Insulated Gate Field Effect Transistors Of Different Threshold Voltages In Same Integrated Circuit (e.g., Enhancement And Depletion Mode) Patents (Class 257/392)
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Patent number: 8174081Abstract: A extractor implanted region is used in a silicon-on-insulator CMOS memory device. The extractor region is reversed biased to remove minority carriers from the body region of partially depleted memory cells. This causes the body region to be fully depleted without the adverse floating body effects.Type: GrantFiled: May 3, 2011Date of Patent: May 8, 2012Assignee: Micron Technology, Inc.Inventor: Leonard Forbes
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Patent number: 8174049Abstract: A semiconductor device according to one embodiment includes: a semiconductor substrate having first and second regions; a first transistor comprising a first gate insulating film and a first gate electrode thereon in the first region on the semiconductor substrate, the first gate insulating film comprising a first interface layer containing nitrogen atoms and a first high dielectric constant layer thereon; a second transistor comprising a second gate insulating film and a second gate electrode thereon in the second region on the semiconductor substrate, the second gate insulating film comprising a second interface layer and a second high dielectric constant layer thereon, the second interface layer containing nitrogen atoms at an average concentration lower than that of the first interface layer or not containing nitrogen atoms, and the second transistor having a threshold voltage different from that of the first transistor; and an element isolation region on the semiconductor substrate, the element isolationType: GrantFiled: December 1, 2009Date of Patent: May 8, 2012Assignee: Kabushiki Kaisha ToshibaInventor: Masakazu Goto
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Patent number: 8169036Abstract: A semiconductor integrated circuit device having a control signal system for avoiding failure to check an indefinite signal propagation prevention circuit, for facilitating a check included in an automated tool, and for facilitating a power shutdown control inside a chip. In the semiconductor integrated circuit device, power shutdown priorities are provided by independent power domains (Area A to Area I). A method for preventing a power domain having a lower priority from being turned OFF when a circuit having a high priority is turned ON is also provided.Type: GrantFiled: September 2, 2011Date of Patent: May 1, 2012Assignee: Renesas Electronics CorporationInventors: Yusuke Kanno, Hiroyuki Mizuno, Yoshihiko Yasu, Kenji Hirose, Takahiro Irita
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Patent number: 8169039Abstract: A disclosed semiconductor device includes an MOS transistor having an N-type low-concentration drain region, a source region, an ohmic drain region, a P-type channel region, an ohmic channel region, a gate isolation film, and a gate electrode. The N-type low-concentration drain region includes two low-concentration drain layers in which the N-type impurity concentration of the upper layer is higher than that of the lower layer; the P-type channel region includes two channel layers in which the P-type impurity concentration of the upper layer is lower than that of the lower layer; and the gate electrode is formed on the P-type channel region and the N-type low-concentration drain region and disposed to be separated from the ohmic drain region when viewed from the top.Type: GrantFiled: August 2, 2010Date of Patent: May 1, 2012Assignee: Ricoh Company, Ltd.Inventor: Takaaki Negoro
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Publication number: 20120091537Abstract: In accordance with an embodiment, a semiconductor device includes an SRAM cell on a substrate. The SRAM cell includes: first and second load transistors each having an n-type source region and a p-type drain region, first and second driver transistors each having a p-type source region and an n-type drain region, and first and second transfer transistors each having an n-type source region and a n-type drain region. The n-type source regions of the first and second load transistors, the n-type drain regions of the first and second driver transistors, and the n-type source regions and the n-type drain regions of the first and second transfer transistors are located in a region other than a region present between any two of the p-type drain regions of the first and second load transistors and the p-type source regions of the first and second driver transistors.Type: ApplicationFiled: September 16, 2011Publication date: April 19, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kanna Adachi, Shigeru Kawanaka, Satoshi Inaba
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Patent number: 8158978Abstract: An inverter, a logic circuit including the inverter and method of fabricating the same are provided. The inverter includes a load transistor of a depletion mode, and a driving transistor of an enhancement mode, which is connected to the load transistor. The load transistor may have a first oxide layer as a first channel layer. The driving transistor may have a second oxide layer as a second channel layer.Type: GrantFiled: July 16, 2010Date of Patent: April 17, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Sang-wook Kim, Young-soo Park, Jae-chul Park
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Publication number: 20120086075Abstract: A semiconductor structure with a metal gate structure includes a first type field-effect transistor having a first gate including: a high k dielectric material on a substrate, a first metal layer on the high k dielectric material layer and having a first work function, and a first aluminum layer on the first metal layer. The first aluminum layer includes an interfacial layer including aluminum, nitrogen and oxygen. The device also includes a second type field-effect transistor having a second gate including: the high k dielectric material on the substrate, a second metal layer on the high k dielectric material layer and having a second work function different from the first work function, and a second aluminum layer on the second metal layer.Type: ApplicationFiled: December 16, 2011Publication date: April 12, 2012Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo Bin HUANG, Ssu-Yi LI, Ryan Chia-Jen CHEN, Chi-Ming YANG, Chyi Shyuan CHERN, Chin-Hsiang LIN
