Abstract: A semiconductor device according to an embodiment includes a memory cell array and a drive circuit section. The memory cell array includes memory cells. The drive circuit section adapted to control a driving voltage to be supplied to the memory cells. The memory cells each including a first variable resistance film and a second variable resistance film connected in series to the first variable resistance film. The driving voltage of the second variable resistance film is different from the driving voltage of the first variable resistance film.

Abstract: A semiconductor device including a transistor on a main surface side of a semiconductor substrate; and a resistance change element on a back-surface side of the semiconductor substrate, wherein the transistor includes a low-resistance section in the semiconductor substrate, the low-resistance section extending to the back surface of the semiconductor substrate, an insulating film is provided in contact with a back surface of the low-resistance section, the insulating film has an opening facing the low-resistance section, and the resistance change element is connected to the low-resistance section through the opening.

Abstract: The present disclosure provides a method of forming an aluminum-containing layer. The method includes providing a substrate in an atomic layer deposition (ALD) process chamber; and performing a cycle of a first step and a second step one or more times in the ALD process chamber to provide a composite layer, wherein performing the first step of the cycle includes: applying a first precursor that includes a non-aluminum-based component having a first molecular weight onto the substrate; and applying a second precursor that that includes an aluminum-based component having a second molecular weight onto the substrate, wherein the second molecular weight is lower than the first molecular weight; and wherein performing the second step of the cycle includes applying the first precursor onto the substrate.

Abstract: Embodiments of the invention are directed to methods and resulting structures for forming a storage element using phase change memory (PCM). In a non-limiting embodiment of the invention, a PCM layer is formed over a surface of a bottom electrode. A top electrode is formed over the PCM layer using a tone inversion process that includes a sacrificial layer. A PCM pillar is then formed by patterning the PCM layer to expose a surface of the bottom electrode. The tone inversion process enables a sub-50 nm PCM pillar diameter.

Abstract: Memory devices having a plurality of memory cells, with each memory cell including a phase change material having a laterally constricted portion thereof. The laterally constricted portions of adjacent memory cells are vertically offset and positioned on opposite sides of the memory device. Also disclosed are memory devices having a plurality of memory cells, with each memory cell including first and second electrodes having different widths. Adjacent memory cells have the first and second electrodes offset on vertically opposing sides of the memory device. Methods of forming the memory devices are also disclosed.

Abstract: A memory cell pillar of a memory device includes a heating electrode having a base portion (leg) and a fin portion (ascender), and a selection device between a first conductive line and the heating electrode. A side surface of the selection device and a side surface of the fin portion extend along a first straight line. A method of fabricating a memory device includes forming a plurality of first insulating walls through a stack structure including a preliminary selection device layer and a preliminary electrode layer, forming a plurality of self-aligned preliminary heating electrode layers, forming a plurality of second insulating walls each between two of the plurality of first insulating walls, and forming a plurality of third insulating walls in a plurality of holes extending along a direction intersecting the plurality of first insulating walls.

Abstract: Memristive devices based on tunable Schottky barrier are provided. In one aspect, a method of forming a memristive device includes: forming a semiconductor layer on a bottom metal electrode, wherein the semiconductor layer has workfunction-modifying molecules embedded therein; and forming a top metal electrode on the semiconductor layer, wherein the top metal electrode forms a Schottky junction with the semiconductor layer, and wherein the workfunction-modifying molecules are configured to alter a workfunction of the top metal electrode. A memristive device and a method for operating a memristive device are also provided.

Abstract: A memory device, containing a first electrode, a second electrode and an oxide layer arranged between the first electrode and the second electrode, is produced. The oxide layer has a first zone and a second zone, with the first zone surrounding or being located on either side of the second zone, with the minimum distance d2 separating the two electrodes on the second zone of the oxide layer being less than the minimum distance d1 separating the two electrodes on the first zone of the oxide layer.

Abstract: There is provided a three-terminal atomic switching device and a method of manufacturing the same, which belongs to the field of microelectronics manufacturing and memory technology. The three-terminal atomic switching device includes: a stack structure including a source terminal and a drain terminal; a vertical trench formed by etching the stack structure; an M8XY6 channel layer formed on an inner wall and a bottom of the vertical trench; and a control terminal formed on a surface of the M8XY6 channel layer, wherein the control terminal fills the vertical trench. The source terminal resistance and the drain terminal resistance are controlled by the control terminal.

