In Complementary Field Effect Transistor Integrated Circuit Patents (Class 257/357)
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Patent number: 6646309Abstract: Employing an electrostatic discharge (ESD) trigger to trigger the MOS transistors (i.e., the ESD fingers) within a CMOS device to provide substantially more uniform turn-on voltages for the MOS transistors, resulting in better ESD device performance without employing selective salicide blocking, is disclosed. A semiconductor device has an ESD trigger and a number of ESD fingers. The turn on voltage of the ESD trigger is less than the turn on voltage of the ESD fingers, such that the ESD fingers turn on substantially uniformly after the ESD trigger turns on during an ESD event. The semiconductor device is substantially fabricated without employing salicide blocking.Type: GrantFiled: October 17, 2002Date of Patent: November 11, 2003Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.Inventor: Chung-Hui Chen
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Patent number: 6639265Abstract: A semiconductor device having improved reliability is provided. The semiconductor device has a pixel portion. The pixel portion has a TFT and a storage capacitor. The TFT and the storage capacitor has a semiconductor layer which includes first and second regions formed continuously. The TFT has the first region of the semiconductor layer including a channel forming region, a source region and a drain region located outside the channel forming region, a gate insulating film adjacent to the first region of the semiconductor layer, and a gate electrode formed on the gate insulating film. The storage capacitor has the second region of the semiconductor layer, an insulating film formed adjacent to the second region of the semiconductor layer, and a capacitor wiring formed on the insulating film. The second region of the semiconductor layer contains an impurity element for imparting n-type or p-type conductivity.Type: GrantFiled: January 25, 2001Date of Patent: October 28, 2003Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Tatsuya Arao, Hideomi Suzawa
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Patent number: 6630715Abstract: A structure and method for a field effect transistor capable of handling high currents, comprises interleaved source and drain diffusion regions with drain diffusion contacts to a first metal level over the drain diffusions only; while a second metal level covers the full width of the device and takes current out of the source in a primarily vertical direction.Type: GrantFiled: October 1, 2001Date of Patent: October 7, 2003Assignee: International Business Machines CorporationInventors: Scott M. Parker, Steven J. Tanghe
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Patent number: 6627956Abstract: A semiconductor switching device of mirror logic includes two FETs having a gate width of 600 &mgr;m, a common input terminal, two control terminal and two output terminals. The resistors connecting the control terminals and the gate electrodes of FETs are placed underneath a pad metal layer extending from the common input terminal. Both FETs extend into the space between the control terminals and the output terminals. The device can be housed in the same package as the device of non-mirror logic.Type: GrantFiled: June 7, 2002Date of Patent: September 30, 2003Assignee: Sanyo Electric Co., Ltd.Inventors: Tetsuro Asano, Toshikazu Hirai, Mikito Sakakibara
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Patent number: 6624479Abstract: A protective circuit in a semiconductor device includes a protective n-channel MOS transistor connected between the power source line and the ground line, with the gate and drain being connected together, and an n-p-n transistor having a base connected to the source of the protective n-channel MOS transistor and connected between the power source line and the ground line. The protective circuit disposed in a low-voltage semiconductor device has a lower power dissipation due to a low junction leakage current.Type: GrantFiled: April 18, 2001Date of Patent: September 23, 2003Assignee: NEC Electronics CorporationInventor: Koichi Sawahata
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Patent number: 6621108Abstract: Disclosed herein is a semiconductor device wherein a thyristor protective element and a trigger element are provided in a semiconductor layer formed on a buried insulating layer, and a trigger electrode (gate) of the thyristor protective element and a back gate of the trigger element are provided in the same p well and electrically connected to each other to thereby drive the thyristor protective element based on a substrate current produced by the breakdown of the trigger element.Type: GrantFiled: March 13, 2001Date of Patent: September 16, 2003Assignees: Hitachi, Ltd., Hitachi ULSI Systems Co., Ltd.Inventors: Yoshiyasu Tashiro, Nobuhiro Kasa, Kousuke Okuyama, Hiroyasu Ishizuka
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Patent number: 6611051Abstract: Wire bonding or printed wiring board leads or, alternatively, lead frames or equivalents thereof are used to electrically connect external electrodes of high withstand voltage capacitors formed on a plurality of semiconductor chips. A driver circuit for signal transmission or receiver circuit for signal receipt formed on the semiconductor chips are electrically connected with substrate-side electrodes of said high withstand voltage capacitors, causing the plurality of semiconductor chips to be received within either a single package or a single module. Using this arrangement, a semiconductor device is capable of achieving both dielectricity and size reduction.Type: GrantFiled: September 28, 2001Date of Patent: August 26, 2003Assignee: Hitachi, Ltd.Inventors: Noboru Akiyama, Minehiro Nemoto, Seigou Yukutake, Yasuyuki Kojima, Kazuyuki Kamegaki
