Field Effect Transistor Patents (Class 257/27)
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Patent number: 8575624Abstract: In one embodiment, a semiconductor device includes a semiconductor substrate, a gate electrode provided on the semiconductor substrate via an insulating layer, and a gate insulator provided on a side surface of the gate electrode. The device includes a stacked layer including a lower main terminal layer of a first conductivity type, an intermediate layer, and an upper main terminal layer of a second conductivity type which are successively stacked on the semiconductor substrate, the stacked layer being provided on the side surface of the gate electrode via the gate insulator. The upper or lower main terminal layer is provided on the side surface of the gate electrode via the gate insulator and the semiconductor layer.Type: GrantFiled: February 23, 2012Date of Patent: November 5, 2013Assignee: Kabushiki Kaisha ToshibaInventors: Takahisa Kanemura, Masaki Kondo
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Patent number: 8575665Abstract: The graphene electronic device may include a gate oxide on a conductive substrate, the conductive substrate configured to function as a gate electrode, a pair of first metals on the gate oxide, the pair of the first metals separate from each other, a graphene channel layer extending between the first metals and on the first metals, and a source electrode and a drain electrode on both edges of the graphene channel layer.Type: GrantFiled: September 2, 2011Date of Patent: November 5, 2013Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-seong Heo, Hyun-jong Chung, Sun-ae Seo, Sung-hoon Lee, Hee-jun Yang
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Publication number: 20130285017Abstract: Embodiments of the present invention provide transistor structures having strained channel regions. Strain is created through lattice mismatches in the source and drain regions relative to the channel region of the transistor. In embodiments of the invention, the transistor channel regions are comprised of germanium, silicon, a combination of germanium and silicon, or a combination of germanium, silicon, and tin and the source and drain regions are comprised of a doped III-V compound semiconductor material. Embodiments of the invention are useful in a variety of transistor structures, such as, for example, trigate, bigate, and single gate transistors and transistors having a channel region comprised of nanowires or nanoribbons.Type: ApplicationFiled: December 20, 2011Publication date: October 31, 2013Inventors: Van H. Le, Harold W. Kennel, Willy Rachmady, Ravi Pillarisetty, Jack Kavalieros, Niloy Mukherjee
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Publication number: 20130279145Abstract: A group III-N nanowire is disposed on a substrate. A longitudinal length of the nanowire is defined into a channel region of a first group III-N material, a source region electrically coupled with a first end of the channel region, and a drain region electrically coupled with a second end of the channel region. A second group III-N material on the first group III-N material serves as a charge inducing layer, and/or barrier layer on surfaces of nanowire. A gate insulator and/or gate conductor coaxially wraps completely around the nanowire within the channel region. Drain and source contacts may similarly coaxially wrap completely around the drain and source regions.Type: ApplicationFiled: December 19, 2011Publication date: October 24, 2013Inventors: Han Wui Then, Robert Chau, Benjamin Chu-Kung, Gilbert Dewey, Jack Kavalieros, Matthew Metz, Niloy Mukherjee, Ravi Pillarisetty, Marko Radosavljevic
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Patent number: 8507893Abstract: Provided are an electronic device and a light-receiving and light-emitting device which can control the electron configuration of a graphene sheet and the band gap thereof, and an electronic integrated circuit and an optical integrated circuit which use the devices. By shaping the graphene sheet into a curve, the electron configuration thereof is controlled. The graphene sheet can be shaped into a curve by forming the sheet on a base film having a convex structure or a concave structure. The local electron states in the curved part can be formed by bending the graphene sheet. Thus, the same electron states as the cylinder or cap part of a nanotube can be realized, and the band gaps at the K points in the reciprocal lattice space can be formed.Type: GrantFiled: May 26, 2009Date of Patent: August 13, 2013Assignee: Hitachi, Ltd.Inventor: Makoto Okai
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Patent number: 8507892Abstract: A method for forming a nanowire tunnel field effect transistor device includes forming a nanowire connected to a first pad region and a second pad region, the nanowire including a core portion and a dielectric layer, forming a gate structure on the dielectric layer of the nanowire, forming a first protective spacer on portions of the nanowire, implanting ions in a first portion of the exposed nanowire and the first pad region, implanting in the dielectric layer of a second portion of the exposed nanowire and the second pad region, removing the dielectric layer from the second pad region and the second portion, removing the core portion of the second portion of the exposed nanowire to form a cavity, and epitaxially growing a doped semiconductor material in the cavity to connect the exposed cross sections of the nanowire to the second pad region.Type: GrantFiled: February 14, 2012Date of Patent: August 13, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Josephine B. Chang, Isaac Lauer, Jeffrey W. Sleight
