Abstract: A semiconductor structure is provided. The semiconductor structure includes a first substrate, and a first bonding structure and a first conductive via which are formed in the first substrate. The first bonding structure includes a first metal layer and a second metal layer with a melting point lower than a melting point of the first metal layer. The first metal layer includes a first surface and a second surface arranged opposite to each other. The first surface of the first metal layer is provided with a first groove, and the second metal layer is arranged in the first groove. The first conductive via is in contact with the second surface of the first metal layer. A projection of the first conductive via coincides with a projection of the first groove in a direction perpendicular to the first surface of the first metal layer.

Abstract: A semiconductor device includes a semiconductor substrate, a word line trench and a word line structure. The word line trench includes a first word line trench and a second word line trench. The word line structure includes a first word line structure part and a second word line structure part connected to each other. The first word line structure part is formed in the first word line trench, and the second word line structure part is formed in the second word line trench; and the first word line structure part includes an avoidance region, and the top surface of the avoidance region is aligned with the top surface of the second word line structure part, and the avoidance region is provided with insulating material.

Abstract: Provided are a memory cell structure, a memory array structure, a semiconductor structure and a manufacturing method thereof. The memory cell structure includes: a substrate, an active region, a word line structure, an insulating dielectric layer, and a capacitor structure. The substrate has a bit line structure therein, and the active region is positioned on the bit line structure. In a direction perpendicular to the substrate, the active region includes a first connection terminal, a second connection terminal away from the first connection terminal, and a channel region positioned between the first connection terminal and the second connection terminal. In the direction perpendicular to the substrate, the word line structure covers a sidewall of the channel region. The insulating dielectric layer covers an outer side of the word line structure, an outer side of the first connection terminal, and an outer side of the second connection terminal.

Abstract: The present disclosure relates to a semiconductor memory device and a fabricating method thereof, and the semiconductor memory device includes a substrate, bit lines, plugs and a spacer structure. The bit lines are separately disposed on the substrate, and the plugs are also disposed on the substrate to alternately arrange with the bit lines. The spacer structure is disposed on the substrate, between each of the bit lines and each of the plugs. The spacer structure includes a first air gap layer, a first spacer and a second air gap layer, and the first air gap layer, the first spacer and the second air gap layer are sequentially stacked between sidewalls of the bit lines and the plugs. Therefore, two air gap layers may be formed between the bit lines and the storage node contacts to improve the delay between the resistor and the capacitor.

Abstract: A semiconductor structure and a forming method thereof are provided. The method for forming a semiconductor structure includes providing a base including a semiconductor substrate and a well region located on a surface of the semiconductor substrate, in which the well region includes a plurality of active pillar columns arranged at intervals along a first direction, and each of the active pillar columns includes a plurality of active pillars arranged at intervals along a second direction, in which the first direction is perpendicular to the second direction; forming a plurality of bit line trenches by etching at least the well region and a partial thickness of the semiconductor substrate at bottoms of the active pillars; and forming buried bit lines in the bit line trenches.

Abstract: Embodiments of the present invention provide a hybrid memory and a hybrid memory manufacturing method including both a volatile memory and a nonvolatile memory on a single substrate so as to increase an operation speed of a semiconductor device and reduce manufacturing cost. A hybrid memory includes: a substrate; a non-volatile memory including an alternating stack in which a plurality of insulation layers and a plurality of horizontal word lines are alternately stacked on the substrate; and a volatile memory including a capacitor, the capacitor penetrating through the alternating stack.

Abstract: A finger-type semiconductor capacitor array layout includes a first conductive structure and a second conductive structure. The first conductive structure includes longitudinal first conductive strips and lateral power supply strips. The second conductive structure includes longitudinal second conductive strips and P lateral power supply strip(s). The longitudinal first conductive strips and the longitudinal second conductive strips are alternately disposed in a first integrated circuit (IC) layer; and the longitudinal first conductive strips include a first row of strips and a second row of strips. The lateral power supply strips are located in a second IC layer, and coupled to the first and second rows of strips through vias. The P lateral power supply strip(s) is/are located in the second IC layer, and include(s) a first-capacitor-group power supply strip that is coupled to K strip(s) of the longitudinal second conductive strips through K via(s). The P and K are positive integers.

