Abstract: A masking and etching technique during the formation of a memory cell capacitor which utilizes an etching technique to utilize a maximum surface area over the memory cell and to form thin spacers to pattern separation walls between capacitors. This technique results in efficient space utilization which, in turn, results in an increase in the surface area of the capacitor for an increased memory cell capacitance.

Abstract: In one aspect, the invention provides a method of forming an integrated circuitry memory device. In one preferred implementation, a conductive layer is formed over both memory array areas and peripheral circuitry areas. A refractory metal layer is formed over the conductive layer to provide conductive structure in both areas. According to a preferred aspect of this implementation, the conductive layer which is formed over the memory array provides an electrical contact for a capacitor container to be formed. According to another preferred aspect of this implementation, the conductive layer formed over the peripheral circuitry area constitutes a conductive line which includes at least some of the silicide. In another preferred implementation, the invention provides a method of forming a capacitor container over a substrate. According to a preferred aspect of this implementation, a conductive layer is elevationally interposed between an upper insulating layer and a lower conductive layer over the substrate.

Abstract: A semiconductor integrated circuit comprises a non-volatile semiconductor memory and a capacitor formed respectively on a first region and a second region of a substrate, wherein an insulation film of the non-volatile semiconductor memory has a thickness different from a capacitor insulation film of the capacitor.

Abstract: A program element for a memory cell formed in a substrate. The element includes a well region of an opposite conductivity type as said substrate formed in the substrate; a first active region formed in the well and having the same conductivity type as said well; and a second active region formed in the well and having a conductivity type opposite to that of the well, and having a junction with said first active region. In a further aspect, the element is used in a memory cell. The memory cell may be implemented in an array of cells to perform a method of creating a reverse breakdown condition in an array of memory cells arranged in columns and rows in the array.

Abstract: There is provided a semiconductor device including (a) a semiconductor substrate, (b) a capacity device, (c) an interlayer insulating layer formed between the semiconductor substrate and the capacity device for electrically isolating them with each other, the interlayer insulating layer being formed below the capacity device with a contact hole therethrough, (d) a contact plug composed of an electrically conductive material and formed in the contact hole, (e) a first film composed of a first material through which hydrogen is not allowed to pass, and formed between the interlayer insulating layer and capacity device, (f) a second film composed of a second material through which hydrogen is not allowed to pass, and formed on an inner wall of the contact hole, (g) a third film composed of a third material through which hydrogen is not allowed to pass, and formed to cover an upper surface of the capacity device therewith, and (h) a fourth film composed of a fourth material through which hydrogen is not allowed t

Abstract: A high-density, high-speed, low-power, scalable split-gate memory device and its fabrication are disclosed. The channel length of a control-gate device and the channel length of a floating-gate device in a split-gate flash memory device can be tailored separately to have a dimension much smaller than the minimum feature size of technology used. A sidewall erase cathode using a thin polycrystalline-silicon layer as the floating gate may be implemented. The sidewall erase cathode may be implemented on two advanced high-density isolation structures having embedded double-sides erase cathodes and high coupling ratio to form triple-sides erase cathodes, which provide high-efficiency, self-limiting erasing from the floating gate to the control gate. Moreover, self-aligned silicidation is applied to the control gate, the source/common buried source, and the drain of the device to reduce contact and interconnect resistances.

Abstract: A memory device including at least one pair of spaced apart conductors and a ferroelectric material between the pair of conductors. The pair of conductors is spaced apart a distance sufficient to permit a tunneling current therebetween.

Abstract: Capacitor structures for use in integrated circuits and methods of their manufacture. The capacitor structures include a bottom electrode, a top electrode and a dielectric layer interposed between the bottom electrode and the top electrode. The capacitor structures further include a metal oxynitride barrier layer interposed between the dielectric layer and at least one of the bottom and top electrodes. Each metal oxynitride barrier layer acts to reduce undesirable oxidation of its associated electrode. Each metal oxynitride barrier layer can further aid in the repairing of oxygen vacancies in a metal oxide dielectric. The capacitors are suited for use as memory cells and apparatus incorporating such memory cells, as well as other integrated circuits.

