Combined With Passive Components (e.g., Resistors) Patents (Class 257/379)
-
Patent number: 8101985Abstract: Capacitors are formed in metallization layers of semiconductor device in regions where functional conductive features are not formed, more efficiently using real estate of integrated circuits. The capacitors may be stacked and connected in parallel to provide increased capacitance, or arranged in arrays. The plates of the capacitors are substantially the same dimensions as conductive features, such as conductive lines or vias, or are substantially the same dimensions as fill structures of the semiconductor device.Type: GrantFiled: October 26, 2010Date of Patent: January 24, 2012Assignee: Infineon Technologies AGInventor: Matthias Hierlemann
-
Publication number: 20120012943Abstract: The present invention provides an anti-fuse of a semiconductor device and a method of manufacturing the same, which has a stable current level and a stable operation. According to the present invention, in order for the anti-fuse to be stably operated, a region in which a gate and an active region partially overlap with each other is formed, and the overlapped region is destroyed when voltage is supplied. Accordingly, a current level can be stabilized, and stable operation is possible.Type: ApplicationFiled: July 12, 2011Publication date: January 19, 2012Applicant: Hynix Semiconductor Inc.Inventor: Yong Sun JUNG
-
Patent number: 8097520Abstract: A passive device structure includes an unpatterned metal gate layer formed in a passive device region of a semiconductor device; an insulator layer formed upon the unpatterned metal gate layer; a semiconductor layer formed upon the insulator layer; and one or more metal contact regions formed in the semiconductor layer; wherein the insulator layer prevents the metal gate layer as serving as a leakage current path for current flowing through a passive device defined by the semiconductor layer and the one or more metal contact regions.Type: GrantFiled: August 19, 2009Date of Patent: January 17, 2012Assignee: International Business Machines CorporationInventors: Huiming Bu, Satya N. Chakravarti, Dechao Guo, Keith Kwong Hon Wong
-
Patent number: 8093118Abstract: A semiconductor structure and a method of forming the same are provided. The semiconductor structure includes a substrate, a resistor and a metal gate structure. The substrate has a first area and a second area. The resistor is disposed in the first area, wherein the resistor does not include any metal layer. The metal gate structure is disposed in the second area.Type: GrantFiled: June 26, 2009Date of Patent: January 10, 2012Assignee: United Microelectronics Corp.Inventors: Kun-Szu Tseng, Che-Hua Hsu, Cheng-Wen Fan, Chih-Yu Tseng, Victor Chiang Liang
-
Publication number: 20120001269Abstract: According to one embodiment, a semiconductor device including a field-effect transistor, and a resistance element connected between a gate electrode of the field effect transistor and a connection point connected between a back gate electrode of the field effect transistor and one of source-drain regions of the field effect transistor, a voltage being applied between the other of the source-drain regions and the gate electrode.Type: ApplicationFiled: March 18, 2011Publication date: January 5, 2012Applicant: Kabushiki Kaisha ToshibaInventors: Yuki NAKAMURA, Takehito IKIMURA
-
Patent number: 8089136Abstract: A semiconductor device of the invention has a plurality of resistor elements formed on an element isolating oxide film in predetermined regions on a surface of a semiconductor substrate. Active regions are furnished close to the resistor elements. This allows the element isolating oxide film near the resistor elements to be divided into suitable strips, forestalling a concave formation at the center of the element isolating oxide film upon polishing of the film by CMP and thereby enhancing dimensional accuracy of the resistor elements upon fabrication.Type: GrantFiled: September 27, 2010Date of Patent: January 3, 2012Assignee: Renesas Electronics CorporationInventors: Hiroyuki Amishiro, Toshio Kumamoto, Motoshige Igarashi, Kenji Yamaguchi
-
Publication number: 20110316090Abstract: A boost converter for high power and high output voltage applications includes a low voltage controller integrated circuit and a high voltage, vertical, discrete field effect transistor, both of which are packed in a single package on separate electrically isolated die pads.Type: ApplicationFiled: September 1, 2011Publication date: December 29, 2011Applicant: ALPHA & OMEGA SEMICONDUCTOR, LTD.Inventors: ALLEN CHANG, Wai-Keung Peter Cheng
-
Patent number: 8084830Abstract: The memory cell is located at respective intersections between the first wirings and the second wirings. Each of the memory cells has a rectifier element and a variable resistance element connected in series. The rectifier element includes a p type first semiconductor region, and a n type second semiconductor region. The first semiconductor region is formed of, at least in part, silicon-germanium mixture (Si1-xGex (0<x<=1)). The second semiconductor region is formed of silicon (Si).Type: GrantFiled: September 9, 2009Date of Patent: December 27, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Hiroshi Kanno, Kenichi Murooka, Jun Hirota, Hideyuki Tabata
-
