is sub-micron in scale. . . . providing spatial resolution mapping of sample composition.
    Type: Grant
    Filed: August 12, 2008
    Date of Patent: July 12, 2011
    Assignee: Anasys Instruments, Inc.
    Inventor: Markus B. Raschke
  • Publication number: 20110167525
    Abstract: A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.
    Type: Application
    Filed: June 8, 2009
    Publication date: July 7, 2011
    Applicant: INFINITESIMA LTD
    Inventor: Andrew Humphris
  • Patent number: 7975316
    Abstract: A frequency shift ?f obtained by an FM-AFM can be expressed by a simple linear coupling of a ?fLR derived from a long-range interaction force and a ?fSR derived from a short-range interaction force. Given this factor, a ?f curve on an atomic defect and a ?f curve on a target atom on the sample surface are each measured for only a relatively short range scale (S1 and S2), and a difference ?f curve of those two curves is obtained (S3). Since the difference ?f curve is derived only from a short-range interaction force, a known conversion operation is applied to this curve obtain an F curve which illustrates the relationship between the force and the distance Z, and then the short-range interaction force on the target atom is obtained from the F curve (S4). Since the range scale in measuring the ?f curve can be narrowed, the measurement time can be shortened, and since the conversion from the ?f curve into F curve is required only once, the computational time can also be shortened.
    Type: Grant
    Filed: January 7, 2008
    Date of Patent: July 5, 2011
    Assignees: Osaka University, Shimadzu Corporation
    Inventors: Masahiro Ota, Noriaki Oyabu, Masayuki Abe, Oscar Custance, Yoshiaki Sugimoto, Seizo Morita
  • Patent number: 7971266
    Abstract: The present invention relates to a method for providing a measuring probe (1, 1a, 2) for a probe microscopic examination of a sample in a probe microscope, in particular a scanning probe microscope, in which the measuring probe (1), which has a probe base (1a) and a probe extension (2) formed thereon, is held on a carrier device and the measuring probe (1) is processed before or after a measurement by detaching a section of the probe extension (2). The invention further relates to an arrangement having a probe microscope for the probe microscopic examination of a sample, in particular a scanning probe microscope.
    Type: Grant
    Filed: January 16, 2009
    Date of Patent: June 28, 2011
    Assignee: JPK Instruments AG
    Inventors: Torsten Jähnke, Torsten Müller, Detlef Knebel, Kathryn Poole
  • Patent number: 7962966
    Abstract: A scanning probe microscope and method for using the same are disclosed. The Scanning probe microscope includes a probe mount for connecting a cantilever arm and a probe signal generator. The probe position signal generator generates a position signal indicative of a position of the probe relative to one end of the cantilever arm. The probe position signal generator includes a first light source that directs a light beam at a first reflector positioned on the cantilever arm and a detector that detects a position of the light beam after the light beam has been reflected from the first reflector. A second reflector reflects the light beam after the light beam is reflected from the first reflector and before the light beam enters the detector, the second reflector passing light from a second light source that illuminates the sample.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: June 14, 2011
    Assignee: Agilent Technologies, Inc.
    Inventor: James Robert Massie
  • Patent number: 7958563
    Abstract: The present invention relates to a method of using an atomic force microscope comprising exciting natural lower and higher vibration modes of a microlever (M) placed on a sample, and analyzing the variation of one variable of a first output signal (Ai cos(?it??i)) representative of the response of M to the excitation of the lower mode, with respect to the variation of a parameter influenced by one variable of a second output signal (Aj cos(?jt??j)) representative of the response of M to the excitation of the higher mode, and/or analyzing the variation of one variable of a second output signal (Aj cos(?jt??j)) representative of the response of M to the excitation of the higher mode, with respect to the variation of a parameter influenced by one variable of a first output signal (Ai cos(?it??i)) representative of the response of M to the excitation of the lower mode.
    Type: Grant
    Filed: July 4, 2006
    Date of Patent: June 7, 2011
    Assignee: Consejo Superior de Investigaciones Cientificas
    Inventors: Ricardo Garcia Garcia, Jose Luis Rodriguez Lozano, Nicolas F. Martinez Caudrado, Shivaprasad Vitthal Patil
  • Patent number: 7958565
    Abstract: A driving laser unit (11) irradiates a laser beam on a cantilever (5) to cause thermal expansion deformation. A driving-laser control unit (13) performs feedback control for the cantilever (5) by controlling intensity of the laser beam on the basis of displacement of the cantilever (5) detected by a sensor (9). A thermal-response compensating circuit (35) has a constitution equivalent to an inverse transfer function of a heat transfer function of the cantilever (5) and compensates for a delay in a thermal response of the cantilever (5) to the light irradiation. Moreover, the cantilever (5) may be excited by controlling the intensity of the laser beam. By controlling light intensity, a Q value of a lever resonance system is also controlled. It is possible to increase scanning speed of an atomic force microscope.
