Target profile for a physical vapor deposition chamber target
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Description
The dashed lines in
Claims
We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
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Patent History
Patent number: D825505
Type: Grant
Filed: Sep 22, 2017
Date of Patent: Aug 14, 2018
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Ryan Hanson (Cupertino, CA), Zhenbin Ge (San Jose, CA), Vivek Gupta (Fremont, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/618,685
Type: Grant
Filed: Sep 22, 2017
Date of Patent: Aug 14, 2018
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventors: Ryan Hanson (Cupertino, CA), Zhenbin Ge (San Jose, CA), Vivek Gupta (Fremont, CA)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/618,685
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)