Plural Sections Connected In Parallel (e.g., Power Mosfet) Patents (Class 257/341)
  • Patent number: 8044462
    Abstract: An electronic device includes a semiconductor substrate of a first conductivity type and a drain layer adjacent the semiconductor substrate and having a plurality of drains. The drain layer includes a first semiconductor layer of the first conductivity type adjacent the semiconductor substrate, and at least one second semiconductor layer of a second conductivity type adjacent the first semiconductor layer. Moreover, a plurality of first column regions of the first conductivity type extends through the at least one second semiconductor layer to contact the first semiconductor layer. A plurality of second column regions of the second conductivity type delimits the plurality of first column regions. Furthermore, a plurality of body regions of the second conductivity type are adjacent respective ones of the plurality of second column regions.
    Type: Grant
    Filed: February 12, 2008
    Date of Patent: October 25, 2011
    Assignee: STMicroelectronics S.R.L.
    Inventors: Monica Micciche, Antonio Giuseppe Grimaldi, Luigi Arcuri
  • Patent number: 8044463
    Abstract: A trenched field effect transistor is provided that includes (a) a semiconductor substrate, (b) a trench extending a predetermined depth into the semiconductor substrate, (c) a pair of doped source junctions, positioned on opposite sides of the trench, (d) a doped heavy body positioned adjacent each source junction on the opposite side of the source junction from the trench, the deepest portion of the heavy body extending less deeply into said semiconductor substrate than the predetermined depth of the trench, and (e) a doped well surrounding the heavy body beneath the heavy body.
    Type: Grant
    Filed: April 7, 2010
    Date of Patent: October 25, 2011
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Brian S. Mo, Duc Chau, Steven Sapp, Izak Bencuya, Dean E. Probst
  • Publication number: 20110254088
    Abstract: Semiconductor power devices, and related methods, wherein a recessed contact makes lateral ohmic contact to the source diffusion, but is insulated from the underlying recessed field plate (RFP). Such an insulated RFP is here referred to as an embedded recessed field plate (ERFP).
    Type: Application
    Filed: April 19, 2011
    Publication date: October 20, 2011
    Applicant: MAXPOWER SEMICONDUCTOR INC.
    Inventors: Mohamed N. Darwish, Jun Zeng, Shih-Tzung Su, Richard A. Blanchard
  • Patent number: 8039898
    Abstract: An embodiment of a process for manufacturing a semiconductor power device envisages the steps of: providing a body made of semiconductor material having a first top surface; forming an active region with a first type of conductivity in the proximity of the first top surface and inside an active portion of the body; and forming an edge-termination structure. The edge-termination structure is formed by: a ring region having the first type of conductivity and a first doping level, set within a peripheral edge portion of the body and electrically coupled to the active region; and a guard region, having the first type of conductivity and a second doping level, higher than the first doping level, set in the proximity of the first top surface and connecting the active region to the ring region.
    Type: Grant
    Filed: June 28, 2007
    Date of Patent: October 18, 2011
    Assignee: STMicroelectronics, S.r.l.
    Inventors: Mario Giuseppe Saggio, Domenico Murabito, Ferruccio Frisina
  • Patent number: 8039897
    Abstract: In one form a lateral MOSFET includes an active gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, and a non-active gate positioned above the drain region. In another form the lateral MOSFET includes a gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, the source region and the drain region being of a first conductivity type, a heavy body region of a second conductivity type in contact with and below the source region, and the drain region comprising a lightly doped drain (LDD) region proximate an edge of the gate and a sinker extending from the upper surface of the monocrystalline body to the bottom surface of the monocrystalline semiconductor body.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: October 18, 2011
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Thomas E. Grebs, Gary M. Dolny, Daniel M. Kinzer
  • Patent number: 8039931
    Abstract: A power semiconductor component and a method for the production of a power semiconductor component are disclosed. According to one embodiment of the invention, a topmost metallization region that is provided is formed in a manner extended laterally and outside contacts formed, in such a way that, as a result, a protection and sealing material region to be provided is formed, whilst avoiding electrically insulating additional protection and sealing layers that are usually to be provided.
    Type: Grant
    Filed: November 28, 2005
    Date of Patent: October 18, 2011
    Assignee: Infineon Technologies AG
    Inventors: Josef Maynollo, Thomas Detzel
  • Patent number: 8030702
    Abstract: A trenched MOSFET (Metal-Oxide-Semiconductor Field Effect Transistor) with a guard ring and a channel stop, including: a substrate including an epi layer region on the top thereof; a plurality of source and body regions formed in the epi layer; a metal layer including a plurality of metal layer regions which are connected to respective source and body, and gate regions forming metal connections of the MOSFET; a plurality of metal contact plugs connected to respective metal layer regions; a plurality of gate structure filled with polysilicon to form a plurality of trenched gates on top of epi layer; an insulating layer deposited on the epi layer formed underneath the metal layer with a plurality of metal contact holes therein for contacting respective source and body regions; a guard ring wrapping around the metal layer corresponding to the gate region at the termination; and a channel stop which is a heavier N-type doping region aside the guard ring at the termination; Wherein the contact plugs connecting to
    Type: Grant
    Filed: October 23, 2009
    Date of Patent: October 4, 2011
    Assignee: Force MOS Technology Co., Ltd.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 8030706
    Abstract: A semiconductor device according to an embodiment of the present invention includes a device part and a terminal part.
