Patents Assigned to Soitec
  • Patent number: 9396987
    Abstract: The invention relates to a method for fabricating a substrate, comprising the steps of providing a donor substrate with at least one free surface, performing an ion implantation at a predetermined depth of the donor substrate to form an in-depth predetermined splitting area inside the donor substrate, and is characterized in providing a layer of an adhesive, in particular an adhesive paste, over the at least one free surface of the donor substrate. The invention further relates to a semiconductor structure comprising a semiconductor layer, and a layer of a ceramic-based and/or a graphite-based and/or a metal-based adhesive provided on one main side of the semiconductor layer.
    Type: Grant
    Filed: December 21, 2012
    Date of Patent: July 19, 2016
    Assignee: Soitec
    Inventor: Oleg Kononchuk
  • Patent number: 9390771
    Abstract: A circuit for sensing a difference in voltage on a pair of dual signal lines comprising a first signal line and a second signal line complementary to the first signal line, comprising: a pair of cross-coupled inverters arranged between the first and the second signal lines, each inverter having a pull-up transistor and a pull-down transistor, the sources of the pull-up transistors or of the pull-down transistors being respectively connected to a first and a second pull voltage signals, a decode transistor having source and drain terminals respectively coupled to one of the first and second signal lines and a gate controlled by a decoding control signal, whereby when the decode transistor is turned on by the decoding control signal, a short circuit is established between the first and the second signal lines through which current flows from one of the first and second pull voltage signals, thereby generating a disturb in between the first and the second pull voltage signals.
    Type: Grant
    Filed: January 16, 2013
    Date of Patent: July 12, 2016
    Assignee: Soitec
    Inventors: Richard Ferrant, Roland Thewes
  • Patent number: 9391011
    Abstract: Semiconductor structures are fabricated that include a semiconductor material bonded to a substrate with a layer of dielectric material between the semiconductor material and the substrate. At least one fluidic microchannel extends in a lateral direction through the layer of dielectric material between the semiconductor material and the substrate. The at least one fluidic microchannel includes at least one laterally extending section having a transverse cross-sectional shape entirely surrounded by the layer of dielectric material.
    Type: Grant
    Filed: March 9, 2015
    Date of Patent: July 12, 2016
    Assignee: Soitec
    Inventor: Mariam Sadaka
  • Patent number: 9368344
    Abstract: Methods of fabricating semiconductor devices or structures include forming structures of a semiconductor material overlying a layer of a compliant material, subsequently changing the viscosity of the compliant material to relax the semiconductor material structures, and utilizing the relaxed semiconductor material structures as a seed layer in forming a continuous layer of relaxed semiconductor material. In some embodiments, the layer of semiconductor material may comprise a III-V type semiconductor material, such as, for example, indium gallium nitride. Novel intermediate structures are formed during such methods. Engineered substrates include a continuous layer of semiconductor material having a relaxed lattice structure.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: June 14, 2016
    Assignee: SOITEC
    Inventor: Chantal Arena
  • Patent number: 9349865
    Abstract: Methods of forming a semiconductor structure include providing a multi-layer substrate having an epitaxial base layer overlying a strained primary semiconductor layer above a buried oxide layer. Elements within the epitaxial base layer are used to alter a strain state in the primary semiconductor layer within a first region of the multi-layer substrate without altering a strain state in the primary semiconductor layer within a second region of the multi-layer substrate. A first plurality of transistor channel structures are formed that each comprise a portion of the primary semiconductor layer within the first region of the multi-layer substrate, and a second plurality of transistor channel structures are formed that each comprise a portion of the primary semiconductor layer within the second region of the multi-layer substrate. Semiconductor structures fabricated by such methods may include transistor channel structures having differing strain states.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: May 24, 2016
    Assignee: SOITEC
    Inventors: Bich-Yen Nguyen, Mariam Sadaka, Christophe Maleville
  • Patent number: 9343351
    Abstract: This transfer process comprises the following steps: (a) providing a donor substrate and a support substrate; (b) forming an embrittlement region in the donor substrate; (c) forming what is called a bonding layer between the first part of the donor substrate and the support substrate; and (d) assembling the donor substrate to the support substrate, and is noteworthy in that it comprises the following step: (e) exposing, in succession, portions of the embrittlement region to electromagnetic irradiations for an exposure time at a given power density, the exposure time being chosen depending on the thickness of the bonding layer so that the support substrate is thermally decoupled from the first part of the donor substrate, the exposure time being chosen depending on the power density in order to activate kinetics that weaken the embrittlement region.