Patent number: 8084314Abstract: A first insulation film is provided on a semiconductor substrate. A high resistance element formed from polysilicon is provided on the first insulation film. A second insulation film is provided on the high resistance element. A hydrogen diffusion preventing film having a hydrogen diffusion coefficient smaller than that of the second insulation film is provided on the second insulation film. The hydrogen diffusion preventing film covers a part of the high resistance element.Type: GrantFiled: August 11, 2010Date of Patent: December 27, 2011Assignee: Panasonic CorporationInventors: Hidenori Iwadate, Takeshi Kobiki
-
Patent number: 8084829Abstract: The invention relates to a semiconductor device (10) comprising a semiconductor body (1) with a high-ohmic semi-conductor substrate (2) which is covered with a dielectric layer (3, 4) containing charges, on which dielectric layer one or more passive electronic components (20) comprising conductor tracks (20) are provided, wherein, at the location of the passive elements (20), a region (5) is present at the interface between the semiconductor substrate (2) and the dielectric layer (3, 4), as a result of which the conductivity of an electrically conducting channel induced in the device (10) by the charges is limited at the location of the region (5). According to the invention, the region (5) is formed by deposition and comprises a semi-insulating material. As a result, the device (10) has a very low high-frequency power loss because the inversion channel is formed in the semi-insulating region (5).Type: GrantFiled: April 20, 2005Date of Patent: December 27, 2011Assignee: NXP B.V.Inventors: Wibo D. Van Noort, Petrus H. C. Magnee, Lis K. Nanver, Celine J. Detcheverry, Ramon J. Havens
-
Patent number: 8080852Abstract: The semiconductor device includes a first MIS transistor including a gate insulating film 92, a gate electrode 108 formed on the gate insulating film 92 and source/drain regions 154, a second MIS transistor including a gate insulating film 96 thicker than the gate insulating film 92, a gate electrode 108 formed on the gate insulating film 96, source/drain regions 154 and a ballast resistor 120 connected to one of the source/drain regions 154, a salicide block insulating film 146 formed on the ballast resistor 120 with an insulating film 92 thinner than the gate insulating film 96 interposed therebetween, and a silicide film 156 formed on the source/drain regions 154.Type: GrantFiled: December 10, 2010Date of Patent: December 20, 2011Assignee: Fujitsu Semiconductor LimitedInventors: Tomohiko Tsutsumi, Taiji Ema, Hideyuki Kojima, Toru Anezaki
-
Publication number: 20110303988Abstract: A level shift circuit includes: a pair of first and second P-channel transistors which are connected in a flip-flop manner and whose sources connected to a first power supply line; a pair of first and second N-channel transistors with the first N-channel transistor provided between the first P-channel transistor and a second power supply line and the second N-channel transistor provided between the second P-channel transistor and the second power supply line, in which input signals complementary to each other are inputted to their gates; and a current supply circuit provided between the first power supply line and a drain of the first N-channel transistor and between the first power supply line and a drain of the second N-channel transistor, respectively.Type: ApplicationFiled: September 10, 2010Publication date: December 15, 2011Applicant: Elpida Memory, Inc.Inventors: Chiaki Dono, Koji Kuroki
-
Patent number: 8077509Abstract: A magnetic memory is provided with a memory cell. The memory cell includes a magnetic recording element, an interconnection to generate a radio-frequency current-induced magnetic field and a ground line. The magnetic recording element is provided with a first magnetic layer whose magnetization direction is substantially fixed, a magnetic recording layer whose magnetization direction is substantially reversed by spin-polarized electrons passing through the magnetic recording layer and a first nonmagnetic layer provided between the first magnetic layer and the magnetic recording layer. The interconnection is provided above the magnetic recording element to generate a radio-frequency current-induced magnetic field acting in a direction substantially perpendicular to a magnetization easy axis of the magnetic recording layer. The ground line is provided on a side opposite to the magnetic recording element with respect to the interconnection.Type: GrantFiled: February 10, 2009Date of Patent: December 13, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Satoshi Yanagi, Yuichi Ohsawa, Shiho Nakamura, Daisuke Saida, Hirofumi Morise
-
Patent number: 8071461Abstract: Electronic elements (44, 44?, 44?) having an active device region (46) and integrated passive device (IPD) region (60) on a common substrate (45) preferably include a composite dielectric region (62, 62?, 62?) in the IPD region underlying the IPD (35) to reduce electromagnetic (E-M) (33) coupling to the substrate (45). Mechanical stress created by plain dielectric regions (36?) and its deleterious affect on performance, manufacturing yield and occupied area may be avoided by providing electrically isolated inclusions (65, 65?, 65?) in the composite dielectric region (62, 62?, 62?) of a material having a thermal expansion coefficient (TEC) less than that of the dielectric material (78, 78?, 78?) in the composite dielectric region (62, 62?, 62?). For silicon substrates (45), non-single crystal silicon is suitable for the inclusions (65, 65?, 65?) and silicon oxide for the dielectric material (78, 78?, 78?).Type: GrantFiled: December 4, 2008Date of Patent: December 6, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Xiaowei Ren, Wayne R. Burger, Colin Kerr, Mark A. Bennett
