Confinement liner for a substrate processing chamber
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Description
The broken lines shown in the drawings represent portions of a confinement liner for a substrate processing chamber that form no part of the claimed design.
Claims
The ornamental design for a confinement liner for a substrate processing chamber, as shown and described.
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Patent History
Patent number: D1051867
Type: Grant
Filed: Jan 17, 2023
Date of Patent: Nov 19, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventor: Joseph Perry (San Jose, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/882,671
Type: Grant
Filed: Jan 17, 2023
Date of Patent: Nov 19, 2024
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventor: Joseph Perry (San Jose, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/882,671
Classifications