Etching Inorganic Substrate Patents (Class 216/96)
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Patent number: 12021187Abstract: Chemically treating ionically conductive sulfide glass solid electrolyte separators or separator layers can improve performance. In particular, treatment involving chemically etching a surface or surface region of the sulfide glass separator to blunt, lessen or remove edge defects or surface flaws, and/or to enhance surface smoothness is cost effective, reliable and well suited for high production environments compared to physical methods of removing scratches or smoothing surfaces, such as mechanical grinding and polishing.Type: GrantFiled: June 4, 2021Date of Patent: June 25, 2024Assignee: PolyPlus Battery CompanyInventors: Steven J. Visco, Vitaliy Nimon, Alexei Petrov, Yevgeniy S. Nimon, Bruce D. Katz
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Patent number: 10899665Abstract: A construction material, a hydrophobic, optionally multi-cellular, inorganic particulate material for use in the construction material, for example, to improve the crush strength and/or stability of the construction material, a method of making the construction material, constructions comprising the construction material, and a method of improving the stability of a construction material.Type: GrantFiled: June 30, 2017Date of Patent: January 26, 2021Assignee: ImerTech SASInventors: Emmanuel Bertin, Christel Careme, Erik Van Dijinen, Anabelle Huguette Reneé Legrix, Lesley Jane Trewolla, Neil Treat, Jarrod Hart, Scott Glover
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Method of forming a multilayer structure for reducing defects in semiconductor devices and structure
Patent number: 10242929Abstract: A method of forming a semiconductor device includes providing a semiconductor substrate and forming amorphous semiconductor layers adjacent a major surface of the substrate. The method includes interposing dielectric layers between the amorphous semiconductor layers. The method includes forming polycrystalline semiconductor layers adjacent the amorphous semiconductor layers. The method includes interposing dielectric layers between the polycrystalline semiconductor layers and between the last amorphous semiconductor layer and the first polycrystalline semiconductor layer. The method includes forming a fine-grain polycrystalline semiconductor layer adjacent the polycrystalline semiconductor layers but is separated from the last polycrystalline semiconductor layer by an additional dielectric layer. The fine-grain polycrystalline semiconductor layer is formed at a higher temperature than the polycrystalline semiconductor layers and the amorphous semiconductor layers.Type: GrantFiled: November 30, 2017Date of Patent: March 26, 2019Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: David Lysacek, Viola Krizakova, Jan Sik -
Patent number: 9748396Abstract: As source and drain wiring, a base layer and a cap layer are each formed of a MoNiNb alloy film, and a low-resistance layer is formed of Cu. The resultant laminated metal film is patterned through one-time wet etching to form a drain electrode and a source electrode. Cu serving as a main wiring layer does not corrode because of being covered with a MoNiNb alloy having good corrosion resistance. Further, even when a protective insulating film including an oxide is formed by plasma CVD in an oxidizing atmosphere, Cu is not oxidized. With the wet etching, the sidewall taper angle of the laminated metal film can be controlled to 20 degrees or more and less than 70 degrees.Type: GrantFiled: December 6, 2016Date of Patent: August 29, 2017Assignee: Panasonic Liquid Crystal Display Co., Ltd.Inventor: Tomoya Kato
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Patent number: 9005456Abstract: Disclosed herein is a method for manufacturing a printed circuit board, wherein a protective film for stripping and a metal layer closely adhered to the protective film for stripping are formed on an inner layer pad to protect the inner layer pad at the time of laser processing related to cavity processing and applying an etchant, thereby making it possible to improve reliability of a product.Type: GrantFiled: November 1, 2013Date of Patent: April 14, 2015Assignee: Samsung Electro-Mechanics Co., Ltd.Inventors: Kwang Sun You, Seung Ryeol Lee, Sang Hoon Park, Kyung Jin Heo, Jae Ho Shin, Joong Hyuk Jung
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Patent number: 8999182Abstract: A method for manufacturing a liquid discharge head includes a step of preparing a first substrate having an energy generating element at a front surface side thereof; a step of forming a wall member, which is to become a wall for a liquid flow passage, at the front surface side of the first substrate; a step of forming a mask having an opening on the wall member and forming a second substrate, which is composed of silicon and is to become an orifice plate, on the mask; and a step of forming a liquid supply port in the first substrate and a liquid discharge port in the second substrate by supplying an etchant from a back surface side of the first substrate, the back surface being a surface opposite the front surface.Type: GrantFiled: June 18, 2013Date of Patent: April 7, 2015Assignee: Canon Kabushiki KaishaInventors: Hiroyuki Abo, Keiji Matsumoto
