Deposition ring for a semiconductor processing chamber
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The dashed lines in
Claims
The ornamental design for a deposition ring for a semiconductor processing chamber, as shown and described.
D381030 | July 15, 1997 | Tepman |
5803977 | September 8, 1998 | Tepman et al. |
D401252 | November 17, 1998 | Tudhope |
D403002 | December 22, 1998 | Tudhope |
D403334 | December 29, 1998 | Tudhope |
D403337 | December 29, 1998 | Or |
D491963 | June 22, 2004 | Doha |
D557226 | December 11, 2007 | Uchino |
D559994 | January 15, 2008 | Nagakubo |
D649986 | December 6, 2011 | Fujikata |
D659175 | May 8, 2012 | Fujikata |
D665491 | August 14, 2012 | Goel |
D694340 | November 26, 2013 | Laporte |
D694790 | December 3, 2013 | Matsumoto |
D705280 | May 20, 2014 | Kimura |
D709538 | July 22, 2014 | Mizukami |
D738451 | September 8, 2015 | Olson |
D767234 | September 20, 2016 | Kirkland |
D770992 | November 8, 2016 | Tauchi |
D796458 | September 5, 2017 | Jang |
D797067 | September 12, 2017 | Zhang |
D797691 | September 19, 2017 | Joubert |
D798248 | September 26, 2017 | Hanson |
D801942 | November 7, 2017 | Riker |
D810705 | February 20, 2018 | Krishnan |
D819580 | June 5, 2018 | Krishnan |
D825504 | August 14, 2018 | Zhang |
D825505 | August 14, 2018 | Hanson |
D836572 | December 25, 2018 | Riker |
D837755 | January 8, 2019 | Riker |
D851613 | June 18, 2019 | Johanson |
D868124 | November 26, 2019 | Riker |
D869409 | December 10, 2019 | Riker |
D876504 | February 25, 2020 | Lee |
D877101 | March 3, 2020 | Johanson |
D888903 | June 30, 2020 | Gunther |
D891382 | July 28, 2020 | Koppa |
D894137 | August 25, 2020 | Johanson |
D902165 | November 17, 2020 | Johanson |
D908645 | January 26, 2021 | Savandaiah |
20060090706 | May 4, 2006 | Miller et al. |
20080308416 | December 18, 2008 | Allen |
20100108500 | May 6, 2010 | Hawrylchak |
20110209985 | September 1, 2011 | Li |
20120263569 | October 18, 2012 | Priddy |
20150190835 | July 9, 2015 | Hawrylchak |
20150357169 | December 10, 2015 | Yuan |
20160002788 | January 7, 2016 | Nal |
20170009367 | January 12, 2017 | Harris |
20190267220 | August 29, 2019 | Scheible et al. |
20200090915 | March 19, 2020 | Kerschbaumer |
D182534 | April 2017 | TW |
D187824 | January 2018 | TW |
- Search Report for Taiwan Design Application No. 110300413, dated May 30, 2021.
Type: Grant
Filed: Jul 31, 2020
Date of Patent: Oct 19, 2021
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Kirankumar Neelasandra Savandaiah (Bangalore), Jiao Song (Singapore), David Gunther (Santa Clara, CA), Irena H. Wysok (San Jose, CA), Anthony Chih-Tung Chan (Sunnyvale, CA)
Primary Examiner: Sheryl Lane
Assistant Examiner: Mark T. Philipps
Application Number: 29/744,882