Abstract: An internal blowout preventer used in drilling rigs for the discovery and production of hydrocarbons from the earth is disclosed. The internal blowout preventer has two independently and remotely operable blowout preventer valves in the same body, providing for greater service life and higher reliability during drilling operations. The two valves are loaded into the internal blowout preventer housing from a single end, and are operable by an actuator assembly.

Abstract: A poppet valve for a hydraulic coupling member has an internal, spring-loaded check valve (which may be a ball check valve) in fluid communication with a bleed passage. The check valve may be configured as a pressure-relief valve which bleeds off excess hydraulic fluid pressure within the coupling member to a preselected value. A poppet valve according to the invention may be used in female coupling members and/or male coupling members. Certain embodiments of the invention may be retrofitted to coupling members of the prior art.

Abstract: Conventional single-lever plumbing fixtures include a so-called cartridge in which the cold and hot water streams fed to said plumbing fixture are discharged into sanitary equipment or are blocked and are mixed with each other.

Abstract: A shut-down arrangement comprises a shut-off actuation device operable under the control of a control unit, a switch whereby a first shut-down signal can be supplied to the control unit and whereby a second shut-down signal can be supplied to the shut-off actuation device, and delay means whereby the transmission of the second shut-down signal to the shut-off actuation device is delayed relative to the transmission of the first shut-down signal to the control unit.

Abstract: An apparatus comprising a tubular body defining a flowbore, a first valve that, when activated, restricts fluid communication via the flowbore in a first direction and allows fluid communication in a second direction, and, when deactivated, allows fluid communication in the first and second directions, a first sleeve slidable from a first to a second position that, when in the first position, the first valve is activated, and, when in the second position, the first valve is deactivated, a second valve, that, when activated, restricts fluid communication in the first direction and allows fluid communication in the second direction, and, when deactivated, allows fluid communication in the first and second directions, and a second sleeve slidable from a first to a second position, that, when in the first position, the second valve is deactivated, and, when in the second position, the second valve is activated.

Abstract: In various embodiments, an electronic flow selector of a fluid flow control system may be used to select a flow rate of a fluid. When the system is in an electronic mode, an encoder may electronically encode the fluid flow selection. A controller may receive the electronically encoded flow selection and transmit a corresponding control signal to an electronic valve to allow the fluid to flow at the selected flow rate. When the system is in a manual mode, mechanical backup flow selectors may be used to directly control the flow rate of a fluid. When the system is in a manual mode, the mechanical backup flow selectors may be in a deployed position. When the system is in an electronic mode, the mechanical backup flow selectors may be in a retracted position. Particular applications to gases and anesthesia delivery are disclosed herein.

Abstract: In various embodiments, an electronic flow selector of a fluid flow control system may be used to select a flow rate of a fluid. When the system is in an electronic mode, an encoder may electronically encode the fluid flow selection. A controller may receive the electronically encoded flow selection and transmit a corresponding control signal to an electronic valve to allow the fluid to flow at the selected flow rate. When the system is in a manual mode, backup manual flow selectors may be used to directly control the flow rate of a fluid. When the system is in a manual mode, the mechanical backup flow selectors may be in a deployed position. When the system is in an electronic mode, the mechanical backup flow selectors may be in a retracted position. Particular applications to gases and anesthesia delivery are disclosed herein.

Abstract: A power unit, a fuel cartridge, and a fuel cell system having the power unit and the fuel cartridge. The power unit includes a coupling unit to couple with the fuel cartridge. The coupling unit includes a nozzle that receives fuel supplied from the fuel cartridge, a selection key to selectively mate with the fuel cartridge, and an outer unit surrounding the nozzle. An end of the nozzle is located between the selection key and an end of the outer unit.

Abstract: An apparatus for dispensing gas from a container containing gas under pressure comprises an adjustable flow regulator and a valve, as well as a cowling and mounting ring.

Abstract: An adjustable damping valve arrangement includes an actuator for controlling a main stage valve. The main stage valve has a rigid main stage valve body which carries out an axial operating movement relative to a valve seat surface of the main stage valve. A pre-opening valve having at least one spring element which in turn preloads a pre-opening valve body precedes the main stage valve body. The main stage valve body is supported on the valve seat surface in the closed operating position by the pre-opening valve. The pre-opening valve is divided by the valve seat surface into an inner pressure-impinged incident flow surface and an outer pressure-impinged incident flow surface. The inner pressure-impinged surface is operative for a first incident flow direction, and the outer pressure-impinged surface is operative for a second incident flow direction.