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Patent number: 8992787Abstract: Anode foils suitable for use in electrolytic capacitors, including those having multiple anode configurations, have improved strength, reduced brittleness, and increased capacitance compared to conventional anode foils for electrolytic capacitors. Exemplary methods of manufacturing an anode foil suitable for use in an electrolytic capacitor include disposing a resist material in a predetermined pattern on an exposed surface of an anode foil substrate such that a first portion of the exposed surface of the anode foil substrate is covered by the resist material, and a second portion of the exposed surface remains uncovered; polymerizing the resist material; exposing at least the second portion of the exposed surface to one or more etchants so as to form a plurality of tunnels; stripping the polymerized resist material; and widening at least a portion of the plurality of tunnels. The resist material may be deposited, for example, by ink-jet printing, stamping or screen printing.Type: GrantFiled: July 29, 2011Date of Patent: March 31, 2015Assignee: Pacesetter, Inc.Inventors: David R. Bowen, Ralph Jason Hemphill, Xiaofei Jiang, Corina Geiculescu, Tearl Stocker
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Patent number: 8986844Abstract: A method for manufacturing a touch screen panel includes reinforcing a glass substrate, the glass substrate to be formed with a plurality of touch screen panels in unit cells, reinforcing the glass substrate including forming a reinforcing layer on an upper and a lower side of the glass substrate by performing a reinforcement treatment on a whole surface of the glass substrate, cutting the reinforced glass substrate in each unit cell, removing a part of the reinforcing layer formed in the upper and the lower side of the glass substrate adjacent to a cut cross section, performing a chemical HF treatment on a cross section of the glass substrate corresponding to the cut cross section and exposing the glass substrate by partially removing the reinforcing layer, and forming a touch screen panel per region of the unit cells, respectively.Type: GrantFiled: January 4, 2011Date of Patent: March 24, 2015Assignee: Samsung Display Co., Ltd.Inventors: Byeong-Kyu Jeon, Sung-Ku Kang
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Patent number: 8974681Abstract: A method for balancing a rotor, notably of a turbomachine, includes a step of determining an unbalancing mass, and a step of balancing by chemical machining of the rotor. The chemical machining includes arranging a bath containing a chemical machining agent so that the bath has a capacity of heterogeneous material removal as a function of the depth in the bath, an amount of material removal at a first depth in the bath is greater than an amount of material removal at a second depth in the bath; immersing the rotor in the bath; and orienting the rotor in the bath taking account of the capacity of heterogeneous material removal so that the quantity of material removed from the rotor in a zone of the unbalancing mass is sufficient to balance the rotor.Type: GrantFiled: July 19, 2013Date of Patent: March 10, 2015Assignee: SNECMAInventors: Gabriela Rodriguez Elizondo, Stephane Vitrac, Marcial Suarez Cabrera, Patrick Momier
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Patent number: 8951427Abstract: A method for manufacturing electrical and/or optical components, wherein a hot melt composition including an alkane based wax and an amorphous material as a masking material is used. The hot melt composition has a melting point of between 40° C. and 85° C. and a viscosity of between 5 and 20 mPa·s at not less than one temperature within the range of between 50° C. and 140° C. A hot melt composition includes between 40 weight % and 89.9 weight % of an alkane based wax; between 10 weight % and 50 weight % of an amorphous material; and between 0.1 weight % and 10 weight % of a phosphonium based ionic liquid. A system and a method for manufacturing electronic and/or optical components is provided, wherein after the etch processes and/or plating processes, the hot melt composition is removed from the substrate with the aid of hot water.Type: GrantFiled: April 26, 2013Date of Patent: February 10, 2015Assignee: Oce Technologies B.V.Inventors: Björn H. A. J. M. Ketelaars, Hylke Veenstra
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Patent number: 8945406Abstract: A method for manufacturing a symbol on an exterior of an electronic device is provided. The method includes preparing a support layer, preparing a nanograting layer on the support layer, the nanograting layer including a first nanograting area corresponding to a preset symbol and a second nanograting area corresponding to an area other than the preset symbol, wherein each of the first nanograting area and the second nanograting area includes three-dimensional (3D) nanostructures and a pitch between the 3D nanostructures arranged in the first nanograting area is different from a pitch between the 3D nanostructures arranged in the second nanograting area.Type: GrantFiled: September 6, 2012Date of Patent: February 3, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Seong-eun Chung, Il-yong Jung
