Abstract: Operations in fabricating a Fin FET include providing a substrate having a fin structure, where an upper portion of the fin structure has a first fin surface profile. An isolation region is formed on the substrate and in contact with the fin structure. A portion of the isolation region is recessed by an etch process to form a recessed portion and to expose the upper portion of the fin structure, where the recessed portion has a first isolation surface profile. A thermal hydrogen treatment is applied to the fin structure and the recessed portion. A gate dielectric layer is formed with a substantially uniform thickness over the fin structure, where the recessed portion is adjusted from the first isolation surface profile to a second isolation surface profile and the fin structure is adjusted from the first fin surface profile to a second fin surface profile by the thermal hydrogen treatment.

Abstract: Sacrificial memory opening fill structures are formed through an alternating stack of insulating layers and sacrificial material layers. A drain select level isolation trench extending through drain select level sacrificial material layers is formed employing a combination of a photoresist layer including a linear opening and a pair of rows of sacrificial memory opening fill structures as an etch mask. Sacrificial spacers are formed on sidewalls of the drain select level isolation trench. A drain select level isolation dielectric structure is formed in a remaining volume of the drain select level isolation trench. The sacrificial memory opening fill structures are replaced with memory stack structures. The sacrificial material layers and the sacrificial spacers are replaced with a conductive material to form electrically conductive layers and conductive connector spacers.

Abstract: A semiconductor device includes gate stacks disposed on a substrate and spaced apart from each other in a first direction, with a separation region interposed between the gate stacks; channel regions penetrating through the gate stacks and disposed within each of the gate stacks; and a guide region adjacent to the separation region, penetrating through at least a portion of the gate stack, and having a bent portion that is bent toward the separation region.

Abstract: A mesa structure is formed over a substrate. An alternating stack of insulating layers and spacer material layers having a total height of approximately double the height of the mesa structure is formed over the substrate and the mesa structure. The spacer material layers are formed as, or are replaced with, electrically conductive layers. Portions of the alternating stack are removed from above the mesa structure by a planarization process. Stepped surfaces can be concurrently formed in a first terrace region overlying the mesa structure and in a second terrace region located at an opposite side of a memory array region of the alternating stack. A pair of level shifted stepped surfaces is formed. Contacts to the alternating stack can reach down only to the lowest surface of the pair of level shifted stepped surfaces, and can be shorter than the alternating stack.

Abstract: A semiconductor memory device according to an embodiment includes a memory cell array that includes memory cells and a plurality of first conducting layers. The memory cells are arrayed in a three-dimensional manner. The first conducting layers are connected to the memory cells and are arrayed in a laminating direction. Stepped wiring portion includes a plurality of second conducting layers. The plurality of second conducting layers connect the first conducting layers and external circuits. At least one of the plurality of second conducting layers includes a contact formation area on a top surface thereof in the stepped wiring portion positioned on the first side portion side. Other ones of the plurality of second conducting layers includes a contact formation area on a top surface thereof in the stepped wiring portion positioned on the second side portion side.

Abstract: Provided is a storage apparatus provided with a plurality of storage elements having storage layers comprising a plurality of layers and electrodes, one layer among the plurality of layers being extended in a first direction and being shared by the plurality of storage elements disposed in the first direction, the electrodes being extended in a second direction that differs from the first direction and being shared by the plurality of storage elements disposed in the second direction.

Abstract: A three-dimensional non-volatile memory including a substrate, a stacked structure and a channel layer. The stacked structure is disposed on the substrate and includes first dielectric layers, gates and charge storage structures. The first dielectric layers and the gates are alternately stacked. The charge storage structures are disposed at one side of the gates. Two adjacent charge storage structures are isolated by the first dielectric layer therebetween. Each of the charge storage structures includes a first oxide layer, a nitride layer and a second oxide layer sequentially disposed at one side of each of the gates. The channel layer is disposed on a sidewall of the stacked structure adjacent to the charge storage structures.