Abstract: A pneumatic valve, in particular a pneumatic proportional pressure control valve, comprising a valve housing (3), in which a piston-like valve element (5) is guided axially movably in a guide (7) and, under the effect of an actuating device (9) for the valve element (5) and of a restoring device (11), which exerts a spring force and acts on the valve element (5) counter to the applied magnetic force (FB) of the actuating device (9), controls a media flow at least between at least a first media connection (13) and a second media connection (15) on the valve housing (3), is characterized in that, with the activation of the actuating device (9), the valve element (5) establishes a media-conducting connection (17) between the respective media connections (13, 15), while allowing for the forces prevailing, on the basis of the applied pressures multiplied by the respectively pressure-effective surfaces, the spring force, the flow forces and the magnetic force.

Abstract: A hydraulic actuating assembly for valves for controlling process fluid flows includes a valve that is operated by an actuator and that is pre-tensioned in the direction of a closing position. The actuator has a pressure chamber which is active in the opening direction and which can be connected to a low pressure by means of three parallel relief paths. A secondary relief path, which can be activated in a test mode, is provided.

Abstract: A faucet having an electronic valve is provided. The faucet includes a spout having a first end through which a fluid exits, a second end coupled to a faucet body, and a sidewall disposed between the first end and the second end. The spout extends along a curved longitudinal axis. A sensor is disposed completely within the spout along a curved portion of the sidewall. The sensor is operatively coupled to the electronic valve.

Abstract: A faucet including a flow reducing insert positioned within an interior of a faucet body, the body and insert having tapered portions that are configured to reduce flow through the faucet when the insert is moved downstream laterally with the body. The insert and the body further having straight portions downstream from the tapered portions with the straight portion including features that permit liquid passing between the tapered portions to flow into the interior and through a downstream end of the faucet. A flow reducer with an insert and interior walls similarly configured to the faucet above.

Abstract: A fire suppression wet pipe system air vent assembly and method of venting air from a fire suppression wet pipe system includes providing a primary air vent valve having an inlet and an outlet. The primary air vent inlet is adapted to be connected with a fire suppression wet pipe system and is configured to vent air, but not water, from its outlet. A secondary air vent valve having an inlet and an outlet is provided. The secondary air vent valve is configured to vent air, but not water, from its outlet. A fluid conduit connects the primary air vent valve outlet with the secondary air vent valve inlet. The second air vent valve provides failsafe air venting upon the failure of the primary air vent valve. A fluid indicator may be provided that indicates the presence of fluid in the conduit. The presence of an appreciable amount of fluid in the conduit is an indication of likely failure of the primary air vent valve.

Abstract: The present invention applies to a vacuum transfer system, and relates to an air control valve for controlling the supply of compressed air in a vacuum transfer system. More specially, the air control valve of the present invention is configured to execute a two-stage control. The two-stage control is realized by a piston operation method, in which, although the control is performed by compressed air supplied thereto, a first control unit is operated by an electronic control method, and a second control unit is operated by a pneumatic control method. In particular, the second control unit is operated by vacuum pressure supplied from the vacuum transfer system. The air control valve of this invention can realize improved operational stability, improved energy efficiency and improved operational precision.

Abstract: The invention relates to a device for the supply of special gas that can be mounted on a gas cylinder. The device comprises a multi-function unit housing a fluid circuit comprising a single high-pressure regulator; a purge system consisting of three low-pressure valves; a fluidic connection with the inner space of a cylinder; and an outlet enabling equipment to be supplied with gas. The invention is characterized in that the high-pressure regulator is arranged upstream of the purge system.

Abstract: According to various aspects, exemplary embodiments are disclosed of check valves and fluid control valve assemblies including the same. In an exemplary embodiment, a valve assembly generally includes a valve housing including a check valve chamber and an opening. The valve assembly further includes a check valve for controlling fluid flow relative to the check valve chamber. A plug is sealingly engaged within the opening, to thereby seal the check valve chamber and restrict fluid flow from the check valve chamber out the opening through the valve housing. A flux-coated solder ring may be along an outer surface of the plug, without any flux-coated solder ring along an inner surface of the plug.