Abstract: Methods for improving the operation of a memory array by arranging a Metal-Insulator-Metal (MIM) structure between a word line and an adjustable resistance bit line structure are described. The MIM structure may correspond with a metal/ReRAM material/metal structure that is arranged between the word line and an intrinsic polysilicon region of the adjustable resistance bit line structure. In one example, a word line (e.g., TiN) may be arranged adjacent to a ReRAM material (e.g., HfOx) that is adjacent to a first metal (e.g., TiN) that is adjacent to the intrinsic polysilicon region. The first metal may comprise a metal, metal-nitride, or a metal-silicide. In another example, the word line may be arranged adjacent to a ReRAM material that is adjacent to a first metal (e.g., TiN) that is adjacent to a second metal different from the first metal (e.g., tungsten) that is adjacent to the intrinsic polysilicon region.

Abstract: Methods for a resistive random access memory (RRAM) device are disclosed. A bottom electrode is formed over a substrate. A top electrode is formed over the bottom electrode. A resistive switching layer is formed interposed between the top electrode and the bottom electrode. The resistive switching is made of a composite of a metal, Si, and O, formed by oxidation of a metal silicide of a metal, co-deposition of the metal and silicon in oxygen ambiance, co-deposition of a metal oxide of the metal and silicon, or co-deposition of a metal oxide of the metal and silicon oxide. There may be an additional tunnel barrier layer between the top electrode and the bottom electrode. The top electrode and the bottom electrode may comprise multiple sub-layers.

Abstract: The disclosure relates to a memory cell formed in a wafer comprising a semiconductor substrate covered with a first insulating layer, the insulating layer being covered with an active layer made of a semiconductor, the memory cell comprising a selection transistor having a control gate and a first conduction terminal connected to a variable-resistance element, the gate being formed on the active layer and having a lateral flank covered with a second insulating layer, the variable-resistance element being formed by a layer of variable-resistance material, deposited on a lateral flank of the active layer in a first trench formed through the active layer along the lateral flank of the gate, a trench conductor being formed in the first trench against a lateral flank of the layer of variable-resistance material.

Abstract: The invention is notably directed to a resistive memory device comprising a control unit for controlling the resistive memory device and a plurality of memory cells. The plurality of memory cells includes a first terminal, a second terminal and a phase change segment comprising a phase-change material for storing information in a plurality of resistance states. The phase change segment is arranged between the first terminal and the second terminal. The phase change material consists of antimony. Furthermore, at least one of the dimensions of the phase change segment is smaller than 15 nanometers. Additional implementations of the resistive memory device include a related method, a related control unit, a related memory cell and a related computer program product.

Abstract: According to one embodiment, a superlattice memory comprises substrate, a first electrode provided on the substrate, a second electrode arranged in opposition to the first electrode, and a superlattice structure part provided between the first electrode and the second electrode, which includes first chalcogen compound layers, second chalcogen compound layers the composition of which is different from the first chalcogen compound, and contains Ge, and third chalcogen compound layers in which one of N, B, C, O, and F is added to the first chalcogen compound, stacked one on another.

Abstract: A magnetic cell and method for providing the magnetic cell are described. A magnetic cell resides on a substrate and is usable in a magnetic device. The magnetic cell includes a magnetic junction and an ovonic threshold switch (OTS) layer. The magnetic junction has a plurality of sidewalls. The magnetic junction includes a free layer switchable between a plurality of stable magnetic states when a write current is passed through the magnetic junction, a nonmagnetic spacer layer and a pinned layer. The nonmagnetic spacer layer is between the pinned layer and the free layer. The OTS layer covers at least a portion of the plurality of sidewalls.

Abstract: Implementations of the disclosed technology provide an electronic device including a semiconductor memory and a method for fabricating the same, in which processes are easily performed and the characteristics of a variable resistance element are improved. An electronic device according to an implementation of the disclosed technology is an electronic device including a semiconductor memory, wherein the semiconductor memory includes: a substrate; a conductive contact plug formed over the first conductive layer and including a stack of a conductive low-resistance structure and a conductive planarizing layer; and a variable resistance pattern coupled to the contact plug, wherein the low-resistance structure comprises a diffusion barrier layer, a low-resistance material layer and a gap-fill layer.