Abstract: A non-volatile semiconductor memory device includes a memory cell array and a control circuit. A control circuit performs an erase operation providing a memory cell with a first threshold voltage level for erasing data of a memory cell, and then perform a plurality of first write operations providing a memory cell with a second threshold voltage level, the second threshold voltage level being higher than the first threshold voltage level and being positive level. When the control circuit receives a first execution instruction from outside during the first write operations, the first execution instruction being for performing first function operation except for the erase operation and the first write operations, the circuit performs the first function operation during the first write operations.

Abstract: The present disclosure provides storage elements, such as storage transistors, wherein at least one storage mechanism is provided on the basis of a ferroelectric material formed in the buried insulating layer of an SOI transistor architecture. In further illustrative embodiments, one further storage mechanism is implemented in the gate electrode structure, thereby providing increased overall information density. In some illustrative embodiments, the storage mechanism in the gate electrode structure is provided in the form of a ferroelectric material.

Abstract: A semiconductor device includes: a gate structure on a substrate; a raised source/drain region adjacent to the gate structure; a channel region under the gate structure; and a protection layer between the substrate and the raised source/drain region. The protection layer is interposed between the substrate and the raised source/drain region. An atom stacking arrangement of the protection layer is different from the substrate and the raised source/drain region.

Abstract: A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers function as gate electrodes of the memory cells.

Abstract: A method of controlling the thickness of gate oxides in an integrated CMOS process which includes performing a two-step gate oxidation process to concurrently oxidize and therefore consume at least a first portion of the cap layer of the NV gate stack to form a blocking oxide and form a gate oxide of at least one metal-oxide-semiconductor (MOS) transistor in the second region, wherein the gate oxide of the at least one MOS transistor is formed during both a first oxidation step and a second oxidation step of the gate oxidation process.

Abstract: In an example, a memory cell may have an access gate, a control gate coupled to the access gate, a first dielectric stack below an upper surface of a semiconductor, above the access gate, and between a first portion of the control gate and the semiconductor, and a second dielectric stack below the access gate and the first dielectric stack and between a second portion of the control gate and the semiconductor. Each of the first and second dielectric stacks may store a charge.

Abstract: A semiconductor device having a nonvolatile memory cell arranged in a p-type well (active region) PW1 in a memory cell region 1A in a semiconductor substrate 1 and an MISFET arranged in a p-type well PW2 (active region) or an n-type well (active region) in a peripheral circuit region 2A is constructed as follows. The surface of an element isolation region STI1 surrounding the p-type well PW1 is set lower than the surface of an element isolation region STI2 surrounding the p-type well PW2 or the n-type well (H1<H2). By making the surface of the element isolation region STI1 receded and lowered, the effective channel width of both a control transistor and a memory transistor can be increased. Since the surface of the element isolation region STI2 is not made receded, an undesired film can be prevented from being residual over a dummy gate electrode.

Abstract: A transistor device includes a pair of source/drain regions having a channel region there-between. A first gate is proximate the channel region. A gate dielectric is between the first gate and the channel region. A second gate is proximate the channel region. A programmable material is between the second gate and the channel region. The programmable material includes at least one of a) a multivalent metal oxide portion and an oxygen-containing dielectric portion, or b) a multivalent metal nitride portion and a nitrogen-containing dielectric portion. Memory cells and arrays of memory cells are disclosed.

Abstract: According to example embodiments, a vertical memory device includes a low resistance layer on a lower insulation layer, a channel layer on the low resistance layer, a plurality of vertical channels on the channel layer, and a plurality of gate lines. The vertical channels extend in a first direction that is perpendicular with respect to a top surface of the channel layer. The gate lines surround outer sidewalls of the vertical channels, and are stacked in the first direction and are spaced apart from each other.

