Utilizing Organic Compound-containing Bath Patents (Class 205/296)
  • Patent number: 10961634
    Abstract: Method for increasing corrosion resistance of substrate including an outermost chromium alloy layer, including (i) providing substrate comprising an outermost layer, the layer having color space defined by CIELAB with lightness L* of 79 or more, including oxygen and carbon, and including iron in amount up to 1 atom-%, (ii) providing an aqueous, acidic passivation solution, the solution including trivalent chromium ions, phosphate ions, one or more than one organic acid anion, (iii) contacting the substrate with the passivation solution and passing electrical current between the substrate as cathode and an anode in the passivation solution wherein a passivation layer is deposited onto the outermost layer, wherein in step (i) the outermost layer is electrolytically deposited from aqueous, acidic deposition composition, the composition including trivalent chromium ions, at least one organic acid comprising an isothiureido moiety and/or salts thereof, and chloride ions in amount of 0 wt-% to 0.1 wt-%.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: March 30, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Berkem Özkaya, Philipp Wachter
  • Patent number: 10941494
    Abstract: An electroless platinum plating solution is disclosed that can be subjected to plating processing with high deposition efficiency, does not self-decompose even when it does not contain sulfur or heavy metals, and has excellent bath stability, and an electroless platinum plating solution that can suppresses out-of-pattern deposition of platinum and perform platinum plating only on a necessary portion. An electroless platinum plating solution is disclosed that contains a soluble platinum salt, a complexing agent and any of a borohydride compound, an aminoborane compound and a hydrazine compound, and has a pH of 7 or more, adding a specific hydroxymethyl compound represented by the following formula (1) or a salt thereof: R1—CH2—OH??(1) wherein R1 is an atomic group having an aldehyde group or a ketone group.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: March 9, 2021
    Assignee: JAPAN PURE CHEMICAL CO., LTD.
    Inventors: Kazuya Shibata, Ukyo Kamimura
  • Patent number: 10879116
    Abstract: A method and apparatus for processing a substrate are provided. In some implementations, the method comprises providing a silicon substrate having an aperture containing an exposed silicon contact surface at a bottom of the aperture, depositing a metal seed layer on the exposed silicon contact surface and exposing the substrate to an electroplating process by flowing a current through a backside of the substrate to form a metal layer on the metal seed layer.
    Type: Grant
    Filed: May 27, 2014
    Date of Patent: December 29, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Roman Gouk, Steven Verhaverbeke
  • Patent number: 10808331
    Abstract: An electroplating system for depositing a plating material on an object includes a pressure device and an anode element. The pressure device includes a lid having first and second through holes and a base having a chamber, conduction holes and third through holes located in the chamber. Each of the conduction tubes includes a conduction hole connecting to one of the third through holes. The lid covers the chamber, the first through holes communicate with the chamber for spraying an electroplating solution toward the object and the second through holes reveal the conduction holes. A passage of electric force line is formed in the connected holes and the third through holes filled with the electroplating solution, and the anode element is located outside the passage of electric force line. The electroplating system can prevent defective plating and enhance plating efficiency.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: October 20, 2020
    Assignee: CHIPBOND TECHNOLOGY CORPORATION
    Inventors: Cheng-Hung Shih, Tsuo-Yun Chu, Xin-Wei Lo, Nian-Cih Yang
  • Patent number: 10738388
    Abstract: Copper electroplating baths include reaction products of amines and polyacrylamides. The reaction products function as levelers and enable copper electroplating baths which have high throwing power and provide copper deposits with reduced nodules.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: August 11, 2020
    Assignees: Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
    Inventors: Weijing Lu, Lingli Duan, Zukhra Niazimbetova, Chen Chen, Maria Rzeznik
  • Patent number: 10711360
    Abstract: Nickel electroplating compositions containing copolymers of arginine and a bisepoxide enable the electroplating of nickel deposits which have uniform bright surfaces over wide current density ranges.