    Type: Grant
    Filed: August 12, 2009
    Date of Patent: October 4, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Miho Watanabe, Masaru Izumisawa, Yasuto Sumi, Hiroshi Ohta, Wataru Sekine, Wataru Saito, Syotaro Ono, Nana Hatano
  • Patent number: 8026550
    Abstract: An integrated circuit includes N plane-like metal layers. A first plane-like metal layer includes M contact portions that communicate with respective ones of the N plane-like metal layers, where M is an integer greater than one, wherein the first plane-like metal layer and the N plane-like metal layers are located in separate planes. A first drain region has a generally rectangular shape. First, second, third and fourth source regions have a generally rectangular shape and that are arranged adjacent to sides of the first drain region. The first drain region and the first, second, third and fourth source regions communicate with at least two of the N plane-like metal layers. A first gate region is arranged between the first, second, third and fourth source regions and the first drain region. First, second, third and fourth substrate contact regions are arranged adjacent to corners of the first drain region.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: September 27, 2011
    Assignee: Marvell World Trade Ltd.
    Inventor: Sehat Sutardja
  • Publication number: 20110227155
    Abstract: A main FET and one or more sense FETs are formed in a common substrate. The main FET and sense FET(s) include a source terminal, a gate terminal and a drain terminal. The common gate pad connects the gate terminals of the main FET and sense FET(s). An electrical isolation may be between the gate terminals of the main FET and the sense FET(s). A sense pad in electrical contact with the source of the one or more sense FETs does not overlap an area of the device containing the sense FET(s). It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
    Type: Application
    Filed: May 31, 2011
    Publication date: September 22, 2011
    Applicant: ALPHA & OMEGA SEMICONDUCTOR, LTD.
    Inventors: Yi Su, Anup Bhalla, Daniel Ng
  • Patent number: 8022471
    Abstract: A trenched semiconductor power device includes a plurality of trenched gates surrounded by source regions near a top surface of a semiconductor substrate encompassed in body regions. The trenched semiconductor power device further comprises tilt-angle implanted body dopant regions surrounding a lower portion of trench sidewalls for reducing a gate-to-drain coupling charges Qgd between the trenched gates and a drain disposed at a bottom of the semiconductor substrate. The trenched semiconductor power device further includes a source dopant region disposed below a bottom surface of the trenched gates for functioning as a current path between the drain to the source for preventing a resistance increase caused by the body dopant regions surrounding the lower portions of the trench sidewalls.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: September 20, 2011
    Assignee: Force-MOS Technology Corp.
    Inventor: Fwu-Iuan Hshieh
  • Patent number: 8022470
    Abstract: A semiconductor device with a trench gate structure includes a semiconductor body with switching electrodes. At least gate electrode controls the off state and the on state between the switching electrodes. The at least one gate electrode in the trench gate structure controls at least one vertical switching channel through at least one body zone. The trench gate structure includes at least one trench with side walls, wherein the at least one gate electrode, which is insulated against the side walls in the region of the at least one body zone alternately by at least one gate oxide section and at least one trench oxide section and forms a switching channel with a gate oxide section in the at least one region, is located in the at least one trench.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: September 20, 2011
    Assignee: Infineon Technologies Austria AG
    Inventor: Franz Hirler
  • Publication number: 20110220999
    Abstract: In a high frequency amplifying MOSFET having a drain offset region, the size is reduced and the on-resistance is decreased by providing conductor plugs 13 (P1) for leading out electrodes on a source region 10, a drain region 9 and leach-through layers 3 (4), to which a first layer wirings 11a, 11d (M1) are connected and, further, backing second layer wirings 12a to 12d are connected on the conductor plugs 13 (P1) to the first layer wirings 11s, 11d (M1).
    Type: Application
    Filed: May 19, 2011
    Publication date: September 15, 2011
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventors: Yutaka Hoshino, Shuji Ikeda, Isao Yoshida, Shiro Kamohara, Megumi Kawakami, Tomoyuki Miyake, Masatoshi Morikawa
  • Patent number: 8018008
    Abstract: A semiconductor device includes a first chip and a second chip. The first chip includes a first conductivity type channel power MOSFET. The second chip includes a second conductivity type channel power MOSFET. The first chip and the second chip are integrated in such a manner that a second-surface drain electrode of the first chip and a second-surface drain electrode of the second chip face to each other and are electrically coupled with each other through a conductive material.