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Publication number: 20130146846Abstract: Manufacturing a semiconductor structure including: forming a seed material on a sidewall of a mandrel; forming a graphene field effect transistor (FET) on the seed material; and removing the seed material.Type: ApplicationFiled: December 13, 2011Publication date: June 13, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: James W. ADKISSON, Thomas J. DUNBAR, Jeffrey P. GAMBINO, Molly J. LEITCH
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Patent number: 8455922Abstract: A III-nitride semiconductor device which includes a charged gate insulation body.Type: GrantFiled: May 15, 2012Date of Patent: June 4, 2013Assignee: International Rectifier CorporationInventor: Michael A. Briere
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Publication number: 20130105764Abstract: A tunneling field effect transistor structure and a method for forming the same are provided. The tunneling field effect transistor structure comprises: a substrate; a plurality of convex structures formed on the substrate, every two adjacent convex structures being separated by a predetermined cavity less than 30 nm in width, the convex structures comprising a plurality of sets, and each set comprising more than two convex structures; a plurality of floated films formed on tops of the convex structures, each floated film corresponding to one set of convex structures, a region of each floated film corresponding to a top of an intermediate convex structure in each set being formed as a channel region, and regions of the each floated film at both sides of the channel region are formed as a source region and a drain region with opposite conductivity types respectively; and a gate stack formed on each channel region.Type: ApplicationFiled: August 28, 2012Publication date: May 2, 2013Applicant: TSINGHUA UNIVERSITYInventors: Ning Cui, Renrong Liang, Jing Wang, Jun Xu
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Patent number: 8431924Abstract: A method to fabricate a hetero-junction in a Tunnel Field Effect Transistor device configuration (e.g. in a segmented nanowire TFET) is provided. A thin transition layer is inserted in between the source region and channel region such that the out-diffusion is within a very limited region of a few nm, guaranteeing extremely good doping abruptness thanks to the lower diffusion of the dopants in the transition layer. The transition layer avoids the direct contact between the highly doped source region and the lowly doped or undoped channel and allows to contain the whole doping entirely within the source region and transition layer. The thickness of the transition layer can be engineered such that the transition layer coincides with the steep transition step from the highly doped source region to the intrinsic region (channel), and hence maximizing the tunneling current.Type: GrantFiled: July 25, 2012Date of Patent: April 30, 2013Assignee: IMECInventors: Francesca Iacopi, Anne S. Verhulst, Arturo Sibaja-Hernandez
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Patent number: 8426891Abstract: A semiconductor substrate according to one embodiment includes: a first transistor having a first gate insulating film formed on a semiconductor substrate, a first gate electrode formed on the first gate insulating film and a first sidewall formed on a side face of the first gate electrode, the first gate insulating film comprising a high-dielectric constant material as a base material, a part of the first sidewall contacting with the first gate insulating film and containing Si and N; and a second transistor having a second gate insulating film formed on the semiconductor substrate, a second gate electrode formed on the second gate insulating film and a second sidewall formed on a side face of the second gate electrode so as to contact with the second gate insulating film, the second gate insulating film comprising a high-dielectric constant material as a base material, a part of the second sidewall contacting with the second gate insulating film and containing Si and N, wherein at least one of an abundanceType: GrantFiled: March 15, 2010Date of Patent: April 23, 2013Assignee: Kabushiki Kaisha ToshibaInventor: Masakazu Goto
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Patent number: 8421120Abstract: A problem is arisen in conventional J-FETs that a shifting in a threshold voltage (VT) is generated before or after an energization with a gate current. A junction gate field effect transistor (J-FET) according to the present invention includes an undoped InGaAs channel layer 5, which is capable of accumulating carrier of a first conductivity type, a p+ type GaAs layer 17 (semiconductor layer), which is provided on the undoped InGaAs channel layer 5, and contains an impurity of a second conductivity type, and a gate electrode 18, which is provided on the p+ type GaAs layer 17. Here, the concentration of hydrogen contained in the p+ type GaAs layer 17 is lower than the concentration of the second conductivity type carrier in the p+ type GaAs layer 17.Type: GrantFiled: June 11, 2007Date of Patent: April 16, 2013Assignee: Renesas Electronics CorporationInventor: Yasunori Bito