Abstract: A method for manufacturing a memory device, the method includes forming an opening in a dielectric layer; overfilling the opening with a bottom electrode layer; removing a first portion of the bottom electrode layer outside the opening, while leaving a second portion of the bottom electrode layer in the opening to form a bottom electrode; and forming a stack over the bottom electrode, the stack comprising a resistance switching element in contact with the bottom electrode and a top electrode over the resistance switching element.

Abstract: A storage device includes a first conductive layer, a second conductive layer, a first variable resistance layer, and a control circuit. The control circuit is configured to apply a first voltage between the first conductive layer and the second conductive layer for a first time and apply a second voltage less than the first voltage for a second time longer than the first time after the application of the first voltage when the first variable resistance layer is in a first high resistance state. The control circuit is further configured to apply the first voltage between the first conductive layer and the second conductive layer and apply a third voltage less than the second voltage between the first conductive layer and the second conductive layer after the application of the first voltage when the first variable resistance layer is in a first low resistance state.

Abstract: Error correction methods for arrays of resistive change elements are disclosed. An array of resistive change elements is organized into a plurality of subsections. Each subsection includes at least one flag bit and a plurality of data bits. At the start of a write operation, all bits in a subsection are initialized. If any data bits fail to initialize, the pattern of errors is compared to the input data pattern. The flag cells are then activated to indicate the appropriate encoding pattern to apply to the input data to match the errors. The input data is then encoded according to this encoding pattern before being written to the array. A second error correction algorithm can be used to correct remaining errors. During a read operation, the encoding pattern indicated by the flag bits is used to decode the read data and retrieve the original input data.

Abstract: A phase change memory device containing a phase change memory material layer includes a vertically repeating sequence of unit layer stacks located over a substrate, a plurality of openings vertically extending through the vertically repeating sequence, a plurality of vertical bit lines located within a respective one of the plurality of openings, and vertical stacks of insulating spacers. Each of the unit layer stacks includes an insulating layer, at least one of the phase change memory material layer or a threshold switch material layer, and an electrically conductive word line layer. Each of the insulating spacers laterally surrounds a respective one of the plurality of vertical bit lines, and contacts a sidewall of a respective one of the electrically conductive word line layers.

Abstract: A mechanism is provided for a thermally assisted magnetoresistive random access memory device (TAS-MRAM). A storage layer has an anisotropic axis, in which the storage layer is configured to store a state in off axis positions and on axis positions. The off axis positions are not aligned with the anisotropic axis. A tunnel barrier is disposed on top of the storage layer. A ferromagnetic sense layer is disposed on top of the tunnel barrier.

Abstract: A resistance change element includes first and second electrodes spaced apart from each other, a metal material layer adjacent to the first electrode, an oxide layer adjacent to each of the metal material layer and the first electrode, and a resistance change layer disposed continuously between the second and first electrodes and between the second electrode and the oxide layer. The resistance change layer is made of a metal oxide. The metal material layer is made of a metal or a metal compound. The oxide layer is made of an oxide of the material forming the metal material layer. The first electrode is made of ruthenium, ruthenium oxide, iridium, iridium oxide, platinum, gold, or copper. A free energy of oxide formation of the oxide forming the oxide layer is higher than a free energy of oxide formation of the oxide forming the resistance change layer.

Abstract: Methods and structures useful for magnetoresistive random-access memory (MRAM) are disclosed. The MRAM device has a magnetic tunnel junction stack having a significantly improved performance of the free layer in the magnetic tunnel junction structure. The MRAM device also utilizes a three-terminal structure, thereby allowing efficient writing of the bit without a concomitant increase in read disturb.