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Publication number: 20120080758Abstract: At least three metal-oxide semiconductor transistors with different threshold voltages are formed in and above corresponding first, second and third parts of a semiconductor substrate. The second transistor has a lower threshold voltage than the second transistor, and the third transistor has a lower threshold voltage than the second transistor. The gate oxide layers for the three transistors are formed as follows: a first oxide layer having a first thickness is formed above the first, second and third parts. The first oxide layer above the second part is etched and a second oxide layer having a second thickness smaller than the first thickness is formed. The first oxide layer above the third part is etched and a third oxide layer having a third thickness smaller than the second thickness is formed. The second and the third oxide layers are then nitrided to form first and second oxy-nitride layers.Type: ApplicationFiled: October 4, 2010Publication date: April 5, 2012Applicant: STMicroelectronics, Inc.Inventor: Franck Arnaud
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Patent number: 8148785Abstract: A semiconductor device can output a reference voltage for an arbitrary potential and can detect the voltage of each cell in a battery including multiple cells very precisely. The device includes a depletion-type MOSFET 21 and an enhancement type MOSFET 22, and has a floating structure that isolates depletion-type MOSFET 21 and enhancement type MOSFET 22 from a ground terminal. The depletion-type MOSFET 21 and enhancement type MOSFET 22 are connected in series to each other, wherein the depletion-type MOSFET 21 is connected to high-potential-side terminal and the enhancement type MOSFET 22 is connected to low-potential-side terminal. The semiconductor device having the configuration described above is disposed in a voltage detecting circuit section in a control IC for a battery including multiple cells.Type: GrantFiled: September 15, 2008Date of Patent: April 3, 2012Assignee: Fuji Electric Co., Ltd.Inventors: Masaharu Yamaji, Akio Kitamura
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Patent number: 8143119Abstract: A first transistor and a second transistor are formed in a first element formation region, and a third transistor is formed in a second element formation region. The three transistors are of the same conductive type, and the first transistor and the second transistor have the same threshold voltage. A first well is formed in the first element formation region by use of a first mask pattern, and a second well is formed in the second element formation region by use of a second mask pattern. A channel region of the first transistor and a channel region of the second transistor have a shape which is line-symmetrical with respect to a reference line. The first mask pattern has a shape which is line-symmetrical with respect to the reference line.Type: GrantFiled: September 14, 2009Date of Patent: March 27, 2012Assignee: Renesas Electronics CorporationInventors: Takashi Sakoh, Hiroki Shirai
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Patent number: 8143677Abstract: A transistor, transistor arrangement and method thereof are provided. The example method may include determining whether a gate width of the transistor has been adjusted; and adjusting a distance between a higher-concentration impurity-doped region of the transistor and a device isolation layer of the transistor based on the adjusted gate width if the determining step determines the gate width of the transistor is adjusted. The example transistor may include a first device isolation layer defining a first active region, a first gate line having a first gate width and crossing over the first active region, a first lower-concentration impurity-doped region formed in the first active region at first and second sides of the first gate line and a first higher-concentration impurity-doped region formed in the lower-concentration impurity-doped region and not in contact with the gate line and the device-isolation layer.Type: GrantFiled: February 25, 2010Date of Patent: March 27, 2012Assignee: Samsung Electronics Co., Ltd.Inventor: Myoung-Soo Kim
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Patent number: 8138529Abstract: An electronic component includes a high voltage switching transistor encased in a package. The high voltage switching transistor comprises a source electrode, a gate electrode, and a drain electrode all on a first side of the high voltage switching transistor. The source electrode is electrically connected to a conducting structural portion of the package. Assemblies using the abovementioned transistor with another transistor can be formed, where the source of one transistor can be electrically connected to a conducting structural portion of a package containing the transistor and a drain of the second transistor is electrically connected to the second conductive structural portion of a package that houses the second transistor. Alternatively, the source of the second transistor is electrically isolated from its conductive structural portion, and the drain of the second transistor is electrically isolated from its conductive structural portion.Type: GrantFiled: November 2, 2009Date of Patent: March 20, 2012Assignee: Transphorm Inc.Inventor: Yifeng Wu