    Type: Grant
    Filed: May 9, 2018
    Date of Patent: July 14, 2020
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventor: Michael Lipschutz
  • Patent number: 10648082
    Abstract: The disclosed process is capable of depositing thin layers of a wide variety of metals onto powders of magnesium, aluminum, and their alloys. A material is provided that comprises particles containing a reactive metal coated with a noble metal that has a less-negative standard reduction potential than the reactive metal. The coating has a thickness from 1 nanometer to 100 microns, for example. A method of forming an immersion deposit on a reactive metal comprises: combining a reactive metal, an ionic liquid, and a noble metal salt; depositing the noble metal on the reactive metal by a surface-displacement reaction, thereby generating the immersion deposit on the reactive metal; and removing the ionic liquid from the immersion deposit. The material may be present in an article or object (e.g., a sintered part) containing from 0.25 wt % to 100 wt % of a coated reactive metal as disclosed herein.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: May 12, 2020
    Assignee: HRL Laboratories, LLC
    Inventors: John H. Martin, Adam F. Gross
  • Patent number: 10633755
    Abstract: The present invention relates to aqueous acidic plating baths for copper deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions, at least one acid and an additive obtainable by a reaction of at least one aminoglycidyl compound comprising at least one amino group which bears at least one glycidyl moiety and at least one second compound selected from ammonia and amine compounds wherein the amine compounds comprise at least one primary or secondary amino group with the proviso that the aminoglycidyl compound contains at least one polyoxyalkylene residue and/or the amine compound contains at least one polyoxyalkylene residue. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: April 28, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Dirk Rohde, Jens Palm
  • Patent number: 10604858
    Abstract: Copper electroplating baths include reaction products of amines, polyacrylamides and sultones. The reaction products function as levelers and enable copper electroplating baths which have high throwing power and provide copper deposits with reduced nodules.
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: March 31, 2020
    Assignees: Dow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
    Inventors: Weijing Lu, Lingli Duan, Zukhra Niazimbetova, Chen Chen, Maria Rzeznik
  • Patent number: 10494732
    Abstract: The present invention relates to a method for monitoring the total amount of brighteners in an acidic copper/copper alloy plating bath during a copper/copper alloy plating process, the use of such a method for controlling a plating process, a controlled process for electrolytically depositing copper/copper alloy onto a substrate utilizing the method for monitoring according to the present invention, and the use of one or more than one redox active compound for monitoring and/or determining the total amount of brighteners in the acidic copper/copper alloy plating bath.
    Type: Grant
    Filed: May 17, 2017
    Date of Patent: December 3, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Mutlu-Iskender Muglali, Torsten Voss, Andreas Kirbs
  • Patent number: 10294574
    Abstract: A composition for electrolytic plating in microelectronics which contains a leveler that comprises the reaction product of an aliphatic di(t-amine) with an alkylating agent. Electrolytic plating methods employing the leveler, a method for making the leveler, and the leveler compound.
    Type: Grant
    Filed: September 15, 2015
    Date of Patent: May 21, 2019
    Assignee: MacDermid Enthone Inc.
    Inventors: Kyle Whitten, Vincent Paneccasio, Jr., Thomas Richardson, Eric Rouya
  • Patent number: 10270073
    Abstract: There is provided an organic/inorganic complex coating porous separator including a porous substrate, and an organic/inorganic complex coating layer formed in a single layer or multiple layers on a single surface or both surfaces of the porous substrate or at least a part of a pore portion of the porous substrate using a coating solution comprising a binder dispersed or suspended in a certain size and selectively comprising inorganic particles, and a secondary battery including the same. According to the present invention, since the coating solution comprising the binder dispersed in a certain size or less in a solvent is coated/dried on the porous substrate, a organic/inorganic complex coating porous separator having excellent air permeability and adhesive strength and a secondary battery including the organic/inorganic complex coating porous separator are provided.
    Type: Grant
    Filed: August 18, 2016
    Date of Patent: April 23, 2019
    Assignee: Hanwha Total Petrochemical Co., Ltd.
    Inventors: Jae Yong Hyun, Jin A. Yoo, Do Hoon Lee, Chang Hyun Choi
  • Patent number: 10239996
    Abstract: A process for preparing non-naturally-occurring defined monomer sequence polymers is provided, and in which a high degree of synthetic control is obtained by the use of solvent resistant diafiltration membranes. Also provided is a process for separating non-naturally-occurring defined monomer sequence polymers from synthetic by-products or excess reagents using solvent resistant diafiltration membranes, and a use of a solvent resistant diafiltration membrane in processes for preparing and separating non-naturally-occurring defined monomer sequence polymers.