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Patent number: 6611027Abstract: A metal-oxide-semiconductor protection transistor is formed in an active region of a semiconductor layer. The active region includes source and drain diffusion layers, which may be partly silicided, and a body region. A gate electrode extends across the active region above the body region. The breakdown voltage in the edge areas of the active regions is increased by increasing the gate length in the edge areas, by increasing the width of the active region below the gate electrode, or by increasing the non-silicided length of the source and drain diffusion layers in the edge areas. The edge areas of the active region are thereby protected from thermal damage during electrostatic discharges.Type: GrantFiled: May 8, 2002Date of Patent: August 26, 2003Assignee: Oki Electric Industry Co., Ltd.Inventor: Kenji Ichikawa
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Patent number: 6611024Abstract: An integrated microelectronics semiconductor circuit fabricated on a silicon-on-insulator (SOI) type substrate can be protected from unwanted current surges and excessive heat buildup during fabrication by means of a heat-dissipating, protective plasma-induced-damage (PID) diode. The present invention fabricates such a protective diode as a part of the overall scheme in which the transistor devices are formed.Type: GrantFiled: September 6, 2001Date of Patent: August 26, 2003Assignee: Chartered Semiconductor Manufacturing Ltd.Inventors: Ting Cheong Ang, Shyue Fong Quek, Sang Yee Loong, Jun Song
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Patent number: 6608365Abstract: An on-chip decoupling capacitor cell is disclosed that is compatible with standard CMOS cells. A cell boundary defining the area of the cell includes a first transistor area and a second transistor area. A PMOS transistor having an n-well is formed within the first transistor area. The on-chip decoupling capacitor cell further includes an n-well extension that extends the n-well into the second transistor area, thereby providing a decoupling capacitor cell having reduced leakage compared to a CMOS capacitor cell, and increased capacitance per unit area compare with a traditional PMOS capacitor cell.Type: GrantFiled: June 4, 2002Date of Patent: August 19, 2003Assignee: LSI Logic CorporationInventors: Weidan Li, Benjamin Mbouombouo, Johann Leyrer
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Patent number: 6600197Abstract: In forming a pair of impurity regions in an active layer, an intrinsic or substantially intrinsic region having a double-sided comb shape is also formed by using a proper mask. The intrinsic or substantially intrinsic region is composed of a portion that effectively functions as a channel forming region and portions in which a channel is not formed and which function as heat sinks. The heat dissipation effect is improved because the heat sinks are formed by the same material as the channel forming region.Type: GrantFiled: November 10, 1999Date of Patent: July 29, 2003Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Setsuo Nakajima, Takeshi Fukunaga
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Patent number: 6600198Abstract: A semiconductor device having high ESD resistance includes an internal circuit, an I/O pad, a division circuit connected to a lead-in line connecting the internal circuit and the I/O pad for outputting an electric signal from first and second terminals corresponding to an electric signal applied to the lead-in line and a clamp circuit including an MOS transistor for cutting off conduction when a difference in voltage between electric signals sent between the terminals is smaller in absolute value than a threshold voltage of the MOS transistor, and conducts when the absolute value is at least equal to the threshold voltage.Type: GrantFiled: September 6, 2001Date of Patent: July 29, 2003Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Takahiro Ohnakado, Satoshi Yamakawa
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Patent number: 6597021Abstract: A protection circuit for protecting a semiconductor device from being damaged due to an excessively high applied voltage, includes a P-type MOS transistor provided between an external input-output terminal and a power supply line, an N-type MOS transistor provided between the P-type MOS transistor and a ground line, a first thyristor provided between the external input-output terminal and the ground line, the anode portion being connected to the external input-output terminal side, and the cathode portion being connected to the ground line, a second thyristor provided between the power supply line and the ground line, the anode portion being connected to the power supply line, and the cathode portion being connected to the ground line, and a resistance portion provided at a predetermined location of a conductor extending from a branch node between the P-type and N-type MOS transistors to the power supply line via the P-type MOS transistor.Type: GrantFiled: October 31, 2001Date of Patent: July 22, 2003Assignee: Sharp Kabushiki KaishaInventors: Eiji Aoki, Hidechika Kawazoe