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Publication number: 20120056272Abstract: A semiconductor device includes a first transistor having a first conductivity type; and a second transistor having the first conductivity type and having a higher threshold voltage than the first transistor. The first transistor includes a first channel region having a second conductivity type, a first gate insulating film, a first gate electrode, and a first extension region having the first conductivity type. The second transistor includes a second channel region having the second conductivity type, a second gate insulating film, a second gate electrode, and a second extension region having the first conductivity type. The second extension region contains impurities for shallower junction. A junction depth of the second extension region is shallower than a junction depth of the first extension region.Type: ApplicationFiled: November 16, 2011Publication date: March 8, 2012Applicant: Panasonic CorporationInventor: Junji HIRASE
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Publication number: 20120056271Abstract: A semiconductor device includes a first, second, and third MIS transistors of a first conductivity type respectively including a first, second, and third gate electrodes on a first, second, and third active regions of a semiconductor substrate with a first, second, and third gate insulating films interposed therebetween. The first gate insulating film is formed of a first silicon oxide film and a first high-k insulating film on the first silicon oxide film. The second gate insulating film is formed of a second silicon oxide film and a second high-k insulating film on the second silicon oxide film. The third gate insulating film is formed of a third silicon oxide film and a third high-k insulating film on the third silicon oxide film. The second silicon oxide film has a same thickness as the first silicon oxide film, and a greater thickness than the third silicon oxide film.Type: ApplicationFiled: November 10, 2011Publication date: March 8, 2012Applicant: Panasonic CorporationInventor: Susumu AKAMATSU
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Patent number: 8129797Abstract: Embedded DRAM MOSFETs including an array NFET having a gate stack comprising a high-K dielectric layer upon which is deposited a first metal oxide layer (CD1) then a conductive layer (TiN), and then a polysilicon layer (Poly). A logic PFET having substantially the same gate stack as the array NFET, and a logic NFET having a third gate stack comprising the high-K dielectric layer upon which is deposited the conductive layer (TiN) and then the polysilicon layer (Poly), without the first metal oxide layer (CD1) between the high-K dielectric layer and the conductive layer (TiN). The array NFET may therefore have a higher gate stack work function than the logic NFET, but substantially the same gate stack work function as the logic PFET.Type: GrantFiled: June 18, 2008Date of Patent: March 6, 2012Assignee: International Business Machines CorporationInventors: Xiangdong Chen, Herbert L. Ho, Geng Wang
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Patent number: 8129798Abstract: A semiconductor device includes a circuit comprising a first transistor in a first Fin; a power supply circuit in a second Fin, the power supply circuit comprising a second transistor connected between the circuit and a power supply line; and a substrate contact electrically connected to the semiconductor substrate and configured to apply a substrate voltage to a substrate, wherein a width of the first Fin in a cross-section of the first Fin perpendicular to a channel length direction of the first transistor is equal to or smaller than a twofold of a largest depletion layer width of a depletion layer formed in a channel part of the first transistor, and a width of the second Fin in a cross-section of the second Fin perpendicular to a channel length direction of the second transistor is larger than a twofold of a largest depletion layer width of a depletion layer in a channel of the second transistor.Type: GrantFiled: December 3, 2009Date of Patent: March 6, 2012Assignee: Kabushiki Kaisha ToshibaInventor: Satoshi Inaba
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Publication number: 20120049293Abstract: Performance and/or uniformity of sophisticated transistors may be enhanced by incorporating a carbon species in the active regions of the transistors prior to forming complex high-k metal gate electrode structures. For example, a carbon species may be incorporated by ion implantation into the active region of a P-channel transistor and an N-channel transistor after selectively forming a threshold adjusted semiconductor material for the P-channel transistor, while the active region of the N-channel transistor is still masked.Type: ApplicationFiled: July 20, 2011Publication date: March 1, 2012Applicant: GLOBALFOUNDRIES INC.Inventors: Thilo SCHEIPER, Jan HOENTSCHEL, Steven LANGDON
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Publication number: 20120051154Abstract: A fuse circuit includes a program unit and a sensing unit. The program unit is programmed in response to a program signal and outputs a program output signal in response to a sensing enable signal. The sensing unit outputs a sensing output signal based on the program output signal and the sensing output signal indicates whether the program unit is programmed or not. The program unit includes an anti-fuse cell, a selection transistor, a program transistor and a sensing transistor. The anti-fuse cell includes at least two anti-fuse elements which are connected in parallel and are respectively broken down at different levels of a program voltage.Type: ApplicationFiled: August 29, 2011Publication date: March 1, 2012Applicant: Samsung Electronics Co., Ltd.Inventors: Jong-Pil SON, Seong-Jin Jang, Byung-Sik Moon, Hyuck-Chai Jung, Ju-Seop Park
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Publication number: 20120049273Abstract: A depletion transistor includes a source region and a drain region of a first conductivity type, a channel region of the first conductivity type arranged between the source region and the drain region and a first gate electrode arranged adjacent the channel region and dielectrically insulated from the channel region by a gate dielectric. The depletion transistor further includes a first discharge region of a second conductivity type arranged adjacent the gate dielectric and electrically coupled to a terminal for a reference potential. The depletion transistor can be included in a charging circuit.Type: ApplicationFiled: August 26, 2010Publication date: March 1, 2012Applicant: INFINEON TECHNOLOGIES AUSTRIA AGInventors: Franz Hirler, Anton Mauder, Joachim Weyers, Frank Pfirsch
