Insulated Gate Field Effect Transistors Of Different Threshold Voltages In Same Integrated Circuit (e.g., Enhancement And Depletion Mode) Patents (Class 257/392)
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Publication number: 20110210402Abstract: Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V.Type: ApplicationFiled: May 9, 2011Publication date: September 1, 2011Applicant: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Publication number: 20110204451Abstract: Disclosed is a semiconductor device manufacturing method comprising: forming an element isolation region in one principal face of a semiconductor substrate of one conductivity type; forming a gate electrode extending from an element region to the element isolation region at both sides of the element region in a first direction, both end portions of the gate electrode in the first direction being on the element isolation region and respectively including a concave portion and protruding portions at both sides of the concave portion; carrying out ion implantation of impurities of the one conductivity type from a direction tilted from a direction perpendicular to the one principal face toward the first direction so that first and second impurity implantation regions of the one conductivity type are formed in the one principal face in two end regions of the element region in the first direction.Type: ApplicationFiled: February 23, 2011Publication date: August 25, 2011Applicant: OKI SEMICONDUCTOR CO., LTD.Inventor: Eisuke SEO
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Patent number: 8004044Abstract: A semiconductor device including a first transistor of a first conductivity type provided on a first active region of a semiconductor region, and a second transistor of a second conductivity type provided on a second active region of the semiconductor region. The first transistor includes a first gate insulating film and a first gate electrode, the first gate insulating film contains a high-k material and a first metal, and the first gate electrode includes a lower conductive film, a first conductive film and a first silicon film. The second transistor includes a second gate insulating film and a second gate electrode, the second gate insulating film contains a high-k material and a second metal, and the second gate electrode includes a second conductive film made of the same material as the first conductive film, and a second silicon film.Type: GrantFiled: May 28, 2009Date of Patent: August 23, 2011Assignee: Panasonic CorporationInventors: Hisashi Ogawa, Yoshihiro Mori
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Patent number: 8004047Abstract: A first gate dielectric of a first transistor is disposed over a workpiece in a first region, and a second gate dielectric of a second transistor is disposed over the workpiece in a second region. The second gate dielectric comprises a different material than the first gate dielectric. A first dopant-bearing metal comprising a first dopant is disposed in recessed regions of the workpiece proximate the first gate dielectric, and a second dopant-bearing metal comprising a second dopant is disposed in recessed regions of the workpiece proximate the second gate dielectric. A first doped region comprising the first dopant is disposed in the workpiece adjacent the first dopant-bearing metal. A second doped region comprising the second dopant is disposed in the workpiece adjacent the second dopant-bearing metal. The dopant-bearing metals and the doped regions comprise source and drain regions of the first and second transistors.Type: GrantFiled: March 2, 2009Date of Patent: August 23, 2011Assignee: Infineon Technologies AGInventor: Hong-Jyh Li
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Publication number: 20110188329Abstract: The semiconductor integrated circuit (1) has a memory (4) and a logic circuit (5), which are mixedly palletized on a silicon substrate (2). The memory includes a partially-depleted type nMOS (6) having an SOI structure and formed on UTB (3). The partially-depleted type nMOS has a backgate region (14) under UTB, to which a voltage can be applied independently of a corresponding gate terminal. The logic circuit includes an nMOS (7) and a pMOS (8), and both are of a fully-depleted type, formed on UTB and have an SOI structure.Type: ApplicationFiled: April 13, 2011Publication date: August 4, 2011Inventors: Takayuki Kawahara, Masanao Yamaoka, Nobuyuki Sugii
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Patent number: 7989898Abstract: A dual workfunction semiconductor device and a device made thereof is disclosed. In one aspect, the device includes a first gate stack in a first region and a second gate stack in a second region. The first gate stack has a first effective workfunction, and the second gate stack has a second effective workfunction different from the first effective workfunction. The first gate stack includes a first gate dielectric capping layer, a gate dielectric host layer, a first metal gate electrode layer, a barrier metal gate electrode, a second gate dielectric capping layer, and a second metal gate electrode. The second gate stack includes a gate dielectric host layer, a first metal gate electrode, a second gate dielectric capping layer, and a second metal gate electrode.Type: GrantFiled: April 22, 2009Date of Patent: August 2, 2011Assignees: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shou-Zen Chang, HongYu Yu