    Type: Grant
    Filed: May 26, 2006
    Date of Patent: June 7, 2011
    Assignee: National University Corporation Kanazawa University
    Inventors: Toshio Ando, Takayuki Uchihashi, Noriyuki Kodera, Hayato Yamashita
  • Patent number: 7954166
    Abstract: An improved method of loading tips and other surfaces with patterning compositions or inks for use in deposition. A method of patterning is described, the method comprising: (i) providing at least one array of tips; (ii) providing a plurality of patterning compositions; (iii) ink jet printing at least some of the patterning compositions onto some of the tips; and (iv) depositing at least some of the patterning compositions onto a substrate surface; wherein the ink jet printing is adapted to prevent substantial cross-contamination of the patterning composition on the tips. Good printing reproducibility and control of printing rate can be achieved. The surfaces subjected to ink jet printing can be treated to encourage localization of the ink at the tip. The method is particularly important for high density arrays.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: May 31, 2011
    Assignee: Northwestern University
    Inventors: Chad A. Mirkin, Yuhuang Wang, Louise R. Giam, Matthew Park
  • Publication number: 20110126328
    Abstract: A lapping system for lapping portions of a workpiece. The lapping system includes, a lap that is defined by a surface. Portions of the surface are a lapping surface. The lapping surface has a coating that enhances material removal from a workpiece in a lapping process. The lapping system further includes, a scanning probe microscope having a tip and a substrate. The scanning probe microscope controls lapping motion of the lap and workpiece.
    Type: Application
    Filed: May 13, 2010
    Publication date: May 26, 2011
    Applicant: General Nanotechnology LLC
    Inventor: Victor B. Kley
  • Patent number: 7945965
    Abstract: The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern.
    Type: Grant
    Filed: April 1, 2009
    Date of Patent: May 17, 2011
    Assignee: SII NanoTechnology Inc.
    Inventors: Naoya Watanabe, Masatsugu Shigeno, Masato Iyoki
  • Patent number: 7937991
    Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.
    Type: Grant
    Filed: June 26, 2007
    Date of Patent: May 10, 2011
    Assignee: Asylum Research Corporation
    Inventors: Roger Proksch, Jason Cleveland, Dan Bocek, Todd Day, Mario B. Viani, Clint Callahan
  • Publication number: 20110093990
    Abstract: A method for characterising an atomic force microscopy tip using a characterisation structure having two inclined sidewalls opposite one another and of which at least one actual lateral distance separating the two inclined sidewalls corresponding to a given height is known, the method including scanning the surfaces of the inclined sidewalls by the tip, the scanning being carried out while the tip oscillates solely vertically; measuring, for the given height, the lateral distance separating the two inclined sidewalls, the measurement incorporating the convolution of the shape of the tip with the shape of the characterisation structure; and determining a characteristic dimension of the tip as a function of the measured lateral distance, and of the actual lateral distance.
    Type: Application
    Filed: October 18, 2010
    Publication date: April 21, 2011
    Applicant: Commissariat á I'énergie atomique et aux énergies alternatives
    Inventors: Johann FOUCHER, Pascal Faurie
  • Patent number: 7921466
    Abstract: The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of a microlever (M) which is disposed on a sample and analysing at least: the variation in the oscillation amplitude (Ai) of an output signal (Ai cos(?it??i)) that is representative of the response from the microlever (M) to the excitation of one of the natural vibration modes thereof, in order to obtain topographic information in relation to the sample; and to the variation in the phase (?j) of an output signal (Aj cos(?jt??j)) that is representative of the response from the microlever (M) to the excitation of another natural vibration mode thereof, in order to obtain compositional information in relation to the sample. The inventive microscope is adapted to be used with the aforementioned method.
