Abstract: The present invention relates to laser ablation microlithography. In particular, we disclose a new SLM design and patterning method that uses multiple mirrors per pixel to concentrate energy to an energy density that facilitates laser ablation, while keeping the energy density on the SLM mirror surface at a level that does not damage the mirrors. Multiple micro-mirrors can be reset at a very high frequency, far beyond current DMD devices.

Abstract: This invention relates to an improved micro lithographic writer that sweeps a modulated pattern across the surface of a workpiece. The SLM disclosed works in a diffractive mode with a continuous or quasi-continuous radiation source. It uses a long and narrow SLM and takes advantage of diffractive effects along the narrow axis of the SLM to improve writing characteristics along that axis.

Abstract: A pattern generator includes: a writing tool and a calibration system. The writing tool is configured to generate a pattern on a workpiece arranged on a stage. The calibration system is configured to determine a correlation between a coordinate system of the writing tool and a coordinate system of a calibration plate on one of the stage and the workpiece. The calibration system is also configured to determine the correlation at least partly based on an optical correlation signal, or pattern, in a form of at least one optical beam being reflected from at least one reflective pattern on the surface of the calibration plate.

Abstract: The technology disclosed relates to a partially coherent illuminators. In particular, it relates to a partially coherent illuminator that directs laser radiation across multiple areas of an illumination pupil. In some circumstances, this reduces spatial and/or temporal coherence of the laser radiation. It must be used with a continuous laser to provide partially coherent illumination from a coherent laser. It can be combined with a workpiece tracker that effectively freezes the workpiece and extends the time that laser radiation can be applied to expose a pattern stamp on the workpiece or, it can be used with a stepper platform, without a tracker. A dynamically controllable aperture architecture is a by product of the technology disclosed.

Abstract: A method of patterning a plurality of layers of a work piece in a series of writing cycles in one or a plurality of write machines, the workpiece being deviced to have a number of N layers and layers of the workpiece having one or a plurality of boundary condition(s) for pattern position, the method comprising the steps of: determining the boundary conditions of layers 1 to N, calculating deviations due to the boundary conditions and calculating a compensation for the deviation of the first transformation added with the assigned part of the deviation due to the boundary conditions.

Abstract: A method for patterning a workpiece in a direct write machine in the manufacturing of a multilayer stack, wherein a first circuit pattern comprising patterns for connection points is transformed according to determined fitting tolerances to fit to connection points of a second circuit pattern and to circuit pattern(s) of specific features such as random placed dies, or group of dies, on or in the workpiece. The second layer may be a previously formed layer or a layer to be formed on the same workpiece or on a different workpiece for the stack. Pattern data associated with selected die is transformed into adjusted circuit pattern data using the transformation defined by the transformed positions such that the circuit pattern is fitted to the selected die(s).

Abstract: In a method for patterning a workpiece provided with dies in a direct write machine, pattern data associated with a selected die, or group of dies, is transformed into adjusted circuit pattern data dependent both on the original pattern data and the transformed positions, wherein the adjusted circuit pattern data represents the circuit pattern of the plurality of dies, or group of dies, such that the adjusted circuit pattern is fitted to a plurality of sub-areas of the workpiece area, and wherein each sub-area is associated with a die, or group of dies, among the plurality of dies distributed on the workpiece. A pattern is then written on the workpiece according to the adjusted circuit pattern data.

Abstract: A method of patterning a plurality of layers of a work piece in a series of write machines, wherein errors due to different transformation capabilities of different machines are compensated by distributing the errors over the plurality of layers.

Abstract: A control apparatus of a machine tool is adapted to detect whether or not an NC program is stopped at an end of a block and whether or not a rotation of a handwheel for a manual pulse generator is stopped and restarted when both a manual pulse mode and a single block mode are selected. The NC program is accordingly automatically restarted from the next block in conjunction with the restart of the handwheel rotation. The operator thus can restart an operation of an NC unit only by rotating the handwheel when the operation is automatically stopped at the end of a block of the NC program.

Abstract: A probe for an electrical test has a foot portion coupled with a board, an arm portion extending laterally from a lower end portion of the foot portion, and a needle tip portion projecting downward from a tip end portion of the arm portion. At least one selected from a group consisting of the foot portion, the arm portion, and the needle tip portion comprises a symbol specifying a position of the probe on the board.