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Publication number: 20130075700Abstract: According to example embodiments, an electrode structure includes a graphene layer on a semiconductor layer and an electrode containing metal on the graphene layer. A field effect transistor (FET) may include the electrode structure.Type: ApplicationFiled: March 27, 2012Publication date: March 28, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hee-jun Yang, Seong-jun Park, Hyun-jong Chung, Jin-seong Heo
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Publication number: 20130048948Abstract: Inverter logic devices include a gate oxide on a back substrate, a first graphene layer and a second graphene layer separated from each other on the gate oxide, a first electrode layer and a first semiconductor layer separated from each other on the first graphene layer, a second electrode layer and a second semiconductor layer separated from each other on the second graphene layer, and an output electrode on the first and second semiconductor layers and configured to output an output signal. The first semiconductor layer is doped with a different type of impurities selected from n-type impurities and p-type impurities than the second semiconductor layer.Type: ApplicationFiled: August 24, 2012Publication date: February 28, 2013Applicant: Samsung Electronics Co., Ltd.Inventors: Jin-seong HEO, Seong-jun PARK, Hyun-jong CHUNG, Hyun-jae SONG, Hee-jun YANG, David SEO
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Publication number: 20130032784Abstract: A thin film transistor having a channel region including a nanoconductor layer. The nanoconductor layer can be a dispersed monolayer of nanotubes or nanowires formed of carbon. The thin film transistor generally includes a gate terminal insulated by a dielectric layer. The nanoconductor layer is placed on the dielectric layer and a layer of semiconductor material is developed over the nanoconductor layer to form the channel region of the thin film transistor. A drain terminal and a source terminal are then formed on the semiconductor layer. At low field effect levels, the operation of the thin film transistor is dominated by the semiconductor layer, which provides good leakage current performance. At high field effect levels, the charge transfer characteristics of the channel region are enhanced by the nanoconductor layer such that the effective mobility of the thin film transistor is enhanced.Type: ApplicationFiled: August 1, 2012Publication date: February 7, 2013Applicant: Ignis Innovation Inc.Inventors: Gholamreza Chaji, Maryam Moradi
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Patent number: 8344359Abstract: A semiconductor structure having a transistor and a thermo electronic structure. The transistor has a control electrode for controlling a flow of carriers through a semiconductor layer between a pair of electrodes. The thermo electronic structure has a first portion disposed on at least one of the pair of electrodes and a second portion disposed over a region of the semiconductor layer proximate the control electrode between the control electrode and said at least one of the pair of electrode. The thermo electronic structure extends from the first portion to the second portion for removing heat generated heat from said region in the semiconductor layer.Type: GrantFiled: April 9, 2010Date of Patent: January 1, 2013Assignee: Raytheon CompanyInventors: John P. Bettencourt, Nicholas J. Kolias
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Patent number: 8344424Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: February 28, 2012Date of Patent: January 1, 2013Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Publication number: 20120298962Abstract: A fabrication process for a nanoelectronic device and a device are provided. Channel material is deposited on a substrate to form a channel. A source metal contact and a drain metal contact are deposited on the channel material, and the source metal contact and the drain metal contact are on opposing ends of the channel material. A polyhydroxystyrene derivative is deposited on the channel material. A top gate oxide is deposited on the polymer layer. A top gate metal is deposited on the top gate oxide.Type: ApplicationFiled: August 7, 2012Publication date: November 29, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Phaedon Avouris, Damon B. Farmer, Fengnian Xia
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Publication number: 20120298960Abstract: A hetero-junction tunneling transistor having a first layer of p++ silicon germanium which forms a source for the transistor at one end. A second layer of n+ silicon material is deposited so that a portion of the second layer overlies the first layer and forms the drain for the transistor. An insulating layer and metallic gate for the transistor is deposited on top of the second layer so that the gate is aligned with the overlying portions of the first and second layers. The gate voltage controls the conduction between the source and the drain and the conduction between the first and second layers occurs by vertical tunneling between the layers.Type: ApplicationFiled: May 24, 2012Publication date: November 29, 2012Inventors: Osama M. Nayfeh, Madan Dubey