    Type: Grant
    Filed: April 21, 2009
    Date of Patent: September 13, 2011
    Assignee: DENSO CORPORATION
    Inventor: Shoji Ozoe
  • Patent number: 8013391
    Abstract: A semiconductor power device includes a drift region of a first conductivity type, a well region extending above the drift region and having a second conductivity type opposite the first conductivity type, active trenches extending through the well region and into the drift region where the active trenches define an active area. Inside each of the active trenches is formed a first conductive gate electrode disposed along and insulated from a first trench sidewall, a second conductive gate electrode disposed along and insulated from a second trench sidewall, and a conductive shield electrode disposed between the first and second conductive gate electrodes, wherein the shield electrode is insulated from and extends deeper inside the trench than the first and second conductive gate electrodes. The device also includes source regions having the first conductivity type formed inside the well region and adjacent the active trenches.
    Type: Grant
    Filed: December 21, 2007
    Date of Patent: September 6, 2011
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Joseph A. Yedinak, Nathan L. Kraft
  • Patent number: 8013360
    Abstract: A semiconductor device includes: a semiconductor layer of a first conductivity type; a first semiconductor pillar region of the first conductivity type provided on a major surface of the semiconductor layer; a second semiconductor pillar region of a second conductivity type provided adjacent to the first semiconductor pillar region on the major surface of the semiconductor layer, the second semiconductor pillar region forming a periodic arrangement structure substantially parallel to the major surface of the semiconductor layer together with the first semiconductor pillar region; a first main electrode; a first semiconductor region of the second conductivity type; a second semiconductor region of the first conductivity type; a second main electrode; a control electrode; and a high-resistance semiconductor layer provided on the semiconductor layer in an edge termination section surrounding the first semiconductor pillar region and the second semiconductor pillar region.
    Type: Grant
    Filed: April 21, 2010
    Date of Patent: September 6, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Wataru Saito, Syotaro Ono, Masakatsu Takashita, Yasuto Sumi, Masaru Izumisawa, Hiroshi Ohta, Wataru Sekine
  • Publication number: 20110210392
    Abstract: A structure of a power semiconductor device, in which a P-well region having a large area and a gate electrode are opposed to each other through a field oxide film having a larger thickness than that of a gate insulating film such that the P-well region having a large area and the gate electrode are not opposed to each other through the gate insulating film, or the gate electrode is not provided above the gate insulating film that includes the P-well region having a large area therebelow.
    Type: Application
    Filed: June 30, 2009
    Publication date: September 1, 2011
    Applicant: Mitsubishi Electric Corporation
    Inventors: Shuhei Nakata, Shoyu Watanabe, Kenichi Otsuka, Naruhisa Miura
  • Patent number: 8008720
    Abstract: A semiconductor device is formed having a pedestal. The pedestal includes at least two dielectric layers. The pedestal has a sidewall and a major surface. A conductive layer is formed overlying the pedestal. A vertical portion of the conductive layer adjacent to the sidewall of the pedestal is a gate of the transistor. The portion of the conductive layer overlying the major surface can be used as interconnect. The gate and gate interconnect are contiguous and formed in a single process. A conductive shield layer may be integrated into the pedestal. The conductive shield layer functions as a faraday shield that reduces gate to drain capacitance of the device.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: August 30, 2011
    Assignee: HVVi Semiconductors, Inc.
    Inventor: Robert Bruce Davies
  • Patent number: 8008714
    Abstract: A semiconductor device, including a MOSFET, has a plurality of transistor cell regions disposed in a semiconductor substrate. A source electrode of the MOSFET is disposed over a main surface of the semiconductor substrate and is in contact with a top surface of a source region in each of the plurality of transistor cell regions. A drain electrode of the MOSFET is a disposed over a back surface of the semiconductor substrate and is electrically connected to the semiconductor substrate. A Schottky cell region is disposed between the plurality of transistor cell regions in the semiconductor substrate. The source electrode is in contact with a part of the main surface of the semiconductor so as to form a Schottky junction in the Schottky cell region.
    Type: Grant
    Filed: October 11, 2010
    Date of Patent: August 30, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Nobuyuki Shirai, Nobuyoshi Matsuura, Yoshito Nakazawa
  • Patent number: 8008747
    Abstract: This invention discloses a semiconductor power device disposed on a semiconductor substrate supporting an epitaxial layer as a drift region composed of an epitaxial layer. The semiconductor power device further includes a super-junction structure includes a plurality of doped sidewall columns disposed in a multiple of epitaxial layers. The epitaxial layer have a plurality of trenches opened and filled with the multiple epitaxial layer therein with the doped columns disposed along sidewalls of the trenches disposed in the multiple of epitaxial layers.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: August 30, 2011
    Assignee: Alpha & Omega Semiconductor, Ltd.