Abstract: The invention relates to a valve assembly which includes at least one, but typically two, balls (12,14) located along a passage and which balls can be moved between open and closed positions to selectively control the passage of fluid along the passage. The valve assembly includes at at least one end thereof a retaining assembly (32,34) which allows the effective sealing against one surface of a ball and retention of the same in position. A sealing assembly is also provided when two balls are provided, intermediate the same, which allows effective sealing to be achieved and at least one of the two trunnions which allows each of the balls to be mounted within the valve body is located only internally of the valve body. The components of the valve assembly which are located within the same can in one embodiment all be inserted into and located within the valve body from one common end.

Abstract: A mesofluidic scale digital valve system includes a first mesofluidic scale valve having a valve body including a bore, wherein the valve body is configured to cooperate with a solenoid disposed substantially adjacent to the valve body to translate a poppet carried within the bore. The mesofluidic scale digital valve system also includes a second mesofluidic scale valve disposed substantially perpendicular to the first mesofluidic scale valve. The mesofluidic scale digital valve system further includes a control element in communication with the solenoid, wherein the control element is configured to maintain the solenoid in an energized state for a fixed period of time to provide a desired flow rate through an orifice of the second mesofluidic valve.

Abstract: A multi-stage pressure regulator system. The system of the present invention provides for distribution of the Joules-Thomson (J-T) cooling effect between multiple stages. In the preferred embodiment of the present invention, the pressure is first reduced by a set ratio in one or more stages followed by an adjustable pressure output stage. The present invention thereby provides a system to control pressure reduction and thus prevent condensation (and associated distortion of a vapor composition sample) of a gas due to J-T cooling effect. The system of the present invention is particularly suitable for use placement (via, for example, a probe) within the source gas supply containment vessel, pipeline or the like, so that pressure reduction occurs at or near isothermal conditions, further lessening the likelihood of J-T condensation.

Abstract: A snowplow blade articulator assembly includes a mounting frame for attaching a snowplow blade to a vehicle chassis. A hydraulic pump and a hydraulic reservoir are attached to the mounting frame, the hydraulic reservoir supplying hydraulic fluid to the hydraulic pump. An articulating assembly is attached to the mounting frame for moving the snowplow blade when the snowplow blade is attached to the mounting frame, the articulating assembly is fluidly connected to the hydraulic pump, and the articulating assembly includes a lift cylinder and a hydraulic manifold. The hydraulic manifold includes a downforce circuit that fluidly isolates the lift cylinder from the hydraulic pump when a first control valve is closed and the downforce circuit fluidly connects a lift chamber of the lift cylinder with a lower chamber of the lift cylinder to maintain equal hydraulic pressure in the lift chamber and in the lower chamber.

Abstract: A regulating valve of the type preferably used for dynamic regulation of fluid-borne systems, such as central heating systems in housing and industrial buildings or cooling facilities, where the control valve is provided with a valve housing with an inlet and an outlet, where a valve insert with an orifice is provided in the valve housing by which the flow in the regulating valve can be regulated, and where additionally there are detectors for detecting either supply pressure or discharge pressure and another pressure, respectively. The regulating valve is provided with a modular valve insert which at least includes a differential pressure regulator, a venturi, a throttle device and a coupling member for an actuator, where the various modules have interacting joining means. A valve insert may thus be built up of respective modules, where the modules are selected individually with the most suitable specifications for the individual task.

Abstract: An in-line mixing system provides a process liquid for treatment of wafer-shaped articles. The system comprises a first flow regulator configured to regulate flow of a first liquid stream, a second flow regulator configured to regulate flow of a second liquid stream having a chemical component, a refractive index meter configured to provide a refractive index measurement of a mixture of the first and second liquid streams, a combined flow meter configured to provide a combined flow measurement of the mixture of the first and second liquid streams, and an automatic controller. The automatic controller is configured to operate the first and second flow regulators based upon the refractive index measurement and the combined flow measurement.

Abstract: In a soft start device for pneumatic systems comprising a primary inlet where compressed air can be supplied at primary pressure, wherein the primary inlet is, via a valve circuit, connected to at least one secondary outlet which can be coupled to a load and where compressed air can be discharged at secondary pressure, the secondary pressure being lower than or equal to the primary pressure, wherein a main valve is installed between the primary inlet and the secondary outlet, a restrictor device being installed in the bypass, wherein the main valve and the restrictor device together with further directional valves of the valve circuit are interconnected such and the valve circuit can be switched into a standard switching position for venting such that the secondary outlet is vented, the valves of the valve circuit are interconnected such that several further switching positions for venting are possible.