    Type: Grant
    Filed: February 21, 2006
    Date of Patent: April 5, 2011
    Assignee: Consejo Superior de Investigaciones Cientificas
    Inventors: Ricardo Garcia Garcia, Tomás Raul Rodriguez Frutos
  • Publication number: 20110067150
    Abstract: A microcantilever system comprising a paddle, its use and a method of simultaneously acquiring the topography and measuring the tip-sample interactions of a sample with it.
    Type: Application
    Filed: September 16, 2009
    Publication date: March 17, 2011
    Inventors: Hendrik Hölscher, Santiago De Jesus Solares
  • Patent number: 7900506
    Abstract: The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures.
    Type: Grant
    Filed: December 14, 2007
    Date of Patent: March 8, 2011
    Assignee: Insitutec, Inc.
    Inventors: Shane C. Woody, Marcin B. Bauza, Stuart T. Smith
  • Publication number: 20110055986
    Abstract: An atomic force microscopy system includes an imaging probe having a first thermal displacement constant and a sample placement surface. At least a portion of the sample placement surface has a second thermal displacement constant. The sample placement surface is spaced apart from the imaging probe at a predetermined displacement. The sample placement surface is configured so that the second thermal displacement constant matches the first thermal displacement constant so that when the imaging probe and the sample placement surface are subject to a predetermined temperature, both the portion of the sample placement surface and the imaging prove are displaced by a same distance.
    Type: Application
    Filed: July 6, 2010
    Publication date: March 3, 2011
    Applicant: GEORGIA TECH RESEARCH CORPORATION
    Inventors: Hamdi Torun, Fahrettin L. Degertekin, Ofer Finkler
  • Publication number: 20110055985
    Abstract: The invention relates to a device for an atomic force microscope (AFM) for the study and/or modification of surface properties. The device comprises a cantilever (flexible bar) having an integrated, piezoresistive sensor, an integrated bimorphic actuator, and a measuring tip. The measuring tip carries at least two metal electrodes, which can be activated via electrical terminals. The measuring tip and/or the cantilever have at least one nanoscopic hole through which synchrotron radiation or laser light is directed onto the material surface to be studied. Furthermore, the invention relates to a method for the study and modification of surface properties and surface-proximal properties, which can be executed using such a device. To this end, atomic force microscopy (AFM), surface enhanced Raman scattering (SERS), photo emission spectroscopy (XPS, XAS), and material modification by local exposure are executed in sequence or simultaneously using the same device.
    Type: Application
    Filed: December 10, 2008
    Publication date: March 3, 2011
    Applicants: TECHNISCHE UNIVERSITAT ILMENAU, SYNCHROTRON SOLEIL, THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Stefan Kubsky, Deirdre Olynick, Peter Schuck, Jan Meijer, Ivo W. Rangelow
  • Publication number: 20110047662
    Abstract: The present invention relates to an apparatus and a method for investigating surface properties of different materials, which make it possible to carry out atomic force microscopy with a simplified and faster shear force method. The apparatus according to the invention is characterized by perpendicular orientation of the measuring tip of a self-actuated cantilever with respect to the surface of the sample. A piezoresistive sensor and a bimorph actuator are preferably DC-isolated. The measuring tip is in the form of a carbon nanotube, in particular. A plurality of cantilevers can be arranged in the form of a cantilever array which is characterized by a comb-like arrangement of individual pre-bent cantilevers. The method according to the invention is distinguished by a fast feedback signal on account of the distance between the measuring tip and the surface to be investigated being regulated using the change in a DC signal which supplies the actuator.
    Type: Application
    Filed: June 26, 2008
    Publication date: February 24, 2011
    Inventors: Ivo W. Rangelow, Tzvetan Ivanov, Burkhard Volland, Teodor Gotszalk, Miroslaw Woszczyna
  • Publication number: 20110045246
    Abstract: A method for manufacturing a silicon single crystal wafer, having at least: a step of preparing a silicon single crystal ingot; a step of slicing the silicon single crystal ingot to fabricate a plurality of sliced substrates; a processing step of processing the plurality of sliced substrates into a plurality of substrates by performing at least one of lapping, etching, and polishing; a step of sampling at least one from the plurality of substrates; a step of measuring surface roughness of the substrate sampled at the sampling step by an AFM and obtaining an amplitude (an intensity) of a frequency band corresponding to a wavelength of 20 nm to 50 nm to make a judgment of acceptance; and a step of sending the substrate to the next step if a judgment result is acceptance or performing reprocessing if the judgment result is rejection.