Abstract: A semiconductor device includes a substrate having one or more inner surfaces defining trenches that define an active pattern of the substrate, the trenches including a first trench and a second trench which have different widths, a device isolation layer on the substrate such that the device isolation layer at least partially fills the trenches, and a word line intersecting the active pattern. The device isolation layer includes a first isolation pattern covering a portion of the second trench, a second isolation pattern on the first isolation pattern and covering a remaining portion of the second trench, and a filling pattern filling the first trench under the word line. A top surface of the second isolation pattern is located at a higher level than a top surface of the filling pattern.

Abstract: A hierarchical network enables access for a stacked memory system including or more memory dies that each include multiple memory tiles. The processor die includes multiple processing tiles that are stacked with the one or more memory die. The memory tiles that are vertically aligned with a processing tile are directly coupled to the processing tile and comprise the local memory block for the processing tile. The hierarchical network provides access paths for each processing tile to access the processing tile's local memory block, the local memory block coupled to a different processing tile within the same processing die, memory tiles in a different die stack, and memory tiles in a different device. The ratio of memory bandwidth (byte) to floating-point operation (B:F) may improve 50× for accessing the local memory block compared with conventional memory. Additionally, the energy consumed to transfer each bit may be reduced by 10×.

Abstract: This application provides a capacitance detection circuit for detecting capacitance of a capacitor element within a capacitor array. The circuit includes a capacitance detection module for detecting a first capacitance of a first capacitor set, a second capacitance of a second capacitor set, and a third capacitance of the third capacitor set, the first capacitor set comprising the capacitor element and a row capacitor element in the same row of the capacitor array as the capacitor element, the second capacitor set comprising the capacitor element and a column capacitor element in the same column of the capacitor array as the capacitor element, the third capacitor set comprising the row capacitor element and the column capacitor element; and a processing module, configured to obtain the capacitance of the capacitor element according to the first capacitance, the second capacitance and the third capacitance.

Abstract: A semiconductor device includes a substrate, and a plurality of active regions disposed over the substrate. The plurality of active regions have a first total area. One or more inactive regions are also disposed over the substrate. The one or more inactive regions have a second total area. The second total area is greater than or equal to 1.5 times the first total area. The active regions may be formed in an epitaxial layer formed over the substrate. A plurality of cells of an active device may be disposed in the plurality of active regions. The inactive regions may include only structures that do not dissipate substantial power when the semiconductor device is functioning as it is designed to function.

Abstract: A method for manufacturing a semiconductor structure includes: providing a substrate; patterning the substrate to form a substrate layer and a plurality of silicon pillars; forming an oxide layer on a surface of the substrate layer between the plurality of silicon pillars; forming an isolation structure on the oxide layer, gaps being provided between upper part of the isolation structure and the silicon pillars; forming a first conductive layer in the gaps; partially removing the isolation structure and retaining the isolation structure below the first conductive layer to form an isolation layer; and forming a dielectric layer and a second conductive layer on surfaces of the isolation layer, the oxide layer, the first conductive layer and the silicon pillars.

Abstract: A semiconductor structure includes: a substrate; a through silicon via structure that is located in the substrate; a first heat dissipation layer that is around a side wall of the through silicon via structure, and a material of which is a metal semiconductor compound; and a second heat dissipation layer that is around the side wall of the through silicon via structure and located between the first heat dissipation layer and the through silicon via structure, and a heat conductivity of which is greater than a heat conductivity of the first heat dissipation layer.

