Retainer plate of top heater for wafer processing furnace

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front, top and right side perspective view of a retainer plate of top heater for wafer processing furnace showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof; and

FIG. 6 is a bottom plan view thereof.

FIG. 7 is a rear elevational view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.

Claims

The ornamental design for a retainer plate of top heater for wafer processing furnace, as shown and described.

Referenced Cited
U.S. Patent Documents
6436228 August 20, 2002 Zuniga
6659850 December 9, 2003 Korovin
7326105 February 5, 2008 Chandrasekaran
D589471 March 31, 2009 Komatsu
D601521 October 6, 2009 Komatsu
D633452 March 1, 2011 Namiki
D649126 November 22, 2011 Takahashi
D716742 November 4, 2014 Jang
D724553 March 17, 2015 Choi
D732094 June 16, 2015 Jussel
9227297 January 5, 2016 Rahmathullah
D769200 October 18, 2016 Fukushima
D794585 August 15, 2017 Nabeya
D797690 September 19, 2017 Furutani
D798250 September 26, 2017 Furutani
D826185 August 21, 2018 Kosugi
D859332 September 10, 2019 Yamaki
10500694 December 10, 2019 Bajaj
D918848 May 11, 2021 Sugiura
D940670 January 11, 2022 Kim
20080171500 July 17, 2008 Kuwabara
20170009367 January 12, 2017 Harris
20190024232 January 24, 2019 Kosugi
20190284696 September 19, 2019 Kosugi
Patent History
Patent number: D962184
Type: Grant
Filed: Dec 27, 2019
Date of Patent: Aug 30, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,678