Insulator of furnace for substrate processing apparatus

Description

FIG. 1 is a front, top and right side perspective view of an insulator of furnace for substrate processing apparatus showing my new design;

FIG. 2 is a bottom, rear and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom plan view thereof;

FIG. 9 is a cross-sectional view taken in the direction of 9-9 in FIG. 3 thereof;

FIG. 10 is a cross-sectional view taken in the direction of 10-10 in FIG. 5 thereof; and,

FIG. 11 is a perspective view of the cross-sectional view shown in FIG. 10.

Claims

The ornamental design for an insulator of furnace for substrate processing apparatus, as shown and described.