    Inventors: François Hébert, Anup Bhalla
  • Patent number: 8004040
    Abstract: Provided are a semiconductor device which can be manufactured at low cost and has a low on-resistance and a high withstand voltage, and its manufacturing method. The semiconductor device comprises an N-type well area formed on a P-type semiconductor substrate, a P-type body area formed within the well area, an N-type source area formed within the body area, an N-type drain area formed at a distance from the body area within the well area, a gate insulating film formed so as to overlay a part of the body area, a gate electrode formed on the gate insulating film and a P-type buried diffusion area which makes contact with the bottom of the body area and extends to an area beneath the drain area in a direction parallel to the surface of the semiconductor substrate within the well area.
    Type: Grant
    Filed: December 10, 2008
    Date of Patent: August 23, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Hisao Ichijo, Alberto Adan, Kazushi Naruse, Atsushi Kagisawa
  • Patent number: 8004049
    Abstract: A device includes an array of cells, the source regions of the individual cells comprising a plurality of source region branches each extending towards a source region branch of an adjacent cell, the base regions of the individual cells comprising a corresponding plurality of base region branches merging together to form a single base region surrounding the source regions. The junctions between the merged base region and the drain region define rounded current conduction path areas for the on-state of the device between adjacent cells. Floating voltage regions of opposite conductivity type to the drain region are buried in the substrate beneath the merged base region. The features of the floating voltage regions define rings of the opposite conductivity type to the drain region that surround the current conduction paths of respective cells. The floating voltage regions include respective islands situated within the current conduction paths.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: August 23, 2011
    Assignee: Freescale Semiconductor, Inc.
    Inventors: Jean-Michel Reynes, Stephane Alves, Ivana Deram, Blandino Lopes, Joel Margheritta, Frederico Morancho
  • Publication number: 20110198613
    Abstract: The leakage current generated in a pn junction region between a gate and a source is reduced in a junction FET using a silicon carbide substrate. In a trench junction FET using a silicon carbide substrate, nitrogen is introduced into a sidewall and a bottom surface of a trench, thereby forming an n type layer and an n+ type layer on a surface of the trench. In this manner, the pn junction region corresponding to the junction region between a p+ type gate region and an n+ type source region is exposed on a main surface of a semiconductor substrate instead of on the damaged sidewall of the trench, and also the exposed region thereof is narrowed. Accordingly, the leakage current in the pn junction region can be reduced.
    Type: Application
    Filed: February 3, 2011
    Publication date: August 18, 2011
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventors: Haruka SHIMIZU, Natsuki YOKOYAMA
  • Patent number: 7999316
    Abstract: Disclosed is a vertically arranged semiconductor device. The semiconductor device can include a semiconductor substrate comprising a first conductive type buried layer, a first conductive type drift region formed on the first conductive type buried layer, and a second conductive type well formed on the first conductive type drift region. A gate insulating layer and a gate electrode can be formed in regions of the substrate from which the first conductive type drift region and the second conductive type well are selectively removed. A first conductive type source region can be formed at sides of the gate electrode. A n insulating layer can be formed on the semiconductor substrate including the gate electrode and can include a trench formed through the insulating layer and a portion of the second conductive type well. A barrier layer can be formed in the trench and a source contact including tungsten and aluminum can be deposited in the trench.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: August 16, 2011
    Assignee: Dongbu Hitek Co., Ltd.
    Inventor: Baek Won Kim
  • Patent number: 7999312
    Abstract: A semiconductor 100 has a P? body region and an N? drift region in the order from an upper surface side thereof. A gate trench and a terminal trench passing through the P? body region are formed. The respective trenches are surrounded with P diffusion regions at the bottom thereof. The gate trench builds a gate electrode therein. A P?? diffusion region, which is in contact with the end portion in a lengthwise direction of the gate trench and is lower in concentration than the P? body region and the P diffusion region, is formed. The P?? diffusion region is depleted prior to the P diffusion region when the gate voltage is off. The P?? diffusion region serves as a hole supply path to the P diffusion region when the gate voltage is on.