    Type: Grant
    Filed: August 6, 2015
    Date of Patent: March 26, 2019
    Assignee: IMPERIAL INNOVATIONS LIMITED
    Inventors: Marc Shaepertoens, Piers Robert James Gaffney, Gyorgy Szekely, Andrew Guy Livingston
  • Patent number: 9922874
    Abstract: A method of processing a semiconductor substrate includes: immersing a substrate in a first bath, wherein the substrate comprises a barrier layer, a conductive seed layer, and a patterned photoresist layer defining an opening; providing a first electric current between the conductive seed layer and a first anode disposed in electrical contact with the first bath to deposit a conductive material within the opening; stripping the patterned photoresist layer; immersing the substrate in a second bath; providing a second electric current that is a reverse of the first electric current between the conductive seed layer plus the conductive material and a second anode disposed in electrical contact with the second bath; etching the conductive seed layer from atop a field region of the barrier layer; and etching the barrier layer from atop a field region of the substrate.
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: March 20, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Prayudi Lianto, Sam Lee, Charles Sharbono, Marvin Louis Bernt, Guan Huei See, Arvind Sundarrajan
  • Patent number: 9512530
    Abstract: A molten salt bath includes at least two types selected from the group consisting of lithium, sodium, potassium, rubidium, cesium, beryllium, magnesium, calcium, strontium, and barium; at least one type selected from the group consisting of fluorine, chlorine, bromine, and iodine; at least one element selected from the group consisting of scandium, yttrium, titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, manganese, technetium, rhenium, and lanthanoid; and an organic polymer having at least one type of a bond of carbon-oxygen-carbon and a bond of carbon-nitrogen-carbon. A deposit obtained using the molten salt bath, and a method of producing a metal deposit using the molten salt bath are provided.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: December 6, 2016
    Assignees: SUMITOMO ELECTRIC INDUSTRIES, LTD., KYOTO UNIVERSITY
    Inventors: Shinji Inazawa, Koji Nitta, Kazunori Okada, Toshiyuki Nohira
  • Patent number: 9243339
    Abstract: A copper electroplating bath for producing copper electrodeposits is described. The copper electroplating bath comprises (a) a soluble copper salt, (b) an electrolyte comprising one or more acids, and (c) a grain refining additive comprising an alkyl, aryl or alkylaryl diamine. The copper electroplating bath can be used for producing electroformed copper deposits having low oxygen content.
    Type: Grant
    Filed: May 25, 2012
    Date of Patent: January 26, 2016
    Inventor: Trevor Pearson
  • Publication number: 20150136611
    Abstract: Reaction products of guanidine compounds or salts thereof, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate with good surface properties of the metal deposits and good physical reliability.
    Type: Application
    Filed: November 21, 2013
    Publication date: May 21, 2015
    Inventors: Julia KOZHUKH, Zuhra I. NIAZIMBETOVA, Maria Anna RZEZNIK
  • Patent number: 9028668
    Abstract: For use for a circuit board where a through hole and a blind via hole co-exist, an electrolytic copper plating bath in which the covering power for the through hole and the plugging performance for the blind via hole are sufficient, and an electroplating method that uses the electrolytic copper plating bath, are disclosed. The electrolytic copper plating bath is mainly composed of a water-soluble copper salt, sulfuric acid and chloride ions. A polyamide polyamine, obtained on processing by heating of an epichlorohydrin modified product of a polycondensation product of diethylene triamine, adipic acid and ?-caprolactam, is contained in the bath as a leveler.
    Type: Grant
    Filed: July 21, 2010
    Date of Patent: May 12, 2015
    Assignee: C. Uyemura & Co., Ltd
    Inventors: Toshihisa Isono, Naoyuki Omura, Koji Shimizu, Shinji Tachibana
  • Patent number: 9011666
    Abstract: A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1—OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2—N(R1—OH)2 (Ib) to give a polyalkanolamine(II), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(II).
    Type: Grant
    Filed: December 8, 2009
    Date of Patent: April 21, 2015
    Assignee: BASF SE
    Inventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Sophia Ebert, Charlotte Emnet, Alexandra Haag, Dieter Mayer
  • Patent number: 8992757
    Abstract: A method for electrofilling large, high aspect ratio recessed features with copper without depositing substantial amounts of copper in the field region is provided. The method allows completely filling recessed features having aspect ratios of at least about 5:1 such as at least about 10:1, and widths of at least about 1 ?m in a substantially void-free manner without depositing more than 5% of copper in the field region (relative to the thickness deposited in the recessed feature). The method involves contacting the substrate having one or more large, high aspect ratio recessed features (such as a TSVs) with an electrolyte comprising copper ions and an organic dual state inhibitor (DSI) configured for inhibiting copper deposition in the field region, and electrodepositing copper under potential-controlled conditions, where the potential is controlled not exceed the critical potential of the DSI.