Abstract: A method for fabricating a patterned layer from a layer material. The method includes steps of: providing a substrate with at least one target region and at least one migration region; applying a layer material; adding a material to the layer material; and performing a heat treatment such that the layer material migrates from the migration region to the target region and a layer which is self-aligned and self-patterned with respect to the target region is formed. The method has the advantage that the layer material, which can often only be etched with difficulty, does not have to be patterned directly. The desired structure of the layer is predetermined by preliminarily structuring the substrate into a target region and a migration region, and is produced by the migration of the layer material as a result of the heat treatment.

Abstract: The semiconductor device comprises a capacitor including a storage electrode 76, a capacitor dielectric film formed on the storage electrode 76, and a plate electrode formed on the capacitor dielectric film 78, the storage electrode 76 having an upper end rounded and having a larger thickness at the upper end than a thickness in the rest region. Whereby electric field concentration on the upper end of the storage electrode can be mitigated, and leakage current increase and dielectric breakdown of the capacitor dielectric film can be precluded.

Abstract: The nonvolatile semiconductor memory device has a floating gate electrode that is formed on the semiconductor region and stores carriers injected from the semiconductor region and a control gate electrode that controls the quantity of stored carriers by applying a predetermined voltage to the floating gate electrode. The source region is formed in the semiconductor region on one of side regions of the floating gate electrode and control gate electrode, while the drain region is formed on the other of the side regions thereof. The drain region creates an electric field from which the carriers injected into the floating gate electrode are subject to an external force having an element directed from the semiconductor region to the floating gate electrode.

Abstract: A semiconductor device preventing contact between a capacitor insulator and a plug material even when an upper surface of the plug is exposed by misregistration in lithography and manufacturing method thereof are obtained. The semiconductor device includes an interlayer insulating film, a conducting plug, a capacitor lower electrode and a capacitor dielectric, and an end portion of the upper surface of the conducting plug has a portion overlapping a vicinity of an outer periphery of the upper surface of the capacitor lower electrode when viewed two-dimensionally. In the vicinity of the end portion of the upper surface of the conducting plug, a chemically inactive member is formed.

Abstract: A current when static electricity intrudes is passed by a first circuit portion composed of a series circuit including a fuse element and a resistor until a program voltage is applied to a program voltage terminal, and the fuse element is fused when the program voltage is applied. A current for breaking the fuse element is passed when an N-type MOS transistor turns into a second breakdown state by a gate voltage from a second circuit portion.

Abstract: There are provided a semiconductor device a semiconductor device capable of preventing the deterioration of characteristics of a capacitor of a stacked semiconductor memory device using a ferroelectric or high-dielectric film for the capacitor of the memory cell thereof, without preventing the scale down for high density integration, and a method for manufacturing the same.

Abstract: Promoting mass storage and a fine structure of each flash memory.

Abstract: Container structures for use in integrated circuits and methods of their manufacture. The container structures include a bottom conductive layer, a top conductive layer and a dielectric layer interposed between the bottom conductive layer and the top conductive layer. The container structures further include a diffusion barrier layer interposed between the dielectric layer and the bottom conductive layer. The diffusion barrier layer acts to inhibit atomic diffusion to at least a portion of the bottom conductive layer, particularly atomic diffusion of oxygen during formation or annealing of the dielectric layer. The container structures are especially adapted for use as container capacitors. The container capacitors are further adapted for use in memory cells and apparatus incorporating such memory cells, as well as other integrated circuits.

Abstract: To provide an IC chip for contactless IC card that ensures reliabilities such as data retention of nonvolatile memory and reduces power consumption. Power supply voltages VDD and VSS, which are output from a rectifier circuit, are used as a power supply for driving an analog circuit, digital circuit, and memory control circuit to cause them to operate at low voltages. A booster circuit is provided for generating a power supply voltage VDDM, which is a boost voltage, to drive a memory circuit. Because the memory circuit can be operated at the same, high voltage and the other circuits can be operated at lower voltages than voltages that would be used in a case where the analog circuit, digital circuit, memory control circuit and memory circuit are driven by a common power supply, power consumption can be reduced.

Abstract: Disclosed is a triple metal line 1T/1C ferroelectric memory device and a method to make the same. A ferroelectric capacitor is connected to the transistor through a buried contact plug. An oxidation barrier layer lies between the contact plug and the lower electrode of the capacitor. A diffusion barrier layer covers the ferroelectric capacitor to prevent diffusion of material into or out of capacitor. As a result of forming the oxidation barrier layer, the contact plug is not exposed to the ambient oxygen atmosphere thereby providing a reliable ohmic contact between the contact plug and the lower electrode. Also, the memory device provides a triple interconnection structure made of metal, which improves device operation characteristics.