-
Patent number: 8072014Abstract: A memory unit includes a resistive sense memory cell configured to switch between a high resistance state and a low resistance state upon passing a current through the resistive sense memory cell and a semiconductor transistor in electrical connection with the resistive sense memory cell. The semiconductor transistor includes a gate element formed on a substrate. The semiconductor transistor includes a source contact and a bit contact. The gate element electrically connects the source contact and the bit contact. The resistive sense memory cell electrically is connected to the bit contact. The source contact is more heavily implanted with dopant material then the bit contact.Type: GrantFiled: October 13, 2010Date of Patent: December 6, 2011Assignee: Seagate Technology LLCInventors: Chulmin Jung, Maroun Georges Khoury, Yong Lu, Young Pil Kim
-
Patent number: 8071457Abstract: A precision low capacitance resistor is formed, e.g., in a bulk substrate. An embodiment includes forming a source/drain region on a substrate, patterning a portion of the source/drain region to form segments, etching the segments to substantially separate an upper section of each segment from a lower section of each segment, and filling the space between the segments with an insulating material. The resulting structure maintains electrical connection between the segments at end pads, but separates the resistor segments from the bottom substrate, thereby avoiding capacitive coupling with the substrate.Type: GrantFiled: January 7, 2010Date of Patent: December 6, 2011Assignee: GLOBALFOUNDRIES Inc.Inventor: Steven R. Soss
-
Patent number: 8063448Abstract: A memory device includes a multi gate field effect transistor (MuGFET) having a fin with a contact area. A programmable memory element abuts the fin contact area.Type: GrantFiled: March 16, 2007Date of Patent: November 22, 2011Assignee: Infineon Technologies AGInventors: Christian Pacha, Tim Schönauer, Michael Kund
-
Patent number: 8053846Abstract: A transistor includes: a semiconductor substrate; a channel region arranged on the semiconductor substrate; a source and a drain respectively arranged on either side of the channel region; and a conductive nano tube gate arranged on the semiconductor substrate to transverse the channel region between the source and the drain. Its method of manufacture includes: arranging a conductive nano tube on a surface of a semiconductor substrate; defining source and drain regions having predetermined sizes and traversing the nano tube; forming a metal layer on the source and drain regions; removing a portion of the metal layer formed on the nano tube to respectively form source and drain electrodes separated from the metal layer on either side of the nano tube; and doping a channel region below the nano tube arranged between the source and drain electrodes by ion-implanting.Type: GrantFiled: July 12, 2007Date of Patent: November 8, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Seung-Nam Cha, Jae-Eun Jang, Jae-Eun Jung, Yong-Wan Jin, Byong-Gwon Song
-
Publication number: 20110266633Abstract: In a replacement gate approach, the semiconductor material or at least a significant portion thereof in a non-transistor structure, such as a precision resistor, an electronic fuse and the like, may be preserved upon replacing the semiconductor material in the gate electrode structures. To this end, an appropriate dielectric material may be provided at least prior to the removal of the semiconductor material in the gate electrode structures, without requiring significant modifications of established replacement gate approaches.Type: ApplicationFiled: December 8, 2010Publication date: November 3, 2011Applicant: GLOBALFOUNDRIES Inc.Inventors: Sven Beyer, Klaus Hempel, Roland Stejskal, Andy Wei, Thilo Scheiper, Andreas Kurz, Uwe Griebenow, Jan Hoentschel
-
Patent number: 8044450Abstract: A semiconductor device comprising a resistance element with a high resistance and high resistance accuracy and a non-volatile semiconductor storage element is rationally realized by comprising the non-volatile semiconductor storage element comprising a first isolation formed to isolate a first semiconductor area, a first insulator, and a first electrode in a self-aligned manner, and a second electrode, and the resistance element comprising a second isolation formed to isolate a second semiconductor area, a third insulator and a conductor layer in a self-aligned manner, and third and fourth electrodes formed on each end of the conductor layer via a fourth insulator, and connected with the conductor layer. The conductor layer or the third and fourth electrodes include the same material with the first or second electrode, respectively.Type: GrantFiled: July 6, 2005Date of Patent: October 25, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Mitsuhiro Noguchi, Susumu Yoshikawa, Koichi Fukuda
-