    Type: Grant
    Filed: May 18, 2011
    Date of Patent: March 31, 2015
    Assignee: Novellus Systems, Inc.
    Inventors: Mark J. Willey, Steven T. Mayer
  • Patent number: 8991050
    Abstract: The present invention describes a method for manufacturing rotogravure cylinders with a cylinder base made of a light weight material like aluminum. The method involves the surface treatment of the cylinder with mechanical means, the copper plating in an appropriate solution, the engraving of the cylinder, and the hardening of the cylinder by chromium plating. The advantage of this method is that the chemical treatment for the preparation of the cylinder surface which generates hazardous waste is replaced by a mechanical process. In addition, the reduction of the cylinder weight considerably (e.g. for aluminum base cylinder the weight reduction is two thirds of the weight of a steel base cylinder) reduces significantly the transportation costs. Moreover, the adhesion of the copper layer to be engraved is improved and the cost and time of manufacturing reduced.
    Type: Grant
    Filed: November 9, 2010
    Date of Patent: March 31, 2015
    Assignee: Artio SARL
    Inventor: Ioannis Ioannou
  • Patent number: 8961771
    Abstract: Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.
    Type: Grant
    Filed: July 26, 2012
    Date of Patent: February 24, 2015
    Assignee: APPLIED Materials, Inc.
    Inventors: Rajesh Baskaran, Robert W. Batz, Jr., Bioh Kim, Tom L. Ritzdorf, John L. Klocke, Kyle M. Hanson
  • Publication number: 20140262800
    Abstract: Presented herein is a method of processing a device, comprising providing an electroplating bath having a leveler, the leveler having a total nitrogen-to-total carbon (TN/TOC) ratio of about 15% or less, bringing a substrate into contact with the electroplating bath, the substrate having a recess formed therein and electroplating the substrate to create a feature substantially free of voids in the substrate recess. Electroplating the substrate is performed for a time period about as long as an electrical response peak of the leveler, and optionally for at least 30 seconds. The leveler may optionally have at least one ingredient free of nitrogen and having a leveling functionality. One ingredient may be a benzene ring free of nitrogen. The leveler TN/TOC ratio is between about 3% and about 15%.
    Type: Application
    Filed: March 27, 2013
    Publication date: September 18, 2014
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Yuan Kao, Hung-Wen Su, Minghsing Tsai
  • Publication number: 20140238868
    Abstract: Compositions suitable for the electrodeposition of copper on substrates, such as electronic device substrates, are provided. Methods of depositing copper layers on surfaces and filling apertures with copper are also provided.
    Type: Application
    Filed: February 25, 2013
    Publication date: August 28, 2014
    Applicants: DOW GLOBAL TECHNOLOGIES LLC, ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Tina C. LI, Robert D. MIKKOLA, David S. LAITAR, Duane R. ROMER
  • Patent number: 8808525
    Abstract: A cyanide-free electrolyte composition for the galvanic deposition of a copper layer on substrate surfaces and a method for the deposition of such layers. The electrolyte composition comprises at least copper(II) ions, a hydantoin and/or hydantoin derivative, a di- and/or tricarboxylic acid or salts thereof, and a metalate of an element of the group consisting of molybdenum, tungsten and vanadium and/or a cerium compound.
    Type: Grant
    Filed: July 15, 2009
    Date of Patent: August 19, 2014
    Assignee: Enthone Inc.
    Inventor: Stefan Schäfer
  • Patent number: 8801912
    Abstract: Disclosed is a method for a repeated electroplating of a workpiece to be plated as a cathode by using an insoluble anode in a plating vessel accommodating a copper sulfate plating bath, wherein a copper dissolution vessel different from the plating vessel is provided, the plating bath is transferred to the copper dissolution vessel and is returned from the copper dissolution vessel to the plating vessel for circulating the plating bath between the plating vessel and the copper dissolution vessel, copper ion supplying salt is charged into the copper dissolution vessel and dissolved in the plating bath so that copper ions consumed by the plating can be replenished, and the workpiece to be plated is continuously electroplated, characterized in that the plating bath is permitted to transfer between the anode side and the cathode side, and the plating bath is returned to vicinity of the anode in the return of the plating bath from the copper dissolution vessel to the plating vessel.
    Type: Grant
    Filed: March 10, 2009
    Date of Patent: August 12, 2014
    Assignee: C. Uyemura & Co., Ltd.