Abstract: A test structure for use in a dynamic random access memory is provided. A first gate structure is disposed in a semiconductor substrate. First and second source/drain regions are disposed in the semiconductor substrate and at two sides of the first gate structure. A bit line structure is disposed on the first source/drain region. A dielectric layer is disposed on the semiconductor substrate and the bit line structure. A first landing pad is disposed on the dielectric layer. A first contact plug is disposed in the dielectric layer and electrically connects the second source/drain region and the first landing pad. A conductive layer is disposed on and electrically connected to the first landing pad, in which a first upper surface of the first landing pad is entirely covered by the conductive layer, and the conductive layer has a substantially planar upper surface.

Abstract: A semiconductor structure and a manufacturing method thereof are provided. The method includes following operations. A substrate including active regions and isolation regions is provided. First trench structures are formed on the substrate, the first trench structure passing through the active region and the isolation region. Bit line contact structures are formed in the first trench structures. Bit line structures are formed on the bit line contact structures, at least part of the bit line structure being positioned in the first trench structure. Bit line protection structures are formed on the bit line structures, the bit line protection structure at least covering an upper surface of the bit line structure. Capacitor contact assemblies are formed, the capacitor contact assembly including a first capacitor contact structure and a second capacitor contact structure which covers an upper surface and part of a side wall of the first capacitor contact structure.

Abstract: In certain aspects, a memory device includes a semiconductor layer, a peripheral circuit including a peripheral transistor in contact with the semiconductor layer, an array of memory cells disposed beside the semiconductor layer and the peripheral circuit, and bit lines coupled to the memory cells. Each of the memory cells includes a vertical transistor extending in a first direction, and a storage unit coupled to the vertical transistor. Each of the bit lines extends in a second direction perpendicular to the first direction. A respective one of the bit lines and a respective storage unit are coupled to opposite ends of each one of the memory cells in the first direction.

Abstract: The present disclosure discloses a method of manufacturing a semiconductor structure and a semiconductor structure, and relates to the technical field of semiconductors. The method includes: providing a base, active regions arranged at intervals along a first direction being arranged in the base; forming, on the base, bit line structures arranged at intervals; forming a contact structure between two adjacent ones of the bit line structures; forming a barrier structure on the contact structure, the barrier structures being arranged in correspondence with and connected to the bit line structure, and a first recess being formed between any adjacent barrier structures; and forming a conductive structure in the first recess, the conductive structure including a protective layer and a conductive portion, and the protective layer wrapping a sidewall and a bottom wall of the conductive portion.

Abstract: A memory device including a gain-cell memory cell capable of storing a large amount of data per unit area is provided. A peripheral circuit of the memory device is formed using a transistor formed on a semiconductor substrate, and a memory cell of the memory device is formed using a thin film transistor. A plurality of layers including thin film transistors where memory cells are formed are stacked above the semiconductor substrate, whereby the amount of data that can be stored per unit area can be increased. When an OS transistor with extremely low off-state current is used as the thin film transistor, the capacitance of a capacitor that accumulates charge can be reduced. In other words, the area of the memory cell can be reduced.

Abstract: A three-dimensional (3D) semiconductor memory device including: stack structures spaced apart from each other on a semiconductor substrate, wherein each of the stack structures includes interlayer insulating layers and semiconductor patterns alternately stacked on the semiconductor substrate; conductive patterns provided between the interlayer insulating layers vertically adjacent to each other and connected to the semiconductor patterns; and a protective structure covering a top surface of the semiconductor substrate between the stack structures, wherein a top surface of the protective structure is located between a top surface and a bottom surface of a lowermost interlayer insulating layer of the interlayer insulating layers.

Abstract: A memory device may include at least one multinary memory cell. Each multinary memory cell includes a parallel connection of N sub-bit units. N is an integer greater than 1. Each of the N sub-bit units includes a series connection of a respective transistor and a respective capacitor. A first sub-bit unit includes a first capacitor having a capacitance of C, and each i-th sub-unit includes an i-th capacitor having a capacitance of about 2i-1×C. A multinary bit having 2N values may be stored. A device network including multiple multinary logic units is also provided. Each of multiple multinary logic unit includes a parallel connection of N sub-bit units. Each sub-bit unit includes a series connection of a respective transistor and a respective capacitor having capacitance ratios of powers of 2.