    Type: Grant
    Filed: January 26, 2007
    Date of Patent: August 16, 2011
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventors: Hidefumi Takaya, Kimimori Hamada, Kyosuke Miyagi
  • Patent number: 7994584
    Abstract: A semiconductor device includes first and second MOSFETs corresponding to at least first power source voltage and second power source voltage lower than the first power source voltage, and non-silicide regions formed in drain portions of the first and second MOSFETs and having no silicide formed therein. The first MOSFET includes first diffusion layers formed in source/drain portions, a second diffusion layer formed below a gate portion and formed shallower than the first diffusion layer and a third diffusion layer formed with the same depth as the second diffusion layer in the non-silicide region, and the second MOSFET includes fourth diffusion layers formed in source/drain portions, a fifth diffusion layer formed below a gate portion and formed shallower than the fourth diffusion layer and a sixth diffusion layer formed shallower than the fourth diffusion layer and deeper than the fifth diffusion layer in the non-silicide region.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: August 9, 2011
    Assignee: Kabsuhiki Kaisha Toshiba
    Inventors: Takayuki Hiraoka, Kuniaki Utsumi, Tsutomu Kojima, Kenji Honda
  • Patent number: 7994571
    Abstract: An inventive semiconductor device includes: a body region of a second conductivity type provided on the drift region of a first conductivity type in a semiconductor layer; a trench extending from a surface of the body region in the semiconductor layer with its bottom located in the drift region; a gate electrode provided in the trench with the intervention of a gate insulation film; a source region of the first conductivity type provided in a surface layer portion of the body region; a first impurity region of the second conductivity type provided around the bottom of the trench in spaced relation from the body region; and a second impurity region of the second conductivity type provided on a lateral side of the body region in the semiconductor layer, the second impurity region being isolated from the body region and electrically connected to the first impurity region.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: August 9, 2011
    Assignee: Rohm Co., Ltd.
    Inventor: Naoki Izumi
  • Patent number: 7994567
    Abstract: To reduce the size and improve the power added efficiency of an RF power module having an amplifier element composed of a silicon power MOSFET, the on resistance and feedback capacitance, which were conventionally in a trade-off relationship, are reduced simultaneously by forming the structure of an offset drain region existing between a gate electrode and an n+ type drain region of the power MOSFET into a double offset one. More specifically, this is accomplished by adjusting the impurity concentration of an n? type offset drain region, which is closest to the gate electrode, to be relatively low and adjusting the impurity concentration of an n type offset drain region, which is distant from the gate electrode, to be relatively high.
    Type: Grant
    Filed: June 25, 2010
    Date of Patent: August 9, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Tomoyuki Miyake, Masatoshi Morikawa, Yutaka Hoshino, Makoto Hatori
  • Patent number: 7994005
    Abstract: High-mobility vertical trench DMOSFETs and methods for manufacturing are disclosed. A source region, a drain region or a channel region of a high-mobility vertical trench DMOSFET may comprise silicon germanium (SiGe) that increases the mobility of the charge carriers in the channel region. In some embodiments the channel region may be strained to increase channel charge carriers mobility.
    Type: Grant
    Filed: November 1, 2007
    Date of Patent: August 9, 2011
    Assignee: Alpha & Omega Semiconductor, Ltd
    Inventor: François Hébert
  • Patent number: 7989890
    Abstract: A semiconductor structure includes a semiconductor substrate of a first conductivity type; a pre-high-voltage well (pre-HVW) in the semiconductor substrate, wherein the pre-HVW is of a second conductivity type opposite the first conductivity type; a high-voltage well (HVW) over the pre-HVW, wherein the HVW is of the second conductivity type; a field ring in the HVW and occupying a top portion of the HVW, wherein the field ring is of the first conductivity type; an insulation region over and in contact with the field ring and a portion of the HVW; a gate electrode partially over the insulation region; a drain region in the HVW, wherein the drain region is of the second conductivity type; and wherein the HVW horizontally extends further toward the drain region than the pre-HVW; and a source region adjacent to, and on an opposite side of the gate electrode than the drain region.
    Type: Grant
    Filed: September 8, 2008
    Date of Patent: August 2, 2011
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tsung-Yi Huang, Puo-Yu Chiang, Ruey-Hsin Liu, Shun-Liang Hsu, Chyi-Chyuan Huang, Fu-Hsin Chen, Eric Huang
  • Patent number: 7989852
    Abstract: An integrated circuit includes N plane-like metal layers. A first plane-like metal layer includes M contact portions that communicate with the N plane-like metal layers, respectively. The first plane-like metal layer and the N plane-like metal layers are located separate planes. First and second drain regions have a symmetric shape across at least one of horizontal and vertical centerlines. First and second gate regions have a first shape that surrounds the first and second drain regions, respectively. First and second source regions are arranged adjacent to and on one side of the first gate region, the second gate region and the connecting region. The first source region, the second source region, the first drain region and the second drain region communicate with at least two of the N plane-like metal layers.
    Type: Grant
    Filed: May 30, 2008
    Date of Patent: August 2, 2011
    Assignee: Marvell World Trade Ltd.
    Inventor: Sehat Sutardja
  • Patent number: 7989887
    Abstract: A trench MOSFET comprising a plurality of transistor cells with a plurality of wide trenched floating gates as termination region is disclosed. The trenched floating gates have trench depth equal to or deeper than body junction depth of body regions in termination area. Each body region between two adjacent said trenched floating gates has floating voltage.
    Type: Grant
    Filed: November 20, 2009
    Date of Patent: August 2, 2011
    Assignee: Force Mos Technology Co., Ltd.