Abstract: A non-volatile semiconductor memory device includes a first memory bank, a second memory bank, a first power supply circuit, and a second power supply circuit. In write operation, the first power supply circuit supplies a boosted voltage to the first memory bank, and the second power supply circuit supplies a boosted voltage to the second memory bank. This enables sufficient current supply capability to be assured. On the other hand, in read operation, only the second power supply circuit supplies a boosted voltage to the first and second memory banks. This enables reduction in power consumption.

Abstract: A new method is provided for the creation of openings in a layer of dielectric while at the same time forming a dielectric that forms the dielectric of MIM capacitors. Under the first embodiment of the invention a layer of insulation, such as SixNy or SiON or TaN and TiN, is deposited over the surface of a semiconductor substrate, points of electrical contact have been provided in this semiconductor surface. A layer of IMD is deposited over the layer of insulation, an opening is created in the layer of IMD that aligns with and overlays a contact point over which a MIM capacitor is to be created. Under the second embodiment of the invention, a stack of three layers of a first layer of TaN followed by SiOx or SixNy followed by a second layer of TaN is used as the dielectric layer for the capacitor whereby the first layer of TaN is used as an etch stop for an opening that is etched for the creation of the upper plate of the capacitor.

Abstract: In an EEPROM consisting of a NAND cell in which a plurality of memory cells are connected in series, the control gate voltage Vread of the memory cell in a block selected by the data read operation is made different from the each of the voltages Vsg1, Vsg2 of the select gate of the select transistor in the selected block so as to make it possible to achieve a high speed reading without bringing about the breakdown of the insulating film interposed between the select gate and the channel of the select transistor. The high speed reading can also be made possible in the DINOR cell, the AND cell, NOR cell and the NAND cell having a single memory cell connected thereto, if the control gate voltage of the memory cell is made different from the voltage of the select gate of the select transistor.

Abstract: The tantalum chip capacitor of the present invention includes a anode terminal which is substantially flat. The tantalum wire which extends from the tantalum pellet through the insulating material terminates substantially flush with the insulating material, allowing the termination materials to be applied over a substantially flat surface. The tantalum chip capacitors of the present invention are created by methods which include the step of grinding the anode end of the capacitor so that the tantalum wire is flush with the insulating material. Conductive materials can then be applied to the anode end of the capacitor creating a substantially flat anode terminal.

Abstract: A fabrication method for forming asymmetric wells of a DRAM cell, and more particularly to a fabrication method for producing a transistor that is capable of reducing body effect, gate-swing and junction leakage current so as to enhance the reliability of a DRAM device. After doped regions used for source/drain are formed in a substrate, a local well and an anti-punchthrough pocket are then formed under the doped region to be used as drains in order to prevent short channel effect. Because the local well and the anti-punchthrough pocket do not extend to the doped region that is used as a source, the DRAM cell's ability for charge retention therefore can be kept at the same time.

Abstract: A semiconductor device includes a first terminal for inputting and outputting data and a second terminal for inputting control data in synchronization with a strobe signal. The semiconductor device includes an equivalent circuit which is provided in the second terminal. Further, the equivalent circuit has a capacitance which is equivalent to that in an output circuit which is provided in the first terminal.

Abstract: Disclosed is a semiconductor integrated circuit device including a DRAM having fine memory cells and a reduced bit line capacity. A side wall insulating film of a gate electrode (word line) is constructed by a side wall insulating film made of silicon nitride and a side wall insulating film made of silicon oxide having a dielectric constant smaller than that of the side wall insulating film made of silicon nitride, thereby reducing a capacity for a word line of a bit line formed over the gate electrode (word line). By setting the level of the upper end of the side wall insulating film made of silicon oxide to be lower than the level of the top face of a cap insulating film, the diameter in the upper part of a plug buried in each of spaces (contact holes) between the gate electrodes is set to be larger than the diameter in the bottom part to assure a contact area between the contact hole and a through hole formed on the contact hole.