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Publication number: 20120298961Abstract: A method to fabricate a hetero-junction in a Tunnel Field Effect Transistor device configuration (e.g. in a segmented nanowire TFET) is provided. A thin transition layer is inserted in between the source region and channel region such that the out-diffusion is within a very limited region of a few nm, guaranteeing extremely good doping abruptness thanks to the lower diffusion of the dopants in the transition layer. The transition layer avoids the direct contact between the highly doped source region and the lowly doped or undoped channel and allows to contain the whole doping entirely within the source region and transition layer. The thickness of the transition layer can be engineered such that the transition layer coincides with the steep transition step from the highly doped source region to the intrinsic region (channel), and hence maximizing the tunneling current.Type: ApplicationFiled: July 25, 2012Publication date: November 29, 2012Applicant: IMECInventors: Francesca Iacopi, Anne S. Verhulst, Arturo Sibaja-Hernandez
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Publication number: 20120298963Abstract: A structure for use in fabrication of a PiN heterojunction tunnel field effect transistor (TFET) includes a silicon wafer comprising an alignment trench, a p-type silicon germanium (SiGe) region, and a hydrogen implantation region underneath the p-type SiGe region and the alignment trench that divides the silicon wafer into a upper silicon region and a lower silicon region, wherein the upper silicon region comprises the alignment trench and the p-type SiGe region; and a first oxide layer located over the alignment trench and the p-type SiGe region that fills the alignment trench and is bonded to a second oxide layer located on a handle wafer; wherein the alignment trench is configured to align a wiring level of the device comprising the PiN heterojunction TFET to the p-type SiGe region.Type: ApplicationFiled: August 10, 2012Publication date: November 29, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Sarunya Bangsaruntip, Steven Koester, Isaac Lauer, Jeffrey W. Sleight
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Publication number: 20120298959Abstract: A tunnel field effect transistor (TFET) and method of making the same is provided. The TFET comprises a source-channel-drain structure and a gat electrode. The source region comprises a first source sub-region which is doped with a first doping profile with a dopant element of a first doping type having a first peak concentration and a second source sub-region close to a source-channel interface which is doped with a second doping profile with a second dopant element with the same doping type as the first dopant element and having a second peak concentration. The second peak concentration of the second doping profile is substantially higher than the maximum doping level of the first doping profile close to an interface between the first and the second source sub-regions.Type: ApplicationFiled: May 17, 2012Publication date: November 29, 2012Applicants: Katholieke Universiteit Leuven, K.U.LEUVEN R&D, IMECInventors: Anne S. Verhulst, Kuo-Hsing Kao
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Patent number: 8304760Abstract: A device is provided that includes a structure having a sidewall surface, a layer of material provided on the sidewall surface, and a device structure provided in contact with the layer of material. Fabrication techniques includes a process that includes forming a structure having a sidewall surface, forming a layer of material on the sidewall surface, and forming a device structure in contact with the layer of material, where the device structure and the layer of material are components of a device.Type: GrantFiled: June 13, 2011Date of Patent: November 6, 2012Assignee: Advanced Micro Devices, Inc.Inventors: An Chen, Zoran Krivokapic
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Patent number: 8299455Abstract: Self-assembled polymer technology is used to form at least one ordered nanosized pattern within material that is present in a conductive contact region of a semiconductor structure. The material having the ordered, nanosized pattern is a conductive material of an interconnect structure or semiconductor source and drain diffusion regions of a field effect transistor. The presence of the ordered, nanosized pattern material within the contact region increases the overall area (i.e., interface area) for subsequent contact formation which, in turn, reduces the contact resistance of the structure. The reduction in contact resistance in turn improves the flow of current through the structure. In addition to the above, the inventive methods and structures do not affect the junction capacitance of the structure since the junction area remains unchanged.Type: GrantFiled: October 15, 2007Date of Patent: October 30, 2012Assignee: International Business Machines CorporationInventors: Bruce B. Doris, Carl J. Radens, Anthony K. Stamper, Jay W. Strane
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Publication number: 20120261643Abstract: Semiconductor structures including parallel graphene nanoribbons or carbon nanotubes oriented along crystallographic directions are provided from a template of silicon carbide (SiC) fins or nanowires. The SiC fins or nanowires are first provided and then graphene nanoribbons or carbon nanotubes are formed on the exposed surfaces of the fin or the nanowires by annealing. In embodiments in which closed carbon nanotubes are formed, the nanowires are suspended prior to annealing. The location, orientation and chirality of the graphene nanoribbons and the carbon nanotubes that are provided are determined by the corresponding silicon carbide fins and nanowires from which they are formed.Type: ApplicationFiled: April 18, 2011Publication date: October 18, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Guy M. Cohen, Christos D. Dimitrakopoulos, Alfred Grill