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Patent number: 8940178Abstract: A method of texturizing a silicon substrate comprising a) contacting the substrate with an etching solution comprising glycolic acid, b) etching a surface of the substrate thereby forming disruptions in said surface of the substrate, and c) removing the etching solution to yield a texturized substrate, said texturized substrate having a plurality of disruptions in at least one surface with a surface density of disruptions of a minimum of 60 disruptions in a 400 micron square area.Type: GrantFiled: March 18, 2009Date of Patent: January 27, 2015Assignee: E I du Pont de Nemours and CompanyInventors: Seung Jin Lee, Hee Soo Yeo
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Patent number: 8932473Abstract: The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner; iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.Type: GrantFiled: December 22, 2008Date of Patent: January 13, 2015Assignee: Universiteit TwenteInventors: Johan Willem Berenschot, Niels Roelof Tas
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Patent number: 8932476Abstract: Apparatuses and methods are provided where porous metal is deposited on a substrate, a mask is provided on the porous metal and then an etching is performed.Type: GrantFiled: February 7, 2013Date of Patent: January 13, 2015Assignee: Infineon Technologies AGInventors: Thomas Kunstmann, Stefan Willkofer, Anja Gissibl, Johann Strasser, Matthias Mueller, Eva-Maria Hess
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Patent number: 8926853Abstract: Aspects of the invention are directed to a method of forming graphene structures. Initially, a cluster of particles is received. The cluster of particles comprises a plurality of particles with each particle in the plurality of particles contacting one or more other particles in the plurality of particles. Subsequently, one or more layers are deposited on the cluster of particles with the one or more layers comprising graphene. The plurality of particles are then etched away without substantially etching the deposited one or more layers. Lastly, the remaining one or more layers are dried. The resultant graphene structures are particularly resistant to the negative effects of aggregation and compaction.Type: GrantFiled: August 23, 2012Date of Patent: January 6, 2015Inventors: Xin Zhao, Yu-Ming Lin
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Patent number: 8911643Abstract: A polishing liquid which is used for chemical mechanical polishing of a body to be polished in a planarization process for manufacturing of a semiconductor integrated circuit, the body to be polished including at least a first layer containing polysilicon or modified polysilicon and a second layer containing at least one selected from the group consisting of silicon oxide, silicon nitride, silicon carbide, silicon carbonitride, silicon oxycarbide, and silicon oxynitride, the polishing liquid having a pH of 1.5 to 7.0, including (1) colloidal silica particles, (2) an organic acid, and (3) an anionic surfactant, and being capable of selectively polishing the second layer with respect to the first layer.Type: GrantFiled: May 28, 2009Date of Patent: December 16, 2014Assignee: FUJIFILM CorporationInventor: Tetsuya Kamimura
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Patent number: 8883033Abstract: A method for removing silicon nitride material includes following steps. A substrate having at least a gate structure formed thereon is provided, and at least a silicon nitride hard mask is formed on top of the gate structure. A first removal is performed to remove a portion of the silicon nitride hard mask with a first phosphoric acid (H3PO4) solution. A second removal is subsequently performed to remove remnant silicon nitride hard mask with a second phosphoric acid solution. The first removal and the second removal are performed in-situ. A temperature of the second phosphoric acid solution is lower than a temperature of the first phosphoric acid solution.Type: GrantFiled: March 5, 2013Date of Patent: November 11, 2014Assignee: United Microelectronics Corp.Inventors: Chi-Sheng Chen, Shin-Chi Chen, Chih-Yueh Li, Ted Ming-Lang Guo, Bo-Syuan Lee, Tsung-Hsun Tsai, Yu-Chin Cheng
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Patent number: 8883032Abstract: A method of surface treatment for zirconium oxide implants and the etching formula for the same are disclosed. The processes are carried out at room temperature. The average surface roughness Ra and the standard deviation of the implant are measured showing significant improvement while comparing with the un-treated sample and the hydrofluoric acid treated samples. The average contact angle is provided showing an almost hydrophilic surface after etched by the formula according to the present invention.Type: GrantFiled: November 28, 2012Date of Patent: November 11, 2014Inventors: Sea-Fue Wang, Chung-Kuang Yang, Jen-Chang Yang, Sheng-Yang Lee
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Patent number: 8877075Abstract: In accordance with an embodiment of the present invention, a method of polishing a device includes providing a layer having a non-uniform top surface. The non-uniform top surface includes a plurality of protrusions. The method further includes removing the plurality of protrusions by exposing the layer to a fluid that has gas bubbles and a liquid.Type: GrantFiled: February 1, 2012Date of Patent: November 4, 2014Assignee: Infineon Technologies AGInventor: Johann Kosub