Abstract: A memory device includes a plurality of gate electrode layers stacked on a substrate, a plurality of channel layers penetrating the plurality of gate electrode layers, a gate insulating layer between the plurality of gate electrode layers and the plurality of channel layers, and a common source line on the substrate adjacent to the gate electrode layers. The common source line includes a first part and a second part that are alternately arranged in a first direction and have different heights in a direction vertical to a top surface of the substrate. The gate insulating layer includes a plurality of vertical parts and a horizontal part. The plurality of vertical parts surrounds corresponding ones of the plurality of channel layers. The horizontal part extends parallel to a top surface of the substrate.

Abstract: The semiconductor device according to the embodiments of the present disclosure may include a contact line connecting a pair of channel pillars with a silt disposed therebetween. The contact line may extend in various directions, for example, a diagonal direction with respect to the slit. The contact line may contacts an upper surface or a side wall of the channel pillars.

Abstract: A method for manufacturing embedded memory using high-?-metal-gate (HKMG) technology is provided. A gate stack is formed on a semiconductor substrate. The gate stack comprises a charge storage film and a control gate overlying the charge storage film. The control gate includes a first material. A gate layer is formed of the first material, and is formed covering the semiconductor substrate and the gate stack. The gate layer is recessed to below a top surface of the gate stack, and subsequently patterned to form a select gate bordering the control gate and to form a logic gate spaced from the select and control gates. An ILD layer is formed between the control, select, and logic gates, and with a top surface that is even with top surfaces of the control, select, and logic gates. The control, select, or logic gate is replaced with a new gate of a second material.

Abstract: A wafer is positioned on a wafer support apparatus beneath an electrode such that a plasma generation region exists between the wafer and the electrode. Radiofrequency power is supplied to the electrode to generate a plasma within the plasma generation region during multiple sequential plasma processing cycles of a plasma processing operation. At least one electrical sensor connected to the electrode measures a radiofrequency parameter on the electrode during each of the multiple sequential plasma processing cycles. A value of the radiofrequency parameter as measured on the electrode is determined for each of the multiple sequential plasma processing cycles. A determination is made as to whether or not any indicatory trend or change exists in the values of the radiofrequency parameter as measured on the electrode over the multiple sequential plasma processing cycles, where the indicatory trend or change indicates formation of a plasma instability during the plasma processing operation.

Abstract: An alternating stack of insulating layers and spacer material layers is formed over a semiconductor substrate. Memory openings are formed through the alternating stack. An optional silicon-containing epitaxial pedestal and a memory film are formed in each memory opening. After forming an opening through a bottom portion of the memory film within each memory opening, a germanium-containing semiconductor layer and a dielectric layer is formed in each memory opening. Employing the memory film and the dielectric layer as a crucible, a liquid phase epitaxy anneal is performed to convert the germanium-containing semiconductor layer into a germanium-containing epitaxial channel layer. A dielectric core and a drain region can be formed over the dielectric layer. The germanium-containing epitaxial channel layer is single crystalline, and can provide a higher charge carrier mobility than a polysilicon channel.

Abstract: The present disclosure generally relates to semiconductor manufactured memory devices and methods of manufacture thereof. More specifically, methods for forming a plurality of layers of a 3D cross-point memory array without the need for lithographic patterning at each layer are disclosed. The method includes depositing a patterned hard mask with a plurality of first trenches over a plurality of layers. Each of the plurality of first trenches is etched all the way through the plurality of layers. Then the hard mask is patterned with a plurality of second trenches, which runs orthogonal to the plurality of first trenches. Selective undercut etching is then used to remove each of the plurality of layers except the orthogonal metal layers from the plurality of second trenches, resulting in a 3D cross-point array with memory material only at the intersections of the orthogonal metal layers.