Publication number: 20110241124Abstract: A semiconductor-based electronic fuse may be provided in a sophisticated semiconductor device having a bulk configuration by appropriately embedding the electronic fuse into a semiconductor material of reduced heat conductivity. For example, a silicon/germanium fuse region may be provided in the silicon base material. Consequently, sophisticated gate electrode structures may be formed on the basis of replacement gate approaches on bulk devices substantially without affecting the electronic characteristics of the electronic fuses.Type: ApplicationFiled: November 8, 2010Publication date: October 6, 2011Applicant: GLOBALFOUNDRIES Inc.Inventors: Andreas Kurz, Andy Wei, Christoph Schwan
-
Patent number: 8030155Abstract: A method of forming a rectifying diode. The method comprises providing a first semiconductor region of a first conductivity type and having a first dopant concentration and forming a second semiconductor region in the first semiconductor region. The second semiconductor region has the first conductivity type and having a second dopant concentration greater than the first dopant concentration. The method also comprises forming a conductive contact to the first semiconductor region and forming a conductive contact to the second semiconductor region. The rectifying diode comprises a current path, and the path comprises: (i) the conductive contact to the first semiconductor region; (ii) the first semiconductor region; (iii) the second semiconductor region; and (iv) the conductive contact to the second semiconductor region. The second semiconductor region does not extend to a layer buried relative to the first semiconductor region.Type: GrantFiled: May 12, 2008Date of Patent: October 4, 2011Assignee: Texas Instruments IncorporatedInventors: Vladimir F. Drobny, Derek W. Robinson
-
Patent number: 8030712Abstract: A method for protecting a circuit component on a semiconductor substrate from a plasma etching or other removal process includes forming a screening layer over an auxiliary layer to conceal at least an area of the auxiliary layer that overlays at least a portion of the circuit component, such as for example a high-ohmic poly resistor. The method transfers a pattern defined by a mask onto the screening layer by selectively removing portions of the screening layer in accordance with the pattern. Portions of the auxiliary layer that are not protected by the screening layer are removed using a plasma gas selective to the auxiliary layer material, without removing the area of the auxiliary layer that overlays the portion of the circuit component, thereby protecting the circuit component from the plasma gas via the screening layer and auxiliary layer.Type: GrantFiled: November 24, 2009Date of Patent: October 4, 2011Assignees: STMicroelectronics, Inc., STMicroelectronics SAInventors: Olivier Le Neel, Olivier Girard, Fabio Ferrari
-
Publication number: 20110227167Abstract: The present disclosure provides reduced substrate coupling for inductors in semiconductor devices. A method of fabricating a semiconductor device having reduced substrate coupling includes providing a substrate having a first region and a second region. The method also includes forming a first gate structure over the first region and a second gate structure over the second region, wherein the first and second gate structures each include a dummy gate. The method next includes forming an inter layer dielectric (ILD) over the substrate and forming a photoresist (PR) layer over the second gate structure. Then, the method includes removing the dummy gate from the first gate structure, thereby forming a trench and forming a metal gate in the trench so that a transistor may be formed in the first region, which includes a metal gate, and an inductor component may be formed over the second region, which does not include a metal gate.Type: ApplicationFiled: March 16, 2010Publication date: September 22, 2011Applicant: Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")Inventors: Harry Hak-Lay Chuang, Ming Zhu, Lee-Wee Teo
-
Patent number: 8018027Abstract: A flip-bonded dual-substrate inductor includes a base substrate, a first inductor body portion provided on a surface of the base substrate, a cover substrate, a second inductor body portion provided on a surface of a cover substrate, and a nanoparticle bonding material provided between the base substrate surface and the cover substrate surface to electrically connect the first inductor body portion and the second inductor body portion. A method for fabricating a flip-bonded dual-substrate inductor including forming a first inductor body portion on a surface of a base substrate, forming a second inductor body portion on a surface of a cover substrate, and attaching the base substrate surface to the cover substrate surface using a nanoparticle bonding material that electrically connects the first inductor body portion and the second inductor body portion.Type: GrantFiled: October 30, 2009Date of Patent: September 13, 2011Assignee: Murata Manufacturing Co., Ltd.Inventors: Tatsuo Rao Bizen, Yinon Degani, Kunquan Sun
-