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Patent number: 8871108Abstract: A method of removing carbon materials, preferably amorphous carbon, from a substrate includes dispensing a liquid sulfuric acid composition including sulfuric acid and/or its desiccating species and precursors and having a water/sulfuric acid molar ratio of no greater than 5:1 onto an material coated substrate in an amount effective to substantially uniformly coat the carbon material coated substrate. The liquid sulfuric acid composition is exposed to water vapor in an amount effective to increase the temperature of the liquid sulfuric acid composition above the temperature of the liquid sulfuric acid composition prior to exposure to the water vapor. In preferred embodiments, amorphous carbon is selectively removed as compared to a silicon oxide (e.g., silicon dioxide) and/or silicon nitride.Type: GrantFiled: March 15, 2013Date of Patent: October 28, 2014Assignee: TEL FSI, Inc.Inventor: Jeffrey M. Lauerhaas
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Patent number: 8858813Abstract: A patterning process comprises (a) providing at least one substrate having at least one major surface; (b) providing at least one patterning composition comprising at least one functionalizing molecule that is a perfluoropolyether organosulfur compound; (c) applying the patterning composition to the major surface of the substrate in a manner so as to form at least one functionalized region and at least one unfunctionalized region of the major surface; and (d) etching at least a portion of the unfunctionalized region.Type: GrantFiled: December 2, 2009Date of Patent: October 14, 2014Assignee: 3M Innovative Properties CompanyInventors: Lijun Zu, Matthew H. Frey, Suresh S. Iyer
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Patent number: 8828251Abstract: A method for finishing an exterior surface of an injection-molded product is provided, in which a metal layer is formed on the exterior surface of the injection-molded product, a photoresist layer is formed on the metal layer, a photomask is placed on the photoresist layer, light is projected onto the photomask, and remaining parts of the metal layer and the photoresist layer except for parts corresponding to a pattern formed on the photomask are removed by etching.Type: GrantFiled: May 25, 2011Date of Patent: September 9, 2014Assignee: Samsung Electronics Co., Ltd.Inventors: Jong-Bae Park, Pil-Woo Lee, Jong-Hwa Kim, Hak-Ju Kim, Jung-Won Cho
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Patent number: 8828258Abstract: A method for surface treatment of a stainless steel separator for a fuel cell comprises preparing a stainless steel sheet containing nickel, chrome and iron, and having a passive film on a surface of the stainless steel sheet, and dipping the stainless steel sheet into a mixed etching solution of nitric acid (HNO3) and sulfuric acid (H2SO4) at a temperature of 50-70° C. for 30 seconds to 30 minutes to selectively lower an amount of Fe in the passive film formed on the surface of the stainless steel sheet.Type: GrantFiled: July 27, 2007Date of Patent: September 9, 2014Assignee: Hyundai HyscoInventors: Yoo Taek Jeon, Yeon Soo Jeong
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Patent number: 8822346Abstract: A reaction block having a plurality of reaction chambers defined therein is provided. A bottom surface of each of the reaction chambers is configured to provide a seal for a corresponding reaction region on the substrate and around a periphery of the substrate. The reaction block includes a plurality of inlet channels and provides a gap between a top surface of the substrate and a bottom surface of the reaction block. The gap accepts a fluid from the inlet channels, wherein the reaction block includes a plurality of vacuum channels having access to the bottom surface of the reaction block to remove the fluid from the gap. A method of selectively etching a substrate for combinatorial processing is also provided.Type: GrantFiled: June 10, 2008Date of Patent: September 2, 2014Assignee: Intermolecular, Inc.Inventor: Kurt Weiner
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Patent number: 8821735Abstract: An object of the invention is to effectively remove particles on the glass substrate surfaces, even in the case wherein abrasive particles having a small particle size is used in the polishing step of the glass substrate and a supersonic treatment is performed at a high frequency at the supersonic cleaning step after the polishing step. In a manufacturing method of a glass substrate for a magnetic disk comprising a polishing step for performing polishing of the glass substrate and a supersonic cleaning step for performing supersonic cleaning of the glass substrate after the polishing step, the polishing step uses abrasive particles having a particle size of 10 nm to 30 nm and a first supersonic cleaning is performed at a frequency of 300 kHz to 1,000 kHz to form secondary particles and then a second supersonic cleaning is performed at a frequency of 30 kHz to 100 kHz in the supersonic cleaning step.Type: GrantFiled: March 31, 2011Date of Patent: September 2, 2014Assignee: Hoya CorporationInventor: Yosuke Suzuki