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Patent number: 8120121Abstract: A semiconductor device including a first transistor in a substrate, a second transistor in the substrate, and a further device in the substrate. The second transistor and the further device are arranged to operate at a second voltage which is higher than a first voltage. The first voltage is the (normal) voltage of operation of the first transistor, and the first transistor is isolated from the second voltage.Type: GrantFiled: September 13, 2007Date of Patent: February 21, 2012Assignees: X-Fab Semiconductor Foundries AG, Melexis Tessenderlo N.V.Inventors: John Nigel Ellis, Piet De Pauw
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Patent number: 8120092Abstract: First gate electrodes of memory cell transistors are formed in series with each other on a semiconductor substrate. A second gate electrode of a first selection transistor is formed adjacent to one end of the first electrodes. A third gate electrode of a second selection transistor is formed adjacent to the second electrode. A fourth gate electrode of a peripheral transistor is formed on the substrate. First, second, and third sidewall films are formed on side surfaces of the second, third, and fourth gate electrodes, respectively. A film thickness of the third sidewall film is larger than that of the first and second sidewall films. A space between the first electrode and the second electrode is larger than a space between the first electrodes, and a space between the second electrode and the third electrode is larger than a space between the first electrode and the second electrode.Type: GrantFiled: September 23, 2009Date of Patent: February 21, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Atsuhiro Sato, Fumitaka Arai
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Patent number: 8119507Abstract: Methods of making, structures, devices, and/or applications for lateral double-diffused metal oxide semiconductor (LDMOS) transistors are disclosed. In one embodiment, an LDMOS transistor can include: (i) an n-doped deep n-well (DNW) region on a substrate; (ii) a gate oxide and a drain oxide between a source region and a drain region of the LDMOS transistor, the gate oxide being adjacent to the source region, the drain oxide being adjacent to the drain region; (iii) a conductive gate over the gate oxide and a portion of the drain oxide; (iv) a p-doped p-body region in the source region; (v) an n-doped drain region in the drain region; (vi) a first n-doped n+ region and a p-doped p+ region adjacent thereto in the p-doped p-body region of the source region; and (vii) a second n-doped n+ region in the drain region.Type: GrantFiled: October 23, 2008Date of Patent: February 21, 2012Assignee: Silergy TechnologyInventor: Budong You
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Publication number: 20120025325Abstract: Structures, layouts and methods of forming integrated circuits are described. In various embodiments, the current invention includes an asymmetric segmented transistor. The asymmetric segmented transistor includes a source region and a drain region disposed within an active region, a floating source/drain region disposed within the active region, a first channel region disposed in the active region between the source region and the floating source/drain region, the first channel having a first length and a first width. A second channel region is disposed in the active region between the drain region and the floating source/drain region, the second channel having a second length and a second width. A first gate dielectric overlies the first channel region and a second gate dielectric overlies the second channel region. A gate line overlies the first gate dielectric and the second gate dielectric.Type: ApplicationFiled: October 12, 2011Publication date: February 2, 2012Applicant: Infineon Technologies AGInventor: Peter Baumgartner
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Patent number: 8105892Abstract: A method is provided that includes providing a semiconductor substrate including at least a thin gate oxide pFET device region and a thick gate oxide pFET device region and forming a thin gate oxide pFET within the thin gate oxide pFET device region and a thick gate oxide pFET within the thick gate oxide pFET device region. The thin gate oxide pFET that is formed includes a layer of SiGe on an upper surface of the thin gate oxide pFET device region, a high k gate dielectric located on an upper surface of the layer of SiGe, a pFET threshold voltage adjusting layer located on an upper surface of the high k gate dielectric, and a gate conductor material atop the pFET threshold voltage adjusting layer. The thick gate oxide pFET that is formed includes a thermal oxide located on an upper surface of the thick gate oxide pFET device region, a silicon layer located on an upper surface of the thermal oxide and a gate conductor material located atop the silicon layer.Type: GrantFiled: August 18, 2009Date of Patent: January 31, 2012Assignee: International Business Machines CorporationInventors: Byeong Y. Kim, Michael P. Chudzik
