Susceptor

Skip to: Description  ·  Claims  ·  References Cited  · Patent History  ·  Patent History
Description

FIG. 1 is a front perspective view of a susceptor showing our new design;

FIG. 2 is a rear perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a right side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3; and,

FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.

Claims

The ornamental design for a susceptor as shown and described.

Referenced Cited
U.S. Patent Documents
3295559 January 1967 Beasley
5584936 December 17, 1996 Pickering
6214122 April 10, 2001 Thompson
D559993 January 15, 2008 Nagakubo
D559994 January 15, 2008 Nagakubo
7459057 December 2, 2008 Zuniga
D724553 March 17, 2015 Choi
D743357 November 17, 2015 Vyne
D770992 November 8, 2016 Tauchi
D784276 April 18, 2017 Tiner
D810705 February 20, 2018 Krishnan
D830981 October 16, 2018 Jeong
D864134 October 22, 2019 Watarai
D992614 July 18, 2023 Sasaki
D1030687 June 11, 2024 Huang
D1037186 July 30, 2024 Daigo
D1047884 October 22, 2024 Daigo
D1067204 March 18, 2025 Huang
D1079661 June 17, 2025 Taniguchi
D1082728 July 8, 2025 Suzuki
D1082729 July 8, 2025 Suzuki
D1082731 July 8, 2025 Suzuki
D1093328 September 16, 2025 Suzuki
D1094320 September 23, 2025 Suzuki
D1094321 September 23, 2025 Suzuki
D1094322 September 23, 2025 Suzuki
D1094323 September 23, 2025 Suzuki
20030085223 May 8, 2003 Zeng
20040011293 January 22, 2004 Johnson
20050217585 October 6, 2005 Blomiley
20050223994 October 13, 2005 Blomiley
20050284372 December 29, 2005 Murugesh
20060057826 March 16, 2006 De Boer
20070144442 June 28, 2007 Migita
20120263569 October 18, 2012 Priddy
20150368829 December 24, 2015 Ngo
20160133504 May 12, 2016 Chu
20170117228 April 27, 2017 Schauer
20180144969 May 24, 2018 Thirunavukarasu
20210066113 March 4, 2021 Umeta
20210202294 July 1, 2021 Mabuchi
20210225688 July 22, 2021 Goodman
20210375663 December 2, 2021 Ikejiri
20220013337 January 13, 2022 Wang
20220246462 August 4, 2022 Kim
20240243002 July 18, 2024 Amano
20240282618 August 22, 2024 Arai
Foreign Patent Documents
1741174 April 2023 JP
1741176 April 2023 JP
1745873 June 2023 JP
1745924 June 2023 JP
1766095 March 2024 JP
301289184 January 2025 KR
301301935 April 2025 KR
301301936 April 2025 KR
301301937 April 2025 KR
Other references
  • TaC Coated Wafer Susceptor,https://www.semicorex.com/tac-coated-wafer-susceptor.html, Copyright © 2023. (Year: 2023).
  • Epitaxy Wafer Carrier,https://www.semicorex.com/epitaxy-wafer-carrier.html, Copyright © 2023. (Year: 2023).
Patent History
Patent number: D1114752
Type: Grant
Filed: Jul 30, 2024
Date of Patent: Feb 24, 2026
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Takafumi Kido (Kawasaki), Masataka Iwasaki (Kawasaki), Takuto Umetsu (Kamakura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/954,965