    Type: Application
    Filed: May 7, 2009
    Publication date: February 24, 2011
    Applicant: SHIN-ETSU HANDOTAI CO., LTD.
    Inventors: Fumio Tahara, Tsuyoshi Ohtsuki, Takatoshi Nagoya, Kiyoshi Mitani
  • Publication number: 20110036169
    Abstract: A high spatial resolution phase-sensitive technique employs a scanning near field ultrasound holography (SNFUH) methodology for imaging elastic as well as viscoelastic variations across a sample surface. SNFUH uses a near-field approach to measure time-resolved variations in ultrasonic oscillations at a sample surface. As such, it overcomes the spatial resolution limitations of conventional phase-resolved acoustic microscopy (i.e. holography) by eliminating the need for far-field acoustic lenses.
    Type: Application
    Filed: September 21, 2010
    Publication date: February 17, 2011
    Applicant: NORTHWESTERN UNIVERSITY
    Inventors: Gajendra Shekhawat, Vinayak P. Dravid
  • Patent number: 7886366
    Abstract: The amplitude control of a cantilever based on the van der Pol model is performed through feedback using measurement data on a deflection of the cantilever. A self-oscillating circuit integrates a deflection angle signal of a cantilever detected by a deflection angle measuring mechanism using an integrator, multiplies a resulting integral value by linear feedback gain generated by a gain generator, and an output corresponding to the linear feedback signal is generated. Also, the self-oscillating circuit cubes the deflection angle signal using analog multipliers, integrates the resulting values using integrators, multiplies the resulting integral values by a nonlinear feedback gain generated by a gain generator, and an output corresponding to the nonlinear feedback signal is generated. Furthermore, the self-oscillating circuit adds the outputs together using an adder, and a voltage signal for a piezo element is generated.
    Type: Grant
    Filed: November 20, 2008
    Date of Patent: February 8, 2011
    Assignees: National Institute of Advanced Industrial Science and Technology, University of Tsukuba
    Inventors: Masaharu Kuroda, Kentaro Nishimura, Takashi Someya, Hiroshi Yabuno
  • Patent number: 7884323
    Abstract: The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
    Type: Grant
    Filed: August 15, 2006
    Date of Patent: February 8, 2011
    Assignee: Cameca Instruments, Inc.
    Inventors: Thomas F. Kelly, Joseph H. Bunton, Scott A. Wiener
  • Patent number: 7874202
    Abstract: In a probe apparatus that intermittently irradiates a sample with excitation light to observe the sample while subjecting a cantilever including a probe arranged to face a surface of the sample to self-excited vibration at a predetermined frequency, the sample is irradiated with the excitation light at a predetermined timing when a distance between the probe and the sample is not greater than a predetermined distance.
    Type: Grant
    Filed: December 30, 2008
    Date of Patent: January 25, 2011
    Assignee: Japan Science and Technology Agency
    Inventors: Takuya Matsumoto, Tomoji Kawai
  • Publication number: 20100330345
    Abstract: The invention provides a lithographic method referred to as “dip pen” nanolithography (DPN). DPN utilizes a scanning probe microscope (SPM) tip (e.g., an atomic force microscope (AFM) tip) as a “pen,” a solid-state substrate (e.g., gold) as “paper,” and molecules with a chemical affinity for the solid-state substrate as “ink.” Capillary transport of molecules from the SPM tip to the solid substrate is used in DPN to directly write patterns consisting of a relatively small collection of molecules in submicrometer dimensions, making DPN useful in the fabrication of a variety of microscale and nanoscale devices. The invention also provides substrates patterned by DPN, including submicrometer combinatorial arrays, and kits, devices and software for performing DPN. The invention further provides a method of performing AFM imaging in air.
    Type: Application
    Filed: October 31, 2007
    Publication date: December 30, 2010
    Inventors: Chad A MIRKIN, Richard Piner, Seunghun Hong
  • Publication number: 20100325761
    Abstract: Optical information and topographic information of the surface of a sample are measured at a nanometer-order resolution and with high reproducibility without damaging a probe and the sample by combining a nanometer-order cylindrical structure with a nanometer-order microstructure to form a plasmon intensifying near-field probe having a nanometer-order optical resolution and by repeating approach/retreat of the probe to/from each measurement point on the sample at a low contact force.
    Type: Application
    Filed: December 18, 2008
    Publication date: December 23, 2010
    Applicant: Hitachi, Ltd.
