Processing chamber purge plate

- LAM RESEARCH CORPORATION
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Description

FIG. 1 is a top perspective view of a processing chamber purge plate, showing my new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a back view thereof;

FIG. 6 is a front view of thereof;

FIG. 7 is a top view thereof; and,

FIG. 8 is a bottom view thereof.

The even dashed broken lines shown in the drawings represent portions of the processing chamber purge plate that form no part of the claimed design.

Claims

The ornamental design for a processing chamber purge plate, as shown and described.

Referenced Cited
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D935572 November 9, 2021 Adachi
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D962183 August 30, 2022 Sugiura
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Foreign Patent Documents
D211239 May 2021 TW
Other references
  • Purge Plate—Discontinued, SKU: Y6UJ9A0003OK ,https://rjginc.com/product/purge-plate/, 2024. (Year: 2024).
Patent History
Patent number: D1107669
Type: Grant
Filed: May 2, 2022
Date of Patent: Dec 30, 2025
Assignee: LAM RESEARCH CORPORATION (Fremont, CA)
Inventor: Hans Peter Nygren (Newark, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/792,965