Abstract: A device including a first transistor, having a gate region partially penetrating into a gallium nitride layer, and a second transistor located inside of the gate region of the first transistor.

Abstract: The present disclosure provides a method for manufacturing a semiconductor structure. The method includes: forming a bit line over a substrate; forming a first spacer layer over and conformal to the bit line; forming a sacrificial layer over and conformal to the first spacer layer; forming a second spacer layer over and conformal to the sacrificial layer; forming a mask layer covering a lower portion of the second spacer layer; removing an upper portion of the second spacer layer; removing the sacrificial layer; and forming a third spacer layer over the first spacer layer and the second spacer layer, thereby forming a first air gap surrounded by the lower portion of the second spacer layer.

Abstract: A semiconductor device and a method of fabricating the same are provided. According to the present invention, a semiconductor device comprises an active region formed in a substrate, and including flat surfaces and hole-shaped recess portions; upper-level plugs disposed over the flat surfaces; a spacer disposed between the upper-level plugs and providing a trench exposing the hole-shaped recess portions; a lower-level plug filling the hole-shaped recess portions; and a buried conductive line disposed over the lower-level plug and partially filling the trench.

Abstract: The present disclosure provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a base, the base including a substrate and a first heat dissipation structure located in the substrate, heat conductivity of the first heat dissipation structure being higher than that of the substrate, the substrate including an upper surface and a lower surface opposite to each other, and a surface of the first heat dissipation structure being exposed on the upper surface of the substrate; a second heat dissipation structure, the second heat dissipation structure being at least located on an upper surface of the first heat dissipation structure; and a through silicon via (TSV) structure, the TSV structure penetrating through an entire thickness of the second heat dissipation structure and extending into the base, the second heat dissipation structure surrounding the TSV structure, and the first heat dissipation structure surrounding the TSV structure.

Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a gate electrode arranged over a substrate. A gate dielectric layer is arranged over the gate electrode, and an active structure is arranged over the gate dielectric layer. A source contact and a drain contact are arranged over the active structure. The active structure includes a stack of cocktail layers alternating with first active layers. The cocktail layers include a mixture of a first material and a second material. The first active layers include a third material that is different than the first and second materials. The bottommost layer of the active structure is one of the cocktail layers.

Abstract: Provided is a patterning method including following steps. A doped polysilicon layer, a core layer, and an undoped polysilicon layer are sequentially formed on a target layer. The undoped polysilicon layer is patterned to form a polysilicon pattern. A first etching process is performed by using the polysilicon pattern as a mask to remove a portion of the core layer to form a core pattern. A second etching process is performed to remove the polysilicon pattern. An atomic layer deposition (ALD) process is performed to form a spacer material on the core pattern and the doped polysilicon layer. A portion of the spacer material is removed to form a spacer on a sidewall of the core pattern. A portion of the core pattern and an underlying doped polysilicon are removed.

Abstract: A semiconductor structure and the fabrication method thereof are provided. The semiconductor structure includes: a substrate including a first doped region and a second doped region; a first selection transistor and a second selection transistor located in the substrate; a conductive layer located between the first doped region and the second doped region; a resistive dielectric layer located on sidewalls of the conductive layer, where the conductive layer, the first doped region, and a portion of the resistive dielectric layer facing the first doped region constitute a first variable resistor, and the conductive layer, the second doped region, and a portion of the resistive dielectric layer facing the second doped region constitute a second variable resistor; and an isolation dielectric layer located between the conductive layer and the substrate. The semiconductor structure improves the storage density of resistive random access memory (RRAM).