    Inventor: Fu-Yuan Hsieh
  • Patent number: 7986005
    Abstract: A power semiconductor device includes a semiconductor body. The semiconductor body includes a body region of a first conductivity type for forming therein a conductive channel of a second conductivity type; a gate electrode arranged next to the body region; and a floating electrode arranged between the gate electrode and the body region.
    Type: Grant
    Filed: July 27, 2007
    Date of Patent: July 26, 2011
    Assignee: Infineon Technologies Austria Ag
    Inventors: Oliver Schilling, Frank Pfirsch
  • Patent number: 7986004
    Abstract: In a high withstand voltage transistor of a LOCOS offset drain type having a buried layer, a plurality of stripe-shaped diffusion layers are formed below a diffusion layer ranging from an offset layer to a drain layer and a portion between the drain region and the buried layer is depleted completely; thus, a withstand voltage between the drain region and the buried layer is improved. By the formation of the stripe-shaped diffusion layers, the drain region becomes widened; thus, on-resistance is reduced. Further, the buried layer is made high in concentration so as to sufficiently suppress an operation of a parasitic bipolar transistor.
    Type: Grant
    Filed: May 24, 2007
    Date of Patent: July 26, 2011
    Assignee: Panasonic Corporation
    Inventors: Akira Ohdaira, Hisaji Nishimura, Hiroyoshi Ogura
  • Patent number: 7981817
    Abstract: A production method for a semiconductor device includes providing a semiconductor substrate having semiconductor layer of a first conductivity type formed on a surface thereof; forming a first mask so as to cover a predetermined region of the semiconductor layer; (c) forming a well region of a second conductivity type by implanting impurity ions of the second conductivity type into the semiconductor layer having the first mask formed thereon; reducing the thickness of the first mask by removing a portion of the first mask; forming a second mask covering a portion of the well region by using photolithography; and forming a source region of the first conductivity type by implanting impurity ions of the first conductivity type into the semiconductor layer having the first mask with the reduced thickness and the second mask formed thereon.
    Type: Grant
    Filed: August 31, 2007
    Date of Patent: July 19, 2011
    Assignee: Panasonic Corporation
    Inventors: Koichi Hashimoto, Shin Hashimoto, Kyoko Egashira
  • Patent number: 7982265
    Abstract: A semiconductor power device includes a drift region of a first conductivity type, a well region extending above the drift region and having a second conductivity type opposite the first conductivity type, an active trench extending through the well region and into the drift region. The active trench, which includes sidewalls and bottom lined with dielectric material, is substantially filled with a first conductive layer and a second conductive layer. The second conductive layer forms a gate electrode and is disposed above the first conductive layer and is separated from the first conductive layer by an inter-electrode dielectric material. The device also includes source regions having the first conductivity type formed inside the well region and adjacent the active trench and a charge control trench that extends deeper into the drift region than the active trench and is substantially filled with material to allow for vertical charge control in the drift region.
    Type: Grant
    Filed: January 22, 2008
    Date of Patent: July 19, 2011
    Assignee: Fairchild Semiconductor Corporation
    Inventors: Ashok Challa, Alan Elbanhawy, Steven P. Sapp, Peter H. Wilson, Babak S. Sani, Christopher B. Kocon
  • Patent number: 7982224
    Abstract: A semiconductor device includes: a semiconductor substrate of silicon carbide of a first conductivity type; a silicon carbide epitaxial layer of the first conductivity type, which has been grown on the principal surface of the substrate; well regions of a second conductivity type, which form parts of the silicon carbide epitaxial layer; and source regions of the first conductivity type, which form respective parts of the well regions. A channel epitaxial layer of silicon carbide is grown over the well regions and source regions of the silicon carbide epitaxial layer. A portion of the channel epitaxial layer located over the well regions functions as a channel region. A dopant of the first conductivity type is implanted into the other portions and of the channel epitaxial layer except the channel region.
    Type: Grant
    Filed: October 10, 2008
    Date of Patent: July 19, 2011
    Assignee: Panasonic Corporation
    Inventors: Chiaki Kudou, Osamu Kusumoto, Koichi Hashimoto
  • Publication number: 20110169081
    Abstract: According to one embodiment, a semiconductor device includes a first semiconductor layer of a first conductivity type and a second semiconductor layer of a second conductivity type. The first semiconductor layer is formed with a trench. The second semiconductor layer is buried in the trench, and includes a hollow portion. A length of the hollow portion along depth direction of the trench is 5 ?m or less or 15 ?m or more.