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Patent number: 7989897Abstract: A semiconductor device includes a first MISFET and a second MISFET which are formed over a semiconductor substrate and have the same conductive type. The first MISFET has a first gate insulating film arranged over the semiconductor substrate, a first gate electrode arranged over the first gate insulating film, and a first source region and a first drain region. The second MISFET has a second gate insulating film arranged over the semiconductor substrate, a second gate electrode arranged over the second gate insulating film, and a second source region and a second drain region. The first and the second gate electrode are electrically coupled, the first and the second source region are electrically coupled, and the first and the second drain region are electrically coupled. Accordingly, the first and the second MISFET are coupled in parallel. In addition, threshold voltages are different between the first and the second MISFET.Type: GrantFiled: November 26, 2008Date of Patent: August 2, 2011Assignee: Renesas Electronics CorporationInventor: Noriaki Maeda
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Publication number: 20110169549Abstract: An electronic component includes a III-N transistor and a III-N rectifying device both encased in a single package. A gate electrode of the III-N transistor is electrically connected to a first lead of the single package or to a conductive structural portion of the single package, a drain electrode of the III-N transistor is electrically connected to a second lead of the single package and to a first electrode of the III-N rectifying device, and a second electrode of the III-N rectifying device is electrically connected to a third lead of the single package.Type: ApplicationFiled: January 8, 2010Publication date: July 14, 2011Applicant: Transphorm Inc.Inventor: Yifeng Wu
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Patent number: 7977736Abstract: A semiconductor device is provided which includes an NMOS vertical channel transistor located on a substrate and including a p+ polysilicon gate electrode surrounding a vertical p-channel region, and a PMOS vertical channel transistor located on the substrate and including an n+ polysilicon gate electrode surrounding a vertical n-channel region. The NMOS and PMOS vertical channel transistors are optionally operable in a CMOS operational mode.Type: GrantFiled: February 8, 2007Date of Patent: July 12, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-Young Kim, Ki-Whan Song
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Publication number: 20110163385Abstract: A semiconductor structure is provided that includes at least one asymmetric gate stack located on a surface of a semiconductor structure. The at least one asymmetric gate stack includes, from bottom to top, a high k gate dielectric, a sloped threshold voltage adjusting material layer and a gate conductor. A method of forming such a semiconductor structure is also provided in which a line of sight deposition process is used in forming the sloped threshold voltage adjusting material layer in which the deposition is tilted within respect to a horizontal surface of a semiconductor structure.Type: ApplicationFiled: January 7, 2010Publication date: July 7, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Dureseti Chidambarrao, Sunfei Fang, Yue Liang, Xiaojun Yu, Jun Yuan
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Patent number: 7973370Abstract: A extractor implanted region is used in a silicon-on-insulator CMOS memory device. The extractor region is reversed biased to remove minority carriers from the body region of partially depleted memory cells. This causes the body region to be fully depleted without the adverse floating body effects.Type: GrantFiled: March 28, 2006Date of Patent: July 5, 2011Assignee: Micron Technology, Inc.Inventor: Leonard Forbes
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Patent number: 7972915Abstract: A method for and devices utilizing monolithic integration of enhancement-mode and depletion-mode AlGaN/GaN heterojunction field-effect transistors (HFETs) is disclosed. Source and drain ohmic contacts of HFETs are first defined. Gate electrodes of the depletion-mode HFETs are then defined. Gate electrodes of the enhancement-mode HFETs are then defined using fluoride-based plasma treatment and high temperature post-gate annealing of the sample. Device isolation is achieved by either mesa etching or fluoride-based plasma treatment. This method provides a complete planar process for GaN-based integrated circuits favored in high-density and high-speed applications.Type: GrantFiled: November 29, 2006Date of Patent: July 5, 2011Assignee: The Hong Kong University of Science and TechnologyInventors: Jing Chen, Yong Cai, Kei May Lau
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Publication number: 20110156167Abstract: A circuit is defined to operate in accordance with a common control signal. The circuit includes a plurality of transistors that have respective timing margins relative to the common control signal. Some of the plurality of transistors are defined differently from another of the plurality of transistors with regard to either transistor channel width, transistor channel length, transistor threshold voltage, or a combination thereof. The different definition of any given one of the plurality of transistors causes a reduction of either transistor power consumption, transistor current leakage, or a combination thereof, in exchange for a corresponding reduction in timing margin while maintaining a positive timing margin.Type: ApplicationFiled: December 29, 2010Publication date: June 30, 2011Applicant: Tela Innovations, Inc.Inventor: Stephen Kornachuk
