Processing chamber purge plate
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Description
The even dashed broken lines shown in the drawings represent portions of the processing chamber purge plate that form no part of the claimed design.
Claims
The ornamental design for a processing chamber purge plate, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
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Patent History
Patent number: D1107669
Type: Grant
Filed: May 2, 2022
Date of Patent: Dec 30, 2025
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventor: Hans Peter Nygren (Newark, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/792,965
Type: Grant
Filed: May 2, 2022
Date of Patent: Dec 30, 2025
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventor: Hans Peter Nygren (Newark, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/792,965
Classifications