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Patent number: 8821747Abstract: A method for manufacturing a glass substrate for a magnetic disk comprises a surface grinding step of processing a mirror-surface plate glass, having a main surface in the form of a mirror surface, to a required flatness and surface roughness using fixed abrasive particles. The method comprises, before the surface grinding step using the fixed abrasive particles, a surface roughening step of roughening the surface of the mirror-surface plate glass by frosting.Type: GrantFiled: October 5, 2009Date of Patent: September 2, 2014Assignee: Hoya CorporationInventors: Takanori Mizuno, Yosuke Suzuki
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Patent number: 8778209Abstract: An apparatus for altering a surface of a cylindrical object includes at least one container containing a fluid resist therein and having at least one opening from which the fluid resist is discharged; at least one roller operatively associated with the at least one container and having a surface sized and shaped to be exposed to the at least one opening, the surface area including a pattern of shapes and upon which the fluid resist is deposited; and at least one support member adjacent the at least one roller for supporting the cylindrical object during transit for contacting the at least one roller. A method is also provided.Type: GrantFiled: December 10, 2012Date of Patent: July 15, 2014Assignee: Linde Engineering North America Inc.Inventor: Benjamin P. L. Turner
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Patent number: 8772174Abstract: A method for treating silicon to form pillars, especially for use as the active anode material in Li-ion batteries, is disclosed. The process is simple to operate on a commercial scale since it uses a solution containing only a small number of ingredients whose concentration needs to be controlled and it can be cheaper to operate than previous processes. The solution includes: 0.01 to 5M HF 0.002 to 0.2M of metal ions capable of nucleating on and forming a porous layer comprising regions of elemental metal on the silicon surface; 0.001 to 0.7M of an oxidant selected from the group O2, O3, H2O2, the acid, ammonium or alkali metal salt of NO3?, S2O82?, NO2?, B4O72? and ClO4? or a mixture thereof. The treated silicon is suitably removed from the solution.Type: GrantFiled: April 8, 2011Date of Patent: July 8, 2014Assignee: Nexeon Ltd.Inventors: Mino Green, Feng-Ming Liu, Yuxiong Jiang, Valerie Elizabeth Dawn Stevens, Benjamin Odarkwei Mills-Lamptey
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Patent number: 8765001Abstract: Monocrystalline semiconductor substrates are textured with alkaline solutions to form pyramid structures on their surfaces to reduce incident light reflectance and improve light absorption of the wafers. The alkaline baths include hydantoin compounds and derivatives thereof in combination with alkoxylated glycols to inhibit the formation of flat areas between pyramid structures to improve the light absorption.Type: GrantFiled: August 28, 2012Date of Patent: July 1, 2014Assignee: Rohm and Haas Electronic Materials LLCInventors: Michael P. Toben, Robert K. Barr, Corey O'Connor
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Patent number: 8760807Abstract: A method fabricates a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. Etch stop and nonmagnetic etchable layers are provided. A side shield layer is provided between the ABS location and the etch stop and etchable layers. A pole trench is formed in the side shield and etchable layers. The pole trench has a pole tip region in the side shield layer and a yoke region in the etchable layer. A nonmagnetic side gap layer, at least part of which is in the pole trench, is provided. A remaining portion of the pole trench has a location and profile for a pole and in which at least part of the pole is formed. A write gap and trailing shield are provided. At least part of the write gap is on the pole. At least part of the trailing shield is on the write gap.Type: GrantFiled: September 28, 2012Date of Patent: June 24, 2014Assignee: Western Digital (Fremont), LLCInventors: Jinqiu Zhang, Ying Hong, Feng Liu, Zhigang Bai
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Patent number: 8747689Abstract: There are provided a liquid processing method and a liquid processing apparatus capable of providing a high etching rate and a high etching selectivity for silicon nitride against silicon oxide, and a storage medium storing the method thereon. In the method for etching, by an etching solution, a substrate on which silicon nitride and silicon oxide are exposed, the etching solution is produced by mixing a fluorine ion source material, water and a boiling point adjusting agent; the produced etching solution is heated to a substrate processing temperature equal to or higher than 140° C.; after a temperature of the etching solution reaches the substrate processing temperature, the temperature of the etching solution is maintained at the substrate processing temperature for a first preset time; and after a lapse of the first preset time, the substrate is etched by the etching solution maintained at the substrate processing temperature.Type: GrantFiled: January 23, 2012Date of Patent: June 10, 2014Assignee: Tokyo Electron LimitedInventors: Hiroki Ohno, Takehiko Orii