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Patent number: 8106455Abstract: Multiple types of gate stacks are formed on a doped semiconductor well. A high dielectric constant (high-k) gate dielectric is formed on the doped semiconductor well. A metal gate layer is formed in one device area, while the high-k gate dielectric is exposed in other device areas. Threshold voltage adjustment oxide layers having different thicknesses are formed in the other device areas. A conductive gate material layer is then formed over the threshold voltage adjustment oxide layers. One type of field effect transistors includes a gate dielectric including a high-k gate dielectric portion. Other types of field effect transistors include a gate dielectric including a high-k gate dielectric portion and a first threshold voltage adjustment oxide portions having different thicknesses. Field effect transistors having different threshold voltages are provided by employing different gate dielectric stacks and doped semiconductor wells having the same dopant concentration.Type: GrantFiled: April 30, 2009Date of Patent: January 31, 2012Assignee: International Business Machines CorporationInventors: Brian J. Greene, Michael P. Chudzik, Shu-Jen Han, William K. Henson, Yue Liang, Edward P. Maciejewski, Myung-Hee Na, Edward J. Nowak, Xiaojun Yu
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Publication number: 20120018814Abstract: According to one embodiment, a method of manufacturing a semiconductor device is disclosed as follows. A first oxide film in a first region and a second oxide film in a second region are formed on a semiconductor substrate. A high-k insulating film is formed on the first oxide film and the second oxide film. A film containing at least one of elements of Mg, La, Y, Dy, Sc, Al is formed on the high-k insulating film. After forming the film containing the element, thermal treatment is performed, so that the element in the film is diffused into the first oxide film and the second oxide film via the high-k insulating film. A metal gate electrode containing a metal material is formed on the high-k insulating film on the first oxide film and on the high-k insulating film on the second oxide film.Type: ApplicationFiled: July 19, 2011Publication date: January 26, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Tetsu Morooka
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Publication number: 20120018813Abstract: A technique for substantially eliminating resist residues from a gate stack that includes, from bottom to top, a high k gate dielectric and a metal gate, e.g., a high k/metal gate stack, is provided. In particular and in one embodiment, a method is disclosed in which a patterned resist and optionally a patterned barrier coating are formed atop a surface of the metal gate electrode of a high k/metal gate stack prior to patterning the metal gate electrode. At least the metal gate electrode not protected by the patterned material is then etched. The presence of the barrier coating eliminates resist residues from the resultant gate stack. The technique provided can be used in fabricating planar semiconductor devices such as, for example, metal oxide semiconductor field effect transistors (MOSFETS) including complementary metal oxide semiconductor (CMOS) field effect transistors, as well as non-planar semiconductor devices such as, for example, finFETs.Type: ApplicationFiled: July 22, 2010Publication date: January 26, 2012Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Steven J. Holmes, Hemanth Jagannathan, Hiroshi Sunamura, Junli Wang
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Publication number: 20120018812Abstract: Methods and systems evaluate an integrated circuit design for power consumption balance and performance balance, using a computerized device. Based on this process of evaluating the integrated circuit, the methods and systems can identify first sets of integrated circuit transistor structures within the integrated circuit design that need reduced power leakage and second sets of integrated circuit transistor structures that need higher performance to achieve the desired power consumption balance and performance balance. With this, the methods and systems alter the integrated circuit design to include implantation of a first dopant into a substrate before a gate insulator formation for the first sets of integrated circuit transistor structures; and alter the integrated circuit design to include implantation of a second dopant into the substrate before a gate insulator formation for the second sets of integrated circuit transistor structures.Type: ApplicationFiled: July 21, 2010Publication date: January 26, 2012Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Terence B. Hook
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Patent number: 8102006Abstract: An integrated circuit and gate oxide forming process are disclosed which provide a gate structure that is simple to integrate with conventional fabrication processes while providing different gate oxide thicknesses for different transistors within the integrated circuit. For a flash memory, which may utilize the invention, the different gate oxide thicknesses may be used for lower voltage transistors, memory array transistors, and higher voltage transistors.Type: GrantFiled: August 5, 2010Date of Patent: January 24, 2012Assignee: Micron Technology, Inc.Inventor: Xianfeng Zhou
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Patent number: 8097923Abstract: A non-volatile memory cell includes a program transistor and a control capacitor. A portion of a substrate associated with the program transistor is exposed to multiple implantations (such as DNW, HiNWell, HiPWell, and P-well implantations). Similarly, a portion of the substrate associated with the control capacitor is exposed to multiple implantations (such as DNW, HiNWell, HiPWell, P-well, and N-well implantations). These portions of the substrate may have faster oxidation rates than other portions of the substrate, allowing a thicker front-end gate oxide to be formed over these portions of the substrate. In addition, a rapid thermal process anneal can be performed, which may reduce defects in the front-end gate oxide and increase its quality without having much impact on the oxide over the other portions of the substrate.Type: GrantFiled: July 12, 2010Date of Patent: January 17, 2012Assignee: National Semiconductor CorporationInventors: Thanas Budri, Jiankang Bu
