Retainer plate of top heater for wafer processing furnace
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Description
Claims
The ornamental design for a retainer plate of top heater for wafer processing furnace, as shown and described.
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Patent History
Patent number: D962184
Type: Grant
Filed: Dec 27, 2019
Date of Patent: Aug 30, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,678
Type: Grant
Filed: Dec 27, 2019
Date of Patent: Aug 30, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,678
Classifications