Abstract: A semiconductor structure and a method for manufacturing same. The semiconductor structure includes: a semiconductor base, including a logical device region and a memory region; a bit line located in the memory region and an electrical contact layer located in the logical device region, which are disposed in a same layer; a first semiconductor channel located on the bit line and a second semiconductor channel located on the electrical contact layer, which are disposed in a same layer; a word line and a gate disposed in a same layer; a capacitor structure, in contact with a second doped region of the first semiconductor channel; an electrical connection structure, in contact with the fourth doped region of the second semiconductor channel; and a dielectric layer, located between the bit line and the word line, and on a side of the word line away from the semiconductor base.

Abstract: A device includes a substrate. A first nanostructure is over the substrate, and includes a semiconductor having a first resistance. A second nanostructure is over the substrate, is offset laterally from the first nanostructure, is at about the same height above the substrate as the first nanostructure, and includes a conductor having a second resistance lower than the first resistance. A first gate structure is over and wrapped around the first nanostructure, and a second gate structure is over and wrapped around the second nanostructure.

Abstract: [Problem] To provide a semiconductor device suitable for miniaturization. To provide a highly reliable semiconductor device. To provide a semiconductor device with improved operating speed. [Solving Means] A semiconductor device including a memory cell including first to cth (c is a natural number of 2 or more) sub memory cells, wherein: the jth sub memory cell includes a first transistor, a second transistor, and a capacitor; a first semiconductor layer included in the first transistor and a second semiconductor layer included in the second transistor include an oxide semiconductor; one of terminals of the capacitor is electrically connected to a gate electrode included in the second transistor; the gate electrode included in the second transistor is electrically connected to one of a source electrode and a drain electrode which are included in the first transistor; and when j?2, the jth sub memory cell is arranged over the j?1th sub memory cell.

Abstract: A semiconductor device includes a substrate including a cell area having a first active region and a peripheral circuit area having a second active region, a direct contact contacting the first active region in the cell area, a bit line structure disposed on the direct contact, a capacitor structure electrically connected to the first active region, a gate structure disposed on the second active region in the peripheral circuit area, lower wiring layers disposed adjacent to the gate structure and electrically connected to the second active region, upper wiring layers disposed on the lower wiring layers, a wiring insulating layer disposed between the lower wiring layers and the upper wiring layers, and upper contact plugs connected to at least one of the lower wiring layers and the upper wiring layers and extending through the wiring insulating layer.

Abstract: Provided are a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes a substrate having a capacitor region and a periphery region and a capacitor. A transistor is disposed in the substrate in the capacitor region, and a conductive device is disposed in the substrate in the periphery region. The capacitor is disposed on the substrate in the capacitor region and electrically connected to the transistor, wherein an upper electrode layer of the capacitor does not extend into the periphery region.

Abstract: Disclosed are an active region, an active region array and a formation method thereof. The active region is formed in a substrate. The active region is provided with a wordline structure. The wordline structure penetrates the active region in a first direction and divides the active region into a source region and a drain region. The source region and the drain region are arranged in a second direction, and a size of the drain region in a third direction is greater than that of the source region in the third direction. An angle between the first direction and the second direction is an acute angle, and the third direction is perpendicular to the second direction.

Abstract: A semiconductor device and a manufacturing method thereof are provided. The method includes forming an isolation structure in a substrate to define an isolating region and forming a capacitor structure on an upper surface of the isolation structure and comprising a first semiconductor structure and a second semiconductor structure separated by an insulator pattern. The first semiconductor structure and the second semiconductor structure are formed with upper surfaces aligned with one another.

Abstract: Embodiments of the disclosure generally provide methods of forming a hybrid film stack that may be used as a capacitor layer or a gate insulating layer with a high dielectric constant as well as film qualities for display applications. In one embodiment, a thin film transistor structure include gate, source and drain electrodes formed on a substrate, and an insulating layer formed on a substrate, wherein the insulating layer is a hybrid film stack having a dielectric layer comprising a zirconium containing material disposed on an interface layer formed above or below the gate, source and drain electrodes.