Abstract: The invention relates to a method for managing the supply of cryogenic liquid to a truck for transporting heat-sensitive materials, said truck implementing a method using said cryogenic liquid to transfer negative calories to the materials. Said method is a so-called indirect-injection method in which the liquid is fed into a heat-exchanger system located inside the truck, where said liquid evaporates. The transfer of cold to the materials is achieved by means of an exchange between the atmosphere surrounding the materials and the cold walls of the heat-exchanger system, characterized in that the heat-exchanger system is supplied with cryogenic liquid by implementing the following measures: an upstream two-position valve, generally closed, is placed upstream from the heat-exchanger system; a proportional analog valve, generally open, is placed downstream from the heat-exchanger system; and a downstream two-position valve, generally open, is placed downstream from the analog valve.

Abstract: Multifunctional safety valve device with proportional pressure regulator, for line feeding aeriform fluid to a user, including a body defining a fluid or gas conduit connected to a gas feed line and a gas delivering line. The conduit has first and second passages intercepted by respective first and second valving elements. The second element downstream of the first for gas pressure regulating and modulating. The valving elements operated by electromagnetic actuators and urged closed at least by a spring. The second element cooperating with a membrane subjected to gas pressure to urge the second element closed. The membrane has, subjected to gas pressure, a surface larger than that of the second element subjected to the same pressure, to maintain the second element closed. The second element presenting, downstream of the second passage, a portion with a flexible rim arranged to seal the second passage when intercepted by the second element.

Abstract: In certain embodiments, a valve assembly includes a housing. The housing can define a first fuel intake, a first fuel output, and a second fuel output. The assembly can include a valve member configured to direct fuel from the first fuel intake to either the first fuel output or the second fuel output. The assembly can further include a nozzle having a first portion and a second portion. The first portion of the nozzle can be in communication with the first fuel output, and the second portion of the nozzle can be in communication with the second fuel output. The assembly can include a compartment in communication with the nozzle, and can include one or more air intakes.

Abstract: A valve unit for adjusting gas flow to a combustion apparatus includes a valve member that moves relative to a valve seat in response to a signal input to a coil, for varying a high-capacity gas flow rate through the valve unit. The valve unit includes a first opening port, a second opening port that is smaller than the first opening port, and a closure member. The closure member is movable between an open position, in which said high-capacity gas flow rate is communicated via the first and second opening ports to an outlet, and a closed position against the first opening port, in which a low-capacity gas flow rate is communicated via only the second opening port to the outlet. The valve unit includes a solenoid for selectively moving the closure member between the open position and closed position to selectively establish a high-capacity gas flow rate or low capacity gas flow rate.

Abstract: Methods and devices using a co-radial arrangement of serial siphon structures composed of siphon valves each separated by a capillary valve to save radial space in a fluidic system. Such serial siphon valves allow to sequentially distribute liquids in a fluidic system upon application of successive centripetal accelerations and decelerations applied to a rotary platform.

Abstract: A system that incorporates teachings of the present disclosure may include, for example, an apparatus including at least one first plate having at least one first opening and at least one second plate having at least one second opening. The apparatus can include a connector for coupling the at least one first plate and the at least one second plate, where the at least one first and second openings are offset to form a non-linear flow path for restricting flow of a fluid through the at least one first and second plates. Additional embodiments are disclosed.

Abstract: A dual fuel heating source can have a fuel selector valve for selecting between a first fuel and a second fuel different from the first. The dual fuel heating source may selectively have a regulator unit, and an outlet valve. The regulator unit can be configured to regulate the pressure of two different fuels. The outlet valve can be connected to the fuel selector valve such that selecting a fuel can determine the path fuel will flow through the outlet valve and also out of the heating source.

Abstract: The invention seeks to provide a method and apparatus for introducing fill material such as walnut shells at a desired volumetric flow rate into a fluid to be injected into a borehole. A valve is provided to enable adjustment of the volumetric flow rate as desired during introduction of the fill material.

Abstract: The invention relates to a valve (10) for controlling the internal pressure p in a cabin of an aircraft, comprising a first flap (11) and a second flap (12), wherein the flaps (11, 12) control a pressure-changing fluid flow (L) between the surroundings and the cabin through an opening (15) of a limiting element (14) of the cabin. in order to increase the inflow volume of the fluid, according to the invention at least one of the flaps (11, 12) is adjustable in the inflow position in respect of the opening (15) in the direction of the surroundings, such that the flow surface of the flap (11, 12) is increased for the air flow (L). Furthermore according to the invention at least one of the flaps (11, 22) has a closure device (21) which reduces an outflow of the fluid that had previously flowed in during an inflow process.