    Inventors: Naoyuki Omura, Toshihisa Isono, Koji Shimizu, Shinji Tachibana, Tomohiro Kawase, Shunsaku Hoshi
  • Patent number: 8795505
    Abstract: A copper electroplating method including dipping a substrate in a copper electroplating solution, the substrate including a seed layer; and forming a copper electroplating layer on the seed layer, wherein the copper electroplating solution includes water, a copper supply source, an electrolytic material, and a first additive, the first additive includes a compound represented by Formula 1, below:
    Type: Grant
    Filed: November 7, 2011
    Date of Patent: August 5, 2014
    Assignees: Samsung Electronics Co., Ltd., Adeka Corporation
    Inventors: Myung-Beom Park, Jung-Sik Choi, Ki-Hyeon Kim, Yuji Morishima, Shin-ichi Tanaka, Takashi Yamada, Takehiro Zushi
  • Publication number: 20140199588
    Abstract: The present invention provides an electrodeposited copper foil having a tensile strength of at least 300 MPa and elongation rate of at least 3.0% after heat treatment at 350° C. for 1 hour and provides a copper foil which prevents the breakage of a current collector (copper foil) while maintaining adhesiveness between the current collector (copper foil) and the active material in response to substantial expansion and contraction of a Si or Sn alloy-based active material. The foil is an electrodeposited copper foil having a roughened surface, the tensile strength of the copper foil being at least 300 MPa after heating at 350° C. for 1 hour, the elongation rate being at least 3.0% after heating at 350° C. for 1 hour, and respective surface area ratios (actual surface area/geometric surface area) of both sides of the copper foil (the side that is roughened and the side that is not roughened) being from 1.6 to 2.2.
    Type: Application
    Filed: June 27, 2012
    Publication date: July 17, 2014
    Applicant: FURUKAWA ELECTRIC CO., LTD.
    Inventors: Kensaku Shinozaki, Akitoshi Suzuki
  • Publication number: 20140197038
    Abstract: An electroplating solution includes an aqueous electrolyte solution including water soluble copper salts, sulfide ions and chloride ions, an accelerator including an organic material having sulfur (S), the accelerator accelerating copper (Cu) reduction, a suppressor including a polyether compound, the suppressor selectively suppressing the copper reduction, and a leveler including a water soluble polymer having nitrogen that is dissolved into positive ions in the aqueous electrolyte solution.
    Type: Application
    Filed: January 15, 2014
    Publication date: July 17, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Myung-Beom PARK, Yun-Deok KANG, Ki-Hyeon KIM, Youn-Joung CHO, Jung-Sik CHOI
  • Patent number: 8771495
    Abstract: A method and composition for metallizing a via feature in a semiconductor integrated circuit device substrate, using a leveler compound which is a dipyridyl compound.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: July 8, 2014
    Assignee: Enthone Inc.
    Inventors: Vincent Paneccasio, Jr., Xuan Lin, Richard Hurtubise, Qingyun Chen
  • Publication number: 20140174937
    Abstract: A copper plating solution which contains compounds with the structure —X—S—Y— where X and Y are, independently of each other, atoms selected from a group consisting of hydrogen, carbon, sulfur, nitrogen, and oxygen, and X and Y can be the same only if they are carbon atoms and aliphatic semialdehydes. By using this copper electroplating solution it is possible to form good filled vias without worsening the appearance of the plating.
    Type: Application
    Filed: December 24, 2012
    Publication date: June 26, 2014
    Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
    Inventors: Matsuko Saito, Makoto Sakai, Shinjiro Hayashi
  • Patent number: 8747643
    Abstract: Copper plating baths containing a leveling agent that is a reaction product of one or more of certain cyclodiaza-compounds with one or more epoxide-containing compounds that deposit copper on the surface of a conductive layer are provided. Such plating baths deposit a copper layer that is substantially planar on a substrate surface across a range of electrolyte concentrations. Methods of depositing copper layers using such copper plating baths are also disclosed.
    Type: Grant
    Filed: August 22, 2011
    Date of Patent: June 10, 2014
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Zukhra I. Niazimbetova, Maria Anna Rzeznik
  • Publication number: 20140097092
    Abstract: A composition comprising a source of metal ions and at least one polyaminoamide, said polyaminoamide comprising amide and amine functional groups in the polymeric backbone and aromatic moieties attached to or located within said polymeric backbone.
