End effector for handling wafers

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Description

FIG. 1 is a front, bottom and right side perspective view of an end effector for handling wafers showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2; and,

FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 2.

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.

Claims

The ornamental design for an end effector for handling wafers, as shown and described.

Referenced Cited
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Other references
  • TEL Tokyo Electron ESCX10-350810-11 Robot Wafer End Effector New Surplus, https://www.ebay.com/itm/174097404372?chn=ps&norover=1&mkevt=1&mkrid=711-117182-37290-0&mkcid=2&mkscid=101&itemid=174097404372&targetid=1263094004546&device=c&mktype=&googleloc=9059726&poi=&campaignid=14859008593&mkgroupid, 2023. (Year: 2023).
  • End Effectors for Advanced Wafer Processing & Wafer Handling,https://innoventtech.com/products/end-effectors/,Copyright © 2023 Innovent (Year: 2023).
Patent History
Patent number: D997892
Type: Grant
Filed: May 26, 2020
Date of Patent: Sep 5, 2023
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Satoshi Aizawa (Toyama), Tetsuya Marubayashi (Toyama), Kiyoaki Yamada (Toyama)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/735,896