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Patent number: 8288760Abstract: A field effect transistor of an embodiment of the present invention includes, a semiconductor substrate containing Si atoms; a protruding structure formed on the semiconductor substrate; a channel region formed in the protruding structure and containing Ge atoms; an under channel region formed under the channel region in the protruding structure and containing Si and Ge atoms, the Ge composition ratio among Si and Ge atoms contained in the under channel region continuously changing from the channel region side to the semiconductor substrate side; a gate insulating film formed on the channel region; and a gate electrode formed on the gate insulating film on the channel region.Type: GrantFiled: May 10, 2010Date of Patent: October 16, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Tsutomu Tezuka, Toshifumi Irisawa
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Publication number: 20120256167Abstract: The graphene electronic device may include a gate oxide on a conductive substrate, the conductive substrate configured to function as a gate electrode, a pair of first metals on the gate oxide, the pair of the first metals separate from each other, a graphene channel layer extending between the first metals and on the first metals, and a source electrode and a drain electrode on both edges of the graphene channel layer.Type: ApplicationFiled: September 2, 2011Publication date: October 11, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jin-seong Heo, Hyun-jong Chung, Sun-ae Seo, Sung-hoon Lee, Hee-jun Yang
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Publication number: 20120256168Abstract: According to example embodiments, a semiconductor device includes a first electrode, a second electrode apart from the first electrode, and an active layer between the first and second electrodes. The active layer includes first and second layers, the first layer contacts the first and second electrodes, and the second layer is separated from at least one of the first and second electrodes.Type: ApplicationFiled: September 23, 2011Publication date: October 11, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jiyoul Lee, Eok-su Kim, Won-mook Choi, Sun-kook Kim
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Patent number: 8274072Abstract: A carbon-based field effect transistor (FET) includes a substrate; a carbon layer located on the substrate, the carbon layer comprising a channel region, and source and drain regions located on either side of the channel region; a gate electrode located on the channel region in the carbon layer, the gate electrode comprising a first dielectric layer, a gate metal layer located on the first dielectric layer, and a nitride layer located on the gate metal layer; and a spacer comprising a second dielectric layer located adjacent to the gate electrode, wherein the spacer is not located on the carbon layer.Type: GrantFiled: February 22, 2012Date of Patent: September 25, 2012Assignee: International Business Machines CorporationInventors: Zhihong Chen, Dechao Guo, Shu-jen Han, Kai Zhao
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Publication number: 20120235118Abstract: A semiconductor structure which includes a substrate; a graphene layer on the substrate; a source electrode and a drain electrode on the graphene layer, the source electrode and drain electrode being spaced apart by a predetermined dimension; a nitride layer on the graphene layer between the source electrode and drain electrode; and a gate electrode on the nitride layer, wherein the nitride layer is a gate dielectric for the gate electrode.Type: ApplicationFiled: March 18, 2011Publication date: September 20, 2012Applicant: International Business Machines CorporationInventors: Phaedon Avouris, Deborah Neumayer, Wenjuan Zhu
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Publication number: 20120235119Abstract: Techniques for forming a thin coating of a material on a carbon-based material are provided. In one aspect, a method for forming a thin coating on a surface of a carbon-based material is provided. The method includes the following steps. An ultra thin silicon nucleation layer is deposited to a thickness of from about two angstroms to about 10 angstroms on at least a portion of the surface of the carbon-based material to facilitate nucleation of the coating on the surface of the carbon-based material. The thin coating is deposited to a thickness of from about two angstroms to about 100 angstroms over the ultra thin silicon layer to form the thin coating on the surface of the carbon-based material.Type: ApplicationFiled: May 29, 2012Publication date: September 20, 2012Applicant: International Business Machines CorporationInventors: Katherina Babich, Alessandro Callegari, Zhihong Chen, Edward Kiewra, Yanning Sun
