Patents Assigned to Soitec
  • Patent number: 9553014
    Abstract: Methods of fabricating semiconductor structures include implanting atom species into a carrier die or wafer to form a weakened region within the carrier die or wafer, and bonding the carrier die or wafer to a semiconductor structure. The semiconductor structure may be processed while using the carrier die or wafer to handle the semiconductor structure. The semiconductor structure may be bonded to another semiconductor structure, and the carrier die or wafer may be divided along the weakened region therein. Bonded semiconductor structures are fabricated using such methods.
    Type: Grant
    Filed: April 23, 2015
    Date of Patent: January 24, 2017
    Assignee: Soitec
    Inventors: Mariam Sadaka, Ionut Radu
  • Patent number: 9548202
    Abstract: The disclosure relates to a method of bonding by molecular adhesion comprising the positioning of a first wafer and of a second wafer within a hermetically sealed vessel, the evacuation of the vessel to a first pressure lower than or equal to 400 hPa, the adjustment of the pressure in the vessel to a second pressure higher than the first pressure by introduction of a dry gas, and bringing the first and second wafers into contact, followed by the initiation of the propagation of a bonding wave between the two wafers, while maintaining the vessel at the second pressure.
    Type: Grant
    Filed: October 11, 2013
    Date of Patent: January 17, 2017
    Assignee: Soitec
    Inventors: Marcel Broekaart, Arnaud Castex
  • Patent number: 9548237
    Abstract: A method comprising the following steps: providing a support substrate and a donor substrate, forming an embrittlement region in the donor substrate so as to delimit a first portion and a second portion on either side of the embrittlement region, assembling the donor substrate on the support substrate, fracturing the donor substrate along the embrittlement region. In addition, the method comprises a step consisting of forming a compressive stress layer in the donor substrate so as to delimit a so-called confinement region interposed between the compressive stress layer and the embrittlement region.
    Type: Grant
    Filed: January 28, 2013
    Date of Patent: January 17, 2017
    Assignee: SOITEC
    Inventors: Gweltaz Gaudin, Oleg Kononchuk, Ionut Radu
  • Patent number: 9531320
    Abstract: The disclosure relates to a guide system for holding and moving sunlight-absorbing devices, in particular, solar panels or concentrated photovoltaic modules, about an azimuth axis and an elevation axis, comprising a housing, at least one azimuth drive, at least one azimuth gear unit, the azimuth drive being configured for driving the azimuth gear unit for a rotational movement about the azimuth axis, at least one elevation drive, at least one elevation gear unit, the elevation drive being configured for driving the elevation gear unit for a rotational movement about the elevation axis, and wherein the elevation gear unit is connected to a first end of a torsion tube, and the torsion tube is turnably mounted inside the housing along the elevation axis, wherein the torsion tube is supported by at least two bearings, preferably one at each end of the torsion tube, and wherein the second end of the torsion tube is configured to receive and connect to a support arm for carrying/supporting one or more of the sunlig
    Type: Grant
    Filed: November 5, 2013
    Date of Patent: December 27, 2016
    Assignee: Soitec Solar GMBH
    Inventor: Abel Gonzalez Moreno
  • Patent number: 9528196
    Abstract: The invention concerns a method for fabricating a substrate in semiconductor material characterized in that it comprises the steps of: starting from a donor substrate in a first semiconductor material at an initial temperature, contacting a surface of the donor substrate with a bath of a second semiconductor material held in the liquid state at a temperature higher than the initial temperature, the second semiconductor material being chosen so that its melting point is equal to or lower than the melting point of the first semiconductor material, solidifying the bath material on the surface to thicken the donor substrate with a solidified layer. The invention also concerns a device for implementing the method.
    Type: Grant
    Filed: July 25, 2012
    Date of Patent: December 27, 2016
    Assignee: Soitec
    Inventor: Michel Bruel
  • Patent number: 9511996
    Abstract: Methods are used to form semiconductor devices that include an integrated circuit and a microelectromechanical system (MEMS) device operatively coupled with the integrated circuit. At least a portion of an integrated circuit may be fabricated on a surface of a substrate, and a MEMS device may be formed over the at least a portion of the integrated circuit. The MEMS device may be operatively coupled with the integrated circuit. Semiconductor structures and electronic devices including such structures are formed using such methods.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: December 6, 2016
    Assignee: SOITEC
    Inventors: Mariam Sadaka, Bernard Aspar, Chrystelle Lagahe Blanchard
  • Patent number: 9496877
    Abstract: The invention relates to a circuit including a transistor of a first type of channel in series with a transistor of a second type of channel between first and second terminals for applying a power supply potential, each of the transistors being a multiple gate transistor having at least a first (G1P, G1N) and a second (G2P, G2N) independent control gates, characterized in that at least one of the transistors is configured for operating in a depletion mode under the action of a second gate signal applied to its second control gate (G2p, G2N).
