Deposition ring for a semiconductor processing chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is an enlarged top isometric view of a deposition ring for a semiconductor processing chamber, according to the first embodiment of the novel design.

FIG. 2 is a front elevation view thereof.

FIG. 3 is a back elevation view thereof.

FIG. 4 is a right elevation view thereof.

FIG. 5 is a left elevation view thereof.

FIG. 6 is a top plan view thereof.

FIG. 7 is a bottom plan view thereof.

FIG. 8 is an enlarged cross-sectional view thereof, taken along line 6-6 of FIG. 6.

FIG. 9 is an enlarged top isometric view of a deposition ring for a semiconductor processing chamber, according to the second embodiment of the novel design.

FIG. 10 is a front elevation view thereof.

FIG. 11 is a back elevation view thereof.

FIG. 12 is a right elevation view thereof.

FIG. 13 is a left elevation view thereof.

FIG. 14 is a top plan view thereof.

FIG. 15 is a bottom plan view thereof.

FIG. 16 is an enlarged cross-sectional view thereof, taken along line 16-16 of FIG. 14; and,

FIG. 17 is an enlarged cross-sectional view thereof, taken along line 17-17 of FIG. 14.

The dashed lines in FIGS. 1-9 represent unclaimed environment forming no part of the claimed design.

Claims

The ornamental design for a deposition ring for a semiconductor processing chamber, as shown and described.

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Patent History
Patent number: D933726
Type: Grant
Filed: Jul 31, 2020
Date of Patent: Oct 19, 2021
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Kirankumar Neelasandra Savandaiah (Bangalore), Jiao Song (Singapore), David Gunther (Santa Clara, CA), Irena H. Wysok (San Jose, CA), Anthony Chih-Tung Chan (Sunnyvale, CA)
Primary Examiner: Sheryl Lane
Assistant Examiner: Mark T. Philipps
Application Number: 29/744,882