Abstract: Discrete silicon nitride portions can be formed at each level of electrically conductive layers in an alternating stack of insulating layers and the electrically conductive layers. The discrete silicon nitride portions can be employed as charge trapping material portions, each of which is laterally contacted by a tunneling dielectric portion on the front side, and by a blocking dielectric portion on the back side. The tunneling dielectric portions may be formed as discrete material portions or portions within a tunneling dielectric layer. The blocking dielectric portions may be formed as discrete material portions or portions within a blocking dielectric layer. The discrete silicon nitride portions can be formed by depositing a charge trapping material layer and selectively removing portions of the charge trapping material layer at levels of the insulating layers. Various schemes may be employed to singulate the charge trapping material layer.

Abstract: There is provided a method of manufacturing a non-volatile memory device including: alternatively stacking a plurality of insulating layers and a plurality of conductive layers on a top surface of a substrate; forming an opening that exposes the top surface of the substrate and lateral surfaces of the insulating layers and the conductive layers; forming an anti-oxidation layer on at least the exposed lateral surfaces of the conductive layers; forming a gate dielectric layer on the anti-oxidation layer, the gate dielectric layer including a blocking layer, an electric charge storage layer, and a tunneling layer that are sequentially formed on the anti-oxidation layer; and forming a channel region on the tunneling layer.

Abstract: An opening is formed through at least one dielectric material layer. A first metallic liner is formed on a bottom surface and sidewalls of the opening by depositing a first metallic material. A metal portion including an elemental metal or an intermetallic alloy of at least two elemental metals is formed on the first metallic liner. A second metallic liner including a second metallic material is formed directly on a top surface of the metal portion. The first metallic material and the second metallic material differ in composition. The first metallic liner and the second metallic liner contact an entirety of all surfaces of the metal portion. The first and second metallic liners can protect the metal portion from a subsequently deposited dielectric material layer, which may be formed as an air-gap dielectric layer after recessing the at least one dielectric material layer.

Abstract: At least one alternating stack of insulating layers and silicon nitride layers is formed over a substrate. Memory stack structures are formed through the at least one alternating stack. A trench and an etch mask spacer are formed such that the trench extends through the entirety of the alternating stack while the etch mask covers upper layers of the at least one alternating stack. Lower silicon nitride layers are removed employing a first hot phosphoric acid wet etch process. After removal of the etch mask spacer, upper silicon nitride layers are removed employing a second hot phosphoric acid wet etch process. Electrically conductive layers are formed in the lateral recesses formed by removal of the silicon nitride layers.

Abstract: A manufacturing method of a semiconductor structure is provided. The manufacturing method of the semiconductor structure includes the following steps: forming a bottom oxide layer; forming a first conductive layer on the bottom oxide layer; forming a stack including alternately arranged second conductive layers and insulating layers on the first conductive layer; forming a first opening having a first cross-sectional width and penetrating through the stack and a portion of the first conductive layer; forming a second opening having a second cross-sectional width and penetrating through the first conductive layer below the first opening for exposing the bottom oxide layer, wherein the second cross-sectional width is smaller than the first cross-sectional width; and forming a memory layer on a sidewall of the first opening and filled in the second opening.

Abstract: A method (and system) for generating random numbers includes setting a drain voltage Vd on an MOSFET device to maximize a transconductance of the MOSFET device and setting a gate voltage Vg of the MOSFET device to tune as desired a random number statistical distribution of an output of the MOSFET device. The MOSFET device includes a gate structure with an oxide layer including at least one artificial trapping layer in which carrier traps are designed to occupy a predetermined distance from conduction and valance bands of material of the artificial trapping layer.

Abstract: A memory structure, includes (a) active columns of polysilicon formed above a semiconductor substrate, each active column extending vertically from the substrate and including a first heavily doped region, a second heavily doped region, and one or more lightly doped regions each adjacent both the first and second heavily doped region, wherein the active columns are arranged in a two-dimensional array extending in second and third directions parallel to the planar surface of the semiconductor substrate; (b) charge-trapping material provided over one or more surfaces of each active column; and (c) conductors each extending lengthwise along the third direction.

