Semiconductor wafer heater
Description
Claims
The ornamental design for a semiconductor wafer heater as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
| 5618351 | April 8, 1997 | Koble, Jr. |
| D404369 | January 19, 1999 | Kawachi |
| D404370 | January 19, 1999 | Kimura |
| D404371 | January 19, 1999 | Shimazu |
| D611013 | March 2, 2010 | Takahashi |
| D797690 | September 19, 2017 | Furutani |
| D798250 | September 26, 2017 | Furutani |
| D826185 | August 21, 2018 | Kosugi |
| D953985 | June 7, 2022 | Inoue |
| D953986 | June 7, 2022 | Inoue |
| D959393 | August 2, 2022 | Sugiura |
| D980177 | March 7, 2023 | Sugiura |
| D1094324 | September 23, 2025 | Suzuki |
| D1099840 | October 28, 2025 | Klesyk |
| 20050087125 | April 28, 2005 | Muhe |
| 20130068164 | March 21, 2013 | Ikeya |
| 20160174302 | June 16, 2016 | Lu |
| 20160270150 | September 15, 2016 | Furutani et al. |
| 20170127476 | May 4, 2017 | Lu |
| 20170273145 | September 21, 2017 | Lu |
| 202430080476.5 | November 2024 | CN |
| 1191932 | December 2003 | JP |
| 2013065792 | April 2013 | JP |
| 2016171066 | September 2016 | JP |
| 1545117 | February 2019 | JP |
| 1545859 | March 2019 | JP |
| 1766094 | March 2024 | JP |
| 1794204 | March 2025 | JP |
- SGL Carbon Silicon and SiC Epitaxy. Found online May 26, 2026 at sglcarbon.com. Reference dated Apr. 19, 2019. Retrieved from https://web.archive.org/web/20190419002201/https://www.sglcarbon.com/en/markets-solutions/applications/silicon-and-sic-epitaxy/ (Year: 2019).
- Cast Aluminum Solutions Specialty Heater. Found online Jun. 9, 2026 at youtube.com. Reference dated Feb. 27, 2018. Retrieved from https://www.youtube.com/watch?v=mXkhQls8qgA (Year: 2018).
- Inventors: Umetsu et al., U.S. Appl. No. 29/995,368, filed Mar. 26, 2025; Corresponds to JP1794204.
- Inventors: Suzuki et al., U.S. Appl. No. 29/942,788, filed May 17, 2024; Corresponds to JP1766094.
Patent History
Patent number: D1153102
Type: Grant
Filed: Jul 25, 2025
Date of Patent: Oct 13, 2026
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Takuto Umetsu (Kamakura), Kunihiko Suzuki (Sunto-gun)
Primary Examiner: Amanda Christensen
Application Number: 30/015,054
Type: Grant
Filed: Jul 25, 2025
Date of Patent: Oct 13, 2026
Assignee: NuFlare Technology, Inc. (Kanagawa)
Inventors: Takuto Umetsu (Kamakura), Kunihiko Suzuki (Sunto-gun)
Primary Examiner: Amanda Christensen
Application Number: 30/015,054
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)