Substrate support pedestal
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Description
The broken lines in
Claims
The ornamental design for a substrate support pedestal, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
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Patent History
Patent number: D931240
Type: Grant
Filed: Jul 30, 2019
Date of Patent: Sep 21, 2021
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Changhun Lee (San Jose, CA), Michael D. Willwerth (Campbell, CA), Jeffrey Ludwig (San Jose, CA)
Primary Examiner: Kendra Leslie Hamilton
Assistant Examiner: Amanda Christensen
Application Number: 29/700,012
Type: Grant
Filed: Jul 30, 2019
Date of Patent: Sep 21, 2021
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Changhun Lee (San Jose, CA), Michael D. Willwerth (Campbell, CA), Jeffrey Ludwig (San Jose, CA)
Primary Examiner: Kendra Leslie Hamilton
Assistant Examiner: Amanda Christensen
Application Number: 29/700,012
Classifications