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Patent number: 8088677Abstract: A method of manufacturing a semiconductor device including implanting an element selected from fluorine and nitrogen, over the entire region of a semiconductor substrate; oxidizing the semiconductor substrate to thereby form a first oxide film over the surface of the semiconductor substrate; selectively removing the first oxide film in a partial region; oxidizing the semiconductor substrate in the partial region to thereby form a second oxide film thinner than the first oxide film in the partial region; and forming gates to thereby form transistors.Type: GrantFiled: July 8, 2009Date of Patent: January 3, 2012Assignee: Renesas Electronics CorporationInventor: Gen Tsutsui
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Publication number: 20110309454Abstract: A combined packaged power semiconductor device includes a flipped top source low-side MOSFET electrically connected to a top surface of a die paddle, a first metal interconnection plate connecting between a bottom drain of a high-side MOSFET or a top source of a flipped high-side MOSFET to a bottom drain of the low-side MOSFET, and a second metal interconnection plate stacked on top of the high-side MOSFET chip. The high-side, low-side MOSFET and the IC controller can be packaged three-dimensionally that reduces the overall size of semiconductor devices and can maximize the chip's size within a package of the same size and improves the performance of the semiconductor devices. The top source of flipped low-side MOSFET is connected to the top surface of the die paddle and thus is grounded through the exposed bottom surface of die paddle, which simplifies the shape of exposed bottom surface of the die paddle and maximizes the area to facilitate heat dissipation.Type: ApplicationFiled: March 31, 2011Publication date: December 22, 2011Inventors: Yueh-Se Ho, Hamza Yilmaz, Yan Xun Xue, Jun Lu
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Publication number: 20110298057Abstract: An object is to provide a semiconductor device having a novel structure with a high degree of integration. A semiconductor device includes a semiconductor layer having a channel formation region, a source electrode and a drain electrode electrically connected to the channel formation region, a gate electrode overlapping with the channel formation region, and a gate insulating layer between the channel formation region and the gate electrode. A portion of a side surface of the semiconductor layer having the channel formation region and a portion of a side surface of the source electrode or the drain electrode are substantially aligned with each other when seen from a planar direction.Type: ApplicationFiled: May 27, 2011Publication date: December 8, 2011Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventor: Kiyoshi KATO
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Publication number: 20110291201Abstract: The present disclosure provides a semiconductor device. The semiconductor device includes a silicon substrate. The semiconductor device includes first and second regions that are disposed in the substrate. The first and second regions have a silicon compound material. The semiconductor device includes first and second source/drain structures that are partially disposed in the first and second regions, respectively. The semiconductor device includes a first gate that is disposed over the substrate. The first gate has a first proximity to the first region. The semiconductor device includes a second gate that is disposed over the substrate. The second gate has a second proximity to the second region. The second proximity is different from the first proximity. The first source/drain structure and the first gate are portions of a first transistor, and the second source/drain structure and the second gate are portions of a second transistor.Type: ApplicationFiled: May 26, 2010Publication date: December 1, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chun-Fai Cheng, Fung Ka Hing, Ming-Huan Tsai, Chun-Feng Nieh, Yimin Huang, Han-Ting Tsai, Haiting Wang
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Publication number: 20110292733Abstract: A programmable CMOS device includes a PFET and an NFET that have a common floating gate. Depending on the configuration, the programmable CMOS device can be programmed, erased, and re-programmed repeatedly. The programming, erasure, and/or reprogramming can be effected by injection of electrons and/or holes into the floating gate. The programmable CMOS device can be employed as a fuse or an antifuse, to program a floating gate of another device, and/or to function as a latch. The programmable CMOS device can be formed employing standard logic compatible processes, i.e., without employing any additional processing steps.Type: ApplicationFiled: May 25, 2010Publication date: December 1, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Jin Cai, Tak H. Ning
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Patent number: 8067788Abstract: A semiconductor device includes a substrate common to a first field effect transistor and a second field effect transistor, a channel layer of a first conductivity type formed on the substrate and common to the first and second field effect transistors, a an upper compound semiconductor layer formed on the channel layer and common to the first and second field effect transistors, a compound semiconductor region of a second conductivity type formed in the same layer as the upper compound semiconductor layer, a gate electrode of the first field effect transistor in ohmic contact with the compound semiconductor region, and a gate electrode of the second field effect transistor in Schottky contact with the upper compound semiconductor layer.Type: GrantFiled: April 2, 2008Date of Patent: November 29, 2011Assignee: Renesas Electronics CorporationInventor: Yasunori Bito