    Inventors: Toshihiko Nakata, Masahiro Watanabe, Takashi Inoue, Kishio Hidaka, Makoto Okai, Toshiaki Morita, Motoyuki Hirooka
  • Patent number: 7856665
    Abstract: An apparatus and technique for measuring the electrical capacitance between a conducting tip of a scanning probe microscope and a sample surface is described. A high frequency digital vector network analyzer is connected to the probe tip of the cantilever of an atomic force microscope, and data collection is coordinated by a digital computer using digital trigger signals between the AFM controller and the vector network analyzer. Methods for imaging tip-sample capacitance and spectroscopic measurements at a single point on the sample are described. A method for system calibration is described.
    Type: Grant
    Filed: November 15, 2007
    Date of Patent: December 21, 2010
    Assignee: Asylum Research Corporation
    Inventors: Maarten Rutgers, William H. Hertzog, Keith M. Jones, Amir A. Moshar
  • Patent number: 7854015
    Abstract: A scanning probe microscope and method for operating the same are disclosed. The microscope includes a probe mount for attaching a probe, an electro-mechanical actuator, a probe position signal generator, an impulse signal generator and a servo. A probe tip is mounted on a first end of a cantilever arm, a second end of the cantilever arm being mounted on a mechanical vibrator that causes the second end to vibrate in response to a drive signal. The probe position signal generator generates a position signal indicative of a position of the probe relative to the second end of the cantilever arm. The impulse signal generator measures a quantity related to an impulse imparted to the probe tip by the interaction between the tip and the local characteristics of the sample. The servo operates the electro-mechanical actuator so as to maintain the measured quantity at a predetermined value.
    Type: Grant
    Filed: November 24, 2008
    Date of Patent: December 14, 2010
    Assignee: Agilent Technologies, Inc.
    Inventor: Storrs Hoen
  • Patent number: 7836757
    Abstract: A phase feedback AFM (atomic force microscope) and method for the phase feedback AFM. A cantilever is driven to oscillate at a constant frequency close to the resonance frequency of the cantilever by a driving signal. The distance between the probe and the sample is controlled such that the phase difference between the driving signal and a cantilever deflection signal indicating deflections of the cantilever is kept constant. The phase feedback AFM has an amplifier-controller for receiving the cantilever deflection signal, the output from an oscillator for driving the cantilever into oscillation, and a signal representing a reference amplitude of oscillation of the cantilever. The phase feedback AFM further includes a feedback circuit which receives the output from the amplifier-controller which controls the cantilever deflection signal to a preset amplitude.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: November 23, 2010
    Assignee: JEOL Ltd.
    Inventor: Shinichi Kitamura
  • Patent number: 7841015
    Abstract: A method is described for determining a dopant concentration on a surface and/or in layer region lying close to the surface of a semiconductor sample using an atomic force microscope, whose leaf-spring tip is brought into contact with the semiconductor sample, forming a Schottky barrier, wherein an electric alternating potential is applied between the spring-leaf tip and the semiconductor sample in the region of the Schottky barrier in such a way that a space charge region inside the semiconductor sample defining the three-dimensional extension of the Schottky barrier is excited and begins to oscillate within the confines of its spatial extension, said oscillations are transmitted to the leaf-spring, are detected and form the basis for determining the dopant concentration.
    Type: Grant
    Filed: February 28, 2007
    Date of Patent: November 23, 2010
    Assignee: Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung E.V.
    Inventors: Walter Arnold, Kerstin Schwarz, Ute Rabe
  • Publication number: 20100290992
    Abstract: The present invention concerns the field of nanoparticle bioconjugates which form an i-motif or an i-motif related structure (compositions) without or with at least one further nucleic acid binding compound. The i-motif base pairs can be charged or non-charged. Their assembly can be controlled by the pH value or temperature. At least one of these nucleic acid binding compounds has to be attached at least to a nanoparticle. The methods provide compositions used for DNA driven programmable nanoparticle assemblies, electronic circuits, diagnostic detection tools, biosensors, memory storage devices, diagnostic devices for biomolecule sequencing and detection, drug delivery, application in tumour diagnostics and treatment, nanomachines, nanofabrication, nanocatalysis, nanoarrays, and nanoscaled enzyme reactors.