    Type: Application
    Filed: May 31, 2012
    Publication date: April 10, 2014
    Applicant: BASF SE
    Inventors: Cornelia Roeger-Goepfert, Marco Arnold, Alexander Fluegel, Charlotte Emnet, Roman Benedikt Raether, Dieter Mayer
  • Patent number: 8679317
    Abstract: A copper electroplating bath useful in filling non-through holes formed on a substrate which contains a water-soluble copper salt, sulfuric acid, and chloride ions and further contains a brightener, a carrier, and a leveler as additives, wherein the leveler contains at least one water-soluble polymer containing quaternary nitrogen, tertiary nitrogen, or both which are cationizable in a solution. In the copper electroplating bath, the filling power for non-through holes formed on a substrate can be easily controlled so as to fit to the size of the holes only by changing the quaternary nitrogen to tertiary nitrogen ratio of the water-soluble polymer to be used as the leveler, which enables copper electroplating of non-through holes of various sizes with a good fit to the sizes.
    Type: Grant
    Filed: May 21, 2007
    Date of Patent: March 25, 2014
    Assignee: C. Uyemura & Co., Ltd.
    Inventors: Toshihisa Isono, Shinji Tachibana, Tomohiro Kawase, Naoyuki Omura
  • Patent number: 8679316
    Abstract: An aqueous, acid bath for the electrolytic deposition of copper contains at least one copper ion source, at least one acid ion source, at least one brightener compound, and at least one leveler compound, and generates a very uniform copper deposit in particular in blind micro vias (BMVs) and trenches. The leveler compound is selected from among synthetically produced non-functionalized peptides, synthetically produced functionalized peptides, and synthetically produced functionalized amino acids.
    Type: Grant
    Filed: April 27, 2009
    Date of Patent: March 25, 2014
    Assignee: Atotech Deutschland GmbH
    Inventors: Heiko Brunner, Bernd Roelfs, Dirk Rohde, Thomas Pliet
  • Publication number: 20130341199
    Abstract: Provided are an additive for electro copper plating and an electro copper plating bath containing the additive, wherein the additive forms a plating film uniformly in a range of from a low current density portion to a high current density portion and thereby gives good glossiness, and is not consumed at the time of non-usage thereof. In the present invention, an additive for electro copper plating including a block polymer compound expressed by the following general formula (1) is added to an electro copper plating bath. (Here, in the formula, R represents an alkyl group or an alkenyl group having a linear-chain or branched-chain structure and having a carbon number of 1 to 15, m is an integer of from 1 to 30, and n is an integer of from 1 to 40.
    Type: Application
    Filed: March 23, 2012
    Publication date: December 26, 2013
    Applicant: C. UYEMURA & CO., LTD.
    Inventors: Hiroki Uchida, Hironori Sugiura
  • Publication number: 20130334057
    Abstract: This electrolytic refining method of high-purity electrolytic copper includes: performing electrolysis by using an electrolyte which includes a copper nitrate solution, a cathode made of stainless steel, and an anode made of copper so as to deposit high-purity electrolytic copper on the cathode. (a) The electrolyte includes a mixture of polyethylene glycol and polyvinyl alcohol at a content of 20 ppm or more as an additive. (b) When a molecular weight of the polyethylene glycol is given as Z and a, current density during the electrolysis is given as X (A/dm2), the electrolysis is performed under conditions that fulfill the following relational expressions, 1000?Z?2000 1.2?(Z?1000)×0.0008?X?2.2?(Z?1000)×0.001.
    Type: Application
    Filed: June 11, 2013
    Publication date: December 19, 2013
    Inventors: Mami Watanabe, Kiyotaka Nakaya, Naoki Kato
  • Patent number: 8591715
    Abstract: The present invention relates to an electrodeposition composition intended particularly for coating a semiconductor substrate in order to fabricate structures of the “through via” type for the production of interconnects in integrated circuits. According to the invention, the said solution comprises copper ions in a concentration of between 14 and 120 mM and ethylenediamine, the molar ratio between ethylenediamine and copper being between 1.80 and 2.03 and the pH of the electrodeposition solution being between 6.6 and 7.5. The present invention also relates to the use of the said electrodeposition solution for the deposition of a copper seed layer, and to the method for depositing a copper a seed layer with the aid of the electrodeposition solution according to the invention.