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Publication number: 20110156166Abstract: The present disclosure also provides another embodiment of a method for making metal gate stacks. The method includes forming a first dummy gate and a second dummy gate on a substrate; removing a polysilicon layer from the first dummy gate, resulting in a first gate trench; forming a first metal layer and a first aluminum layer in the first gate trench; applying a chemical mechanical polishing (CMP) process to the substrate; performing an annealing process to the first aluminum layer using a nitrogen and oxygen containing gas, forming an interfacial layer of aluminum, nitrogen and oxygen on the first aluminum layer; thereafter removing the polysilicon layer from the second dummy gate, resulting in a second gate trench; and forming a second metal layer and a second aluminum layer on the second metal layer in the second gate trench.Type: ApplicationFiled: December 31, 2009Publication date: June 30, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo Bin Huang, Ssu-Yi Li, Ryan Chia-Jen Chen, Chi-Ming Yang, Chyi Shyuan Chern, Chin-Hsiang Lin
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Patent number: 7968940Abstract: Double gate IGBT having both gates referred to a cathode in which a second gate is for controlling flow of hole current. In on-state, hole current can be largely suppressed. While during switching, hole current is allowed to flow through a second channel. Incorporating a depletion-mode p-channel MOSFET having a pre-formed hole channel that is turned ON when 0V or positive voltages below a specified threshold voltage are applied between second gate and cathode, negative voltages to the gate of p-channel are not used. Providing active control of holes amount that is collected in on-state by lowering base transport factor through increasing doping and width of n well or by reducing injection efficiency through decreasing doping of deep p well. Device includes at least anode, cathode, semiconductor substrate, n? drift region, first & second gates, n+ cathode region; p+ cathode short, deep p well, n well, and pre-formed hole channel.Type: GrantFiled: September 27, 2007Date of Patent: June 28, 2011Assignee: Anpec Electronics CorporationInventor: Florin Udrea
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Patent number: 7964917Abstract: A semiconductor device includes a plurality of first MIS transistors and a plurality of second MIS transistors formed on a semiconductor substrate and a liner insulating film applying stress along the gate length direction. Each of the first MIS transistors includes first L-shaped sidewalls each having an L-shaped cross-sectional shape, and each of the second MIS transistors includes second L-shaped sidewalls each having an L-shaped cross-sectional shape and outer sidewalls. The minimum thickness of a part of the liner insulating film located on each of second source/drain regions of the second MIS transistor is larger than the minimum thickness of a part thereof located on each of first source/drain regions of the first MIS transistor.Type: GrantFiled: October 18, 2007Date of Patent: June 21, 2011Assignee: Panasonic CorporationInventor: Susumu Akamatsu
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Publication number: 20110133291Abstract: Disclosed is a fabrication method which includes: forming a first gate electrode and a second gate electrode which cross over an active region, the overall width of the second gate electrode being less than that of the first gate electrode; ion-implanting dopants into the active region at an oblique angle using the first and second gate electrodes as a mask for ion-implantation, thereby to form separated doped regions on opposite sides of the first gate electrode and to form a continuous doped region extending from one of opposite sides of the second gate electrode to the other.Type: ApplicationFiled: October 29, 2010Publication date: June 9, 2011Applicant: OKI SEMICONDUCTOR CO., LTD.Inventor: Mayumi Shibata
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Patent number: 7956390Abstract: A semiconductor device having a semiconductor substrate, a first impurity region including a first conductive impurity formed in the semiconductor substrate, a first transistor and a second transistor formed in the first impurity region, a first stress film and a second stress having a first stress over the first transistor a and the second transistor, and a third stress film having a second stress different from the first stress provided in the first impurity region between the first stress film and the second stress film.Type: GrantFiled: August 19, 2008Date of Patent: June 7, 2011Assignee: Fujitsu Semiconductor LimitedInventor: Manabu Kojima
