Substrate retaining ring

- EBARA CORPORATION
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Description

FIG. 1 is a top perspective view of a first embodiment of a substrate retaining ring showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a side view thereof, with the ring being radially symmetrical about a vertical axis;

FIG. 6 is a top perspective view of a second embodiment of a substrate retaining ring showing our new design;

FIG. 7 is a bottom perspective view thereof;

FIG. 8 is a top plan view thereof;

FIG. 9 is a bottom plan view thereof; and,

FIG. 10 is a side view thereof, with the ring being radially symmetrical about a vertical axis.

The broken lines shown in the drawings represent portions of the substrate retaining ring that form no part of the claimed design.

Claims

The ornamental design for a substrate retaining ring, as shown and described.

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Patent History
Patent number: D766849
Type: Grant
Filed: Nov 12, 2013
Date of Patent: Sep 20, 2016
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Makoto Fukushima (Tokyo), Hozumi Yasuda (Tokyo), Keisuke Namiki (Tokyo), Osamu Nabeya (Tokyo), Shingo Togashi (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/472,350