    Type: Grant
    Filed: May 4, 2009
    Date of Patent: November 26, 2013
    Assignee: Alchimer
    Inventors: Saïd Zahraoui, Frédéric Raynal
  • Patent number: 8589084
    Abstract: Ethanol emissions from a direct ignition spark ignition are measured using mass spectrometry. The method exploits specific fragment ions from ethanol. Ethanol contributes ions of mass number 31, and no other gas species produces ions at this mass number. The method and a device for implementing the method can be used for online detection of ethanol in emissions from engines burning E85 or other ethanol/gasoline mixtures.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: November 19, 2013
    Assignee: Massachusetts Institute of Technology
    Inventors: Kenneth Kar, Wai K. Cheng
  • Patent number: 8574418
    Abstract: The object of the present invention is a method of coating a surface of a substrate with copper by electroplating. According to the invention, this method comprises: a step during which the surface to be coated is brought into contact with an electroplating bath while the surface is not under electrical bias; a step of forming the coating during which the surface is biased; a step during which the surface is separated from the electroplating bath while it is under electrical bias; the aforementioned electroplating bath comprising, in solution in a solvent: a source of copper ions, with a concentration of between 0.4 and 40mM; and at least one copper complexing agent.
    Type: Grant
    Filed: September 20, 2006
    Date of Patent: November 5, 2013
    Assignee: Alchimer
    Inventors: Hervé Monchoix, Frédéric Raynal, Jérôme Daviot, José Gonzalez
  • Publication number: 20130264213
    Abstract: Disclosed is a composition comprising a source of metal ions, one or more suppressing agents and at least one additive comprising a linear or branched, polymeric biguanide compound comprising the structural unit of formula L1 or the corresponding salt thereof, wherein R1 is independently selected from H or an organic radical having 1-20 carbon atoms; R2 is an divalent organic radical having 1-20 carbon atoms, optionally comprising 20 polymeric biguanide side branches; and n is an integer of 2 or more.
    Type: Application
    Filed: December 19, 2011
    Publication date: October 10, 2013
    Applicant: BASF SE
    Inventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Harald Hoerhammer, Arnold Marco, Charlotte Emnet, Dieter Mayer
  • Publication number: 20130168255
    Abstract: The subject-matter of the present invention is a composition especially intended for filling, by the electroplating of copper, a cavity in a semiconductor substrate such as a “through-via” structure for the production of interconnects in three-dimensional integrated circuits. According to the invention, this composition comprises in solution in a solvent: copper ions in a concentration lying between 45 and 1500 mM; a complexing agent for the copper consisting of at least one compound chosen from aliphatic polyamines having 2 to 4 amino groups, preferably ethylenediamine, in a concentration lying between 45 and 3000 mM; the molar ratio between the copper and said complexing agent lying between 0.1 and 5; thiodiglycolic acid in a concentration lying between 1 and 500 mg/l; and optionally a buffer system, in particular ammonium sulfate, in a concentration lying between 0.1 and 3M.
    Type: Application
    Filed: June 9, 2011
    Publication date: July 4, 2013
    Applicant: ALCHIMER
    Inventors: Nadia Frederich, Frédéric Raynal, José Gonzalez
  • Publication number: 20130122326
    Abstract: An electrodeposited nano-twins copper layer, a method of fabricating the same, and a substrate comprising the same are disclosed. According to the present invention, at least 50% in volume of the electrodeposited nano-twins copper layer comprises plural grains adjacent to each other, wherein the said grains are made of stacked twins, the angle of the stacking directions of the nano-twins between one grain and the neighboring grain is between 0 to 20 degrees. The electrodeposited nano-twins copper layer of the present invention is highly reliable with excellent electro-migration resistance, hardness, and Young's modulus. Its manufacturing method is also fully compatible to semiconductor process.
    Type: Application
    Filed: November 16, 2012
    Publication date: May 16, 2013
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventor: NATIONAL CHIAO TUNG UNIVERSITY
  • Patent number: 8419920
    Abstract: An object of the present invention is to provide a method for preparing a sulfuric acid base copper electrolytic solution used for formation of an electro-deposited copper film comprising a surface excellent in smoothness and gloss when formed by using the solution just after preparation and is prepared by using mono-sulfides. To achieve the object, a sulfuric acid base copper electrolytic solution is made to contain a sulfonated active sulfur compound, the bis(3-sulfopropyl)disulfide which is recommended for formation of a glossy electro-deposited copper film. And the bis(3-sulfopropyl)disulfide contained is obtained by converting a 3-mercapto-1-propanesulfonic acid into the bis(3-sulfopropyl)disulfide in an aqueous solution of the 3-mercapto-1-propanesulfonic acid by an oxidation reaction. In the oxidation reaction, an air bubbling method is preferably used to prevent oxidative decomposition of the 3-mercapto-1-propanesulfonic acid.