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Patent number: 8193562Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: February 1, 2011Date of Patent: June 5, 2012Assignee: Tansphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Patent number: 8174049Abstract: A semiconductor device according to one embodiment includes: a semiconductor substrate having first and second regions; a first transistor comprising a first gate insulating film and a first gate electrode thereon in the first region on the semiconductor substrate, the first gate insulating film comprising a first interface layer containing nitrogen atoms and a first high dielectric constant layer thereon; a second transistor comprising a second gate insulating film and a second gate electrode thereon in the second region on the semiconductor substrate, the second gate insulating film comprising a second interface layer and a second high dielectric constant layer thereon, the second interface layer containing nitrogen atoms at an average concentration lower than that of the first interface layer or not containing nitrogen atoms, and the second transistor having a threshold voltage different from that of the first transistor; and an element isolation region on the semiconductor substrate, the element isolationType: GrantFiled: December 1, 2009Date of Patent: May 8, 2012Assignee: Kabushiki Kaisha ToshibaInventor: Masakazu Goto
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Publication number: 20120097923Abstract: The invention provides a graphene device structure and a method for manufacturing the same, the device structure comprising a graphene layer; a gate region in contact with the graphene layer; semiconductor doped regions formed in the two opposite sides of the gate region and in contact with the graphene layer, wherein the semiconductor doped regions are isolated from the gate region; a contact formed on the gate region and contacts formed on the semiconductor doped regions. The on-off ratio of the graphene device is increased through the semiconductor doped regions without increasing the band gap of the graphene material, i.e., without affecting the mobility of the material or the speed of the device, thereby increasing the applicability of the graphene material in CMOS devices.Type: ApplicationFiled: February 24, 2011Publication date: April 26, 2012Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventors: Qingqing Liang, Zhi Jin, Wenwu Wang, Huicai Zhong, Xinyu Liu, Huilong Zhu
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Patent number: 8148718Abstract: The invention provides a transistor having a substrate, a structure supported by the substrate including a source, drain, gate, and channel, wherein the source and the channel are made of different materials, and a tunnel junction formed between the source and the channel, whereby the tunnel junction is configured for injecting carriers from the source to the channel.Type: GrantFiled: June 2, 2008Date of Patent: April 3, 2012Assignee: The Regents of the University of CaliforniaInventors: Peter Asbeck, Lingquan Wang
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Publication number: 20120049160Abstract: The disclosed field-effect transistor has a graphene channel, and does not exhibit ambipolar properties. Specifically, the field-effect transistor has a semi-conducting substrate; a channel including a graphene layer disposed on the aforementioned semiconductor substrate; a source electrode and drain electrode comprising a metal; and a gate electrode. The aforementioned channel and the aforementioned source and drain electrodes comprising a metal are connected via a semiconductor layer.Type: ApplicationFiled: April 1, 2010Publication date: March 1, 2012Inventors: Eiichi Sano, Taiichi Otsuji
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Publication number: 20110309334Abstract: A method for forming a field effect transistor (FET) includes depositing a channel material on a substrate, the channel material comprising one of graphene or a nanostructure; forming a gate over a first portion of the channel material; forming spacers adjacent to the gate; depositing a contact material over the channel material, gate, and spacers; depositing a dielectric material over the contact material; removing a portion of the dielectric material and a portion of the contact material to expose the top of the gate; recessing the contact material; removing the dielectric material; and patterning the contact material to form a self-aligned contact for the FET, the self-aligned contact being located over a source region and a drain region of the FET, the source region and the drain region comprising a second portion of the channel material.Type: ApplicationFiled: June 22, 2010Publication date: December 22, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Josephine Chang, Isaac Lauer, Jeffrey Sleight
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Patent number: 8058643Abstract: Non-volatile resistance change memories, systems, arrangements and associated methods are implemented in a variety of embodiments. According to one embodiment, a memory cell having two sections with outwardly-facing portions, the outwardly-facing portions electrically coupled to electrodes is implemented. The memory cell has an ionic barrier between the two sections. The two sections and the ionic barrier facilitate movement of ions from one of the two sections to the other of the two sections in response to a first voltage differential across the outwardly-facing portions. The two sections and the ionic barrier diminish movement of ions from the one of the two sections to the other of the two sections in response to another voltage differential across the outwardly-facing portions.Type: GrantFiled: September 28, 2007Date of Patent: November 15, 2011Assignee: The Board of Trustees of the Leland Stanford Junior UniversityInventors: Rene Meyer, Paul C. McIntyre
