Retainer plate of top heater for wafer processing furnace
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Description
Claims
The ornamental design for a retainer plate of top heater for wafer processing furnace, as shown and described.
Referenced Cited
U.S. Patent Documents
| 6436228 | August 20, 2002 | Zuniga |
| 6659850 | December 9, 2003 | Korovin |
| 7326105 | February 5, 2008 | Chandrasekaran |
| D589471 | March 31, 2009 | Komatsu |
| D601521 | October 6, 2009 | Komatsu |
| D633452 | March 1, 2011 | Namiki |
| D649126 | November 22, 2011 | Takahashi |
| D716742 | November 4, 2014 | Jang |
| D724553 | March 17, 2015 | Choi |
| D732094 | June 16, 2015 | Jussel |
| 9227297 | January 5, 2016 | Rahmathullah |
| D769200 | October 18, 2016 | Fukushima |
| D794585 | August 15, 2017 | Nabeya |
| D797690 | September 19, 2017 | Furutani |
| D798250 | September 26, 2017 | Furutani |
| D826185 | August 21, 2018 | Kosugi |
| D859332 | September 10, 2019 | Yamaki |
| 10500694 | December 10, 2019 | Bajaj |
| D918848 | May 11, 2021 | Sugiura |
| D940670 | January 11, 2022 | Kim |
| 20080171500 | July 17, 2008 | Kuwabara |
| 20170009367 | January 12, 2017 | Harris |
| 20190024232 | January 24, 2019 | Kosugi |
| 20190284696 | September 19, 2019 | Kosugi |
Patent History
Patent number: D962183
Type: Grant
Filed: Dec 27, 2019
Date of Patent: Aug 30, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,671
Type: Grant
Filed: Dec 27, 2019
Date of Patent: Aug 30, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Shinobu Sugiura (Toyama), Tetsuya Kosugi (Toyama), Takatomo Yamaguchi (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/718,671
Classifications