Abstract: A novel silicon micromirror structure for improving image fidelity in laser pattern generators is presented. In some embodiments, the micromirror is formed from monocrystalline silicon. Analytical- and finite element analysis of the structure as well as an outline of a fabrication scheme to realize the structure are given. The spring constant of the micromirror structure can be designed independently of the stiffness of the mirror-surface. This makes it possible to design a mirror with very good planarity, resistance to sagging during actuation, and it reduces influence from stress in reflectivity-increasing multilayer coatings.

Abstract: An embodiment of the invention provides a method for manufacturing a probe sheet in which a probe tip can be arranged at a predetermined accurate position without the need for troublesome positional adjustment operations of the probe tip in coupling operations of each contactor and a probe sheet main body. It is a method for manufacturing a probe sheet comprising a probe sheet main body having conductive paths and a plurality of contactors formed to be protruded from one surface of the probe sheet main body and connected to the conductive paths.

Abstract: A movable BF guide is provided in a movable-blade receiving area into which a movable blade slides along a fixed blade while being pressed against the fixed blade in a process of cutting recording paper. The movable-blade receiving area is blocked by the BF guide when the cutting process is not performed, thus preventing the entry of the end portion of the downstream connected recording paper into the movable-blade receiving area.

Abstract: An electrical test contactor comprises a contactor main body including a plate-shaped attachment portion extending in the up-down direction, a plate-shaped arm portion extending from the lower end portion of the attachment portion at least to one side in the right-left direction, and a plate-shaped pedestal portion projecting downward from the tip end portion of the arm portion, a contact portion projecting downward from the lower end of the pedestal portion and having the lower end of the contact portion acting as a probe tip, and a resistor having a higher resistance value than the contactor main body and the contact portion and arranged at the contactor main body so as to heighten the resistance value of the contactor.

Abstract: A print system includes: a printer; and a print data supplying device. The print data supplying device includes: a print data supplying unit that supplies the printer with a print data; an internal print data condition storage unit that stores a plurality of internal print data conditions in association with the respective print data generation processing operations, the internal print data conditions pertaining to the internal print data; a determination unit that determines whether or not the internal print data satisfies any one of the internal print data conditions; and a print data generation unit that generates the print data by performing one of a plurality of print data generation processing operations, in accordance with internal print data that is output as a result of a data processing operation, and in accordance with the result of the determination made by the determination unit.

Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: Disclosed herein is a device comprising a pair of bellows pumps configured for efficient mixing at a microfluidic scale. By moving a fluid sample and particles in suspension through an aperture between the paired bellows pump mixing chambers, molecular collisions leading to binding between the particles and ligands in the sample are enhanced. Such devices provide an alternative for mixing that does not use a vent and can be used with a variety of particles in suspension such as magnetic beads to capture or purify useful cells and molecules.

Abstract: A contact type electrical connector includes a first plunger in contact with one member; a second plunger in contact with another member and electrically connected to the first plunger, whereby the two members are electrically connected through the first plunger; a cylindrical support member for slidably and elastically supporting the first and second plungers with a connection portion of the first plunger and a connection portion of the second plunger overlapping and electrically connected; and a compression coil spring surrounding the outer peripheries of the first and second plungers with the connection portions thereof supported by the cylindrical support member and brought into contact with a spring receiving portion of each of the plungers so as to urge the plungers apart. The cylindrical support member, which may be formed as a coil spring, serves to improve electrical connection between the plungers.

Abstract: The embodiment of the subject matter provides a probe that is good both in mechanical characteristics and electrical characteristics. A probe for an electrical test comprises a probe main body portion made of a nickel-boron alloy, and a probe tip portion projecting downward from the probe main body portion and made of a different conductive material from that for the probe main body portion. The crystal size of the nickel-boron alloy is 50 nm at the maximum, and the contained amount of the boron is 0.02 wt % or more and 0.20 wt % or less.

Abstract: A piezoelectric exciter includes: a beam including a substrate and a piezoelectric element affixed to the substrate; a supporting portion that supports the beam; a terminal fixed to the supporting portion, the terminal feeding electricity to the piezoelectric element; and a conductive member that electrically connects the terminal to an electrode of the piezoelectric element, wherein a conductive-member-containing recess is formed in the supporting portion and the conductive member is contained in the conductive-member-containing recess in an embedded state and wherein the supporting portion is made of a resin that is subjected to insert molding together with the substrate and the beam is made by affixing the piezoelectric element to the substrate after the insert molding.