Abstract: A trapping gate forming process includes the following. An oxide/nitride/oxide layer is formed on a substrate. A hard mask is formed to cover the oxide/nitride/oxide layer. The hard mask, the oxide/nitride/oxide layer and the substrate are patterned to form at least a trench in the hard mask, the oxide/nitride/oxide layer along a first direction. An isolation structure is formed in the trench. A first gate is formed across the oxide/nitride/oxide layer along a second direction orthogonal to the first direction. A flash cell formed by said process includes a substrate, a first gate and an oxide/nitride/oxide layer. The substrate contains at least an active area extending along a first direction. The first gate is disposed across the active area along a second direction orthogonal to the first direction, thereby intersecting an overlapping area. The oxide/nitride/oxide layer is disposed in the overlapping area between the first gate and the active area.

Abstract: A memory structure includes a substrate, a plurality of stacks, a plurality of memory layers, a plurality of channel layers and a plurality of pad layers. The stacks are disposed on the substrate. The stacks are separated from each other by a plurality of first trenches. The stacks include alternately arranged first stacks and second stacks. Each of the stacks includes alternately stacked conductive strips and insulating strips. The memory layers are partially disposed in the first trenches. The memory layers extend onto the stacks in a conformal manner. The channel layers are disposed on the memory layers in a conformal manner. The pad layers are at least disposed on the channel layers at positions substantially above the first stacks.

Abstract: According to one embodiment, the array chip includes a three-dimensionally disposed plurality of memory cells and a memory-side interconnection layer connected to the memory cells. The circuit chip includes a substrate, a control circuit provided on the substrate, and a circuit-side interconnection layer provided on the control circuit and connected to the control circuit. The circuit chip is stuck to the array chip with the circuit-side interconnection layer facing to the memory-side interconnection layer. The bonding metal is provided between the memory-side interconnection layer and the circuit-side interconnection layer. The bonding metal is bonded to the memory-side interconnection layer and the circuit-side interconnection layer.

Abstract: The disclosed technology relates generally to non-volatile memory devices, and more particularly to ferroelectric non-volatile memory devices. In one aspect, a non-volatile memory cell includes a pinch-off ferroelectric memory FET and at least one select device electrically connected in series to the pinch-off ferroelectric memory FET.

Abstract: Some embodiments include a memory array which has a vertical stack of alternating insulative levels and wordline levels. The wordline levels have terminal ends corresponding to control gate regions. Charge-trapping material is along the control gate regions of the wordline levels and not along the insulative levels. The charge-trapping material is spaced from the control gate regions by charge-blocking material. Channel material extends vertically along the stack and is laterally spaced from the charge-trapping material by dielectric material. Some embodiments include methods of forming NAND memory arrays.

Abstract: A three-dimensional semiconductor device includes an electrode structure on a substrate that includes a first region and a second region, the electrode structure including a ground selection electrode, cell electrodes, and a string selection electrode which are sequentially stacked on the substrate wherein the ground selection electrode, the cell electrodes, and the string selection electrode respectively include a ground selection pad, cell pads, and a string selection pad which define a stepped structure in the second region of the substrate, a plurality of dummy pillars penetrating each of the cell pads and a portion of the electrode structure under each of the cell pads, and a cell contact plug electrically connected to each of the cell pads, wherein each of the dummy pillars penetrates a boundary between adjacent cell pads, and wherein the adjacent cell pads share the dummy pillars.

Abstract: Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.

Abstract: According to one embodiment, it includes a stacked body including N-number of layers (N is an integer of 2 or more) stacked on a semiconductor substrate, opening portions penetrating the stacked body in a stacking direction, columnar bodies respectively disposed in the opening portions, and a slit dividing M-number of layers (M is an integer of 1 or more and (N?2) or less) of the stacked body in a horizontal direction from above, wherein the slit is formed with lateral surfaces respectively having a spatial periodicity in a horizontal plane.