Abstract: A phase change memory device includes a vertical stack of multiple two-dimensional arrays of pillar structures. Each of the multiple two-dimensional arrays of pillar structures is located within a respective array level. Each two-dimensional array among the multiple two-dimensional arrays of pillar structures is contacted by a respective overlying one-dimensional array of conductive rails laterally extending along a first horizontal direction and a respective underlying one-dimensional array of conductive rails laterally extending along a second horizontal direction different from the first direction. Each pillar structure within the multiple two-dimensional arrays of pillar structures includes a phase change memory element and a selector element in a series connection with the phase change memory element. A first set of dielectric isolation structures having a first homogeneous composition vertically extends continuously through two vertically neighboring array levels.

Abstract: An integrated circuit or semiconductor structure of a resistive random access memory (RRAM) cell is provided. The RRAM cell includes a bottom electrode and a data storage region having a variable resistance arranged over the bottom electrode. Further, the RRAM cell includes a diffusion barrier layer arranged over the data storage region, an ion reservoir region arranged over the diffusion barrier layer, and a top electrode arranged over the ion reservoir region. A method for manufacture the integrated circuit or semiconductor structure of the RRAM cell is also provided.

Abstract: Resistive processing unit including: a plurality of transistors each having a lithium-doped region, wherein the plurality of transistors are arranged in an array to provide resistance; at least one first transmission line electrically connected to a source region of each transistor in at least one column of the array; at least one second transmission line electrically connected to a drain region of each transistor in at least one row of the array; and at least one third transmission line electrically connected to a gate region of the plurality of transistors in at least one row of the array; wherein application of an electrical voltage to the at least one first transmission line, the at least one second transmission line or the at least one third transmission line mobilizes lithium ions in the lithium region, thereby affecting a channel resistance of at least one transistor in the plurality of transistors.

Abstract: A semiconductor device including a semiconductor substrate with a first surface and a second surface facing each other, the semiconductor substrate having an element region in which a transistor is provided on the first surface, and a separation region in which an element separating layer surrounding the element region is provided; a contact plug extending from the first surface to the second surface, in the element region of the semiconductor substrate; and an insulating film covering a periphery of the contact plug.

Abstract: Embodiments disclosed herein may include depositing a storage component material over and/or in a trench in a dielectric material, including depositing the storage component material on approximately vertical walls of the trench and a bottom of the trench. Embodiments may also include etching the storage component material so that at least a portion of the storage component material remains on the approximately vertical walls and the bottom of the trench, wherein the trench is contacting an electrode and a selector such that storage component material on the bottom of the trench contacts the electrode.

Abstract: A method of fabricating a memristive structure for symmetric modulation between resistance states is presented. The method includes forming a first electrode and a second electrode over an insulating substrate, forming an anode contacting the first and second electrodes, forming an ionic conductor over the anode, forming a cathode of the same material as the anode over the ionic conductor, forming a third electrode over the cathode, and enabling bidirectional transport of ions between the anode and cathode resulting in a resistance adjustment of the memristive structure, the anode and the cathode being formed from metastable mixed conducting materials with ion concentration dependent conductivity.

Abstract: A resistance switching device is disclosed and is fabricated to create a memristor device. The memristor device includes a substrate and a platinum bottom electrode formed on the substrate. A tantalum top electrode is formed opposite the bottom electrode, and an electrical insulator layer is disposed between the top electrode and the bottom electrode, wherein the electrical insulator layer comprises hafnium oxide. In an alternate implementation, a titanium nitride layer is deposited on the substrate, which then allows a reduced thickness platinum bottom electrode layer to be deposited on the titanium nitride layer.

Abstract: A conductive-bridging random access memory and a method for fabricating a conductive-bridging random access memory are provided. The conductive-bridging random access memory includes a bottom electrode layer on a semiconductor substrate, an electrical resistance switching layer on the bottom electrode layer, an electron-capturing layer on the electrical resistance switching layer, a barrier layer on the electron-capturing layer, an ion source layer on the barrier layer, and a top electrode layer on the ion source layer. The electron-capturing layer includes electron-capturing material, and the electron affinity of the electron-capturing material is at least 60 KJ/mole.

Abstract: An analog neuromorphic circuit is disclosed having resistive memories that provide a resistance to each corresponding input voltage signal. Input voltages are applied to the analog neuromorphic circuit. Each input voltage represents a vector value that is a non-binary value included in a vector that is incorporated into a dot-product operation with weighted matrix values included in a weighted matrix. A controller pairs each resistive memory with another resistive memory. The controller converts each pair of resistance values to a single non-binary value. Each single non-binary value is mapped to a weighted matrix value included in the weighted matrix that is incorporated into the dot-product operation with the vector values included in the vector. The controller generates dot-product operation values from the dot-product operation with the vector and the weighted matrix where each dot-product operation is a non-binary value.