    Type: Grant
    Filed: September 30, 2011
    Date of Patent: November 15, 2016
    Assignee: Soitec
    Inventors: Carlos Mazure, Richard Ferrant, Bich-Yen Nguyen
  • Patent number: 9490264
    Abstract: The invention relates to a semiconductor device produced on a semiconductor-on-insulator substrate that includes a thin layer of semiconductor material separated from a base substrate by a buried insulating layer, the device including a first conducting region in the thin layer, a second conducting region in the base substrate and a contact connecting the first region to the second region through the insulating layer. The invention also relates to a process for fabricating such semiconductor devices.
    Type: Grant
    Filed: January 4, 2011
    Date of Patent: November 8, 2016
    Assignee: Soitec
    Inventors: Carlos Mazure, Richard Ferrant
  • Patent number: 9481943
    Abstract: A system for epitaxial deposition of a Group III-V semiconductor material that includes gallium. The system includes sources of the reactants, one of which is a gaseous Group III precursor having one or more gaseous gallium precursors and another of which is a gaseous Group V component, a reaction chamber wherein the reactants combine to deposit Group III-V semiconductor material, and one or more heating structures for heating the gaseous Group III precursors prior to reacting to a temperature to decompose substantially all dimers, trimers or other molecular variations of such precursors into their monomer forms.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: November 1, 2016
    Assignee: SOITEC
    Inventors: Chantal Arena, Christiaan Werkhoven
  • Patent number: 9481944
    Abstract: The present invention provides improved gas injectors for use with CVD (chemical vapor deposition) systems that thermalize gases prior to injection into a CVD chamber. The provided injectors are configured to increase gas flow times through heated zones and include gas-conducting conduits that lengthen gas residency times in the heated zones. The provided injectors also have outlet ports sized, shaped, and arranged to inject gases in selected flow patterns. The invention also provides CVD systems using the provided thermalizing gas injectors. The present invention has particular application to high-volume manufacturing of GaN substrates.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: November 1, 2016
    Assignee: Soitec
    Inventors: Chantal Arena, Ronald Thomas Bertram, Jr., Ed Lindow, Christiaan Werkhoven
  • Patent number: 9481566
    Abstract: Methods of forming semiconductor devices comprising integrated circuits and microelectromechanical system (MEMS) devices operatively coupled with the integrated circuits involve the formation of an electrically conductive via extending at least partially through a substrate from a first major surface of the substrate toward an opposing second major surface of the substrate, and the fabrication of at least a portion of an integrated circuit on the first major surface of the substrate. A MEMS device is provided on the second major surface of the substrate, and the MEMS device is operatively coupled with the integrated circuit using the at least one electrically conductive via. Structures and devices are fabricated using such methods.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: November 1, 2016
    Assignee: SOITEC
    Inventors: Mariam Sadaka, Bernard Aspar, Chrystelle Lagahe Blanchard
  • Patent number: 9478707
    Abstract: The disclosure relates to a manufacturing method comprising the formation of elemental LED or photovoltaic structures on a first substrate, each comprising at least one p-type layer, an active zone and an n-type layer, formation of a first planar metal layer on the elemental structures, provision of a transfer substrate comprising a second planar metal layer, assembly of the elemental structures with the transfer substrate by bonding of the first and second metal layers by molecular adhesion at room temperature, and removal of the first substrate.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: October 25, 2016
    Assignee: Soitec
    Inventor: Pascal Guenard
  • Patent number: 9478275
    Abstract: The disclosure relates to semiconductor memory devices and related methods. A semiconductor memory device comprises: a single-ended sense amplifier circuit for reading data sensed from selected memory cells in a memory array, the sense amplifier having a first node used to feed in a reference signal, a second node coupled to a bit line, and sense transistors responsible for amplifying the content of a selected memory cell during a sense operation, a reference circuit having replica transistors of the sense transistors and further comprising a regulation network designed so that each replica transistor operates in a stable operating point, and wherein the regulation network generates a control voltage that is applied to the sense amplifier circuit.