    Type: Grant
    Filed: June 14, 2013
    Date of Patent: May 17, 2016
    Assignee: Soitec
    Inventor: Michel Bruel
  • Patent number: 9343626
    Abstract: Semiconductor structures include an active region between a plurality of layers of InGaN. The active region may be at least substantially comprised by InGaN. The plurality of layers of InGaN include at least one well layer comprising InwGa1-wN, and at least one barrier layer comprising InbGa1-bN proximate the at least one well layer. In some embodiments, the value of w in the InwGa1-wN of the well layer may be greater than or equal to about 0.10 and less than or equal to about 0.40 in some embodiments, and the value of b in the InbGa1-bN of the at least one barrier layer may be greater than or equal to about 0.01 and less than or equal to about 0.10. Methods of forming semiconductor structures include growing such layers of InGaN to form an active region of a light emitting device, such as an LED. Luminary devices include such LEDs.
    Type: Grant
    Filed: March 14, 2014
    Date of Patent: May 17, 2016
    Assignee: SOITEC
    Inventors: Jean-Philippe Debray, Chantal Arena, Heather McFavilen
  • Patent number: 9337377
    Abstract: Atomic layer deposition (ALD) or ALD-like deposition processes are used to fabricate dilute nitride III-V semiconductor materials. A first composition of process gases may be caused to flow into a deposition chamber, and a group V element other than nitrogen and one or more group III elements may be adsorbed over the substrate (in atomic or molecular form). Afterward, a second composition of process gases may be caused to flow into the deposition chamber, and N and one or more group III elements may be adsorbed over the substrate in the deposition chamber. An epitaxial layer of dilute nitride III-V semiconductor material may be formed over the substrate in the deposition chamber from the sequentially adsorbed elements.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: May 10, 2016
    Assignee: SOITEC
    Inventors: Chantal Arena, Robin Scott, Claudio Canizares
  • Patent number: 9330958
    Abstract: The invention relates to a process for fabricating a heterostructure comprising at least one thin layer and a carrier substrate made of a semiconductor, the process comprising: bonding a first substrate made of a single-crystal first material, the first substrate comprising a superficial layer made of a polycrystalline second material, to a second substrate so that a bonding interface is created between the polycrystalline layer and the second substrate; removing from the free surface of one of the substrates, called the donor substrate, a thickness thereof so that only a thin layer is preserved; generating a layer of amorphous semiconductor material between the first substrate and the bonding interface by amorphization of the layer of polycrystalline material; and crystallizing the layer of amorphous semiconductor material, the newly crystallized layer having the same orientation as the adjacent first substrate.
    Type: Grant
    Filed: November 21, 2012
    Date of Patent: May 3, 2016
    Assignee: SOITEC
    Inventor: Gweltaz Gaudin
  • Patent number: 9324911
    Abstract: Dilute nitride III-V semiconductor materials may be formed by substituting As atoms for some N atoms within a previously formed nitride material to transform at least a portion of the previously formed nitride material into a dilute nitride III-V semiconductor material that includes arsenic. Such methods may be employed in the fabrication of photoactive devices, such as photovoltaic cells and photoemitters. The methods may be carried out within a deposition chamber, such as a metalorganic chemical vapor deposition (MOCVD) or a hydride vapor phase epitaxy (HVPE) chamber.