Abstract: A valving arrangement for a mobile gas supply system includes a primary inlet port, a primary outlet port, a regulator, a secondary inlet port, and a secondary outlet port. The primary inlet port is adapted to be connected to a gas cylinder. The primary outlet port is in fluid communication with the primary inlet port and is adapted to be connected to one or more accessories for delivering gas from the gas cylinder. The regulator is disposed between the primary inlet port and the primary outlet port for reducing the pressure of the gas delivered by the gas cylinder to the primary inlet port. The secondary inlet port is in fluid communication with the primary outlet port. The secondary outlet port is in fluid communication with the primary outlet port and the secondary inlet port. The secondary inlet and secondary outlet ports are adapted for connecting the valving arrangement to one or more additional gas cylinders.

Abstract: A fluid regulating device includes a valve disc and a valve port adapted to provide a secondary seal during an obstructed closing operation, whereby the valve disc directly engages a housing component of the valve port to maximize the integrity of the secondary seal and advantageously reduce the size and complexity of existing valve ports. The valve port comprises a housing and a cartridge slidably disposed in the housing. The valve disc directly engages a primary seat carried by the cartridge during a normal closing operation. During an obstructed closing operation, however, the cartridge is pushed into the housing such that the valve disc directly engages a secondary seat carried by the housing at a location that is downstream of the cartridge.

Abstract: A compressed air supply assembly for operating a pneumatic assembly includes a compressed air supply; a compressed air connection to the pneumatic assembly; a purge connection to the environment; a pneumatic main line between the compressed air supply and the compressed air connection comprising an air dryer; a purge line between the compressed air connection and the purge connection; and a solenoid valve arrangement with a control valve to control a purge valve. The control valve is connected to a control valve connection in a pneumatic control line connected to a pressure control connection of the purge valve; and the purge valve is connected to a purge valve connection in the purge line. A pressure-maintaining device is connected to the pneumatic control line and maintains control pressure at the pressure control connection when the purge valve connection is open, independently of pressure in the purge line and/or the main line.

Abstract: A nozzle head includes a housing, an activating member, and a cap. The housing is engagable with a pumping mechanism of an air pump. The housing includes a passage and also includes a first end adapted for receiving an American valve and a second end adapted for receiving a French valve respectively. The activating member is disposed in the housing and movable to a first position in which the housing includes the first end in fluid communication with the passage and the second end not in fluid communication with the passage and a second position in which the housing includes the second end in fluid communication with the passage and the first end not in fluid communication with the passage. The cap is fitted to the first end of the housing and rotatable with respect thereto.

Abstract: An apparatus includes a fitting having an inner surface defining a passageway, an outer surface, and at least one aperture extending from the outer surface to the inner surface. A plug extends into the passageway and has a plug surface defining at least one hole. A retaining member extends through the aperture and into the hole to retain the plug with respect to the fitting. A locking member is operatively connected to the fitting and the plug, and is positioned such that the locking member restricts movement of the retaining member out of said at least one hole.

Abstract: A constant-flow valve assembly having a first passageway carrying fluid at a first pressure, a piston chamber, and a second passageway connected to the chamber and carrying fluid at the second pressure. A third passageway carries fluid at a third pressure. An adjustable valve is between the chamber and the third passageway, and an adjustable restrictor is positioned between the first and second passageways. An inlet portion of the restrictor assembly receives fluid at the first pressure and directs the fluid to a restrictor, and outlet portion directs the fluid to the second passageway at the second pressure. The restrictor is movable to adjust the position of entry and exit portions relative to the inlet and outlet portions to adjust a fluid flow rate to the second passageway to adjust the flow rate through the valve assembly.

Abstract: A gas valve unit for adjusting a volumetric gas flow which is fed to a gas burner of a gas device includes a valve chamber, an actuation shaft protruding out of the valve chamber, and at least two on/off valves arranged in the valve chamber. Further arranged in the valve chamber is at least one restrictor plate having at least two restrictor points, each of the restrictor points having at least one restrictor opening. The restrictor plate is accessible from a side of the valve chamber on which the actuation shaft is protruding from the valve chamber.