Patent number: 8017474Abstract: A process of forming an electronic device can include forming a capacitor dielectric layer over a base region, wherein the base region includes a base semiconductor material, forming a gate dielectric layer over a substrate, forming a capacitor electrode over the capacitor dielectric layer, forming a gate electrode over the gate dielectric layer, and forming an input terminal and an output terminal to the capacitor electrode. The input terminal and the output terminal can be spaced apart from each other and are connected to different components within the electronic device. A filter can include the base region, the capacitor dielectric layer, and the capacitor electrode. A transistor structure can include the gate dielectric layer and the gate electrode. An electronic device can include a low-pass filter and a transistor structure, such as an n-channel transistor or a p-channel transistor.Type: GrantFiled: June 5, 2008Date of Patent: September 13, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Fabio Duarte de Martin, Fabio de Lacerda, Alfredo Olmos
-
Patent number: 8013385Abstract: A semiconductor device of the present invention has a first contact and a second contact which are located over a device isolation film so as to be opposed with each other, and have a length in the horizontal direction larger than the height; a first electro-conductive pattern located on the first contact and is formed in at least a single interconnect layer; a second electro-conductive pattern located on the second contact so as to be opposed with the first electro-conductive pattern; and an interconnect formed in an upper interconnect layer which is located above the first electro-conductive pattern and the second electro-conductive pattern, so as to be located in a region above the first electro-conductive pattern and the second electro-conductive pattern.Type: GrantFiled: December 7, 2009Date of Patent: September 6, 2011Assignee: Renesas Electronics CorporationInventors: Masayuki Furumiya, Yasutaka Nakashiba
-
Patent number: 8008699Abstract: Parasitic inductance of the main circuit of a power source unit is reduced. In a non-insulated DC-DC converter having a circuit in which a power MOSFET for high side switch and a power MOSFET for low side switch are connected in series, the power MOSFET for high side switch and the power MOSFET for low side switch are formed of n-channel vertical MOSFETs, and a source electrode of the power MOSFET for high side switch and a drain electrode of the power MOSFET for low side switch are electrically connected via the same die pad.Type: GrantFiled: March 10, 2010Date of Patent: August 30, 2011Assignee: Renesas Electronics CorporationInventors: Takayuki Hashimoto, Noboru Akiyama, Masaki Shiraishi, Tetsuya Kawashima
-
Patent number: 8004023Abstract: A semiconductor device having a semiconductor substrate including a first region and a second region is provided. The semiconductor device further includes a gate electrode on the first region and having a first sidewall and a second sidewall, a first source region in the first region proximate to the first sidewall, a first drain region in the first region proximate to the second sidewall, an upper electrode on the second region and having a first sidewall and a second sidewall, a second source region in the second region proximate to the first sidewall of the upper electrode, and a second drain region in the second region proximate to the second sidewall of the upper electrode, wherein an impurity doping concentration of the first source region and the first drain region is greater than an impurity doping concentration of the second source region and the second drain region.Type: GrantFiled: December 13, 2007Date of Patent: August 23, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Dae-won Ha, Tae-hyun An, Min-young Shim
-
Publication number: 20110198704Abstract: A power switch with active snubber. In accordance with a first embodiment, an electronic circuit includes a first power semiconductor device and a second power semiconductor device coupled to the first power semiconductor device. The second power semiconductor device is configured to oppose ringing of the first power semiconductor device.Type: ApplicationFiled: July 1, 2010Publication date: August 18, 2011Applicant: VISHAY SILICONIXInventor: Kyle Terrill
-
Patent number: 7998830Abstract: A semiconductor device having a core device with a high-k gate dielectric and an I/O device with a silicon dioxide or other non-high-k gate dielectric, and a method of fabricating such a device. A core well and an I/O well are created in a semiconductor substrate and separated by an isolation structure. An I/O device is formed over the I/O well and has a silicon dioxide or a low-k gate dielectric. A resistor may be formed on an isolation structure adjacent to the core well. A core-well device such as a transistor is formed over the core well, and has a high-k gate dielectric. In some embodiments, a p-type I/O well and an n-type I/O well are created. In a preferred embodiment, the I/O device or devices are formed prior to forming the core device and protected with a sacrificial layer until the core device is fabricated.Type: GrantFiled: December 6, 2010Date of Patent: August 16, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Long Cheng, Sheng-Chen Chung, Kong-Beng Thei, Harry Chuang, Mong-Song Liang
-
Patent number: 7994576Abstract: A method for fabricating metal gate transistor and resistor is disclosed. The method includes the steps of: providing a substrate having a transistor region and a resistor region; forming a shallow trench isolation in the substrate of the resistor region; forming a tank in the shallow trench isolation of the resistor region; forming at least one gate in the transistor region and a resistor in the tank of the resistor region; and transforming the gate into a metal gate transistor.Type: GrantFiled: June 22, 2009Date of Patent: August 9, 2011Assignee: United Microelectronics Corp.Inventors: Chih-Yu Tseng, Chien-Ting Lin, Kun-Szu Tseng, Cheng-Wen Fan, Victor-Chiang Liang