    Type: Grant
    Filed: December 19, 2012
    Date of Patent: April 26, 2016
    Assignee: Soitec
    Inventors: Chantal Arena, Robin Scott, Claudio Canizares
  • Patent number: 9312339
    Abstract: Methods of fabricating semiconductor structures include forming a plurality of openings extending through a semiconductor material and at least partially through a metal material and deforming the metal material to relax a remaining portion of the semiconductor material. The metal material may be deformed by exposing the metal material to a temperature sufficient to alter (i.e., increase) its ductility. The metal material may be formed from one or more of hafnium, zirconium, yttrium, and a metallic glass. Another semiconductor material may be deposited over the remaining portions of the semiconductor material, and a portion of the metal material may be removed from between each of the remaining portions of the semiconductor material. Semiconductor structures may be formed using such methods.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: April 12, 2016
    Assignee: Soitec
    Inventor: Christiaan J. Werkhoven
  • Patent number: 9306104
    Abstract: The invention relates to a photovoltaic concentrator module with multifunction frame and also to a method for production thereof. The concentrator module has a lens- and a base plate, between which a frame extends. Between the lens plate and the frame and/or the base plate and the frame, two sealing compounds and/or adhesive compounds extend, which compounds differ with respect to their hardening time and/or gas permeability.
    Type: Grant
    Filed: February 15, 2007
    Date of Patent: April 5, 2016
    Assignee: SOITEC SOLAR GMBH
    Inventors: Frank Dimroth, Andreas Bett, Christoph Schmidt, Hansjörg Lerchen-Müller
  • Patent number: 9293448
    Abstract: Three-dimensionally integrated semiconductor systems include a photoactive device operationally coupled with a current/voltage converter on a semiconductor-on-insulator (SeOI) substrate. An optical interconnect is operatively coupled to the photoactive device. A semiconductor device is bonded over the SeOI substrate, and an electrical pathway extends between the current/voltage converter and the semiconductor device bonded over the SeOI substrate. Methods of forming such systems include forming a photoactive device on an SeOI substrate, and operatively coupling a waveguide with the photoactive device. A current/voltage converter may be formed over the SeOI substrate, and the photoactive device and the current/voltage converter may be operatively coupled with one another. A semiconductor device may be bonded over the SeOI substrate and operatively coupled with the current/voltage converter.
    Type: Grant
    Filed: September 2, 2014
    Date of Patent: March 22, 2016
    Assignee: SOITEC
    Inventors: Bich-Yen Nguyen, Mariam Sadaka
  • Patent number: 9293473
    Abstract: A manufacturing process for a semiconductor-on-insulator structure having reduced electrical losses and which includes a support substrate made of silicon, an oxide layer and a thin layer of semiconductor material, and a polycrystalline silicon layer interleaved between the support substrate and the oxide layer. The process includes a treatment capable of conferring high resistivity to the support substrate prior to formation of the polycrystalline silicon layer, and then conducting at least one long thermal stabilization on the structure at a temperature not exceeding 950° C. for at least 10 minutes.
    Type: Grant
    Filed: February 3, 2015
    Date of Patent: March 22, 2016
    Assignee: SOITEC
    Inventors: Patrick Reynaud, Sebastien Kerdiles, Daniel Delprat
  • Patent number: 9276070
    Abstract: Methods of forming ternary III-nitride materials include epitaxially growing ternary III-nitride material on a substrate in a chamber. The epitaxial growth includes providing a precursor gas mixture within the chamber that includes a relatively high ratio of a partial pressure of a nitrogen precursor to a partial pressure of one or more Group III precursors in the chamber. Due at least in part to the relatively high ratio, a layer of ternary III-nitride material may be grown to a high final thickness with small V-pit defects therein. Semiconductor structures including such ternary III-nitride material layers are fabricated using such methods.