Abstract: A method of forming a capacitor structure includes following operations. A first electrode is formed. A hafnium-zirconium oxide (HZO) layer is formed over the first electrode under a first temperature. An interface dielectric layer is formed over the HZO layer under a second temperature greater than the first temperature. A second electrode is formed over the interface dielectric layer. The HZO layer and the interface dielectric layer are annealed.

Abstract: In an embodiment, a semiconductor device is provided that includes a lateral transistor device having a source, a drain and a gate, and a monolithically integrated capacitor coupled between the gate and the drain.

Abstract: Embodiments herein relate to vertical contacts for semiconductor devices. For instance, a memory device having vertical contacts can comprise a substrate including circuitry components, a vertical stack of layers formed from repeating iterations of a group of layers disposed on the substrate, the group of layers comprising a first dielectric material layer, a semiconductor material layer, and a second dielectric material layer including horizontal conductive lines formed along a horizontal plane in the second dielectric material layer, and vertical contacts coupled to the horizontal conductive lines, the vertical contacts extending along a vertical plane within the vertical stack of layers to directly electrically couple the horizontal conductive lines to the circuitry components.

Abstract: Provided herein may be a semiconductor device and a method of manufacturing the semiconductor device. The semiconductor device may include a dummy stacked body including a plurality of first material layers and second material layers alternately stacked in a contact area, at least one contact plug formed to vertically pass through a portion or an entirety of the dummy stacked body, and a capacitor comprising a first electrode body and a second electrode body, the first and second electrode bodies formed around the at least one contact plug and vertically passed through a portion or an entirety of the dummy stacked body.

Abstract: In an embodiment a memory cell includes a first doped well of a first conductivity type in contact with a second doped well of a second conductivity type, the second conductivity type being opposite to the first conductivity type, a third doped well of the second conductivity type in contact with a fourth doped well of the first conductivity type, a first wall in contact with the second and fourth wells, the first wall including a conductive or semiconductor core and an insulating sheath, a stack of layers including a first insulating layer, a first semiconductor layer, a second insulating layer and a second semiconductor layer at least partially covering the second and fourth wells and a third semiconductor layer located below the second and fourth wells and the first wall.

Abstract: Embodiments provide a wordline driver circuit and a memory. The wordline driver circuit at least includes a first type of wordline drivers and a second type of wordline drivers, wherein each of the wordline drivers includes a PMOS transistor and an NMOS transistor. A first type of PMOS transistors in the first type of wordline drivers and a second type of PMOS transistors in the second type of wordline drivers are configured to receive different first control signals. The first type of PMOS transistors and the second type of PMOS transistors are arranged side by side, a part of the NMOS transistors in the first type of wordline drivers and the second type of wordline drivers are positioned on a side of the first type of PMOS transistors and the second type of PMOS transistors.

Abstract: A field effect transistor includes a channel made of germanium and a source/drain portion. The source/drain portion includes a germanium layer, an interfacial epitaxial layer over the germanium layer, a semiconductor layer over the interfacial epitaxial layer, and a conducting layer over the semiconductor layer. The interfacial epitaxial layer contains germanium and an element from the semiconductor layer and has a thickness in a range from about 1 nm to about 3 nm.

Abstract: Some embodiments include an integrated assembly. The integrated assembly has a first transistor with a horizontally-extending channel region between a first source/drain region and a second source/drain region; has a second transistor with a vertically-extending channel region between a third source/drain region and a fourth source/drain region; and has a capacitor between the first and second transistors. The capacitor has a first electrode, a second electrode, and an insulative material between the first and second electrodes. The first electrode is electrically connected with the first source/drain region, and the second electrode is electrically connected with the third source/drain region. A digit line is electrically connected with the second source/drain region. A conductive structure is electrically connected with the fourth source/drain region.

