Substrate support pedestal

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is a top, front, right side perspective view of a substrate support pedestal, showing our new design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a right side elevation view thereof; and,

FIG. 7 is a left side elevation view thereof.

The broken lines in FIGS. 1-7 represent unclaimed environment forming no part of the claimed design.

Claims

The ornamental design for a substrate support pedestal, as shown and described.

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Patent History
Patent number: D931240
Type: Grant
Filed: Jul 30, 2019
Date of Patent: Sep 21, 2021
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Changhun Lee (San Jose, CA), Michael D. Willwerth (Campbell, CA), Jeffrey Ludwig (San Jose, CA)
Primary Examiner: Kendra Leslie Hamilton
Assistant Examiner: Amanda Christensen
Application Number: 29/700,012