    Type: Grant
    Filed: April 10, 2014
    Date of Patent: March 1, 2016
    Assignee: Soitec
    Inventors: Christophe Figuet, Pierre Tomasini
  • Patent number: 9275893
    Abstract: The present disclosure concerns a method of detaching a layer to be detached from a donor substrate, comprising the following steps: a) assembling the donor substrate and a porous substrate, b) application of a treatment of chemical modification of the crystallites, the chemical modification being adapted to generate a variation of the volume of the crystallites, the volume variation generates deformation in compression or in tension of the porous substrate, the deformation in compression or in tension generates a stress in tension or in compression in the donor substrate, which causes fracture in a fracture plane, the fracture plane delimiting the layer to be detached, the stress leading to the detachment of the layer to be detached from the donor substrate.
    Type: Grant
    Filed: April 10, 2013
    Date of Patent: March 1, 2016
    Assignee: Soitec
    Inventor: Alexandre Barthelemy
  • Patent number: 9275892
    Abstract: A method of transferring a layer from a donor substrate onto a receiving substrate comprises ionic implantation of at least one species into the donor substrate and forming a layer of concentration of the species intended to form microcavities or platelets; bonding the donor substrate with the receiving substrate by wafer bonding; and splitting at high temperature to split the layer in contact with the receiving substrate by cleavage, at a predetermined cleavage temperature, at the layer of microcavities or platelets formed in the donor substrate. The method further comprises, after the first implantation step and before the splitting step, ionic implantation of silicon ions into the donor substrate to form a layer of concentration of silicon ions in the donor substrate, the layer of concentration of silicon ions at least partially overlapping the layer of concentration of the species intended to form microcavities or platelets.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: March 1, 2016
    Assignee: SOITEC
    Inventors: Nicolas Daix, Konstantin Bourdelle
  • Patent number: 9275888
    Abstract: Temporary substrates may include a bonding surface prepared for receiving an additional substrate that will transfer a thin layer. Such substrates may include a principal part or support and a surface layer thereon with the surface layer having a plurality of inserts therein. The inserts are made of a material having a coefficient of thermal expansion that is significantly different from that of the material constituting the surface layer. Processing methods for transferring a selected portion of an original substrate may involve such temporary substrates and productions methods may produce such temporary substrates.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: March 1, 2016
    Assignee: Soitec
    Inventor: Gregory Riou
  • Publication number: 20160042989
    Abstract: The disclosure relates to a process for manufacturing a composite structure, the process comprising the following steps: a) providing a donor substrate and a carrier substrate; b) forming a dielectric layer; c) forming a covering layer; d) forming a weakened zone in the donor substrate; e) joining the carrier substrate and the donor substrate via a contact surface having an outline; f) fracturing the donor substrate via the weakened zone, steps b) and e) being executed so that the outline is inscribed in the outline, and step c) being executed so that the covering layer covers the peripheral surface of the dielectric layer.
    Type: Application
    Filed: March 21, 2014
    Publication date: February 11, 2016
    Applicant: SOITEC
    Inventors: Sebastien Kerdiles, Guillaume Chabanne, Francois Boedt
  • Patent number: 9251871
    Abstract: The invention relates to a sense amplifier for sensing and amplifying data stored in a memory cell, the sense amplifier being connected between a bit line (BL) and a reference bit line complementary (/BL) to the first bit line and comprising: a sense circuit (SC) capable of providing an output indicative of the data stored in the memory cell; and a precharge and decode circuit (PDC) comprising a pair of dual gate transistors (T5, T6) for precharging the first and second bit lines during a precharge operation and for transferring the output provided by the sense circuit to a data line (LIO,/LIO) during a read operation.
    Type: Grant
    Filed: November 14, 2012
    Date of Patent: February 2, 2016
    Assignee: Soitec
    Inventors: Richard Ferrant, Joerg Vollrath, Roland Thewes, Wolfgang Hoenlein, Hofmann Franz, Gerhard Enders