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Patent number: 8067807Abstract: In an LCD driver IC, a high-breakdown-voltage MISFET is mounted together with a typical low-breakdown-voltage MISFET. Because the high-breakdown-voltage MISFET has a gate oxide film thicker than that of the typical MISFET, the electrode of the high-breakdown-voltage MISFET is inevitably high in level. Accordingly, the depth of a gate contact is shallow so that process compatibility with the typical portion is necessary. In the present invention, in, e.g., the channel width direction of the high-breakdown-voltage MISFET, the boundary of a thick-film gate oxide region is located inwardly of the end of a gate electrode. At the gate electrode portion thus lowered in level, a gate contact is disposed so that the boundary of the thick film is located inwardly of the end of the gate electrode and between the gate contact and a channel end.Type: GrantFiled: July 23, 2009Date of Patent: November 29, 2011Assignee: Renesas Electronics CorporationInventor: Masatoshi Taya
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Patent number: 8063450Abstract: The present invention relates to vertical nanowire transistors with a wrap-gated geometry. The threshold voltage of the vertical nanowire transistors is controlled by the diameter of the nanowire, the doping of the nanowire, the introduction of segments of heterostructures in the nanowire, the doping in shell-structures surrounding the nanowire, tailoring the work function of the gate stack, by strain engineering, by control of the dielectrica or the choice of nanowire material. Transistors with varying threshold voltages are provided on the same substrate, which enables the design of advanced circuits utilizing the shifts in the threshold voltages, similar to the directly coupled field logic.Type: GrantFiled: September 19, 2007Date of Patent: November 22, 2011Assignee: QuNano ABInventors: Lars-Erik Wernersson, Erik Lind, Tomas Bryllert, Jonas Ohlsson, Truls Löwgren, Lars Samuelson, Claes Thelander
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Publication number: 20110278680Abstract: In a method for forming a semiconductor device, a gate electrode is formed over a semiconductor body (e.g., bulk silicon substrate or SOI layer). The gate electrode is electrically insulated from the semiconductor body. A first sidewall spacer is formed along a sidewall of the gate electrode. A sacrificial sidewall spacer is formed adjacent the first sidewall spacer. The sacrificial sidewall spacer and the first sidewall spacer overlying the semiconductor body. A planarization layer is formed over the semiconductor body such that a portion of the planarization layer is adjacent the sacrificial sidewall spacer. The sacrificial sidewall spacer can then be removed and a recess etched in the semiconductor body. The recess is substantially aligned between the first sidewall spacer and the portion of the planarization layer. A semiconductor material (e.g., SiGe or SiC) can then be formed in the recess.Type: ApplicationFiled: July 29, 2011Publication date: November 17, 2011Applicant: Infineon Technologies AGInventors: Helmut Horst Tews, Andre Schenk
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Patent number: 8043916Abstract: A method of fabricating a semiconductor device is provided. The method includes preparing a semiconductor substrate having first and second regions, forming a mask layer pattern on the second region, growing an oxidation retarding layer on the first region and removing the mask layer pattern. The method further includes growing a silicon oxide layer on the semiconductor substrate to form gate insulating layers having different thicknesses from one another on the first and second regions.Type: GrantFiled: August 5, 2010Date of Patent: October 25, 2011Assignee: Samsung Electronics Co., Ltd.Inventor: Chan-Sik Park
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Publication number: 20110254104Abstract: A semiconductor device includes a first MISFET and a second MISFET which are formed over a semiconductor substrate and have the same conductive type. The first MISFET has a first gate insulating film arranged over the semiconductor substrate, a first gate electrode arranged over the first gate insulating film, and a first source region and a first drain region. The second MISFET has a second gate insulating film arranged over the semiconductor substrate, a second gate electrode arranged over the second gate insulating film, and a second source region and a second drain region. The first and the second gate electrode are electrically coupled, the first and the second source region are electrically coupled, and the first and the second drain region are electrically coupled. Accordingly, the first and the second MISFET are coupled in parallel. In addition, threshold voltages are different between the first and the second MISFET.Type: ApplicationFiled: June 27, 2011Publication date: October 20, 2011Applicant: RENESAS ELECTRONICS CORPORATIONInventor: Noriaki Maeda
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INTEGRATED CIRCUIT DEVICES INCLUDING DEVICE ISOLATION STRUCTURES AND METHODS OF FABRICATING THE SAME
Publication number: 20110248357Abstract: An integrated circuit device includes a substrate having adjacent first and second regions, and a device isolation structure in the substrate between the first and second regions. The first and second regions of the substrate may respectively include transistors configured to be driven at different operational voltages, and the device isolation structure may electrically separates the transistors of the first region from the transistors of the second region. The device isolation structure includes outer portions immediately adjacent to the first and second regions and an inner portion therebetween. The outer portions of the device isolation structure comprise a material having an etching selectivity with respect to that of the inner portion. Related devices and fabrication methods are also discussed.Type: ApplicationFiled: January 31, 2011Publication date: October 13, 2011Inventors: Oh-kyum Kwon, Tae-Jung Lee, Sun-Hyun Kim -
Patent number: 8035139Abstract: A dynamic random access memory (DRAM) device can include a plurality of memory cells. Each memory cell can include a charge storing structure and an access device comprising an enhancement mode junction field effect transistor (JFET). The DRAM device can further include a plurality of sense amplifiers that each generates an output value in response to a signal received at respective sense amplifier inputs, and a plurality of bit lines, each bit line coupling a plurality of memory cells to at least one input of at least one of the sense amplifiers. A method can fabricate such DRAM devices.Type: GrantFiled: August 20, 2008Date of Patent: October 11, 2011Assignee: SuVolta, Inc.Inventor: Douglas B. Boyle