    Type: Application
    Filed: February 9, 2009
    Publication date: November 18, 2010
    Inventors: Frank Seela, Simone Budow, Peter Leonard
  • Publication number: 20100281586
    Abstract: The present invention disposes a membrane between two electrical conductive walls having a height at least as great as the thickness of the membrane. The conductive walls are fabricated on an electrically insulative chip base. The chip base has one or more through hole between the electrically conducting walls. The chip is placed inside a container having a well below the through hole of the electrically insulative base. At least one passageway extends from the well to the periphery of the container. This invention probes changes of the membrane as an in-plane electric field is applied between the conductive walls. The well may include various compounds while-other compounds can be placed in contact with the top of the membrane. The passageways are used to introduce substances into and out of the well.
    Type: Application
    Filed: July 12, 2010
    Publication date: November 4, 2010
    Inventor: Thusara Sugat Chandra ABEYGUNARATNE
  • Publication number: 20100275334
    Abstract: A modular AFM/SPM which provides faster measurements, in part through the use of smaller probes, of smaller forces and movements, free of noise artifacts, that the old generations of these devices have increasingly been unable to provide. The modular AFM/SPM includes a chassis, the foundation on which the modules of the instrument are supported; a view module providing the optics for viewing the sample and the probe; a head module providing the components for the optical lever arrangement and for steering and focusing those components; a scanner module providing the XYZ translation stage that actuates the sample in those dimensions and the engage mechanism; a isolation module that encloses the chassis and provides acoustic and/or thermal isolation for the instrument and an electronics module which, together with the separate controller, provide the electronics for acquiring and processing images and controlling the other functions of the instrument.
    Type: Application
    Filed: October 14, 2009
    Publication date: October 28, 2010
    Inventors: Roger Proksch, Mario Viani, Jason Cleveland, Maarten Rutgers, Matthew Klonowski, Daron Walters, James Hodgson, Jonathan Hensel, Paul Costales
  • Publication number: 20100269232
    Abstract: A scanning probe microscope and method for using the same are disclosed. The scanning probe microscope includes a probe mount, a probe position signal generator, and a controller. The probe mount is adapted to receive a probe having a tip that moves in response to an interaction between the tip and a local characteristic of a sample. The probe position signal generator generates a position signal indicative of a position of the probe tip. The controller receives the position signal and derives a pixel value for a corresponding location on the sample from the position signal over a pixel time period. The controller generates an image that includes the pixel value. The controller stores a plurality of intermediate pixel data values at different times during the pixel time period.
    Type: Application
    Filed: April 17, 2009
    Publication date: October 21, 2010
    Inventor: Richard Kenton Workman
  • Patent number: 7818816
    Abstract: Disclosed are methods and devices for patterning micro- and/or nano-sized pattern elements on a substrate using field emitted electrons from an element. Disclosed methods and devices can also be utilized to form nano- and micron-sized depressions in a substrate according to a more economical process than as has been utilized in the past. Methods include single-step methods by which structures can be simultaneously created and located at desired locations on a substrate. Methods include the application of a bias voltage between a probe tip and a substrate held at a relatively close gap distance. The applied voltage can promote current flow between the probe and the substrate via field emissions. During a voltage pulse, and within predetermined energy levels and tip-to-surface gap distances, three dimensional formations can be developed on the substrate surface.
    Type: Grant
    Filed: October 1, 2008
    Date of Patent: October 19, 2010
    Assignee: Clemson University Research Foundation
    Inventors: Jason B. Reppert, Jay B. Gaillard, Bevan C. Elliott, Doyl E. Dickel, M. Pinar Mengüc, Apparao M. Rao
  • Publication number: 20100263098
    Abstract: The invention relates to a method for the combined analysis of a sample with objects to be analysed, in particular a sample with biological objects, in which measurement results for one or more of the objects to be analysed in the sample are obtained by analysing the one or more objects to be analysed by an imaging method of measurement, probe-microscopic measurement results are obtained for the one or more objects to be analysed by analysing the one or more objects to be analysed by a probe-microscopic method of measurement, and the measurement results and the probe-microscopic measurement results are assigned to one another, after optional prior intermediate processing. Furthermore, the invention relates to an apparatus for carrying out combined analysis of a sample with objects to be investigated, in particular a sample with biological objects.