Abstract: A capacitor having variable capacitance for a semiconductor device is formed on a device isolation area. A trench is formed in a semiconductor substrate for device isolation and a device isolating insulating film in which a bottom electrode of the capacitor is buried is formed in the trench. A first dielectric film is formed on the buried bottom electrode, a middle electrode is formed thereon and a second dielectric film and a top electrode are formed on the middle electrode, thereby having a three-layer electrode structure. The capacitor according to the present invention has variable capacitance in accordance with a voltage applied to top, bottom and middle electrodes, respectively.

Abstract: A semiconductor memory comprises: a fist conductivity type semiconductor substrate and one or more memory cells constituted of an island-like semiconductor layer, a charge storage layer and a control gate, the charge storage layer and the control gate being formed to entirely or partially encircle a sidewall of the island-like semiconductor layer, wherein at least one of said one or more memory cells is electrically insulated from the semiconductor substrate.

Abstract: A memory cell contains a memory transistor and a transfer transistor. A gate electrode of the transfer transistor and a control gate electrode of the memory transistor are connected to a word line. The memory transistor has a floating gate electrode that is isolated from a channel region of the memory transistor by a first dielectric layer and is connected to a first source/drain region of the transfer transistor. The control gate electrode is isolated from the floating gate electrode by a second dielectric layer. A first source/drain region of the memory transistor is connected to a bit line. The memory and transfer transistors are preferably of different conductivity types. During the writing of information, the transfer transistor is in the on-state and the memory transistor is in the off-state. During the reading-out of information, the transfer transistor is in the off-state and the memory transistor is in the on-state.

Abstract: In a semiconductor memory device, first insulating films are formed on a semiconductor substrate. Element isolating layers are formed on the semiconductor substrate for isolating element forming regions set at regular intervals in the semiconductor substrate, such that the upper surface of the element isolating layers are located at a higher level than the upper surface of the semiconductor substrate. First conductive layers are formed at regular intervals on the first insulating films. A second insulating film is formed on the element isolating layers and the first insulating film. A second conductive layer, which has a lower surface with irregularities corresponding to the configurations of the element isolating layers and the first conductive layer, and a flat upper surface irrespective of the configurations of the element isolating films and the first conductive layer, is formed on the second insulating film.

Abstract: A tunneling transistor is provided as an effective means for miniaturization of a semiconductor integrated circuit having nonvolatile memory. An insulating layer is disposed on a silicon substrate. A source and a drain are disposed on the insulating layer, with an insulator of a few nanometers in thickness that provides a tunnel barrier being interposed between the source and the drain. A ferroelectric layer that exhibits spontaneous polarization is disposed directly above a region of the source that is adjacent to the insulator. With this construction, when the ferroelectric layer is polarized in a predetermined direction, at least a portion of the region of the source adjacent to the insulator forms a depletion region, with it being possible to vary the amount of current tunneling through the insulator depending on whether the ferroelectric layer is polarized or not.

Abstract: A method of operating a semiconductor memory device capable of writing or reading in parallel a plurality of memory transistors connected to a word line in a memory cell array including a plurality of memory cells each having, alternately provided in a word line direction, an active region (channel forming region) comprised of a first conductivity type semiconductor and impurity regions comprised of a second conductivity type semiconductor shared by adjacent memory cells, for example, a VG type memory cell array, comprising driving the control gates capacitively coupled with the borders of the active regions with impurity regions and electrically isolated from the word lines to electrically divide the physical memory cell array into n number of memory cell arrays and driving the impurity regions and word lines in the same memory cell array to operate in parallel the plurality of memory cells connected to the same word line out of the cell columns.

Abstract: A nonvolatile semiconductor memory device has its output signals widely separated from each other to ensure its proper operation, does not require any high-accuracy resistance generating element, and realizes a high density memory capacity due to its simplememory cell construction in which provided are: a first wiring (21); a second wiring (25) perpendicular to the first wring (21); a third wiring (35) parallel to the first wiring (21); a first memory element (28) between the first wiring (21) and the second wiring (25); and, a second memory element (38) between the second wiring (25) and the third wiring (35). Each of the memory elements (28, 38) includes an insulation film (13) sandwiched between two layers each constructed of a ferromagnetic thin film. The first memory element (28) stores data different from that stored in the second memory element (38).

Abstract: The present invention provides a storage electrode of a capacitor, which includes a region in contact with a dielectric film of the capacitor, wherein at least the region is made of an amorphous electrically conductive oxide material.