    Type: Grant
    Filed: October 2, 2007
    Date of Patent: April 16, 2013
    Assignee: Mitsui Mining & Smelting Co., Ltd.
    Inventors: Sakiko Tomonaga, Makoto Dobashi, Junshi Yoshioka, Ayumu Tateoka, Mitsuyoshi Matsuda, Hisao Sakai
  • Publication number: 20130081855
    Abstract: A composite material includes a metal matrix of a metal and a reducing agent. The reducing agent is dispersed in the metal matrix and is capable of reducing an oxide of the metal at room temperature.
    Type: Application
    Filed: September 28, 2012
    Publication date: April 4, 2013
    Applicant: DENSO CORPORATION
    Inventor: Denso Corporation
  • Patent number: 8388824
    Abstract: A method for metallizing a via feature in a semiconductor integrated circuit device substrate, wherein the semiconductor integrated circuit device substrate comprises a front surface, a back surface, and the via feature and wherein the via feature comprises an opening in the front surface of the substrate, a sidewall extending from the front surface of the substrate inward, and a bottom. The method comprises contacting the semiconductor integrated circuit device substrate with an electrolytic copper deposition chemistry comprising (a) a source of copper ions and (b) a leveler compound, wherein the leveler compound is a reaction product of a dipyridyl compound and an alkylating agent; and supplying electrical current to the electrolytic deposition chemistry to deposit copper metal onto the bottom and sidewall of the via feature, thereby yielding a copper filled via feature.
    Type: Grant
    Filed: November 26, 2008
    Date of Patent: March 5, 2013
    Assignee: Enthone Inc.
    Inventors: Vincent Paneccasio, Jr., Xuan Lin, Richard Hurtubise, Qingyun Chen
  • Publication number: 20130020203
    Abstract: A composition comprising a source of metal ions and at least one additive comprising a polyalkyleneimine backbone, said polyalkyleneimine backbone having a molecular weight Mw of from 300 g/mol to 1000000 g/mol, wherein the N hydrogen atoms in the backbone are substituted by a polyoxyalkylene radical and wherein the average number of oxyalkylene units in said polyoxyalkylene radical is from 1.5 to 10 per N—H unit.
    Type: Application
    Filed: March 17, 2011
    Publication date: January 24, 2013
    Applicant: BASF SE
    Inventors: Cornelia Roeger-Goepfert, Roman Benedikt Raether, Marco Arnold, Charlotte Emnet, Dieter Mayer
  • Patent number: 8349149
    Abstract: One embodiment of the invention is an apparatus for electrochemical deposition (ECD) of a metal or an alloy inside at least one opening located at a front surface of a substrate, said apparatus including: (a) an electrochemical deposition (ECD) cell adapted to contain an electrolyte, the electrolyte including plating metallic ions and at least one inhibitor additive; (b) a cathode including at least a portion of said front surface of the substrate, wherein at least one surface inside said at least one opening includes an exposed metallic surface, and wherein at least a portion of said cathode is immersed in said electrolyte; (c) at least one anode, wherein at least a portion of the at least one anode is immersed in said electrolyte; (d) a power supply adapted to generate an electroplating current through the electrolyte between said cathode and said at least one anode; and (e) means for producing a turbulent flow of the electrolyte across the front surface of the substrate, wherein the turbulent flow is capab
    Type: Grant
    Filed: July 13, 2007
    Date of Patent: January 8, 2013
    Inventor: Uri Cohen
  • Patent number: 8337688
    Abstract: Disclosed are metal plating compositions for plating a metal on a substrate. The metal plating compositions include compounds which influence the leveling and throwing performance of the metal plating compositions. Also disclosed are methods of depositing metals on a substrate.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: December 25, 2012
    Assignee: Rohm and Haas Electronic Materials LLC
    Inventors: Erik Reddington, Gonzalo U. Desmaison, Zukra I. Niazimbetova, Donald E. Cleary, Mark Lefebvre
  • Publication number: 20120318676
    Abstract: Electroplating methods provide substantially uniform deposits of copper on the edges and walls of through-holes of printed circuit boards. The electroplating methods provide copper deposits which have high throwing power.
    Type: Application
    Filed: December 15, 2011
    Publication date: December 20, 2012
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Elie H. NAJJAR, Mark LEFEBVRE, Leon R. BARSTAD, Michael P. TOBEN