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Patent number: 8035101Abstract: A transistor, a semiconductor device including the transistor and methods of manufacturing the same are provided, the transistor including a threshold voltage adjusting layer contacting a channel layer. A source electrode and a drain electrode contacting may be formed opposing ends of the channel layer. A gate electrode separated from the channel layer may be formed. A gate insulating layer may be formed between the channel layer and the gate electrode.Type: GrantFiled: April 17, 2009Date of Patent: October 11, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Sungho Park, Ihun Song, Kiha Hong
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Patent number: 8030713Abstract: A silicon-germanium non-formation region not formed with a silicon germanium layer and a silicon-germanium formation region formed with a silicon germanium layer are provided in a silicon chip, an internal circuit and an input/output buffer are arranged in the silicon-germanium formation region, and a pad electrode and an electrostatic protection element are arranged in the silicon-germanium non-formation region.Type: GrantFiled: March 11, 2009Date of Patent: October 4, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Takayuki Hiraoka, Toshikazu Fukuda
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Patent number: 8030716Abstract: A method for fabricating a CMOS structure is disclosed. The method includes the blanket disposition of a high-k gate insulator layer in an NFET device and in a PFET device, and the implementation of a gate metal layer over the NFET device. This is followed by a blanket disposition of an Al layer over both the NFET device and the PFET device. The method further involves a blanket disposition of a shared gate metal layer over the Al layer. When the PFET device is exposed to a thermal annealing, the high-k dielectric oxidizes the Al layer, thereby turning the Al layer into a PFET interfacial control layer, while in the NFET device the Al becomes a region of the metal gate.Type: GrantFiled: September 16, 2010Date of Patent: October 4, 2011Assignee: International Business Machines CorporationInventors: Dae-Gyu Park, Michael P. Chudzik, Vijay Narayanan, Vamsi Paruchuri
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Publication number: 20110227169Abstract: The present invention enhances voltage conversion efficiency of a semiconductor device. In a non-isolated DC-DC converter that includes a high-side switch power MOSFET and a low-side switch power MOSFET, which are series-connected, the high-side switch power MOSFET and driver circuits for driving the high-side and low-side switch power MOSFETs are formed within one semiconductor chip, whereas the low-side switch power MOSFET is formed in another semiconductor chip. The two semiconductor chips are sealed in a single package.Type: ApplicationFiled: June 2, 2011Publication date: September 22, 2011Applicant: RENESAS ELECTRONICS CORPORATIONInventors: Tomoaki UNO, Masaki SHIRAISHI, Nobuyoshi MATSUURA, Yukihiro SATOU
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Patent number: 8021949Abstract: A method for fabrication of features for an integrated circuit includes patterning a first semiconductor structure on a surface of a semiconductor device, and epitaxially growing semiconductor material on opposite sides of the first semiconductor structure to form fins. A first angled ion implantation is applied to one side of the first semiconductor structure to dope a respective fin on the one side. The first semiconductor structure is selectively removed to expose the fins. Fin field effect transistors are formed using the fins.Type: GrantFiled: December 1, 2009Date of Patent: September 20, 2011Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Ying Zhang
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Publication number: 20110221009Abstract: An apparatus has a semiconductor device that includes: a semiconductor substrate having a channel region, a high-k dielectric layer disposed at least partly over the channel region, a gate electrode disposed over the dielectric layer and disposed at least partly over the channel region, wherein the gate electrode is made substantially of metal, and a gate contact engaging the gate electrode at a location over the channel region. A different aspect involves a method for making a semiconductor device that includes: providing a semiconductor substrate having a channel region, forming a high-k dielectric layer at least partly over the channel region, forming a gate electrode over the dielectric layer and at least partly over the channel region, the gate electrode being made substantially of metal, and forming a gate contact that engages the gate electrode at a location over the channel region.Type: ApplicationFiled: March 10, 2010Publication date: September 15, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Harry Hak-Lay Chuang, Lee-Wee Teo, Han-Gan Chew
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Publication number: 20110215420Abstract: A MOS device includes an active area having first and second contacts. First and second gates are disposed between the first and second contacts. The first gate is disposed adjacent to the first contact and has a third contact. The second gate is disposed adjacent to the second contact and has a fourth contact coupled to the third contact. A transistor defined by the active area and the first gate has a first threshold voltage, and a transistor defined by the active area and the second gate has a second threshold voltage.Type: ApplicationFiled: April 26, 2010Publication date: September 8, 2011Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fu-Lung HSUEH, Chih-Ping Chao, Chewn-Pu Jou, Yung-Chow Peng, Harry-Hak-Lay Chuang, Kuo-Tung Sung