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Publication number: 20030116806Abstract: An input protection circuit capable of precisely bypassing a surge current to a power source terminal and protecting the gate of a protective transistor from an electrostatic surge. The input protection circuit has an input terminal which receives an input signal, a first power source terminal which receives a first power source electric potential, and a first protective power source potential line connected to the first power source terminal for supplying the first power source electric potential to an input protection circuit. The input protection circuit has a first input protection transistor of a first conductive type having a drain connected to the input terminal, a gate and a source connected to the first protective power source potential line.Type: ApplicationFiled: December 20, 2002Publication date: June 26, 2003Applicant: Oki Electric Industry Co., Ltd.Inventor: Katsuhiro Kato
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Patent number: 6583518Abstract: A dual-polycide semiconductor structure and method for forming the same having reduced dopant cross-diffusion. A conductive layer is formed over a polysilicon layer having a first region doped with a first dopant and a second region adjoining the first region at an interface doped with a second dopant. A region of discontinuity is then formed in the conductive layer located away from the interface. The conductive layer formed over the polysilicon gate overlaps the interface to provide electrical continuity between the first and second regions of the polysilicon gate, but also includes a region of discontinuity to reduce dopant cross-diffusion.Type: GrantFiled: August 31, 2001Date of Patent: June 24, 2003Assignee: Micron Technology, Inc.Inventors: Jigish D. Trivedi, Zhongze Wang, Todd R. Abbott, Chih-Chen Cho
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Patent number: 6583475Abstract: An NMOS transistor circuit has a surge protection circuit connected in parallel with the NMOS transistor. A resistor is connected between a back gate of the NMOS transistor and ground. As a result, an input impedance higher than the input impedance of the surge protection circuit is applied to a semiconductor terminal at the electrode pad side of the NMOS transistor.Type: GrantFiled: June 4, 2001Date of Patent: June 24, 2003Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Chikao Makita, Kunihiko Karasawa
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Patent number: 6576959Abstract: A semiconductor circuit for multi-voltage operation having built-in electrostatic discharge (ESD) protection is described, comprising a drain extended nMOS transistor and a pnpn silicon controlled rectifier (SCR) merged with the transistor so that a dual npn structure is created and both the source of the transistor and the cathode of the SCR are connected to electrical ground potential, forming a dual cathode, whereby the ESD protection is enhanced. The rectifier has a diffusion region, forming an abrupt junction, resistively coupled to the drain, whereby the electrical breakdown-to-substrate of the SCR can be triggered prior to the breakdown of the nMOS transistor drain. The SCR has anode and cathode regions spaced apart by semiconductor surface regions and insulating layers positioned over the surface regions with a thickness suitable for high voltage operation and ESD protection.Type: GrantFiled: September 5, 2001Date of Patent: June 10, 2003Assignee: Texas Instruments IncorporatedInventors: Keith E. Kunz, Charvaka Duvvury, Hisashi Shichijo
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Patent number: 6576960Abstract: An electrostatic discharge protection device is formed in a substrate and contains a drain area of a first dopant concentration abutting an extended drain area having a dopant concentration lower than the first dopant concentration. Similarly, a highly doped source area abuts a lower doped source extension area. The source and drain are laterally bounded by oxide regions and covered by an insulation layer. The areas of lower doping prevent charge crowding during an electrostatic discharge event by resistively forcing current though the nearly planer bottom surface of the drain, rather than the curved drain extension. In addition, a highly doped buried layer can abut an area of a graded doping level. By adjusting the doping levels of the graded areas and the buried layers, the substrate breakdown voltage is pre-selected.Type: GrantFiled: March 11, 2002Date of Patent: June 10, 2003Assignee: Micron Technology, Inc.Inventors: Stephen R. Porter, Manny K. Ma, Stephen Casper, Kevin Duesman
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Patent number: 6576961Abstract: An embodiment of the invention is a doped region within the silicon substrate 20 of an integrated circuit where the silicon substrate 10 separates the doped region into at least two sub-regions 40, 50. Another embodiment of the invention is a method of manufacturing an integrated circuit where any logic element is formed in a doped region. The doped region containing the logic element is separated into at least two sub-regions 40, 50 by the silicon substrate 10 of the integrated circuit.Type: GrantFiled: April 24, 2002Date of Patent: June 10, 2003Assignee: Texas Instruments IncorporatedInventor: Vikas I. Gupta
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Patent number: 6566717Abstract: An electrostatic discharge (ESD) protection circuit for protecting an internal device from an ESD is disclosed. The ESD protection circuit includes an NMOS transistor connected to a ground voltage terminal having silicide layers on a gate electrode and on source/drain regions thereof; and a PMOS transistor having a gate electrode connected to a ground voltage terminal and connecting the NMOS transistor to a pad.Type: GrantFiled: September 7, 2001Date of Patent: May 20, 2003Assignee: Hynix Semiconductor Inc.Inventor: Jong-Chuck Jung
