Substrate supporter for semiconductor deposition apparatus

- ASM IP Holding B.V.
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Description

FIG. 1 is a perspective view of a substrate supporter for semiconductor deposition apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view taken along line VIII-VIII of FIG. 1 with two partially enlarged views showing a transition from a center recess on the top surface of the support and an outer edge at the outer portion of the support.

Claims

The ornamental design for a substrate supporter for semiconductor deposition apparatus, as shown and described.

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Patent History

Patent number: D716742
Type: Grant
Filed: Mar 12, 2014
Date of Patent: Nov 4, 2014
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Hyun Soo Jang (Daejeon), Dae Youn Kim (Daejeon), Jeong Ho Lee (Seoul), Seung Seob Lee (Seoul), Hak Yong Kwon (Osan-si)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/484,670