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Publication number: 20110253983Abstract: A device is provided that includes a structure having a sidewall surface, a layer of material provided on the sidewall surface, and a device structure provided in contact with the layer of material. Fabrication techniques includes a process that includes forming a structure having a sidewall surface, forming a layer of material on the sidewall surface, and forming a device structure in contact with the layer of material, where the device structure and the layer of material are components of a device.Type: ApplicationFiled: June 13, 2011Publication date: October 20, 2011Applicant: Advanced Micro Devices, Inc.Inventors: An Chen, Zoran Krivokapic
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Patent number: 8030688Abstract: A method for fabricating a semiconductor device which protects the ohmic metal contacts and the channel of the device during subsequent high temperature processing steps is explained. An encapsulation layer is used to cover the channel and ohmic metal contacts. The present invention provides a substrate on which a plurality of semiconductor layers are deposited. The semiconductor layers act as the channel of the device. The semiconductor layers are covered with an encapsulation layer. A portion of the encapsulation layer and the plurality of semiconductor layers are removed, wherein ohmic metal contacts are deposited. The ohmic metal contacts are then annealed to help reduce their resistance. The encapsulation layer ensures that the ohmic metal contacts do not migrate during the annealing step and that the channel is not harmed by the high temperatures needed during the annealing step.Type: GrantFiled: June 17, 2009Date of Patent: October 4, 2011Assignee: HRL Laboratories, LLCInventors: Tahir Hussain, Miroslav Micovic, Paul Hashimoto, Gary Peng, Ara K. Kurdoghlian
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Patent number: 8017935Abstract: A method of manufacturing a parallel redundant array of single-electron devices. The method includes (a) providing a mask for diffusing a plurality of n-doped regions defined by a first set of a plurality of active regions, (b) providing a mask for disposing a plurality of polysilicon gates defined by a second set of a plurality of exposed regions, wherein an offset between a first member of the plurality of the exposed region of the first set differs in offset from a second member of the plurality of the exposed region of the second set, and (c) fabricating the parallel redundant array of single-electron devices as a function of the offset.Type: GrantFiled: August 29, 2007Date of Patent: September 13, 2011Assignee: Texas Instruments IncorporatedInventors: Robert B. Staszewski, Renaldi Winoto, Dirk Leipold
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Patent number: 7994542Abstract: A semiconductor device of the present invention comprises a logic circuit to which a power supply voltage, a sub-power supply voltage, a ground voltage and a sub-ground voltage are supplied; a driver for generating the sub-power supply voltage and the sub-ground voltage based on the power supply voltage and the ground voltage; a first wiring layer including a sub-power supply line for supplying the sub-power supply voltage and a sub-ground line for supplying the sub-ground voltage; a second wiring layer including source/drain lines for MOS transistors; a third wiring layer including a main power supply line for supplying the power supply voltage and a main ground line for supplying the ground voltage and arranged opposite to the first wiring layer to sandwich the second wiring layer; via structures for connecting the source/drain lines of the second wiring layer to the other layers.Type: GrantFiled: May 31, 2007Date of Patent: August 9, 2011Assignee: Elpida Memory, Inc.Inventors: Hirokazu Ato, Kazuhiko Matsuki
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Patent number: 7947977Abstract: A thin film transistor includes a source electrode, a drain electrode, a semiconducting layer, and a gate electrode. The drain electrode is spaced from the source electrode. The semiconducting layer is electrically connected to the source electrode and the drain electrode. The gate electrode is insulated from the source electrode, the drain electrode, and the semiconducting layer by an insulating layer. The at least one of the source electrode, drain electrode, and the gate electrode includes a metallic carbon nanotube layer. The metallic carbon nanotube layer includes a plurality of metallic carbon nanotubes.Type: GrantFiled: April 2, 2009Date of Patent: May 24, 2011Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Kai-Li Jiang, Qun-Qing Li, Shou-Shan Fan
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Publication number: 20110101308Abstract: A fabrication process for a nanoelectronic device and a device are provided. Channel material is deposited on a substrate to form a channel. A source metal contact and a drain metal contact are deposited on the channel material, and the source metal contact and the drain metal contact are on opposing ends of the channel material. A polyhydroxystyrene derivative is deposited on the channel material. A top gate oxide is deposited on the polymer layer. A top gate metal is deposited on the top gate oxide.Type: ApplicationFiled: November 3, 2009Publication date: May 5, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Phaedon Avouris, Damon B. Farmer, Fengnian Xia