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Patent number: 8747683Abstract: A mold of an embodiment of the present invention has a surface that has a shape which is inverse of a surface shape of a moth-eye structure. This surface has a plurality of protrusions, a plurality of ridges extending between the plurality of protrusions via saddle portions, and a plurality of holes, each of which is defined by at least any three of the plurality of protrusions and ridges extending between the at least any three of the plurality of protrusions, and an average distance between centers of adjacent holes, p, and an average depth of the saddle portions, r, satisfy the relationship of 0.15?r/p?0.60.Type: GrantFiled: November 25, 2010Date of Patent: June 10, 2014Assignee: Sharp Kabushiki KaishaInventors: Akinobu Isurugi, Kiyoshi Minoura, Tokio Taguchi, Takao Imaoku
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Patent number: 8741167Abstract: This invention provides a method of making a photovoltaic cell. The method uses an etching composition comprising one or more onium salts selected from the group consisting of iodonium salts and sulfonium and an organic medium to etch the anti-reflection coating. Also provided is a photovoltaic cell made by this method.Type: GrantFiled: January 6, 2014Date of Patent: June 3, 2014Assignee: E I du Pont de Nemours and CompanyInventors: Angel R Cartagena, Feng Gao, Haixin Yang, Lei Zhang
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Patent number: 8741070Abstract: Disclosed are a liquid processing method, a liquid processing apparatus, and a recording medium that can prevent convex portions of a target substrate from collapsing when a rinsing liquid is dried. A base surface of a target substrate is hydrophilized and the surfaces of convex portions become water-repellent by surface-processing the target substrate which includes a main body, a plurality of convex portions protruding from the main body, and a base surface formed between the convex portions on the substrate main body. Next, a rinsing liquid is supplied to the target substrate which has been subjected to the surface processing. Thereafter, the rinsing liquid is removed from the target substrate.Type: GrantFiled: December 16, 2011Date of Patent: June 3, 2014Assignee: Tokyo Electron LimitedInventors: Nobutaka Mizutani, Tsutae Omori, Takehiko Orii, Akira Fujita
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Publication number: 20140144880Abstract: A method of surface treatment for zirconium oxide implants and the etching formula for the same are disclosed. The processes are carried out at room temperature. The average surface roughness Ra and the standard deviation of the implant are measured showing significant improvement while comparing with the un-treated sample and the hydrofluoric acid treated samples. The average contact angle is provided showing an almost hydrophilic surface after etched by the formula according to the present invention.Type: ApplicationFiled: November 28, 2012Publication date: May 29, 2014Applicant: TAIPEI MEDICAL UNIVERSITYInventors: Sea-Fue Wang, Chung-Kuang Yang, Jen-Chang Yang, Sheng-Yang Lee
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Publication number: 20140144881Abstract: Provided is a nanowire manufacturing method, comprising forming a plurality of grid patterns on a substrate, forming a nanowire on the grid patterns, and separating the grid pattern and the nanowire. According to the present invention, the width and height of the nanowire can be adjusted by controlling the wet-etching process time period, and the nanowire can be manufactured at a room temperature at low cost, the nanowire can be mass-manufactured and the nanowire with regularity can be manufactured even in case of mass production.Type: ApplicationFiled: June 28, 2012Publication date: May 29, 2014Applicant: LG INNOTEK CO., LTD.Inventors: Young Jae Lee, Kyoung Jong Yoo, Jun Lee, Jin Su Kim, Jae Wan Park
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Patent number: 8722544Abstract: A method of simultaneously cleaning inorganic and organic contaminants from semiconductor wafers and micro-etching the semiconductor wafers. After the semiconductor wafers are cut or sliced from ingots, they are contaminated with cutting fluid as well as metal and metal oxides from the saws used in the cutting process. Aqueous alkaline cleaning and micro-etching solutions containing alkaline compounds and mid-range alkoxylates are used to simultaneously clean and micro-etch the semiconductor wafers.Type: GrantFiled: October 14, 2010Date of Patent: May 13, 2014Assignee: Rohm and Haas Electronic Materials LLCInventors: Robert K. Barr, Raymond Chan
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Patent number: 8691019Abstract: A process for cleaning a compound semiconductor wafer; the compound semiconductor wafer comprises, taking gallium arsenide (GaAs) as a representative, a group III-V compound semiconductor wafer. The process comprises the following steps: 1) treating the wafer with a mixture of dilute ammonia, hydrogen peroxide and water at a temperature not higher than 20° C.; 2) washing the wafer with deionized water; 3) treating the wafer with an oxidant; 4) washing the wafer with deionized water; 5) treating the wafer with a dilute acid solution or a dilute alkali solution; 6) washing the wafer with deionized water; and 7) drying the resulting wafer. The process can improve the cleanliness, micro-roughness and uniformity of the wafer surface.Type: GrantFiled: October 14, 2011Date of Patent: April 8, 2014Assignee: Beijing Tongmei Xtal Technology Co., Ltd.Inventors: Diansheng Ren, Qinghui Liu