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Publication number: 20030089953Abstract: The present disclosure relates that by modifying the masking layer normally utilized for complimentary type tub development to provide one or more additional openings arranged in close proximity to the drain area of a selected power device of the non-complimentary type, that the dopant profile may be modified to provide a greater voltage breakdown exclusively for that selected power device without affecting similar type logic circuit non-complimentary devices as found within the same integrated circuit chip. Furthermore, this is accomplished without the need for providing an additional mask or additional process steps to supplement and thereby disturb a given predefined process set for the fabrication of semiconductor devices.Type: ApplicationFiled: May 23, 2002Publication date: May 15, 2003Applicant: Xerox CorporationInventors: Shelby F. Nelson, Alan D. Raisanen
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Publication number: 20030089952Abstract: The present disclosure relates that by modifying the masking layer normally utilized for complimentary type tub development to provide one or more additional openings arranged in close proximity to the drain area of a selected power device of the non-complimentary type, that the dopant profile may be modified to provide a greater voltage breakdown exclusively for that selected power device without affecting similar type logic circuit non-complimentary devices as found within the same integrated circuit chip. Furthermore, this is accomplished without the need for providing an additional mask or additional process steps to supplement and thereby disturb a given predefined process set for the fabrication of semiconductor devices.Type: ApplicationFiled: November 13, 2001Publication date: May 15, 2003Applicant: Xerox Corporation.Inventors: Shelby F. Nelson, Alan D. Raisanen
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Patent number: 6559507Abstract: In a n+ snapback device, saturation current is limited by using one or more NLDD current blocking regions.Type: GrantFiled: June 29, 2001Date of Patent: May 6, 2003Assignee: National Semiconductor CorporationInventors: Vladislav Vashchenko, Andy Strachan
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Patent number: 6555877Abstract: A semiconductor device (10,50) is disclosed which can accommodate a negative voltage on its source using a P-type substrate (12) which is connected to ground potential. A first embodiment illustrates a device which can handle high voltage applications as well as a negative voltage applied to the source. A drain contact region (29) is recessed by a dimension (X) from a first insulated region (18). The dimension (X) provides for an optimum distance for high voltage applications while avoiding lateral surface punch-through. A second embodiment illustrates a gate structure (52) having a shape which surrounds a drain contact region (62) and accommodates a high voltage application while also eliminating the lateral surface punch-through. The drain contact region (62) is formed in a P-type region (20) centered inside the gate structure (52).Type: GrantFiled: August 27, 2001Date of Patent: April 29, 2003Assignee: Semiconductor Components Industries LLCInventors: Mohamed Imam, Raj Nair, Mohammed Tanvir Quddus, Masaru Suzuki, Takeshi Ishiguro, Jefferson W. Hall
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Patent number: 6552399Abstract: Described are structures for a device with a controllable dummy layer which can provide a low controllable trigger voltage and can be used as a first triggered device in ESD protection networks. A controllable dummy layer diode is provided which is structured as a butting diode with a dummy polysilicon layer above the butting region. The dummy polysilicon layer functions as an STI block to remove the STI between the n+ and p+ regions of the diode. In one embodiment the diode has the function of a controllable gate with a punchthrough-like-trigger, in which a capacitor-couple circuit couples a portion of the ESD voltage into the gate of the diode to provide a gate voltage.Type: GrantFiled: February 7, 2002Date of Patent: April 22, 2003Assignee: Chartered Semiconductor Manufacturing Ltd.Inventors: Cai Jun, Lo Keng Foo
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Patent number: 6552372Abstract: An MOS integrated circuit, such as an input-output buffer, exhibits improved resistance to damage from electrostatic discharge (ESD) by balancing the ESD current flow through active and inactive sections of drivers. Better balance of the ESD current flow is achieved by increasing the width and length of nulti-finger channels of semiconductor material defining the gates of the drivers in the active section. Wider, longer gates of the drivers in the active section increase their ability to carry current, thereby resulting in a more symmetrical distribution of ESD current between the active and inactive sections without degrading the IC's normal performance.Type: GrantFiled: April 5, 2001Date of Patent: April 22, 2003Assignee: Taiwan Semiconductor Manufacturing Co., LtdInventors: Yi-Hsun Wu, Jian-Hsing Lee, Shui-Hung Chen, Jian-Ren Shih
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Patent number: 6548868Abstract: In a ESD protection clamp, breakdown and triggering voltage of the structure are reduced by introducing an internal zener diode structure that has a lower avalanche breakdown than the p-n junction of the ESD device. This introduces extra holes into the source junction region causing electrons to be injected into the junction and into the drain junction region to increase the carrier multiplication rate to increase the current density and lower the triggering voltage and breakdown voltage of devices such as NMOS devices or LVTSCRs.Type: GrantFiled: June 11, 2001Date of Patent: April 15, 2003Assignee: National Semiconductor Corp.Inventors: David Tsuei, Vladislav Vashchenko