-
Patent number: 7994464Abstract: A pixel cell array architecture having a dual conversion gain. A dual conversion gain element is coupled between a floating diffusion region and a respective storage capacitor. The dual conversion gain element having a control gate switches in the capacitance of the capacitor to change the conversion gain of the floating diffusion region from a first conversion gain to a second conversion gain. In order to increase the efficient use of space, the dual conversion gain element gate also functions as the bottom plate of the capacitor. In one particular embodiment of the invention, a high dynamic range transistor is used in conjunction with a pixel cell having a capacitor-DCG gate combination; in another embodiment, adjacent pixels share pixel components, including the capacitor-DCG combination.Type: GrantFiled: February 12, 2010Date of Patent: August 9, 2011Assignee: Micron Technology, Inc.Inventor: Jeffrey A. McKee
-
Patent number: 7994630Abstract: According to one embodiment, a power transistor package includes an electrically conductive flange configured to be connected to a source of a power transistor device. The package further includes a first terminal mechanically fastened to the flange and configured to be electrically connected to a gate of the power transistor device and a second terminal mechanically fastened to the flange and configured to be electrically connected to a drain of the power transistor device. The package also includes a bus bar mechanically fastened to the flange which extends between and connects at least two different DC bias terminals mechanically fastened to the flange. The bus bar is configured to be electrically connected to the drain via one or more RF grounded connections.Type: GrantFiled: February 9, 2009Date of Patent: August 9, 2011Assignee: Infineon Technologies AGInventors: Cynthia Blair, Donald Fowlkes
-
Patent number: 7989896Abstract: A method of fabricating a semiconductor device according to one embodiment includes: laying out a first region, a second region, a third region and a fourth region on a semiconductor substrate by forming an element isolation region in the semiconductor substrate; forming a first insulating film on the first region and the second region; forming a first semiconductor film on the first insulating film; forming a second insulating film and an aluminum oxide film thereon on the fourth region after forming of the first semiconductor film; forming a third insulating film and a lanthanum oxide film thereon on the third region after forming of the first semiconductor film; forming a high dielectric constant film on the aluminum oxide film and the lanthanum oxide film; forming a metal film on the high dielectric constant film; forming a second semiconductor film on the first semiconductor film and the metal film; and patterning the first insulating film, the first semiconductor film, the second insulating film, the alType: GrantFiled: November 4, 2009Date of Patent: August 2, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Tomonori Aoyama, Seiji Inumiya, Kazuaki Nakajima, Takashi Shimizu
-
Patent number: 7989895Abstract: Example embodiments of the invention may provide for a multi-package system. The multi-package system may include a first package having a plurality of first organic dielectric layers, where the first package includes at least one first conductive layer positioned between two of the plurality of first organic dielectric layers, and where the at least one first conductive layer is circuitized to form at least one first passive device. The multi-package system may also include a second package having a plurality of second organic dielectric layers, where the second package includes at least one second conductive layer positioned between two of the plurality of second organic dielectric layers, and where the at least one second conductive layer is circuitized to form at least one second passive device. An electrical connector may be provided between a bottom surface of the first package and a top surface of the second package to electrically connect the first package and the second package.Type: GrantFiled: November 15, 2007Date of Patent: August 2, 2011Assignee: AVX CorporationInventors: George E. White, Sidharth Dalmia
-
Patent number: 7989790Abstract: A memory comprises a number of word lines in a first direction, a number of bit lines in a second direction, each coupled to at least one of the word lines, and a number of memory elements, each coupled to one of the word lines and one of the bit lines. Each memory element comprises a top electrode for connecting to a corresponding word line, a bottom electrode for connecting to a corresponding bit line, a resistive layer on the bottom electrode, and at least two separate liners, each liner having resistive materials on both ends of the liner and each liner coupled between the top electrode and the resistive layer.Type: GrantFiled: January 18, 2007Date of Patent: August 2, 2011Assignee: MACRONIX International Co., Ltd.Inventors: Erh-Kun Lai, Chiahua Ho, Kuang-Yeu Hsieh
-
