Top cover of a load lock chamber

- HIRATA CORPORATION
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Description

FIG. 1 is a perspective view of a first embodiment of the top cover of a load lock chamber;

FIG. 2 is a front view of the first embodiment;

FIG. 3 is a rear view of the first embodiment;

FIG. 4 is a right side view of the first embodiment;

FIG. 5 is a left side view of the first embodiment;

FIG. 6 is a top view of the first embodiment;

FIG. 7 is a bottom view of the first embodiment;

FIG. 8 is a sectional view of the first embodiment taken along line VIII-VIII of FIG. 2;

FIG. 9 is a perspective view of a second embodiment of the top cover of a load lock chamber;

FIG. 10 is a front view of the second embodiment;

FIG. 11 is a rear view of the second embodiment;

FIG. 12 is a right side view of the second embodiment;

FIG. 13 is a left side view of the second embodiment;

FIG. 14 is a top view of the second embodiment;

FIG. 15 is a bottom view of the second embodiment; and,

FIG. 16 is a sectional view of the second embodiment taken along line XVI-XVI of FIG. 10.

Claims

The ornamental design for a top cover for a load lock chamber, as shown and described.

Referenced Cited
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Other references
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Patent History
Patent number: D734377
Type: Grant
Filed: Sep 27, 2013
Date of Patent: Jul 14, 2015
Assignee: HIRATA CORPORATION (Shinagawa-Ku, Tokyo)
Inventor: Junichi Hirakida (Shinagawa-ku)
Primary Examiner: Patricia Palasik
Application Number: 29/468,197
Classifications
Current U.S. Class: Element Or Attachment (D15/138)