Abstract: The present disclosure provides a semiconductor structure having an air gap surrounding a lower portion of a bit line, and a manufacturing method of the semiconductor structure. The semiconductor structure includes a substrate; a bit line structure disposed over the substrate; a first dielectric layer, surrounding the bit line structure; a second dielectric layer, surrounding a lower portion of the first dielectric layer, wherein the second dielectric layer is separated from the first dielectric layer by a first air gap; and a third dielectric layer, surrounding an upper portion of the first dielectric layer and sealing the first air gap.

Abstract: A thin film structure including a dielectric material layer and an electronic device to which the thin film structure is applied are provided. The dielectric material layer includes a compound expressed by ABO3, wherein at least one of A and B in ABO3 is substituted and doped with another atom having a larger atom radius, and ABO3 becomes A1-xA?xB1-yB?yO3 (where x>=0, y>=0, at least one of x and y?0, a dopant A? has an atom radius greater than A and/or a dopant B? has an atom radius greater than B) through substitution and doping. A dielectric material property of the dielectric material layer varies according to a type of a substituted and doped dopant and a substitution doping concentration.

Abstract: The present disclosure relates to a method of forming a device. The method includes depositing a first layer of getter material on a substrate. A first electrode is formed in a first conductive layer deposited on the first layer of getter material. An insulator element is formed in a piezoelectric layer deposited on the first electrode. A second electrode is formed in a second conductive layer deposited on the insulator element. A first input-output electrode is formed to be conductively connected to the first layer of getter material and a second input-output electrode is formed to be conductively connected to the second electrode.

Abstract: Apparatuses, devices and methods for fabricating one or more vertically integrated single bit capacitor-based memory cells is disclosed. A single bit capacitor-based memory cell can include a vertically oriented transistor and a vertically oriented capacitor that is vertically integrated with the transistor, so as to form a memory cell. Aspects of the disclosure include process steps for forming the transistor and the capacitor, including a first metal part of a capacitor, a second metal part of a capacitor and an electrically insulating layer disposed between the two. The transistor and the capacitor also include an electrical contact between them and a layer that insulates the transistor from the base layer or the underlying substrate.

Abstract: A method for manufacturing a semiconductor structure includes: providing a substrate, the substrate includes a plurality of first trenches and a first pattern having an array of lines each formed between adjacent two of the plurality of first trenches; forming a first dielectric layer to cover at least the sidewalls of each of the lines in the array of the first pattern; and each of the lines in the array of the first pattern is segmented to form elements of a second pattern.

Abstract: A device includes a lower semiconductor substrate, a lower gate structure on the lower semiconductor substrate, the lower gate structure comprises a lower gate electrode, a lower interlayer insulating film on the lower semiconductor substrate, an upper semiconductor substrate on the lower interlayer insulating film, an upper gate structure on the upper semiconductor substrate, and an upper interlayer insulating film on the lower interlayer insulating film, the upper interlayer insulating film covers sidewalls of the upper semiconductor substrate The upper gate structure comprises an upper gate electrode extending in a first direction and gate spacers along sidewalls of the upper gate electrode. The upper gate electrode comprises long sidewalls extending in the first direction and short sidewalls in a second direction The gate spacers are on the long sidewalls of the upper gate electrode and are not disposed on the short sidewalls of the upper gate electrode.

Abstract: A semiconductor structure includes vertical stacks located over a substrate, wherein each of the vertical stacks includes from bottom to top, a bottom electrode, a dielectric pillar structure including a lateral opening therethrough, and a top electrode; layer stacks located over the vertical stacks, wherein each of the layer stacks includes an active layer and an outer gate dielectric and laterally surrounds a respective one of the vertical stacks; inner gate electrodes passing through a respective subset of the lateral openings in a respective row of vertical stacks that are arranged along a first horizontal direction; and outer gate electrodes laterally extending along the first horizontal direction and laterally surrounding a respective row of layer stacks.