Abstract: After formation of an alternating stack of insulating layers and sacrificial material layers, a memory opening can be formed through the alternating stack, which is subsequently filled with a columnar semiconductor pedestal portion and a memory stack structure. Breakage of the columnar semiconductor pedestal portion under mechanical stress can be avoided by growing a laterally protruding semiconductor portion by selective deposition of a semiconductor material after removal of the sacrificial material layers to form backside recesses. At least an outer portion of the laterally protruding semiconductor portion can be oxidized to form a tubular semiconductor oxide spacer. Electrically conductive layers can be formed in the backside recesses to provide word lines for a three-dimensional memory device.

Abstract: A vertical memory device includes insulating interlayer patterns, of gate electrodes, a channel, and a charge storage pattern structure. The insulating interlayer patterns are spaced in a first direction. The gate electrodes between are neighboring insulating interlayer patterns, respectively. The channel extends through the insulating interlayer patterns and the gate electrodes in the first direction. The charge storage pattern structure includes a tunnel insulation pattern, a charge trapping pattern structure, and a blocking pattern sequentially stacked between the channel and each of the gate electrodes in a second direction. The charge trapping pattern structure includes charge trapping patterns spaced in the first direction. The charge trapping patterns are adjacent to sidewalls of first gate electrodes, respectively. A first charge trapping pattern extends in the first direction along a sidewall of a first insulating interlayer pattern.

Abstract: According to one embodiment, the recess has a side surface and a bottom surface. The side surface is continuous with the major surface. The bottom surface is positioned lower than the major surface. The stacked body is provided above the major surface of the substrate. The stacked body includes a plurality of electrode layers stacked with an insulating body interposed. The columnar portion includes a semiconductor body and a stacked film. The semiconductor body extends in a stacking direction of the stacked body through the stacked body. The semiconductor body contacts the side surface and the bottom surface of the recess of the substrate. The stacked film includes a charge storage portion and is provided between the semiconductor body and the stacked body higher than the major surface of the substrate. The stacked film is not provided in the recess of the substrate.

Abstract: A semiconductor device includes a semiconductor substrate, an element isolation film, and a fin having side surfaces facing each other in a first direction of an upper surface and a main surface connecting the facing side surfaces and extending in a second direction orthogonal to the first direction. The device further includes a control gate electrode arranged over the side surface via a gate insulation film and extending in the first direction, and a memory gate electrode arranged over the side surface via another gate insulation film having a charge accumulation layer and extending in the first direction. Furthermore, an overlap length by which the memory gate electrode overlaps with the side surface is smaller than an overlap length by which the control gate electrode overlaps with the side surface in the direction orthogonal to the upper surface.

Abstract: Exemplary methods for laterally etching silicon nitride may include flowing a fluorine-containing precursor and an oxygen-containing precursor into a remote plasma region of a semiconductor processing chamber. The methods may include forming a plasma within the remote plasma region to generate plasma effluents of the fluorine-containing precursor and the oxygen-containing precursor. The methods may also include flowing the plasma effluents into a processing region of the semiconductor processing chamber. A substrate may be positioned within the processing region, and the substrate may include a trench formed through stacked layers including alternating layers of silicon nitride and silicon oxide. The methods may also include laterally etching the layers of silicon nitride from sidewalls of the trench while substantially maintaining the layers of silicon oxide. The layers of silicon nitride may be laterally etched less than 10 nm from the sidewalls of the trench.

Abstract: A method to integrate silicon-oxide-nitride-oxide-silicon (SONOS) transistors into a complementary metal-oxide-semiconductor (CMOS) flow including a triple gate oxide structure. The memory device may include a non-volatile memory (NVM) transistor that has a charge-trapping layer and a blocking dielectric, a first field-effect transistor (FET) including a first gate oxide of a first thickness, a second FET including a second gate oxide of a second thickness, a third FET including a third gate oxide of a third thickness, in which the first thickness is greater than the second thickness and the second thickness is greater than the third thickness.