    Type: Application
    Filed: July 24, 2008
    Publication date: October 14, 2010
    Inventors: Torsten Müller, Kathryn Anne Poole, Detlef Knebel, Torsten Jähnke
  • Patent number: 7810382
    Abstract: The invention relates to a method of determining material properties of a contact formed between a measurement tip of a microscopic probe and a sample surface of a sample material. According to the method, a distance modulation is applied for modulating a distance between a support of the microscopic probe end the sample surface in a direction essentially normal to the sample surface and wherein a normal force signal indicative of a normal force is measured and demodulated. In the method it is proposed that the material properties be determined using measurement data comprised in the demodulated normal force signal and related to a (concave) buckling deformation of the microscopic probe relative to and away from the sample surface.
    Type: Grant
    Filed: February 10, 2006
    Date of Patent: October 12, 2010
    Assignee: Karlsruher Institut für Technologie
    Inventors: Thomas Schimmel, Matthias Müller
  • Publication number: 20100257643
    Abstract: A preferred embodiment of the invention provides an ultra-soft atomic force microscope device that has a nanoneedle cantilever that terminates in a smaller diameter nanofiber tip. Deflection of the nanoneedle cantilever is measured directly by a laser Doppler vibrometer. The invention simultaneously provides a very low mass nanoneedle cantilever arm with a very small diameter nanofiber tip, while being able to image the vibration and displacement. An AFM device of the invention simultaneously provides a ultra low mass and soft cantilever, the ability to accurately and directly measure vibration and deflection of the very small diameter nanoneedle cantilever with the laser Doppler vibrometer, and a sharp nanofiber tip that provides sub nanometer resolution.
    Type: Application
    Filed: February 19, 2010
    Publication date: October 7, 2010
    Applicants: UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION, INC., PURDUE RESEARCH FOUNDATION
    Inventors: Ronald Reifenberger, Arvind Raman, Laura Butler Biedermann, Mehdi M. Yazdanpanah
  • Patent number: 7810166
    Abstract: The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.
    Type: Grant
    Filed: September 30, 2005
    Date of Patent: October 5, 2010
    Assignee: Nambition GmbH
    Inventors: Jens Struckmeier, Karl Schlagenhauf
  • Publication number: 20100235956
    Abstract: An atomic force microscopy (AFM) method includes a scanning probe that scans a surface of a structure to produce a first structure image. The structure is then rotated by 90° with respect to the scanning probe. The scanning probe scans the surface of the structure again to produce a second structure image. The first and second structure images are combined to produce best fit image of the surface area of the structure. The same method is used to produce the best fit image of a flat standard. The best fit image of the flat standard is subtracted from the best fit image of the structure to obtain a true topographical image in which Z direction run out error is substantially reduced or eliminated.
    Type: Application
    Filed: March 16, 2009
    Publication date: September 16, 2010
    Applicant: SEAGATE TECHNOLOGY LLC
    Inventors: Huiwen Liu, Lin Zhou, Dale Egbert, Jonathan Arland Nelson, Peter Gunderson
  • Patent number: 7797757
    Abstract: An atomic force microscopy sensor includes a substrate, a cantilever beam and an electrostatic actuator. The cantilever beam has a proximal end and an opposite distal end. The proximal end is in a fixed relationship with the substrate and the cantilever beam is configured so that the distal end is in a moveable relationship with respect to the substrate. The electrostatic actuator includes a first electrode that is coupled to the cantilever beam adjacent to the proximal end and a spaced apart second electrode that is in a fixed relationship with the substrate. When an electrical potential is applied between the first electrode and the second electrode, the first electrode is drawn to the second electrode, thereby causing the distal end of the cantilever beam to move.
    Type: Grant
    Filed: August 14, 2007
    Date of Patent: September 14, 2010
    Assignee: Georgia Tech Research Corporation
    Inventor: Fahrettin Levent Degertekin
  • Publication number: 20100223698
    Abstract: The present invention concerns the enhancing of the mass resolution of wide angle tomographic atom probes. The invention consists of an atom probe also comprising a sample-holding device and a detector which are separated from one another by a distance L and enclosed in a chamber, an “Einzel” type electrostatic lens consisting of three electrodes arranged inside the chamber between the sample and the detector, to which electrical potentials are applied so as to form an electrical field that strongly focuses the beam of ions emitted by the sample under test when the probe is operating. According to the invention, the geometry of the electrodes is defined precisely so as to greatly limit the effects of the spherical aberration that affects the “Einzel” lens on the beam of ions, said spherical aberration being clearly sensitive when the lens is greatly polarized. The invention applies more particularly to the atom probes known as 3D atom probes.