    Type: Application
    Filed: January 7, 2011
    Publication date: July 14, 2011
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Hironori Ishikawa, Shinya Sato, Hiroyuki Sugaya, Tomoyuki Sakuma
  • Publication number: 20110169080
    Abstract: A charge-balance power device and a method of manufacturing the charge-balance power device are provided. The charge-balance power device includes: a charge-balance body region in which one or more first conductive type pillars as a first conductive type impurity region and one or more second conductive type pillars as a second conductive type impurity region are arranged; a first conductive type epitaxial layer that is formed on the charge-balance body region; and a transistor region that is formed in the first conductive type epitaxial layer. With this invention, it is possible to form the same charge-balance body region regardless of the structure of the transistor region formed on the top side of wafer.
    Type: Application
    Filed: December 14, 2010
    Publication date: July 14, 2011
    Inventors: Chong-Man YUN, Soo-Seong Kim, Kwang-Hoon Oh
  • Patent number: 7977739
    Abstract: Generally, a power MOSFET mainly includes an active region occupying most of an internal region (a region where a gate electrode made of polysilicon or the like is integrated), and a surrounding gate contact region (where the gate electrode made of polysilicon or the like is derived outside a source metal covered region to make contact with a gate metal) (see FIG. 65 in a comparative example). Since the gate electrode made of polysilicon or the like has a stepped portion existing between both regions, a focus margin may be reduced in a lithography step, including exposure or the like, for formation of a contact hole for a source or for a gate. The invention of the present application provides a semiconductor device having a trench gate type power MISFET with a gate electrode protruding from an upper surface of a semiconductor substrate, in which respective main upper surfaces of the gate electrode in an active region and a gate contact region are substantially at the same height.
    Type: Grant
    Filed: June 25, 2009
    Date of Patent: July 12, 2011
    Assignee: Renesas Electronics Corporation
    Inventor: Tsuyoshi Kachi
  • Patent number: 7977180
    Abstract: Methods for fabricating stressed MOS devices are provided. In one embodiment, the method comprises providing a silicon substrate having a P-well region and depositing a polycrystalline silicon gate electrode layer overlying the P-well region. P-type dopant ions are implanted into the polycrystalline silicon gate electrode layer to form a P-type implanted region and a first polycrystalline silicon gate electrode is formed overlying the P-well region. Recesses are etched into the P-well region using the first polycrystalline silicon gate electrode as an etch mask. The step of etching is performed by exposing the silicon substrate to tetramethylammonium hydroxide. A tensile stress-inducing material is formed within the recesses.
    Type: Grant
    Filed: December 8, 2008
    Date of Patent: July 12, 2011
    Assignee: GLOBALFOUNDRIES, Inc.
    Inventors: Andrew M. Waite, Andy C. Wei
  • Patent number: 7977737
    Abstract: A semiconductor device with inherent capacitances and method for its production. The semiconductor device has an inherent feedback capacitance between a control electrode and a first electrode. In addition, the semiconductor device has an inherent drain-source capacitance between the first electrode and a second electrode. At least one monolithically integrated additional capacitance is connected in parallel to the inherent feedback capacitance or in parallel to the inherent drain-source capacitance. The additional capacitance comprises a first capacitor surface and a second capacitor surface opposite the first capacitor surface. The capacitor surfaces are structured conductive layers of the semiconductor device on a front side of the semiconductor body, between which a dielectric layer is located and which form at least one additional capacitor.
    Type: Grant
    Filed: March 6, 2008
    Date of Patent: July 12, 2011
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Winfried Kaindl, Carolin Tolksdorf, Anton Mauder, Holger Kapels, Gerald Deboy, Franz Hirler
  • Patent number: 7977745
    Abstract: A power metal-oxide-semiconductor field effect transistor (MOSFET) cell includes a semiconductor substrate. A first electrode is disposed on the semiconductor substrate. A voltage sustaining layer is formed on the semiconductor substrate. A highly doped active zone of a first conductivity type is formed in the voltage sustaining layer opposite the semiconductor substrate. The highly doped active zone has a central aperture and a channel region that is generally centrally located within the central aperture. A terminal region of the second conductivity type is disposed in the voltage sustaining layer proximate the highly doped active zone. The terminal region has a central aperture with an opening dimension generally greater than an opening dimension of the central aperture of the highly doped zone. An extension region is disposed in the voltage sustaining region within the central aperture of the highly doped active zone.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: July 12, 2011
    Assignee: Third Dimension (3D) Semiconductor, Inc.
    Inventor: Fwu-Iuan Hshieh
  • Publication number: 20110163378
    Abstract: The present invention discloses a layout structure of a transistor unit of a power MOS transistor, wherein the layout structure comprises a drain area, a plurality of body areas, a plurality of source areas and a gate area. The plurality of body areas surround the drain area. The plurality of source areas extend from the perimeters of the plurality of body areas in an anisotropic manner. The gate area is disposed between the drain area and the plurality of source areas. The contacts of the drain area, the plurality of body areas and the plurality of source areas are all disposed on the same side of the layout structure.