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Publication number: 20110127616Abstract: In sophisticated semiconductor devices, different threshold voltage levels for transistors may be set in an early manufacturing stage, i.e., prior to patterning the gate electrode structures, by using multiple diffusion processes and/or gate dielectric materials. In this manner, substantially the same gate layer stacks, i.e., the same electrode materials and the same dielectric cap materials, may be used, thereby providing superior patterning uniformity when applying sophisticated etch strategies.Type: ApplicationFiled: October 15, 2010Publication date: June 2, 2011Inventors: Jan Hoentschel, Sven Beyer, Thilo Scheiper
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Patent number: 7952150Abstract: The present invention relates to providing an enhancement-mode (e-mode) Metal-Oxide-Semiconductor Field Effect Transistor (MOSFET) with a complementary depletion-mode (d-mode) FET on a common group III-V substrate. The depletion mode FET may be another MOSFET, a MEtal-Semiconductor FET (MESFET), a High Electron Mobility Transistor (HEMT), or like FET structure. In particular, the e-mode MOSFET includes a gate structure that resides between source and drain structures on a transistor body. The gate structure includes a gate contact that is separated from the transistor body by a gate oxide. The gate oxide is an oxidized material that includes Indium and Phosphorus. The gate oxide is formed beneath the gate contact.Type: GrantFiled: June 5, 2009Date of Patent: May 31, 2011Assignee: RF Micro Devices, Inc.Inventor: Walter A. Wohlmuth
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Patent number: 7952149Abstract: An apparatus and method for controlling the net doping in the active region of a semiconductor device in accordance with a gate length is provided. A compensating dopant is chosen to be a type of dopant which will electrically neutralize dopant of the opposite type in the substrate. By implanting the compensating dopant at relatively high angle and high energy, the compensating dopant will pass into and through the gate region for short channels and have little or no impact on the total dopant concentration within the gate region. Where the channel is of a longer length, the high implant angle and the high implant energy cause the compensating dopant to lodge within the channel thereby neutralizing a portion of the dopant of the opposite type.Type: GrantFiled: May 12, 2005Date of Patent: May 31, 2011Assignee: International Business Machines CorporationInventors: Omer H. Dokumaci, Oleg Gluschenkov
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Patent number: 7951678Abstract: Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V.Type: GrantFiled: August 12, 2008Date of Patent: May 31, 2011Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Edward J. Nowak
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Publication number: 20110121405Abstract: A method of manufacturing a semiconductor device has forming a first mask pattern exposing a region for forming a first transistor and a region for forming a second transistor, performing a first ion implantation using the first mask pattern, performing a second ion implantation using the first mask pattern, removing the first mask pattern and forming a second mask pattern in which the first transistor forming region is covered and the second transistor forming region is opened, and performing a third ion implantation using the second mask pattern.Type: ApplicationFiled: January 26, 2011Publication date: May 26, 2011Applicant: Fujitsu Semiconductor LimitedInventor: Yoshihiro TAKAO
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Publication number: 20110121404Abstract: An advanced transistor with punch through suppression includes a gate with length Lg, a well doped to have a first concentration of a dopant, and a screening region positioned under the gate and having a second concentration of dopant. The second concentration of dopant may be greater than 5×1018 dopant atoms per cm3. At least one punch through suppression region is disposed under the gate between the screening region and the well. The punch through suppression region has a third concentration of a dopant intermediate between the first concentration and the second concentration of dopant. A bias voltage may be applied to the well region to adjust a threshold voltage of the transistor.Type: ApplicationFiled: September 30, 2010Publication date: May 26, 2011Inventors: Lucian Shifren, Pushkar Ranade, Paul E. Gregory, Sachin R. Sonkusale, Weimin Zhang
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Publication number: 20110115030Abstract: A semiconductor device includes: a partially depleted first transistor formed in a semiconductor layer on an insulating layer; a second transistor formed in the semiconductor layer; and a third transistor formed in the semiconductor layer, wherein the first transistor has a first gate electrode formed above the semiconductor layer via an insulating film and a first source or a first drain of a first conductivity type formed in the semiconductor layer below a side of the first gate electrode, the second transistor has a second gate electrode formed above the semiconductor layer via the insulating film and a second source or a second drain of the first conductivity type formed in the semiconductor layer below a side of the second gate electrode, the third transistor has a third gate electrode formed above the semiconductor layer via the insulating film and a third source or a third drain of a second conductivity type formed in the semiconductor layer below a side of the third gate electrode, one of the first soType: ApplicationFiled: November 15, 2010Publication date: May 19, 2011Applicant: SEIKO EPSON CORPORATIONInventor: Yoji KITANO
