Substrate retaining ring

- EBARA CORPORATION
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Description

FIG. 1 is a perspective view, observed from top of a substrate retaining ring showing our new design;

FIG. 2 is a perspective view, observed from bottom thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a front view, rear view, right side view and left side view thereof;

FIG. 6 is an enlarged cross-section view, taken along the line 6-6 of part 6 of FIG. 3 thereof;

FIG. 7 is an enlarged cross-section view, taken along the line 7-7 of part 7 of FIG. 3 thereof; and,

FIG. 8 is an enlarged cross-section view, taken along the line 8-8 of part 8 of FIG. 3 thereof.

Claims

The ornamental design for substrate retaining ring, as shown and described.

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Patent History
Patent number: D799437
Type: Grant
Filed: Feb 24, 2016
Date of Patent: Oct 10, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventors: Osamu Nabeya (Tokyo), Hozumi Yasuda (Tokyo), Makoto Fukushima (Tokyo), Shingo Togashi (Tokyo), Keisuke Namiki (Tokyo), Satoru Yamaki (Tokyo)
Primary Examiner: Thomas Johannes
Assistant Examiner: Shawn T Gingrich
Application Number: 29/555,718