Top cover of a load lock chamber
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Claims
The ornamental design for a top cover for a load lock chamber, as shown and described.
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Type: Grant
Filed: Sep 27, 2013
Date of Patent: Jul 14, 2015
Assignee: HIRATA CORPORATION (Shinagawa-Ku, Tokyo)
Inventor: Junichi Hirakida (Shinagawa-ku)
Primary Examiner: Patricia Palasik
Application Number: 29/468,197