Heater for semiconductor thermal process
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Description
The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the heater for semiconductor thermal process that form no part of the claimed design.
Claims
The ornamental design for a heater for semiconductor thermal process, as shown and described.
Referenced Cited
U.S. Patent Documents
1140145 | May 1915 | Finger |
2173217 | September 1939 | Thomsen |
2205496 | June 1940 | Schneider |
2610884 | September 1952 | Enderle |
3484070 | December 1969 | Zukowska |
D244903 | July 5, 1977 | Hildebrand |
5324920 | June 28, 1994 | Nakao |
D404016 | January 12, 1999 | Ishii |
D405428 | February 9, 1999 | Ishii |
D410438 | June 1, 1999 | Ishii |
6023091 | February 8, 2000 | Koch |
D424527 | May 9, 2000 | Ishii |
D425871 | May 30, 2000 | Ishii |
D426521 | June 13, 2000 | Ishii |
D428858 | August 1, 2000 | Ishii |
D429224 | August 8, 2000 | Ishii |
D450801 | November 20, 2001 | Fundak |
D484283 | December 23, 2003 | Lam |
6737613 | May 18, 2004 | Yamaguchi |
D502631 | March 8, 2005 | Burke |
7027722 | April 11, 2006 | Uemori |
7350756 | April 1, 2008 | Woltmann |
D574166 | August 5, 2008 | Kaisler |
D579885 | November 4, 2008 | Sato |
D703578 | April 29, 2014 | Madrid |
D706161 | June 3, 2014 | Madrid |
D711771 | August 26, 2014 | Madrid |
D739293 | September 22, 2015 | Penrod |
Patent History
Patent number: D793975
Type: Grant
Filed: Mar 10, 2016
Date of Patent: Aug 8, 2017
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Hitoshi Murata (Toyama), Yuichi Wada (Toyama), Takashi Yahata (Toyama), Hidenari Yoshida (Toyama), Shuhei Saido (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/557,678
Type: Grant
Filed: Mar 10, 2016
Date of Patent: Aug 8, 2017
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Hitoshi Murata (Toyama), Yuichi Wada (Toyama), Takashi Yahata (Toyama), Hidenari Yoshida (Toyama), Shuhei Saido (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/557,678
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)