Abstract: A resistive random access memory (RRAM) cell includes a substrate, a transistor having a gate on the substrate and a source/drain region in the substrate, a first inter-layer dielectric layer covering the transistor, a contact plug disposed in the first inter-layer dielectric layer and landing on the source/drain region, a resistive material layer conformally covering a protruding upper end portion of the contact plug, and a top electrode on the resistive material layer.

Abstract: An optical recording medium includes a reflective layer, a first dielectric layer, a phase-change recording layer, and a second dielectric layer. The phase-change recording layer has an average composition represented by SbxInyMz, in which M is at least one of Mo, Ge, Mn, and Al, and x, y, and z are values in the ranges 0.70?x?0.92, 0.05?y?0.20, and 0.03?z?0.10, respectively, provided that x+y+z=1, the first dielectric layer includes a zirconium oxide-containing composite material or tantalum oxide, and the second dielectric layer includes a chromium oxide-containing composite material or silicon nitride.

Abstract: A semiconductor device includes a semiconductor substrate, a gate structure and at least one CMP resistant structure. The gate structure is over the semiconductor substrate. The CMP resistant structure is embedded in a top surface of the gate structure. The CMP resistant structure has a CMP resistance property different from a CMP resistance property of the gate structure.

Abstract: Memory cell architectures and methods of forming the same are provided. An example memory cell can include a switch element and a memory element formed in series with the switch element. A smallest lateral dimension of the switch element is different than a smallest lateral dimension of the memory element.

Abstract: Described herein are multi-deck memory devices with an inverted deck. For example, in one embodiment a memory device includes a first deck of memory cells including layers of material, including a layer of storage material and a layer of selector material, and a second deck of memory cells over the first deck of memory cells, the second deck comprising layers of material in an order opposite relative to the first deck. In one such embodiment, conductive bitlines located between the first and second decks are common to both decks. Inverting the second deck can enable operating the decks symmetrically despite accessing the decks with opposite polarity voltages.

Abstract: A method of fabricating a resistive memory array includes forming a plurality of insulators and a conductive structure on a first substrate, performing a resistor-forming process to transform the insulators into a plurality of resistors, polishing the conductive structure to expose a plurality of contact points respectively electrically connected to the resistors, providing a second substrate having a plurality of transistors and a plurality of interconnect pads, bonding respectively the interconnect pads and the contact points, and removing the first substrate from the resistors and the conductive structure.

Abstract: A manufacture includes a first electrode having an upper surface and a side surface, a resistance variable film over the first electrode, and a second electrode over the resistance variable film. The resistance variable film extends along the upper surface and the side surface of the first electrode. The second electrode has a side surface. A portion of the side surface of the first electrode and a portion of the side surface of the second electrode sandwich a portion of the resistance variable film.

Abstract: A memory cell and method including a first electrode formed through a first opening in a first dielectric layer, a resistive layer formed on the first electrode, a spacing layer formed on the resistive layer, a second electrode formed on the resistive layer, and a second dielectric layer formed on the second electrode, the second dielectric layer including a second opening. The first dielectric layer formed on a substrate including a first metal layer. The first electrode and the resistive layer collectively include a first lip region that extends a first distance beyond the first opening. The second electrode and the second dielectric layer collectively include a second lip region that extends a second distance beyond the first opening. The spacing layer extends from the second distance to the first distance. The second electrode is coupled to a second metal layer using a via that extends through the second opening.

Abstract: Systems and methods for providing a Barrier Modulated Cell (BMC) structure with reduced shifting in stored memory cell resistance levels over time are described. The BMC structure may comprise a reversible resistance-switching memory element within a memory array comprising a first conductive metal oxide (e.g., titanium oxide) in series with an alternating stack of one or more layers of an amorphous low bandgap material (e.g., germanium) with one or more layers of a second conductive metal oxide (e.g., aluminum oxide). The BMC structure may include a barrier layer comprising a first conductive metal oxide, such as titanium oxide or strontium titanate, in series with a germanium stack that includes a layer of amorphous germanium or amorphous silicon germanium paired with a second conductive metal oxide. The second conductive metal oxide (e.g., aluminum oxide) may be different from the first conductive metal oxide (e.g., titanium oxide).

