Susceptor of semiconductor manufacturing apparatus

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Description

FIG. 1 is a front, top and left side perspective view of a susceptor of semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

Claims

The ornamental design for a susceptor of semiconductor manufacturing apparatus, as shown and described.

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Patent History
Patent number: D1079661
Type: Grant
Filed: Feb 5, 2024
Date of Patent: Jun 17, 2025
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventor: Daiki Taniguchi (Toyama)
Primary Examiner: Mary Shannon Malley
Assistant Examiner: Bria' l Simmons-Holloway
Application Number: 29/927,474