Publication number: 20110175174Abstract: A semiconductor device includes a semiconductor body of a first semiconductive material. A transistor is disposed in the semiconductor body. The transistor includes source and drain regions of a second semiconductive material embedded in the semiconductor body. A resistor overlies a top surface of the semiconductor body and is laterally spaced from the transistor. The resistor is formed from the second semiconductive material.Type: ApplicationFiled: March 31, 2011Publication date: July 21, 2011Applicant: Infineon Technologies AGInventors: Knut Stahrenberg, Jin-Ping Han
-
Publication number: 20110175152Abstract: An integrated circuit is provided that includes a fully depleted semiconductor device and a capacitor present on a semiconductor on insulator (SOI) substrate. The fully depleted semiconductor device may be a finFET semiconductor device or a planar semiconductor device. In one embodiment, the integrated circuit includes a substrate having a first device region and a second device region. The first device region of the substrate includes a first semiconductor layer that is present on a buried insulating layer. The buried insulating layer that is in the first device region is present on a second semiconductor layer of the substrate. The second device region includes the second semiconductor layer, but the first semiconductor layer and the buried insulating layer are not present in the second device region. The first device region includes the fully depleted semiconductor device. A capacitor is present in the second device region.Type: ApplicationFiled: January 19, 2010Publication date: July 21, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Roger A. Booth, JR., Kangguo Cheng, Bruce B. Doris, Ghavam G. Shahidi
-
Patent number: 7977754Abstract: A semiconductor device and method for fabricating a semiconductor device is disclosed. The semiconductor device comprises a semiconductor substrate; an active region of the substrate, wherein the active region includes at least one transistor; and a passive region of the substrate, wherein the passive region includes at least one resistive structure disposed on an isolation region, the at least one resistive structure in a lower plane than the at least one transistor.Type: GrantFiled: August 29, 2008Date of Patent: July 12, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry Chuang, Kong-Beng Thei
-
Patent number: 7973385Abstract: A semiconductor device including a doped substrate of a first doping polarity and a doped semiconductor material of a second doping polarity. The semiconductor material is on, or in, the substrate, and the second doping polarity is opposite the first doping polarity such that the semiconductor material and the substrate form a diode. The semiconductor device further includes an inductor on or above the semiconductor material, and a pattern in the semiconductor material for reducing eddy currents. The pattern includes a doped semiconductor material of the first doping polarity and a least one trench within the doped semiconductor material of the first doping polarity, wherein, at least at a depth at which the trench is closest to the inductor, the doped semiconductor material of the first doping polarity fully surrounds the trench so that, at least at the depth, the trench does not touch the doped semiconductor material of the second doping polarity.Type: GrantFiled: July 23, 2007Date of Patent: July 5, 2011Assignee: X-Fab Semiconductor Foundries AGInventors: Paul Stribley, Christopher Lee, John Ellis
-
Publication number: 20110156161Abstract: A semiconductor device including a substrate, a first device, a second device and an interlayer dielectric layer is provided. The substrate has a first area and a second area. The first device is disposed in the first area of the substrate and includes a first dielectric layer on the substrate and a metal gate on the first dielectric layer. The second device is in the second area of the substrate and includes a second dielectric layer on the substrate and, a polysilicon layer on the second dielectric layer. It is noted that the height of the polysilicon layer is less than that of the metal gate of the first device. The interlayer dielectric layer covers the second device.Type: ApplicationFiled: December 29, 2009Publication date: June 30, 2011Applicant: UNITED MICROELECTRONICS CORP.Inventors: Kun-Szu Tseng, Cheng-Wen Fan, Chih-Yu Tseng, Victor Chiang Liang
-
Publication number: 20110156162Abstract: In sophisticated semiconductor devices comprising high-k metal gate electrode structures formed on the basis of a replacement gate approach, semiconductor-based resistors may be provided without contributing to undue process complexity in that the resistor region is recessed prior to depositing the semiconductor material of the gate electrode structure. Due to the difference in height level, a reliable protective dielectric material layer is preserved above the resistor structure upon exposing the semiconductor material of the gate electrode structure and removing the same on the basis of selective etch recipes. Consequently, well-established semiconductor materials, such as polysilicon, may be used for the resistive structures in complex semiconductor devices, substantially without affecting the overall process sequence for forming the sophisticated replacement gate electrode structures.Type: ApplicationFiled: October 19, 2010Publication date: June 30, 2011Inventors: RALF RICHTER, JENS HEINRICH, ANDY WEI
-