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Patent number: 8685260Abstract: A known method of forming organic semiconductor devices employs the deposition of a conductive polymer onto a substrate to form electrodes or conductive tracks and then to apply an electrical material such as an organic semiconductor on top of these tracks. Although the conductive polymer serves as a highly efficient injector of electrons into the semiconductor, it is not a good conductor. This introduces undesirable inefficient in the supply of current to and from the semiconductor. Worse still the conductivity may deteriorate with time. A solution to this problem has been found by printing the polymer (7) onto a conductive layer (6) carried on a substrate (5). The printed polymer (7) is then used as a resist during a process in which parts of the conductive polymer not protected by the polymer are removed. The resulting device benefits from the good electron injection qualities of the conductive polymer (7) and efficient conduction by virtue of the underlying conductive layer (6).Type: GrantFiled: April 11, 2007Date of Patent: April 1, 2014Assignee: Novalia Ltd.Inventor: Kate Jessie Stone
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Patent number: 8685273Abstract: This disclosure involves a formula, mixing procedure, etching technique and application of an etchant for revealing defects in T2SL's grown lattice matched to (100) GaSb. The etching agent comprises a (2.5:4.5:16.5:280) solution by volume or (1%:2%:9%:88%) by weight, of HF:H2O2:H2SO4:H2O. The etchant is made by mixing (49%) hydrofluoric aqueous solution with (30%) water-based peroxide, followed by sulfuric acid, and diluted with de-ionized H2O (DI-water).Type: GrantFiled: November 6, 2012Date of Patent: April 1, 2014Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Edward H Aifer, Sergey I Maximenko
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Patent number: 8658049Abstract: A method for manufacturing a touch panel includes the following steps. A mother plate is provided. A plurality of adhesive materials are formed on the mother plate. A plurality of cover glasses are disposed on the adhesive materials respectively. The adhesive materials are cured, whereby the cover glasses are attached to the mother plate. A plurality of circuit units are formed on the cover glasses respectively. The cover glass having the circuit unit is removed from the mother plate, wherein the bonding strength of the cured adhesive material is within a range about between 5 g/25 mm and 600 g/25 mm, whereby the adhesive material provides enough adhesive force between the cover glass and the mother plate, and the adhesive material cannot be stayed on a surface of the cover glass during a removing process.Type: GrantFiled: September 14, 2012Date of Patent: February 25, 2014Assignee: HannStar Display CorporationInventor: Tsung-Hsien Yen
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Patent number: 8658053Abstract: Disclosed is an etchant composition employed for selectively etching a metallic material in production of a semiconductor device, which is an aqueous solution containing a fluorine compound, and a chelating agent having, in the molecular structure thereof, a phosphorus oxo-acid as a functional group; or is an aqueous solution containing a fluorine compound, a chelating agent having, in the molecular structure thereof, a phosphorus oxo-acid as a functional group, and an inorganic acid and/or an organic acid. Also disclosed is a method for producing a semiconductor device employing the etchant composition.Type: GrantFiled: June 22, 2006Date of Patent: February 25, 2014Assignee: Mitsubishi Gas Chemical Company, Inc.Inventors: Kazuyoshi Yaguchi, Kojiro Abe, Masaru Ohto
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Patent number: 8647526Abstract: The object of the present invention is a new inkjet printable etching composition comprising an etchant, which is activated by a second component. Thus, a further object is the use of this new composition in a process for the etching of surfaces semiconductor devices or surfaces of solar cell devices.Type: GrantFiled: May 12, 2010Date of Patent: February 11, 2014Assignee: Merck Patent Gesellschaft mit Beschrankter HaftungInventors: Oliver Doll, Edward Plummer, Mark James, Ingo Koehler
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Patent number: 8641998Abstract: A method for manufacturing graphene oxide nanoplatelets and derivative products and the graphene oxide nanoplatelets obtained, comprising two distinct phases, a first phase for obtaining an intermediate material consisting of carbon nanofilaments, each one having a structure comprising continuous ribbon of graphitic material with a small number of stacked monoatomic graphene layers and spirally rolled around and along the main axis of said nanofilaments, and a second phase wherein said carbon nanofilaments are subjected to a high-temperature treatment in order to clean said filaments and increase their degree of crystallinity. Once these nanofilaments are treated, a chemical etching is performed on them comprising an oxidation that causes the fragmentation of the carbon nanofilaments and starts a cleaving method that is completed by physical means in order to obtain graphene oxide nanoplatelets.Type: GrantFiled: June 1, 2011Date of Patent: February 4, 2014Assignee: Grupo Antonlin-Ingerieria, S.A.Inventors: Cesar Merino Sanchez, Ignacio Martin Gullon, Helena Varela Rizo, Maria Del Pilar Merino Amayuelas