    Type: Application
    Filed: January 6, 2010
    Publication date: July 7, 2011
    Applicant: PTEK TECHNOLOGY CO., LTD.
    Inventors: MING TANG, SHIH PING CHIAO
  • Patent number: 7973363
    Abstract: To provide a semiconductor device in which dielectric breakdown strength in a peripheral region is increased without increasing on-resistance. An IGBT comprises a body region, guard ring, and collector layer. The body region is formed within an active region in a surface layer of a drift layer. The guard ring is formed within a peripheral region in the surface layer of the drift layer, and surrounds the body region. The collector layer is formed at a back surface side of the drift layer, and is formed across the active region and the peripheral region. A distance F between a back surface of the guard ring and the back surface of the drift layer is greater than a distance between a back surface of the body region and the back surface of the drift layer. A thickness H of the collector layer in the peripheral region is smaller than a thickness D of the collector layer in the active region.
    Type: Grant
    Filed: November 5, 2008
    Date of Patent: July 5, 2011
    Assignee: Toyota Jidosha Kabushiki Kaisha
    Inventor: Masafumi Hara
  • Patent number: 7973362
    Abstract: A semiconductor component includes a semiconductor body having an edge with an edge zone of a first conductivity type. Charge compensation regions of a second conductivity type are embedded into the edge zone, with the charge compensation regions extending from a top side of the semiconductor component vertically into the semiconductor body. For the number Ns of charge carriers present in a volume Vs between two charge compensation regions that are adjacent in a direction perpendicular to the edge, and for the number Np of charge carriers present in a volume Vp between two charge compensation regions that are adjacent in a direction parallel to the edge, Np>Ns holds true.
    Type: Grant
    Filed: October 3, 2007
    Date of Patent: July 5, 2011
    Assignee: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Michael Rueb, Carolin Tolksdorf, Markus Schmitt
  • Patent number: 7968941
    Abstract: A semiconductor device includes: an epitaxial layer; a body layer, formed in the epitaxial layer, which includes a channel region; a source layer disposed in superposition on the body layer; a gate insulator, formed on the epitaxial layer, which is in a ring shape surrounding the source layer; a gate electrode formed through the gate insulator; a drift layer, formed in the epitaxial layer, which is in a ring shape surrounding the body layer; and a drain layer formed in the surface of the epitaxial layer and disposed opposite to the source layer. The body layer is disposed such that the boundary surface at an end in the gate-width direction is in contact with the undersurface of the gate insulator. The gate insulator has a thick film portion thicker than a part above the channel region in the gate-length direction at least in a part where the gate insulator is in contact with the boundary surface of the body layer at the end in the gate-width direction.
    Type: Grant
    Filed: March 27, 2009
    Date of Patent: June 28, 2011
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Kazunori Fujita, Tomio Yamashita, Haruki Yoneda, Kazuhiro Sasada
  • Patent number: 7968940
    Abstract: Double gate IGBT having both gates referred to a cathode in which a second gate is for controlling flow of hole current. In on-state, hole current can be largely suppressed. While during switching, hole current is allowed to flow through a second channel. Incorporating a depletion-mode p-channel MOSFET having a pre-formed hole channel that is turned ON when 0V or positive voltages below a specified threshold voltage are applied between second gate and cathode, negative voltages to the gate of p-channel are not used. Providing active control of holes amount that is collected in on-state by lowering base transport factor through increasing doping and width of n well or by reducing injection efficiency through decreasing doping of deep p well. Device includes at least anode, cathode, semiconductor substrate, n? drift region, first & second gates, n+ cathode region; p+ cathode short, deep p well, n well, and pre-formed hole channel.
    Type: Grant
    Filed: September 27, 2007
    Date of Patent: June 28, 2011
    Assignee: Anpec Electronics Corporation
    Inventor: Florin Udrea
  • Patent number: 7968942
    Abstract: The present invention provides a semiconductor apparatus having high reliability with respect to a withstand voltage, leakage characteristics, etc. by disposing a structure of preventing stress occurring by metal wiring from directly acting on a trench relating to the semiconductor apparatus having a trench gate.
    Type: Grant
    Filed: October 29, 2008
    Date of Patent: June 28, 2011
    Assignee: Panasonic Corporation
    Inventors: Tatsumi Kumekawa, Mitsuhiro Hamada, Shuji Mizokuchi
  • Patent number: RE42864
    Abstract: A power semiconductor device includes a substrate having an upper surface and a lower surface. A source region of first conductivity is formed within a well region of second conductivity. The source region is provided proximate to the upper surface of the substrate. The well region has a non-polygon design. A gate electrode overlies the upper surface of the substrate. A drain electrode is provided proximate to the lower surface of the substrate.
    Type: Grant
    Filed: January 17, 2006
    Date of Patent: October 25, 2011
    Assignee: IXYS Corporation
    Inventors: Vladimir Tsukanov, Nathan Zommer