Abstract: This disclosure relates generally to valves, and more particularly, to gas valve assemblies. In one illustrative but non-limiting example, a valve assembly may include a valve body having an interior and an exterior, a valve or valve sealing member positioned in the valve body, a sensor element (e.g., a magnet and/or a ferrous core) secured relative to the valve sealing member and a sensor (e.g., a magnetic field sensor) positioned outside of the interior of the valve body. The valve sealing member may be movable between an opened position and a closed position, and the sense element may move with the valve sealing member. The sensor may be configured to detect a position of the valve sealing member and communicate that position to a valve controller.

Abstract: A gas flow of a gas pipe is indicated before an electromagnetic valve is actually opened, so that the electromagnetic valve can be prevented from being opened or closed by a wrong manipulation or hazards caused by undesired mixing of gases can be avoided so as to improve safety. The substrate processing apparatus includes a state detection unit configured to detect an opening/closing request state and an opening/closing state of a valve installed at a gas pipeline; and a indication unit configured to indicate a gas flow state of the gas pipeline predicted according to the opening/closing request state and a gas flow state of the gas pipeline when the valve is opened, in a way that each state is distinguished.

Abstract: Hydraulic system for actuating the hydraulic actuators of a working machine, the hydraulic system has a delivery, a discharge, a drainage line, a signal line, a main slide valve which actuates a corresponding hydraulic actuator, a safety slide valve integral with the main slide valve and adapted for opening or closing the drainage line itself, and a pressure compensator presenting a frontal chamber connectable by way of the main slide valve to the delivery and a rear chamber connected to the signal line; the drainage line connecting a node of the signal line to the discharge.

Abstract: A valve including a valve body having a bore and a spindle received in the bore, the spindle being actuatable to open and close the valve. A compression gland seal is provided about the spindle for compression between the spindle and the bore. A first seal ring is provided about the spindle at a position spaced along the spindle from the gland seal, and provides a seal between the spindle and the bore of the valve body. A second seal ring is provided about the spindle at a position spaced along the spindle from the gland seal and the first seal ring, and provides a further seal between the spindle and the bore of the valve body.

Abstract: A fluid-flow control valve includes an inlet (E) for connecting to a feed duct; an outlet (S) for connecting to an evacuation duct; a valve member (1) that, at rest, bears against a valve seat (2) to isolate the inlet (E) from the outlet (S); and an actuator mechanism (5, C) for moving the valve member (1). The actuator mechanism includes a chamber (C), which communicates with the inlet (E) via a hole (11) and is disposed relative to the valve member (1) on its side facing away from the seat (2), in such a manner as to urge the valve member against its seat; and a bypass (5) that connects the chamber (C) to the outlet (S), the bypass being controllable between an open state for passing fluid, and a closed state.

Abstract: A control valve includes a body including an internal passageway and is constituted at one end as a coupler that includes a valve poppet openable to allow fluid access to or from the passageway past the poppet. The body defines at least one lateral port. A valve spool is disposed within the body and is movable lengthwise of the body by a solenoid actuator, disposed at the other end of the body, to control fluid communication between the passageway and the lateral port.

Abstract: A system to secure a storage unit on a supply vessel surface includes a first frame module having a first attachment mechanism configured to releasably engage with a second attachment mechanism of a second frame module, and a first valve disposed on the first frame module, wherein the first valve is in fluid communication with a second valve disposed on the second frame module through a central flow pipe. The system further includes a locking mechanism configured to releasably secure the storage unit to at least the first frame module, and at least one flow conduit configured to provide fluid communication between the first valve and the storage unit.

Abstract: An electronic faucet includes a spout assembly having a sensor configured to control the flow of water therethrough in response to the position of a spray head.

Abstract: A gas flow monitoring system is provided in process gas lines each arranged to supply gas to a predetermined process chamber via a flow control device, the system being configured to measure lowering or rising of gas pressure before and after the flow control device to monitor a flow rate of the flow control device. The system includes a first flow monitoring unit placed upstream of the flow control device in a selected one of the process gas lines, a second flow monitoring unit placed in a discharge passage upstream of the process chamber, and a controller that constantly monitors the flow rate of the flow control device with the first flow monitoring unit and, when the first flow monitoring unit detects the flow-rate abnormality two or more times, commands the second flow monitoring unit to re-verify whether flow-rate abnormality is present or not in the flow control device.