Abstract: A semiconductor processing method of forming a contact pedestal includes, a) providing a node location to which electrical connection is to be made; b) providing insulating dielectric material over the node location; c) etching a contact opening into the insulating dielectric material over the node location to a degree insufficient to outwardly expose the node location, the contact opening having a base; d) providing a spacer layer over the insulating dielectric material to within the contact opening to a thickness which less than completely fills the contact opening; e) anisotropically etching the spacer layer to form a sidewall spacer within the contact opening; f) after forming the sidewall spacer, etching through the contact opening base to outwardly expose the node location; g) filling the contact opening to the node location with electrically conductive material; h) rendering the sidewall spacer electrically conductive; and i) etching the electrically conductive material to form an electrically conducti

Abstract: The present invention is envisioned to realize miniaturization, low voltage operation and high reliability of a nonvolatile semiconductor memory device, and simplification of its production process. Interpoly dielectric film 109a of the nonvolatile semiconductor memory device is composed of a nitrogen-introduced CVD SiO2 film, and is used as gate oxide film of MOS transistors in the low voltage region of the peripheral circuit region. Gate oxide film of MOS transistors in the high voltage region of the peripheral circuit region is composed of a laminate of said SiO2 film 109a and a nitrogen-introduced CVD SiO2 film. According to the present invention, reliability of gate oxide film of peripheral circuit MOS transistors of the nonvolatile semiconductor memory device and its transistor characteristics are improved. It is also possible to realize miniaturization and low voltage operation of the nonvolatile semiconductor memory device. Further, simplification of its production process is made possible.

Abstract: A nonvolatile ferroelectric capacitor comprising Bi4−xAxTi3O12 thin film which is obtained by substituting at least some atoms of nonvolatile element A such as La for volatile Bi atoms in Bi4Ti3O2. Nonvolatile element A in perovskite layer of B4−xAxTi3O12 suppress the generation of oxygen vacancies in the perovskite layer, thereby improving fatigue behavior.

Abstract: A method of fabricating a contact of a semiconductor memory device to prevent severe necking of a storage node despite misalignment thereof, and thus to prevent the falling-down of the storage node. A portion of a contact hole is filled with a material having an etch selectivity with respect to the storage node above the material and with respect to a conductive layer beneath the material.

Abstract: The integrated semiconductor memory configuration has a semiconductor body in which selection transistors and storage capacitors are integrated. The storage capacitors have a dielectric layer configured between two electrodes. At least the upper electrode is constructed in a layered manner with a platinum layer, that is seated on the dielectric layer, and a thicker, base metal layer lying above the platinum layer.

Abstract: Reduced scale structures of improved reliability and/or increased composition options are enabled by the creation and use of intrinsically conductive recrystallization barrier layers. The intrinsically conductive layers are preferably used adjacent to conductive strap features in trench capacitors to act as recrystallization barriers.

Abstract: An upper electrode of an FRAM capacitor is connected to a diffusion layer on the surface of a semiconductor substrate via a contact hole, second interconnecting layer, contact hole, first interconnecting layer, and contact hole. The first interconnecting layer is formed at substantially the same level as the FRAM capacitor. This decreases the depth of the contact hole connecting the first interconnecting layer to the surface of the semiconductor substrate and thereby decreases the aspect ratio of this contact hole. This facilitates processing and filling this contact hole and allows micropatterning.

Abstract: This invention is a nonvolatile semiconductor memory device including an electrically rewritable memory cell having a gate, source, drain, and charge storage layer, an extracting electrode electrically connected to at least one of the source and drain of the memory cell, and a counter electrode essentially capacitively coupled with the extracting electrode.

Abstract: A fuse configuration for a semiconductor apparatus is described. The fuse configuration has a semiconductor material disposed underneath the fuse and is made porous by implantation and subsequent etching, so that it provides a thermal insulation. The thermal insulation protects the semiconductor body when the fuse is blown due to a decreased energy requirement for blowing the fuse.

Abstract: A capacitor structure having a first and at least a second conductor level of electrically conductive concentric ring-shaped lines. The conductive lines of the first and at least second levels are arranged in concentric ring-shaped stacks. A dielectric material is disposed between the first and second conductor levels and between the concentric conductive lines in each of the levels. At least one electrically conductive via electrically connects the conductive lines in each stack, thereby forming a concentric array of ring-shaped capacitor plates. The concentric array of capacitor plates are electrically connected in an alternating manner to first and second terminals of opposite polarity so that capacitance is generated between adjacent plates of the array. The capacitor structure is especially useful in deep sub-micron CMOS.