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Patent number: 7928442Abstract: Provided is an optical device having a strained buried channel area. The optical device includes: a semiconductor substrate of a first conductive type; a gate insulating layer formed on the semiconductor substrate; a gate of a second conductive type opposite to the first conductive type, formed on the gate insulating layer; a high density dopant diffusion area formed in the semiconductor substrate under the gate and doped with a first conductive type dopant having a higher density than the semiconductor substrate; a strained buried channel area formed of a semiconductor material having a different lattice parameter from a material of which the semiconductor substrate is formed and extending between the gate insulating layer and the semiconductor substrate to contact the high density dopant diffusion area; and a semiconductor cap layer formed between the gate insulating layer and the strained buried channel area.Type: GrantFiled: August 17, 2007Date of Patent: April 19, 2011Assignee: Electronics and Telecommunications Research InstituteInventors: Bongki Mheen, Jeong-Woo Park, Hyun-Soo Kim, Gyungock Kim
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Patent number: 7919791Abstract: A Group III-V nitride microelectronic device structure including a delta doped layer and/or a doped superlattice. A delta doping method is described, including the steps of: depositing semiconductor material on a substrate by a first epitaxial film growth process; terminating the deposition of semiconductor material on the substrate to present an epitaxial film surface; delta doping the semiconductor material at the epitaxial film surface, to form a delta doping layer thereon; terminating the delta doping; resuming deposition of semiconductor material to deposit semiconductor material on the delta doping layer, in a second epitaxial film growth process; and continuing the semiconductor material second epitaxial film growth process to a predetermined extent, to form a doped microelectronic device structure, wherein the delta doping layer is internalized in semiconductor material deposited in the first and second epitaxial film growth processes.Type: GrantFiled: March 25, 2002Date of Patent: April 5, 2011Assignee: Cree, Inc.Inventors: Jeffrey S. Flynn, George R. Brandes
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Patent number: 7915643Abstract: Enhancement mode III-nitride devices are described. The 2DEG is depleted in the gate region so that the device is unable to conduct current when no bias is applied at the gate. Both gallium face and nitride face devices formed as enhancement mode devices.Type: GrantFiled: September 17, 2007Date of Patent: March 29, 2011Assignee: Transphorm Inc.Inventors: Chang Soo Suh, Umesh Mishra
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Patent number: 7910736Abstract: A method for producing an organic field-effect transistor, comprising the steps of: a) providing a substrate comprising a gate structure, a source electrode and a drain electrode located on the substrate, and b) applying an n-type organic semiconducting compound to the area of the substrate where the gate structure, the source electrode and the drain electrode are located, wherein the n-type organic semiconducting compound is selected from the group consisting of compounds of the formula I wherein R1, R2, R3and R4are independently hydrogen, chlorine or bromine, with the proviso that at least one of these radicals is not hydrogen, Y1 is O or NRa, wherein Ra is hydrogen or an organyl residue, Y2 is O or NRb, wherein Rb is hydrogen or an organyl residue, Z1, Z2, Z3 and Z4 are O, where, in the case that Y1 is NRa, one of the residues Z1 and Z2 may be a NRc group, where Ra and Rc together are a bridging group having 2 to 5 atoms between the terminal bonds, where, in the case that Y2 is NRb, one of theType: GrantFiled: May 4, 2007Date of Patent: March 22, 2011Assignees: BASF Aktiengesellschaft, The Board of Trustees of the Lenand Stanford Junior UniversityInventors: Martin Koenemann, Peter Erk, Zhenan Bao, Mang-Mang Ling
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Publication number: 20110042649Abstract: The present invention relates to a thin-film transistor which comprises a conductive and predominantly continuous carbon-based layer (3) comprising predominantly planar graphene-like structures. The graphene-like structures may be in the following various forms: planar graphene-like nanoribbons oriented predominantly perpendicularly to the carbon-based layer surface or planar graphene-like sheets oriented predominantly parallel to the carbon-based layer surface. The carbon-based layer thickness is in the range from approximately 1 to 1000 nm.Type: ApplicationFiled: February 16, 2009Publication date: February 24, 2011Inventors: Steven Grant Duvall, Pavel Khokhlov, Pavel I. Lazarev
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Patent number: 7851784Abstract: The Nanotube Array Ballistic Transistors are disclosed, wherein the ballistic (without collisions) electron propagation along the nanotubes, grown normally to the substrate plane on the common metal electrode, is used for a new class of hybrid (solid state/vacuum) electronic devices. In the disclosed transistors, the array of nanotubes emits electrons into vacuum when electrons gain sufficient energy inside the nanotubes due to ballistic electron movement under the voltage applied to the nanotube ends. In the disclosed devices, planar layer deposition technology is used to form multilayer structures and attach two electrodes to the nanotubes ends. The ballistic transistor can also be used for making a new type of electron-emission display when a phosphor layer is deposited on the anode electrode.Type: GrantFiled: February 13, 2007Date of Patent: December 14, 2010Assignee: Nano-Electronic And Photonic Devices And Circuits, LLCInventor: Alexander Kastalsky