Substrate supporter for semiconductor deposition apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a perspective view of a substrate supporter for a semiconductor deposition apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross sectional view thereof taken along line 8-8 in FIG. 6; and,

FIG. 9 is a cross sectional view thereof taken along line 9-9 in FIG. 6.

The broken lines shown in the drawings represent portions of the substrate supporter for a semiconductor deposition apparatus that form no part of the claimed design.

Claims

The ornamental design for a substrate supporter for semiconductor deposition apparatus, as shown and described.

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Patent History
Patent number: D724553
Type: Grant
Filed: Mar 12, 2014
Date of Patent: Mar 17, 2015
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Seung Woo Choi (Cheonan-si), Hyung Wook Noh (Anyang-si), Jeong Jun Woo (Cheonan-si), Dae Youn Kim (Daejeon), Hyun Soo Jang (Daejeon)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/484,673