Abstract: A low-leakage resistive random access memory cell includes a complementary pair of bit lines and a switch node. A first ReRAM device is connected to a first one of the bit lines. A p-channel transistor has a source connected to the ReRAM device, a drain connected to the switch node, and a gate connected to a bias potential. A second ReRAM device is connected to a second one of the bit lines. An n-channel transistor has a source connected to the ReRAM device a drain connected to the switch node, and a gate connected to a bias potential.

Abstract: Methods are provided for selectively depositing Al and N containing material on a first conductive surface of a substrate relative to a second, dielectric surface of the same substrate. In some aspects, methods of forming an Al and N containing protective layer or etch stop layer for use in integrated circuit fabrication are provided.

Abstract: A storage device includes a plurality of flash memory cells, a controller which writes data into a memory cell which is used as the cell which stores data therein in the plurality of flash memory cells and performs resetting of a threshold voltage of a timer cell used for decision of a threshold voltage of the memory cell in the plurality of flash memory cells and a level decision unit which estimates a state of a second threshold voltage which is the current threshold voltage of the memory cell on the basis of a first threshold voltage which is the current threshold voltage of the timer cell.

Abstract: A switching device includes a first electrode and a second electrode, and an electrolyte layer disposed between the first electrode and the second electrode. The electrolyte layer includes a first layer charged with negative charges and a second layer charged with positive charges.

Abstract: A resistive memory device includes a first electrode, a memristor coupled in electrical series with the first electrode, a second electrode coupled in electrical series with the memristor, a selector coupled in electrical series with the second electrode, and a third electrode coupled in electrical series with the selector. The memristor includes oxygen or nitrogen elements. The selector includes a composite dielectric material of a first dielectric material, a second dielectric material that is different from the first dielectric material, and a dopant material including a cation having a migration rate faster than the oxygen or the nitrogen elements of the memristor. The first dielectric material and the second dielectric material are present in a ratio ranging from 1:9 to 9:1, and a concentration of the dopant material in the composite dielectric material ranges from about 1% up to 50%.

Abstract: A method includes depositing a first dielectric layer in an opening, the first dielectric layer comprising a semiconductor element and a non-semiconductor element. The method further includes depositing a semiconductor layer on the first dielectric layer, the semiconductor layer comprising a first element that is the same as the semiconductor element. The method further includes introducing a second element to the semiconductor layer wherein the second element is the same as the non-semiconductor element. The method further includes applying a thermal annealing process to the semiconductor layer to change the semiconductor layer into a second dielectric layer.

Abstract: A magnetic memory device includes a magnetic memory stack including a bottom electrode and having a hard mask formed thereon. An encapsulation layer is formed over sides of the magnetic memory stack and has a thickness adjacent to the sides formed on the bottom electrode. A dielectric material is formed over the encapsulation layer and is removed from over the hard mask and gapped apart from the encapsulation layer on the sides of the magnetic memory stack to form trenches between the dielectric material and the encapsulation layer at the sides of the magnetic memory stack. A top electrode is formed over the hard mask and in the trenches such that the top electrode is spaced apart from the bottom electrode by at least the thickness.

Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall. A dielectric material is implanted into the film of the adhesion species to form a sidewall liner.

Abstract: A three-terminal non-volatile multi-state device based on mobile ion induced electrical resistivity change is provided. The three-terminal non-volatile multi-state memory device includes a substrate having a first electrode and a second electrode therein. The three-terminal non-volatile multi-state memory device further includes a mobile ion including resistor layer disposed over the first electrode, the second electrode, and part of the substrate. The three-terminal non-volatile multi-state memory device also includes a third electrode formed over the mobile ion including resistor layer. The three-terminal non-volatile multi-state memory device provides multi-level states determined by an electrical resistivity the mobile ion including resistor layer which changes the electrical resistivity based on the mobile ion concentration in the material.