Abstract: A method is disclosed for forming a split-gate flash memory cell where the floating gate of the cell is self-aligned to isolation, to source and to word line. This multi-self-aligned structure, which provides the maximum shrinkage of the cell that is possible, is also disclosed. The multi-self-alignment is accomplished by first defining the floating gate at the same time the trench isolation is formed, and then self-aligning the source to the floating gate by using a nitride layer as a hard mask in place of the traditional polyoxide, and finally forming a polysilicon spacer to align the word line to the floating gate. Furthermore, a thin floating gate is used to form a thin and sharp poly tip through the use of a “smiling effect” to advantage.

Abstract: A method and novel DRAM cell design are described for making DRAM devices with more than a Gigabit memory cells. After forming the FETs and polycide word lines with a cap oxide and sidewall spacers, a thin diffusion protection oxide is deposited and openings are formed for contacts to the substrate. A conductively doped first polysilicon layer is deposited and polished back to the cap oxide. The first polysilicon remaining in the recesses between word lines is patterned to form first plug that are auto self-aligned (zero alignment error) to the word lines to achieve a very high density (Gigabit) memory. A planar first insulating layer with openings for bit lines is formed. Polycide bit lines are formed having a Si3N4 cap layer and sidewall spacers. Contact openings are selectively etched to first in the first insulating layer to first plugs and self-aligned aligned to the bit lines.

Abstract: A triple-well EEPROM cell is described that is programmed and erased by electron tunneling across an entire portion of separate transistor channels. The EEPROM cell has three transistors formed in a semiconductor substrate. The three transistors are a tunneling transistor (NMOS), a sense transistor (NMOS) and a read transistor (NMOS). The tunneling transistor is formed in a second well (e.g a P conductivity type well) that is separated from the substrate by a first well, having e.g. an N conductivity type. a first well formed in the substrate. Electron tunneling occurs to program the EEPROM cell through a sense tunnel oxide layer upon incurrence of a sufficient voltage potential between a floating gate and the sense channel. Electron tunneling also occurs to erase the EEPROM cell through a tunnel oxide layer upon incurrence of a sufficient voltage potential between the floating gate and the tunneling channel.

Abstract: A dielectric film (110) is formed overlying a semiconductor device substrate (10). A dielectric post (204) having an outer peripheral boundary having sidewalls is formed over the dielectric film (110). A first conductive film (402) is deposited at least along the sidewalls of the dielectric post (204) to form a lower electrode. A capacitor dielectric film (1801) is deposited on the first conductive film, and a upper electrode (1802) is formed on the capacitor dielectric film (1801).

Abstract: A semiconductor device having improved reliability is provided. The semiconductor device has a pixel portion. The pixel portion has a TFT and a storage capacitor. The TFT and the storage capacitor has a semiconductor layer which includes first and second regions formed continuously. The TFT has the first region of the semiconductor layer including a channel forming region, a source region and a drain region located outside the channel forming region, a gate insulating film adjacent to the first region of the semiconductor layer, and a gate electrode formed on the gate insulating film. The storage capacitor has the second region of the semiconductor layer, an insulating film formed adjacent to the second region of the semiconductor layer, and a capacitor wiring formed on the insulating film. The second region of the semiconductor layer contains an impurity element for imparting n-type or p-type conductivity.

Abstract: A capacitor of a semiconductor device includes a first insulating layer having a contact hole therethrough and a contact plug that is in the contact hole and electrically connected to a semiconductor substrate. Also, a diffusion barrier layer is on the contact plug and fills the contact hole, and a storage node is on the insulating layer in contact with the diffusion barrier layer. The storage node has a uniform outer surface morphology and a cavity therein. A second insulating layer is on the first insulating layer and separates the storage nodes from adjacent storage nodes, and a fill layer fills the cavities of the storage nodes. A dielectric layer having a large dielectric constant covers the second insulating layer, the fill layer, and the storage nodes, and a plate node is on the dielectric layer. The storage node has a smooth surface adjacent the dielectric layer, which decreases leakage current.

Abstract: A semiconductor memory device including at least three different types of memory cell structures. The types include an NVRAM cell structure, an FERAM cell structure, a DRAM cell structure, and an SRAM cell structure. The cell structures are disposed on the same substrate.