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Publication number: 20030057487Abstract: A semiconductor chip comprises a base substrate, a bulk device region having a bulk growth layer on a part of the base substrate, an SOI device region having a buried insulator on the base substrate and a silicon layer on the buried insulator, and a boundary layer located at the boundary between the bulk device region and the SOI device region. The bulk device region has a first device-fabrication surface in which a bulk device is positioned on the bulk growth layer. The SOI device region has a second device-fabrication surface in which an SOI device is positioned on the silicon layer. The first and second device-fabrication surfaces are positioned at a substantially uniform level.Type: ApplicationFiled: November 29, 2001Publication date: March 27, 2003Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Takashi Yamada, Hajime Nagano, Ichiro Mizushima, Tsutomu Sato, Hisato Oyamatsu, Shinichi Nitta
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Patent number: 6538288Abstract: An electrostatic discharge (ESD) protection structure for an integrated circuit constructed on a substrate of a first type is provided to includes a plurality of island-like distributed diffusion regions. The protection structure includes a semiconductor controlled rectifier (SCR), an MOS transistor and a plurality of island-like distributed diffusion regions of the first type. The semiconductor controlled rectifier is constructed on the base region and coupled to the integrated circuit. The SCR includes a first region of a second type formed next to the base region, a second region of the first type formed in the first region, and a third region of the second type formed in the base region. The MOS transistor has a drain coupled to the bonding pad or a VDD bus, and a gate and a source both coupled to a reference ground. The plurality of island-like distributed diffusion regions of the first type are formed in the base region and each is coupled to the reference ground.Type: GrantFiled: November 29, 2000Date of Patent: March 25, 2003Assignee: Winbond Electronics Corp.Inventors: Shu-Chuan Lee, Yu-Chen Lin
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Publication number: 20030052368Abstract: An input protection circuit is provided which has a high electrostatic discharge (ESD) breakdown voltage and can input a signal in a wide positive and negative voltage range. In a surface layer of a substrate, a well and a field insulating film are formed. An emitter region is formed in the well to form a lateral bipolar transistor having the well as its base. Another emitter region is formed in the surface layer of the substrate to form another lateral bipolar transistor having the well as its collector. A gate electrode layer is formed on the field insulating film between the well and the other emitter region to form a MOS transistor. The emitter region is connected to an input terminal, the well is connected to the gate electrode layer, and the other emitter region and substrate are connected to a ground potential.Type: ApplicationFiled: September 16, 2002Publication date: March 20, 2003Applicant: Yamaha CorporationInventors: Nobuaki Tsuji, Terumitsu Maeno
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Patent number: 6534833Abstract: The invention comprises a semiconductor device with protection circuitry and a method of protecting an integrated circuit from electrostatic discharge. One aspect of the invention is a semiconductor device with protection circuitry which comprises an integrated circuit having at least one bond pad. A protection circuit is electrically connected to the bond pad and is operable to prevent damage to the integrated circuit during an electrostatic discharge event. The protection circuit comprises a first MOSFET having a first gate electrode connected in series with a second MOSFET having a second gate electrode wherein the first gate electrode and second gate electrode are commonly controlled in response to an electrostatic discharge event.Type: GrantFiled: March 18, 1998Date of Patent: March 18, 2003Assignee: Texas Instruments IncorporatedInventors: Charvaka Duvvury, Michael D. Chaine, Puvvada Venugopal
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Patent number: 6528842Abstract: An Electrically Erasable Programmable Read Only Memory (EEPROM) cell uses a single standard NMOS (or PMOS) transistor with its gate connected to a Metal-Insulator-Metal, or Poly-Insulator-Poly capacitor such that a floating gate is formed. The floating gate is programmed and erased via Fowler-Nordheim tunneling.Type: GrantFiled: December 31, 2001Date of Patent: March 4, 2003Assignee: Jet City Electronics, Inc.Inventors: Thomas M. Luich, David Byrd
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Patent number: 6524893Abstract: An electrostatic discharge protection device according to the present invention is provided at an input or an output of a semiconductor integrated circuit for protecting an internal circuit of the semiconductor integrated circuit from an electrostatic surge flowing into or out of the semiconductor integrated circuit. The electrostatic discharge protection device includes: a thyristor; and a trigger diode for triggering the thyristor with a low voltage. The trigger diode includes: an n-type cathode high impurity concentration region; a p-type anode high impurity concentration region; and an insulator section for electrically insulating a silicide layer formed on a surface of the n-type cathode high impurity concentration region from another silicide layer formed on a surface of the p-type anode high impurity concentration region.Type: GrantFiled: December 5, 2001Date of Patent: February 25, 2003Assignee: Sharp Kabushiki KaishaInventors: Hidechika Kawazoe, Eiji Aoki, Sheng Teng Hsu, Katsumasa Fujii