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Patent number: 7939898Abstract: A transistor is defined to include a substrate portion and a diffusion region defined in the substrate portion so as to provide an operable transistor threshold voltage. An implant region is defined within a portion of the diffusion region so as to transform the operable transistor threshold voltage of the diffusion region portion into an inoperably high transistor threshold voltage. A gate electrode is defined to extend over both the diffusion region and the implant region. A first portion of the gate electrode defined over the diffusion region forms a first transistor segment having the operable transistor threshold voltage. A second portion of the gate electrode defined over the implant region forms a second transistor segment having the inoperably high transistor threshold voltage. Therefore, a boundary of the implant region defines a boundary of the operable first transistor segment.Type: GrantFiled: November 16, 2008Date of Patent: May 10, 2011Assignee: Tela Innovations, Inc.Inventors: Michael C. Smayling, Scott T. Becker
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Publication number: 20110101467Abstract: A stacked semiconductor device includes a first gate structure formed on a substrate, a first insulating interlayer covering the first gate structure on the substrate, a first active pattern formed through and on the first insulating interlayer and contacting the substrate, a second gate structure formed on the first active pattern and the first insulating interlayer, a buffer layer covering the second gate structure on the first active pattern and the first insulating interlayer, a second insulating interlayer formed on the buffer layer, and a contact plug formed through the first and second insulating interlayers, which contacts with the substrate and is insulated from the second gate structure by the buffer layer. Operation failures of a transistor in the stacked semiconductor device can be reduced because the buffer layer prevents a word line from being electrically connected to the contact plug.Type: ApplicationFiled: January 7, 2011Publication date: May 5, 2011Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Kyung-Tae Jang, Ju-Bum Lee, Jae-Kyo Chung, Heung-Seop Song, Mi-Young Lee
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Publication number: 20110101466Abstract: An electronic component includes a high voltage switching transistor encased in a package. The high voltage switching transistor comprises a source electrode, a gate electrode, and a drain electrode all on a first side of the high voltage switching transistor. The source electrode is electrically connected to a conducting structural portion of the package. Assemblies using the abovementioned transistor with another transistor can be formed, where the source of one transistor can be electrically connected to a conducting structural portion of a package containing the transistor and a drain of the second transistor is electrically connected to the second conductive structural portion of a package that houses the second transistor. Alternatively, the source of the second transistor is electrically isolated from its conductive structural portion, and the drain of the second transistor is electrically isolated from its conductive structural portion.Type: ApplicationFiled: November 2, 2009Publication date: May 5, 2011Applicant: TRANSPHORM INC.Inventor: Yifeng Wu
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Publication number: 20110089498Abstract: A method of fabricating a semiconductor device is provided that includes providing a semiconductor substrate having a first portion and a second portion, forming a first transistor in the first portion of the substrate, the first transistor being operable at a first voltage, and forming a second transistor in the second portion of the substrate, the second transistor being operable at a second voltage greater than the first voltage. The formation of the second transistor includes forming an extended feature of the second transistor with a photomask that is used to adjust a threshold voltage of the first transistor.Type: ApplicationFiled: October 20, 2009Publication date: April 21, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jan Sonsky, Anco Heringa
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Patent number: 7928509Abstract: The present invention discloses an integrated junction field effect transistor (JFET) and Schottky diode, comprising a depletion mode JFET which includes a source, a drain and a gate, wherein the drain is not provided with an ohmic contact such that it forms a Schottky diode.Type: GrantFiled: May 21, 2009Date of Patent: April 19, 2011Assignee: Richtek Technology CorporationInventor: Chih-Feng Huang
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Publication number: 20110074498Abstract: A suite of novel structures and methods is provided to reduce power consumption in a wide array of electronic devices and systems. Some of these structures and methods can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. As will be discussed, some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors.Type: ApplicationFiled: February 18, 2010Publication date: March 31, 2011Applicant: SuVolta, Inc.Inventors: Scott E. Thompson, Damodar R. Thummalapally
