Substrate retaining ring
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Description
Claims
The ornamental design for substrate retaining ring, as shown and described.
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Patent History
Patent number: D799437
Type: Grant
Filed: Feb 24, 2016
Date of Patent: Oct 10, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Osamu Nabeya (Tokyo), Hozumi Yasuda (Tokyo), Makoto Fukushima (Tokyo), Shingo Togashi (Tokyo), Keisuke Namiki (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Thomas Johannes
Assistant Examiner: Shawn T Gingrich
Application Number: 29/555,718
Type: Grant
Filed: Feb 24, 2016
Date of Patent: Oct 10, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Osamu Nabeya (Tokyo), Hozumi Yasuda (Tokyo), Makoto Fukushima (Tokyo), Shingo Togashi (Tokyo), Keisuke Namiki (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Thomas Johannes
Assistant Examiner: Shawn T Gingrich
Application Number: 29/555,718
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)