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Patent number: 6521951Abstract: Inter power supply surge voltage transmitting diode element is formed by a buried layer formed in a semiconductor substrate, a well region formed on the buried layer with its bottom portion being in contact with the buried layer, and impurity regions of mutually different conductivity types formed apart from each other at the surface of the well region. One of the impurity regions is electrically coupled to a first power supply line on which a surge voltage generates, and the other is electrically coupled to a second power supply line absorbing the surge voltage. The surge transmitting element includes a plurality of elements arranged parallel to each other between the first and second power supply lines. The second power supply line supplies the power supply voltage to an internal circuitry which consumes relatively small current.Type: GrantFiled: April 17, 2002Date of Patent: February 18, 2003Assignee: Mitsubishi Denki Kabushiki KaishaInventors: Hirotashi Sato, Shigeki Ohbayashi
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Patent number: 6515337Abstract: An input protection circuit capable of precisely bypassing a surge current to a power source terminal and protecting the gate of a protective transistor from an electrostatic surge. The input protection circuit has an input terminal which receives an input signal, a first power source terminal which receives a first power source electric potential, and a first protective power source potential line connected to the first power source terminal for supplying the first power source electric potential to an input protection circuit. The input protection circuit has a first input protection transistor of a first conductive type having a drain connected to the input terminal, a gate and a source connected to the first protective power source potential line.Type: GrantFiled: February 15, 2000Date of Patent: February 4, 2003Assignee: Oki Electric Industry Co., Ltd.Inventor: Katsuhiro Kato
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Patent number: 6507074Abstract: An ESD protection structure for I/O pads is formed with well resistors underlying the active areas of a transistor The well resistors are coupled in series with the active areas and provide additional resistance which is effective in protecting the transistor from ESD events. Metal conductors over the active areas, have a plurality of contacts to the active areas formed through an insulative layer to contact the active areas. Additional active areas adjacent to the active areas of the transistor are also coupled to the well resistors, and to a conductive layer which provides a conductor to the I/O pads. The active areas are silicided to reduce their resistance and increase the switching speed of the transistor. The n-well resistors are coupled in series to provide a large resistance with respect to that of the active areas to reduce the impact of ESD events.Type: GrantFiled: August 30, 2001Date of Patent: January 14, 2003Assignee: Micron Technology, Inc.Inventors: Stephen L. Casper, Manny K. F. Ma, Joseph C. Sher
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Patent number: 6504216Abstract: An electrostatic discharge protective circuit. The electrostatic discharge protective circuit includes a gate electrode. A drain is formed at one side of the gate electrode. A source is formed at another side of the gate electrode, wherein the gate electrode, the drain and the source together form a transistor. A plurality of isolation structures penetrates through the gate electrode and respectively isolates the drain and the source into a plurality of drain regions and source regions. A plurality of contacts is respectively formed on the gate electrode, the drain regions and the source regions, wherein each drain region and each source region respectively have at least one contact.Type: GrantFiled: July 24, 2000Date of Patent: January 7, 2003Assignee: United Microelectronics Corp.Inventors: Tien-Hao Tang, Chen-Chung Hsu
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Patent number: 6501136Abstract: A multi-gate-finger MOSFET structure positions the gate element over a channel between drain and source diffusion regions, such that the entire structure is within the active region in a substrate. The gate/channel-to-drain and gate/channel-to-source diffusion edges are effectively continuous along the gate/channel layout, so as to cascade the snap-back action to enhance uniform turn on of the entire gate element during an ESD event. In addition, multiple poly-gate extensions are incorporated to reduce the gate resistance, thereby minimizing the propagation delay of the gate signal.Type: GrantFiled: September 16, 1997Date of Patent: December 31, 2002Assignee: Winbond Electronics CorporationInventor: Shi-Tron Lin
