End effector for handling wafers
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Description
The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.
Claims
The ornamental design for an end effector for handling wafers, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
Other references
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- TEL Tokyo Electron ESCX10-350810-11 Robot Wafer End Effector New Surplus, https://www.ebay.com/itm/174097404372?chn=ps&norover=1&mkevt=1&mkrid=711-117182-37290-0&mkcid=2&mkscid=101&itemid=174097404372&targetid=1263094004546&device=c&mktype=&googleloc=9059726&poi=&campaignid=14859008593&mkgroupid, 2023. (Year: 2023).
- End Effectors for Advanced Wafer Processing & Wafer Handling,https://innoventtech.com/products/end-effectors/,Copyright © 2023 Innovent (Year: 2023).
Patent History
Patent number: D997892
Type: Grant
Filed: May 26, 2020
Date of Patent: Sep 5, 2023
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Satoshi Aizawa (Toyama), Tetsuya Marubayashi (Toyama), Kiyoaki Yamada (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/735,896
Type: Grant
Filed: May 26, 2020
Date of Patent: Sep 5, 2023
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Satoshi Aizawa (Toyama), Tetsuya Marubayashi (Toyama), Kiyoaki Yamada (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/735,896
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)