    Type: Grant
    Filed: October 10, 2013
    Date of Patent: October 25, 2016
    Assignee: SOITEC
    Inventor: Roland Thewes
  • Patent number: 9479174
    Abstract: A tristate gate includes an output port and at least two transistors. Each of the transistors has at least a first and a second gate configured such that a high-impedance value (Z) on the output port is set by controlling the threshold voltage of at least one of the transistors.
    Type: Grant
    Filed: December 11, 2012
    Date of Patent: October 25, 2016
    Assignee: SOITEC
    Inventor: Richard Ferrant
  • Patent number: 9472469
    Abstract: This disclosure relates to an eDRAM memory element comprising a first storage node, a bitline node for accessing the value stored in the storage node, and a select transistor, controlling access from the bitline node to the storage node, wherein the select transistor has a front gate and a back gate.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: October 18, 2016
    Assignee: Soitec
    Inventors: Gerhard Enders, Franz Hofmann
  • Patent number: 9437473
    Abstract: A process for separating at least two substrates comprising at least two separation interfaces along one of the interfaces includes, before inserting a blade between the substrate, damaging at least one portion of a peripheral region of a chosen one of the interfaces, then inserting the blade and partially parting the substrates, and applying a fluid in a space between the parted substrates while the blade remains inserted therebetween, and decreasing a rupture energy of the chosen interface by stress corrosion involving breaking of siloxane bonds present at the interface.
    Type: Grant
    Filed: September 4, 2013
    Date of Patent: September 6, 2016
    Assignee: SOITEC
    Inventors: Didier Landru, Christophe Figuet
  • Patent number: 9425081
    Abstract: The disclosure relates to a method for implantation of atomic or ionic species into a batch of substrates made of semiconductor material, in which: each substrate made of semiconductor material is positioned on a respective support of a batch implanter, each substrate comprising a thin layer of electrical insulator on its surface; and a dose of at least one ionic or atomic species is implanted over the whole surface of the substrates, through their layer of insulator, so as to form a fragilization region within each substrate and to bound there a thin layer of semiconductor material between the thin layer of insulator and the fragilization region of the substrate, the implantation method being characterized in that, during the method, each support on which a substrate is positioned has at least two separate inclinations with respect to the plane orthogonal to the direction of implantation of the species in order to improve the implantation depth of the species in the substrate.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: August 23, 2016
    Assignee: SOITEC
    Inventors: Nadia Ben Mohamed, Carole David, Camille Rigal
  • Patent number: 9412904
    Abstract: A device for back-scattering an incident light ray, including: a host substrate; a structured layer; a first face in contact with a front face of the host substrate; a second flat face parallel to the first face; a first material and a second material which form, in a mixed plane, alternating surfaces at least one of whose dimensions is between 300 nm and 800 nm, the mixed plane is between the first and second face of the structured layer; wherein the refractive index of the first and of the second material are different, the structured layer is covered by a specific layer, the specific layer is made of a material which is different from the first and second materials of the structured layer, and the specific layer is crystalline and semi-conductive.
    Type: Grant
    Filed: January 4, 2013
    Date of Patent: August 9, 2016
    Assignees: Commissariat a l'energie atomique et aux energies alternatives, Soitec
    Inventors: Yohan Desieres, Philippe Gilet, Pascal Guenard
  • Patent number: 9412580
    Abstract: Embodiments of the invention include methods for forming Group III-nitride semiconductor structure using a halide vapor phase epitaxy (HVPE) process. The methods include forming a continuous Group III-nitride nucleation layer on a surface of a non-native growth substrate, the continuous Group III-nitride nucleation layer concealing the upper surface of the non-native growth substrate. Forming the continuous Group III-nitride nucleation layer may include forming a Group III-nitride layer and thermally treating said Group III-nitride layer. Methods may further include forming a further Group III-nitride layer upon the continuous Group III-nitride nucleation layer.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: August 9, 2016
    Assignee: SOITEC
    Inventors: Chantal Arena, Ronald Thomas Bertram, Jr., Ed Lindow, Subhash Mahajan, Fanyu Meng
  • Patent number: 9397258
    Abstract: Semiconductor structures include an active region between a plurality of layers of InGaN. The active region may be at least substantially comprised by InGaN. The plurality of layers of InGaN include at least one well layer, and at least one barrier layer proximate the at least one well layer. Methods of forming semiconductor structures include growing such layers of InGaN to form an active region of a light emitting device, such as an LED. Luminary devices include such LEDs.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: July 19, 2016
    Assignee: SOITEC
    Inventors: Chantal Arena, Jean-Philippe Debray, Richard Scott Kern