    Type: Application
    Filed: October 8, 2008
    Publication date: September 2, 2010
    Applicants: CAMECA, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
    Inventors: Alain Bostel, Mikhail Yavor, Ludovic Renaud, Bernard Deconihout
  • Publication number: 20100218288
    Abstract: Various embodiments of the present invention are directed to microscopy cantilevers. Consistent with an example embodiment, aspects of the invention are directed to a cantilever having a body and a force sensor arrangement extending from an end of the body and including a tip near a free end of the force sensor arrangement. The force sensor arrangement exhibits a high temporal response to the tip's interaction with a sample, relative to the response of the cantilever. The force sensor arrangement's response is detected and used to characterize the sample.
    Type: Application
    Filed: February 25, 2009
    Publication date: August 26, 2010
    Inventors: Ali Fatih Sarioglu, Olav Solgaard
  • Patent number: 7770231
    Abstract: A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
    Type: Grant
    Filed: August 2, 2007
    Date of Patent: August 3, 2010
    Assignee: Veeco Instruments, Inc.
    Inventors: Craig Prater, Chanmin Su, Nghi Phan, Jeffrey M. Markakis, Craig Cusworth, Jian Shi, Johannes H. Kindt, Steven F. Nagle, Wenjun Fan
  • Publication number: 20100192267
    Abstract: A nanoindenter that includes an interferometer, a rod, a force actuator and a controller is disclosed. The interferometer generates a light beam that is reflected from a moveable reflector, the interferometer determining a distance between a reference location and the moveable reflector. The rod is characterized by a rod axis and includes a tip on a first end thereof, the rod includes the moveable reflector at a location proximate to the tip. The tip is disposed in a manner that allows the tip to be forced against the surface of a sample. The force actuator applies a force to the rod in a direction parallel to the rod axis in response to a force control signal coupled to the actuator. The controller receives the determined distance from the interferometer and generates the force control signal. The invention can also be used as a scanning probe microscope.
    Type: Application
    Filed: January 29, 2009
    Publication date: July 29, 2010
    Inventors: Warren C. Oliver, John Swindernan, Jennifer Hay, Karmit Parks
  • Publication number: 20100180356
    Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.
    Type: Application
    Filed: March 23, 2010
    Publication date: July 15, 2010
    Applicant: Asylum Research Corporation
    Inventors: Flavio Alejandro Bonilla, Roger Proksch, Jason Cleveland, Tim Sauter
  • Publication number: 20100175155
    Abstract: Detection and localization of stretching and rupture of targets (e.g., macromolecules) is achieved using time-varying tip-sample force measurements in a dynamic-mode atomic force microscope. The detection and localization is achieved with an independent force sensor that can detect and distinguish stretching and rupture forces acting on a sensor device as the tip of the sensor device traverses a surface, wherein the stretching and rupture forces are temporally distinct from forces between the tip and the substrate.
    Type: Application
    Filed: January 6, 2010
    Publication date: July 8, 2010
    Applicant: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
    Inventor: Ozgur Sahin
  • Patent number: 7745206
    Abstract: An atomic force microscope and a method for detecting interactions between a probe and two or more sensed agents on a scanned surface and determining the relative location of two or more sensed agents is provided. The microscope has a scanning probe with a tip that is sensitive to two or more sensed agents on said scanned surface; two or more sensing agents tethered to the tip of the probe; and a device for recording the displacement of said probe tip as a function of time, topographic images, and the spatial location of interactions between said probe and the two or more sensed agents on said surface.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: June 29, 2010
    Assignee: Arizona State University
    Inventors: Hongda Wang, Stuart Lindsay
  • Publication number: 20100154086
    Abstract: A general high-throughput screening (HTS) process using an atomic force microscope (AFM) to detect and measure molecular recognition events. The AFM is used to measure changes in molecular complex height, friction, shape, elasticity or any other relevant parameters that report a molecular recognition event. In addition, the force involved in molecular recognition and bonding is directly measured using the technique of force spectroscopy. In one embodiment, a flow chamber is used to introduce molecules and assay their effect on a molecular interaction occurring between molecules on the AFM probe and a surface. In some cases the surface may be an introduced microparticle. In a second embodiment, the sample is a solid phase array of molecules that is interrogated by a functionalized AFM probe, and the effects of introduced agents at each molecular address in the array is measured by force spectroscopy.
    Type: Application
    Filed: July 11, 2007
    Publication date: June 17, 2010
    Inventors: Eric Henderson, Curtis Mosher