Heater for semiconductor thermal process

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Description

FIG. 1 is a front, bottom, right side perspective view of a heater for semiconductor thermal process showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

The dashed-dot-dashed lines represent the boundary lines of the claimed design.

The broken lines shown in the drawings represent portions of the heater for semiconductor thermal process that form no part of the claimed design.

Claims

The ornamental design for a heater for semiconductor thermal process, as shown and described.

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Patent History
Patent number: D793975
Type: Grant
Filed: Mar 10, 2016
Date of Patent: Aug 8, 2017
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Hitoshi Murata (Toyama), Yuichi Wada (Toyama), Takashi Yahata (Toyama), Hidenari Yoshida (Toyama), Shuhei Saido (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/557,678