Publication number: 20110156119Abstract: Semiconductor memory devices and methods of forming the same are provided, the semiconductor memory devices include a first and a second buried gate respectively disposed on both inner sidewalls of a groove formed in an active portion and a device isolation pattern. The first and second buried gates are controlled independently from each other.Type: ApplicationFiled: November 1, 2010Publication date: June 30, 2011Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Woo Chung, Kang-Uk Kim, Yongchul Oh, Hui-Jung Kim, Hyun-Gi Kim
-
Publication number: 20110147853Abstract: The present invention provides a method of integrating an electrical fuse process into a high-k/metal gate process. The method simultaneously forms a dummy gate stack of a transistor and a dummy gate stack of an e-fuse; and simultaneously removes the polysilicon of the dummy gate stack in the transistor region and the polysilicon of the dummy gate stack in the e-fuse region. Thereafter, the work function metal layer disposed in the opening of the e-fuse region is removed; and the opening in the transistor region and the opening in the e-fuse region with metal conductive structures are filled to form an e-fuse and a metal gate of a transistor.Type: ApplicationFiled: December 18, 2009Publication date: June 23, 2011Inventors: Yung-Chang Lin, Kuei-Sheng Wu, Chang-Chien Wong
-
Patent number: 7964919Abstract: An integrated circuit includes a first thin film resistor on a first dielectric layer. A first layer of interconnect conductors on the first dielectric layer includes a first and second interconnect conductors electrically contacting the first thin film resistor. A second dielectric layer is formed on the first dielectric layer. A second thin film resistor is formed on the second dielectric layer. A third dielectric layer is formed on the second dielectric layer. A second layer of interconnect conductors on the third dielectric layer includes a third interconnect conductor extending through an opening in the second and third dielectric layers to contact the first interconnect conductor, a fourth interconnect conductor extending through an opening in the second and third dielectric layers to contact the second interconnect conductor, and two interconnect conductors extending through openings in the third dielectric layer of the second thin film resistor.Type: GrantFiled: July 21, 2008Date of Patent: June 21, 2011Assignee: Texas Instruments IncorporatedInventors: Eric W. Beach, Vladimir F. Drobny, Derek W. Robinson
-
Publication number: 20110140185Abstract: In a semiconductor integrated circuit device, testing pads (209b) using a conductive layer, such as relocation wiring layers (205) are provided just above or in the neighborhood of terminals like bonding pads (202b) used only for probe inspection at which bump electrodes (208) are not provided. Similar testing pads may be provided even with respect to terminals like bonding pads provided with bump electrodes. A probe test is executed by using these testing pads or under the combined use of under bump metallurgies antecedent to the formation of the bump electrodes together with the testing pads. According to the above, bump electrodes for pads dedicated for probe testing may not be added owing to the use of the testing pads. Further, the use of testing pads provided in the neighborhood of the terminals like the bonding pads and smaller in size than the under bump metallurgies enables a probe test to be executed after a relocation wiring process.Type: ApplicationFiled: February 22, 2011Publication date: June 16, 2011Applicant: RENESAS ELECTRONICS CORPORATIONInventors: Asao Nishimura, Syouji Syukuri, Gorou Kitsukawa, Toshio Miyamoto
-
Publication number: 20110133290Abstract: A semiconductor device of high reliability and element-integrating performance, has a substrate (silicon substrate), a first trench made in the silicon substrate, a passive element layer buried in the first trench, and a first insulating film (silicon nitride film) arranged between the first trench and the passive element layer. The passive element layer projects upwardly relative to the substrate, and so too preferably the adjacent insulating film. An active element is formed such that its gate electrode, which is preferably fully silicided, has an upper end at a level higher than the upper surface of the passive element film.Type: ApplicationFiled: December 6, 2010Publication date: June 9, 2011Applicant: Renesas Electronics CorporationInventor: Satoru MURAMATSU
-
Publication number: 20110108926Abstract: In a gated anti-fuse, an anode is separated from a cathode by an oxide layer and the anode or cathode voltage is controlled by the control gate of a transistor like structure connected to the anode or cathode.Type: ApplicationFiled: November 12, 2009Publication date: May 12, 2011Inventor: Sandeep R. Bahl
-
Patent number: 7939874Abstract: A semiconductor device has semiconductor elements formed on a silicon substrate. A first one of the semiconductor elements has a region formed with a surface orientation of <100>. A second one of the semiconductor elements has a region formed with a surface orientation of <110>or <111>. A third one of the semiconductor elements has a region formed with a surface orientation different from the respective surface orientations of the regions of the first and second semiconductor elements.Type: GrantFiled: February 5, 2008Date of Patent: May 10, 2011Assignee: Seiko Instruments Inc.Inventor: Hitomi Sakurai