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Patent number: 6498357Abstract: A method for forming a lateral SCR device for on-chip ESD protection in shallow-trench-isolation CMOS process is provided. In the present lateral SCR device, the shallow trench isolation among the current conduction path of the lateral SCR device is removed and instead of a dummy gate. Thereby, the SCR device has a narrower anode-to-cathode spacing, and then the lateral SCR device can be turned on more quickly to protect the CMOS IC's in ESD events. Additionally, the silicon area of the substrate occupied by the lateral SCR device is also saved. This method for forming a lateral SCR device without shallow-trench-isolation regions in its current path can be fully process-compatible to general CMOS technologies by only changing layout patterns in the mask layers.Type: GrantFiled: February 9, 2001Date of Patent: December 24, 2002Assignee: United Microelectronics Corp.Inventors: Ming-Dou Ker, Chyh-Yih Chang, Tien-Hao Tang
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Patent number: 6492686Abstract: Buffering circuitry (10) uses pull-up slew rate control circuitry (12) and pull-down slew rate control circuitry (14) to control the rising and falling slew rates of an output signal (50) provided by buffering circuitry (10). Pull-up slew rate control circuitry (12) and pull-down slew rate control circuitry (14) may be used in an embodiment of buffering circuitry (10) which provides a higher output voltage VHIGH than the standard power voltage VPOWER which is used to power most of the circuitry. Buffering circuitry (10) utilizes distributed resistive elements (89-91) to provide improved electrostatic discharge protection. Buffering circuitry (10) utilizes a low power level shifter (16). Voltage reference generation circuitry (18) may be used to provide a stable low power reference voltage VREF (42).Type: GrantFiled: January 7, 2000Date of Patent: December 10, 2002Assignee: Motorola, Inc.Inventors: Bernard J. Pappert, Roger A. Whatley
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Publication number: 20020175378Abstract: A SOI substrate having an etch stopping layer, a SOI integrated circuit fabricated on the SOI substrate, and a method of fabricating both are provided. The SOI substrate includes a supporting substrate, an etch stopping layer staked on the supporting substrate, a buried oxide layer and a semiconductor layer sequentially stacked on the etch stopping layer. The etch stopping layer preferably has an etch selectivity with respect to the buried oxide layer. A device isolation layer is preferably formed to define active regions. The device isolation, buried oxide and etch-stop layers are selectively removed to form first and second holes exposing the supporting substrate without damaging it. Semiconductor epitaxial layers grown on the exposed supporting substrate therefore have single crystalline structures without crystalline defects. Thus, when impurity regions are formed at surfaces of the epitaxial layers, a high performance PN diode having a superior leakage current characteristic may be formed.Type: ApplicationFiled: November 21, 2001Publication date: November 28, 2002Inventors: Tae-Hee Choe, Nae-In Lee, Geum-Jong Bae, Sang-Su Kim, Hwa-Sung Rhee
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Publication number: 20020167052Abstract: An integrated circuit device that includes a semiconductor substrate, a well region formed inside the semiconductor substrate, a first isolation structure contiguous with the well region, a second isolation structure contiguous with well region and spaced apart from the first isolation structure, a dielectric layer disposed over the well region and the first and second isolation structures, and a layer of silicon, formed over the dielectric layer, including a first p-type portion, a first n-type portion contiguous with the first p-type portion, a second p-type portion, and a second n-type portion contiguous with the second p-type portion, wherein at least a portion of the first p-type and first n-type portions overlap the first isolation structure and at least a portion of the second p-type and second n-type portions overlap the second isolation structure.Type: ApplicationFiled: May 10, 2001Publication date: November 14, 2002Applicant: Industrial Technology InstituteInventors: Chyh-Yih Chang, Ming-Dou Ker, Hsin-Chin Jiang
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Patent number: 6479870Abstract: A electrostatic discharge (ESD) device with salicide layers isolated by a shallow trench isolation in order to save one salicide block photomask. A shallow trench isolation is formed in drain region to isolate a portion of the drain region, so that the drain region is partitioned into two parts. A salicide layer is formed on the drain region. Since the salicide layer is not formed on the shallow trench isolation, without using an additional photomask, the salicide layer on the drain region is partitioned into two parts. The effect of the local thermal energy occurring to drain junction upon the contact metal of the drain region is eliminated.Type: GrantFiled: November 21, 2000Date of Patent: November 12, 2002Assignee: United Microelectronics Corp.Inventors: Shiao-Shien Chen, Tien-Hao Tang, Shiang Huang-Lu
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Patent number: 6479883Abstract: An electrostatic discharge protection circuit formed between an input/output pad and an internal circuit that can be applied to a silicon-on-insulator type of MOSFET. The protection circuit includes two n-type tunneling source-body contact devices connected in a series to form two sets of parasitic diode/zener diode pairs that serve as electrostatic discharge routes. When an excessive positive voltage or negative voltage is applied, one of the n-type tunneling source-body contact devices becomes a conductive NMOS transistor forming a discharge route for electrostatic charges. Meanwhile, the other n-type device operates reversely and acts like a zener diode when a definite voltage is exceeded. The zener diode, together with a parasitic diode, provides another discharge route for electrostatic charges.Type: GrantFiled: June 2, 2000Date of Patent: November 12, 2002Assignee: United Microelectronics Corp.Inventors: Shiao-Shien Chen, Tien-Hao Tang