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Patent number: 8637409Abstract: An etching method includes: applying a radiation to an etching aqueous solution; and etching a material to be etched by using the etching aqueous solution irradiated with the radiation.Type: GrantFiled: February 17, 2012Date of Patent: January 28, 2014Assignee: Fujitsu LimitedInventors: Shirou Ozaki, Masayuki Takeda
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Patent number: 8632836Abstract: The invention relates to a method for modification of a biocompatible component comprising the steps of a) providing a biocompatible component at least partly covered by metallic oxide; and b) treating at least a part of said component, which part is covered by said metallic oxide, with an aqueous composition comprising oxalic acid; whereby a modified metallic oxide is obtained. The invention also relates to a biocompatible component comprising a substrate having a surface comprising a) a microstructure comprising pits separated by plateus and/or ridges; and b) a primary nanostructure being superimposed on said microstructure, said primary nanostructure comprising depressions arranged in a wave-like formation.Type: GrantFiled: July 8, 2008Date of Patent: January 21, 2014Assignee: Astra Tech ABInventors: Anette Fredriksson, Ingela Petersson
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Patent number: 8632691Abstract: Disclosed herein is an interface treatment method for germanium-based device, which belongs to the field of manufacturing technologies of ultra large scaled integrated (ULSI) circuits. In the method, the natural oxide layer on the surface of the germanium-based substrate is removed by using a concentrated hydrochloric acid solution having a mass percentage concentration of 15%˜36%, and dangling bonds of the surface are performed a passivation treatment by using a diluted hydrochloric acid solution having a mass percentage concentration of 5%˜10% so as to form a stable passivation layer on the surface. This method makes a good foundation for depositing a high-K (high dielectric constant) gate dielectric on the surface of the germanium-based substrate after cleaning and passivating, enhances quality of the interface between the gate dielectric and the substrate, and improves the electrical performance of germanium-based MOS device.Type: GrantFiled: June 14, 2012Date of Patent: January 21, 2014Assignee: Peking UniversityInventors: Ru Huang, Min Li, Xia An, Ming Li, Meng Lin, Xing Zhang
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Patent number: 8628674Abstract: A method for trimming a structure obtained by bonding a first wafer to a second waver on contact faces and thinning the first waver, wherein at least either the first wafer or the second wafer is chamfered and thus exposes the edge of the contact face of the first wafer, wherein the trimming concerns the first wafer. The method includes a) selecting the second wafer from among wafers with a resistance to a chemical etching planned in b) that is sufficient with respect to the first wafer to allow b) to be carried out; b) after bonding the first wafer to the second wafer, chemical etching the edge of the first wafer to form in the first wafer a pedestal resting entirely on the contact face of the second wafer and supporting the remaining of the first wafer; and c) thinning the first wafer until the pedestal is reached and attacked, to provide a thinned part of the first wafer.Type: GrantFiled: November 20, 2012Date of Patent: January 14, 2014Assignees: Commissariat a l'Energie Atomique et aux Energies Alternatives, SoitecInventors: Marc Zussy, Bernard Aspar, Chrystelle Lagahe-Blanchard, Hubert Moriceau
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Patent number: 8623231Abstract: A method for etching an ultra thin film is provided which includes providing a substrate having the ultra thin film formed thereon, patterning a photosensitive layer formed over the ultra thin film, etching the ultra thin film using the patterned photosensitive layer, and removing the patterned photosensitive layer. The etching process includes utilizing an etch material with a diffusion resistant carrier such that the etch material is prevented from diffusing to a region underneath the photosensitive layer and removing portions of the ultra thin film underneath the photosensitive layer.Type: GrantFiled: June 11, 2008Date of Patent: January 7, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: George Liu, Kuei Shun Chen, Vencent Chang, Chih-Yang Yeh
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Patent number: 8613864Abstract: The invention includes methods in which silicon is removed from titanium-containing container structures with an etching composition having a phosphorus-and-oxygen-containing compound therein. The etching composition can, for example, include one or both of ammonium hydroxide and tetra-methyl ammonium hydroxide. The invention also includes methods in which titanium-containing whiskers are removed from between titanium-containing capacitor electrodes. Such removal can be, for example, accomplished with an etch utilizing one or more of hydrofluoric acid, ammonium fluoride, nitric acid and hydrogen peroxide.Type: GrantFiled: August 23, 2012Date of Patent: December 24, 2013Assignee: Micron Technology, Inc.Inventor: Prashant Raghu