Baffle plate

- Tokyo Electron Limited
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Description

FIG. 1 is a front view of a baffle plate showing our new design.

FIG. 2 is a rear view of the baffle plate of FIG. 1.

FIG. 3 is a top plan view of the baffle plate of FIG. 1.

FIG. 4 is a bottom plan view of the baffle plate of FIG. 1.

FIG. 5 is a right side view of the baffle plate of FIG. 1.

FIG. 6 is a left view of the baffle plate of FIG. 1.

FIG. 7 is a front perspective view of the baffle plate of FIG. 1.

FIG. 8 is a rear perspective view of the baffle plate of FIG. 1; and,

FIG. 9 is a front perspective view of the baffle plate of FIG. 1 shown in a used condition with a plasma processing device shown in broken lines.

The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.

Claims

The ornamental design for a baffle plate, as shown and described.

Referenced Cited
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Other references
  • Notice of Allowance, Taiwanese Design Application No. 101301467, dated Jun. 26, 2012.
Patent History
Patent number: D697038
Type: Grant
Filed: Mar 19, 2012
Date of Patent: Jan 7, 2014
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Naoki Matsumoto (Sendai), Jun Yoshikawa (Sendai)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/416,085