Retainer ring for substrate

- EBARA CORPORATION
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Description

FIG. 1 is a top perspective view of a retainer ring for substrate showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a front view thereof;

FIG. 6 is a rear view thereof;

FIG. 7 is a right side view thereof;

FIG. 8 is a left side view thereof;

FIG. 9 is an enlarged cross-section view thereof, taken along the line 9-9 of part 9 of FIG. 3;

FIG. 10 is an enlarged cross-section view thereof, taken along the line 10-10 of part 10 of FIG. 3;

FIG. 11 is an enlarged cross-section view thereof, taken along the line 11-11 of part 11 of FIG. 3;

FIG. 12 is an enlarged perspective view thereof, observed from an inside of the retainer ring and taken along the line 12,13-12,13 of FIG. 4; and,

FIG. 13 is an enlarged perspective view thereof, observed from an outside of the retainer ring and taken along the line 12,13-12,13 of FIG. 4.

The broken lines depict environmental subject matter only and form no part of the claimed design.

Claims

The ornamental design for a retainer ring for substrate, as shown and described.

Referenced Cited
U.S. Patent Documents
5944593 August 31, 1999 Chiu
6186880 February 13, 2001 Gonzalez
6224472 May 1, 2001 Lai
6602116 August 5, 2003 Prince
6869335 March 22, 2005 Taylor
7029375 April 18, 2006 Phang
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7186171 March 6, 2007 Oh
D557226 December 11, 2007 Uchino
D559993 January 15, 2008 Nagakubo
7326105 February 5, 2008 Chandrasekaran
7344434 March 18, 2008 Chen
7459057 December 2, 2008 Zuniga
7819723 October 26, 2010 Nakamura
8298046 October 30, 2012 Frank, Jr.
8517803 August 27, 2013 Sather
D697038 January 7, 2014 Matsumoto
D699200 February 11, 2014 Nagakubo
D729730 May 19, 2015 Gillespie-Brown
D734377 July 14, 2015 Hirakida
D766849 September 20, 2016 Fukushima
Foreign Patent Documents
302820523 May 2014 CN
Patent History
Patent number: D794585
Type: Grant
Filed: Apr 5, 2016
Date of Patent: Aug 15, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Osamu Nabeya (Tokyo), Hozumi Yasuda (Tokyo), Makoto Fukushima (Tokyo), Keisuke Namiki (Tokyo), Shingo Togashi (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/560,291