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Patent number: 6469342Abstract: A silicon nitride read-only memory that prevents the antenna effect is described. The structure of the silicon nitride read-only memory includes a word-line, an electron-trapping layer and a metal protection layer. The word line covers the substrate. The electron-trapping layer is positioned between the word line and the substrate. The metal protection line covers the substrate and electrically connects the word line to a grounding doped region in the substrate. Moreover, the resistance of the metal protection line is higher than that of the word line. The charges generated during the manufacturing process are conducted to the substrate through the metal protection line. The resistance of the metal protection line is also higher than that of the word line. The metal protection line can be burnt out by a high current after the completion of the manufacturing process to ensure a normal operation for the read-only memory.Type: GrantFiled: November 20, 2001Date of Patent: October 22, 2002Assignee: Macronix International Co., Ltd.Inventors: Tung-Cheng Kuo, Chien-Hung Liu, Shyi-Shuh Pan, Shou-Wei Hung
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Patent number: 6469351Abstract: A Vss-side off transistor is often used in an electrostatic breakdown prevention circuit having an NMOS transistor. In such a circuit, the state of connection of the transistor ensures that off-leak current has a significant influence on the standby current, which is particularly noticeable when the circuit is used in a semiconductor device running at low power consumption. In such case, since the threshold voltage of a MOS transistor forming the semiconductor device is made as low as possible, the sub-threshold leak current in the electrostatic breakdown prevention circuit is large. To prevent this, the NMOS transistor forming the electrostatic breakdown prevention circuit is formed with a P type gate electrode for the purpose of increasing its threshold voltage by about 1.1 V as compared with that if the gate electrode of the NMOS transistor were to have an N type gate electrode.Type: GrantFiled: June 1, 1999Date of Patent: October 22, 2002Assignee: Seiko Instruments Inc.Inventor: Yoichi Mimuro
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Publication number: 20020140037Abstract: An electrostatic discharge (ESD) protection circuit for protecting an internal device from an ESD is disclosed. The ESD protection circuit includes an NMOS transistor connected to a ground voltage terminal having silicide layers on a gate electrode and on source/drain regions thereof; and a PMOS transistor having a gate electrode connected to a ground voltage terminal and connecting the NMOS transistor to a pad.Type: ApplicationFiled: September 7, 2001Publication date: October 3, 2002Inventor: Jong-Chuck Jung
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Patent number: 6455902Abstract: An ESD power clamp circuit provides ESD protection for semiconductor chips through a power clamping device. The power clamping device includes a FET and a bipolar element, formed in an isolation region, and a buried diffusion. The buried diffusion is used as a subcollector for the bipolar element, and is used as an isolation for the FET.Type: GrantFiled: December 6, 2000Date of Patent: September 24, 2002Assignee: International Business Machines CorporationInventor: Steven H. Voldman
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Patent number: 6455895Abstract: A semiconductor integrated circuit having an input protection device which is suitable for receiving inputs of signals having voltages higher than the internal power supply voltage is provided. The input protection device consists of an offset NMOS transistor in which one of heavily doped N-type diffusion layers is electrically connected to a signal input terminal of the semiconductor integrated circuit. In the NMOS transistor, the field isolation structure is a trench structure, and the heavily doped N-type diffusion layers are offset from the gate electrode. Since a parasitic bipolar action easily occurs according to this construction, the protective function against overcurrent caused by static electricity or the like is not impaired. Since signal voltages are by no means applied directly to the gate oxide of the protection device during normal operation, signals with voltages higher than the internal power supply voltage can be input.Type: GrantFiled: April 21, 1999Date of Patent: September 24, 2002Assignee: NEC CorporationInventor: Yasuyuki Morishita
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Patent number: 6455897Abstract: A semiconductor device, including an electrostatic discharge protection circuit capable of preventing current from being concentrated in a hot spot through a silicide layer, includes an N-type MOS transistor having a first diffusion region on a semiconductor substrate. This N-type MOS transistor is isolated from another MOS transistor by a first element isolation region. A second diffusion region is formed between the first diffusion region and first element isolation region. The first and second diffusion regions are separated by a second element isolation region. A silicide is formed on the surface of the semiconductor substrate excluding the first and second element isolation regions. A pad is connected to the second N-type diffusion region through a contact.Type: GrantFiled: May 30, 2001Date of Patent: September 24, 2002Assignee: Seiko Epson CorporationInventors: Kazuhiko Okawa, Takayuki Saiki