Abstract: A memory device including first conductive lines spaced apart from each other and extending in a first direction; second conductive lines spaced apart from each other and extending in a second direction that is different from the first direction; first memory cells having a structure that includes a selection device layer, a middle electrode layer, a variable resistance layer, and a top electrode layer; and insulating structures arranged alternately with the first memory cells in the second direction under the second conductive lines, wherein the first insulating structures have a top surface that is higher than a top surface of the first top electrode layer, and the second conductive lines have a structure that includes convex and concave portions, the convex portions being connected to the top surface of the top electrode layer and the concave portions accommodating the insulating structures between the convex portions.

Abstract: A three-dimensional memory device includes a first alternating stack of first insulating layers and first electrically conductive layers, a first memory opening fill structure extending through the first alternating stack and including a first memory film and a first vertical semiconductor channel, a joint-level electrically conductive layer overlying the first alternating stack, at least one joint-level doped semiconductor portion contacting a top surface of the first vertical semiconductor channel and located within, and electrically isolated from, the joint-level electrically conductive layer, a second alternating stack of second insulating layers and second electrically conductive layers located over the joint-level electrically conductive layer, and a second memory opening fill structure extending through the second alternating stack and including a second memory film and a second vertical semiconductor channel that is laterally surrounded by the second memory film and vertically extends into the at leas

Abstract: A semiconductor device of an embodiment includes a semiconductor layer, a first conductor, a first conductive layer, a first insulating layer, a second conductive layer, and a plurality of second conductors. The semiconductor layer has a first region and a second region. The first conductor is provided in the semiconductor layer. The first conductive layer is electrically connected to the first conductor. The first insulating layer is provided in the semiconductor layer with at least part of the first insulating layer being provided between the first conductive layer and the semiconductor layer. A distance from the first insulating layer to the first region is smaller than a distance to the second region. A first distance to the first region from a plane that includes a first interface between the first insulating layer and the first conductive layer is larger than a second distance from the plane to the second region.

Abstract: Provided herein is a semiconductor device including: a channel layer; a data storage layer surrounding the channel layer and extending along the channel layer; interlayer insulating layers surrounding the data storage layer and stacked along the channel layer, wherein the interlayer insulating layers are spaced apart from each other, wherein a conductive area is disposed between the interlayer insulating layers; a conductive pattern disposed in the conductive area and surrounding the data storage layer; buffer patterns disposed between the interlayer insulating layers and the data storage layer and surrounding the data storage layer, wherein each of the buffer patterns includes a densified area, wherein the buffer patterns are separated from each other by the conductive area; and a blocking insulating pattern disposed between the conductive pattern and the data storage layer and surrounding the data storage layer.

Abstract: A layer stack including an alternating stack of insulating layers and sacrificial material layers is formed over a substrate. After formation of memory stack structures, backside trenches are formed through the layer stack. The sacrificial material layers are replaced with electrically conductive layers. Drain select level dielectric isolation structures are formed through drain select level of the stack after formation of the electrically conductive layers. The drain select level dielectric isolation structures laterally separate portions of conductive layers that are employed as drain select level gate electrodes for the memory stack structures.

Abstract: Three-dimensional memory structures that are configured to use area efficiently, and methods for providing three-dimensional memory structures that use area efficiently are provided. The vertical memory structure can include a number of bit line bits that is greater than a number of word line bits. In addition, the ratio of bit line bits to word line bits can be equal to a ratio of a first side a memory cell included in a memory array of the memory structure to a dimension of a second side of the memory cell.

Abstract: According to one embodiment, a semiconductor device includes a substrate and a multilayer body provided on the substrate. The multilayer body has electrode films and insulating films. The electrode films contain silicon, the insulating films contain silicon oxide. Each of the electrode films and each of the insulating films are alternately stacked. A hole is formed in the multilayer body, and the hole vertically extends in the multilayer body. The electrode films include a first electrode film and a second electrode film located below the first electrode film. Carbon concentration of the first electrode film is higher than carbon concentration of the second electrode film.