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Patent number: 7915691Abstract: Hybrid SRAM circuit, hybrid SRAM structures and method of fabricating hybrid SRAMs. The SRAM structures include first and second cross-coupled inverters coupled to first and second pass gate devices. The pull-down devices of the inverters are FinFETs while the pull-up devices of the inverters and the pass gate devices are planar FETs or pull-down and pull-up devices of the inverters are FinFETs while the pass gate devices are planar FETs.Type: GrantFiled: October 30, 2007Date of Patent: March 29, 2011Assignee: International Business Machines CorporationInventors: Robert C. Wong, Haining Sam Yang
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Patent number: 7915687Abstract: A semiconductor device includes: a first gate insulating film on a first region of a semiconductor substrate; a first gate electrode on the first gate insulating film; a second gate insulating film on a second region of the semiconductor substrate; and a second gate electrode on the second gate insulating film. The first gate insulating film includes a first insulating film composed of a first material containing a first metal, and the second gate insulating film includes a second insulating film composed of the first material and a second material containing a second metal.Type: GrantFiled: December 3, 2008Date of Patent: March 29, 2011Assignee: Panasonic CorporationInventor: Hisashi Ogawa
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Publication number: 20110068412Abstract: By covering ends of a field insulating film in a region where a MOS transistor having a relatively thin gate insulating film is formed with a relatively thick gate insulating film, a channel region of the MOS transistor having the relatively thin gate insulating film is set apart from an inversion-preventing diffusion layer formed under the field insulating film so as not to be influenced by film thickness fluctuation of the field insulating film, etching fluctuation of the relatively thick gate insulating film, and impurity concentration fluctuation at both sides of the channel due to the inversion-preventing diffusion layer.Type: ApplicationFiled: September 22, 2010Publication date: March 24, 2011Inventor: Yuichiro Kitajima
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Patent number: 7910957Abstract: A semiconductor device has a first and a second active regions of a first conductivity type disposed on a semiconductor substrate, a third and a fourth active regions of a second conductivity type disposed on the semiconductor substrate, the second and the fourth active regions having sizes larger than those of the first and the third active regions respectively, a first electroconductive pattern disposed adjacent to the first active region and having a first width, a second electroconductive pattern disposed adjacent to the second active region and having a second width larger than the first width, a third electroconductive pattern disposed adjacent to the third active region and having a third width; and a fourth electroconductive pattern disposed adjacent to the fourth active region and having a fourth width smaller than the third width.Type: GrantFiled: December 23, 2008Date of Patent: March 22, 2011Assignee: Fujitsu Semiconductor LimitedInventors: Junichi Mitani, Satoshi Nakai, Kazushi Fujita
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Patent number: 7910444Abstract: A forms spacers in a electronic device integrated on a semiconductor substrate that includes: first and second transistors each comprising a gate electrode projecting from the substrate and respective source/drain regions. The process comprises: forming in cascade a first protective layer and a first conformal insulating layer of a first thickness on the whole electronic device; forming a first mask to cover the first transistor; removing the first conformal insulating layer not covered by the first mask; removing the first mask; forming a second conformal insulating layer of a second thickness on the whole device; and removing the insulating layers until the protective layer is exposed to form first spacers of a first width on the side walls of the gate electrodes of the first transistor and second spacers of a second width on the side walls of the gate electrodes of the second transistor.Type: GrantFiled: October 27, 2009Date of Patent: March 22, 2011Assignee: STMicroelectronics S.r.l.Inventors: Giorgio Servalli, Giulio Albini, Carlo Cremonesi
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Patent number: 7911008Abstract: A planar pass gate NFET is designed with the same width as a planar pull-down NFET. To optimize a beta ratio between the planar pull-down NFET and an adjoined planar pass gate NFET, the threshold voltage of the planar pass gate NFET is increased by providing a different high-k metal gate stack to the planar pass gate NFET than to the planar pull-down NFET. Particularly, a threshold voltage adjustment dielectric layer, which is formed over a high-k dielectric layer, is preserved in the planar pass gate NFET and removed in the planar pull-down NFET. The combined NFET active area for the planar pass gate NFET and the planar pull-down NFET is substantially rectangular, which enables a high fidelity printing of the image of the combined NFET active area by lithographic means.Type: GrantFiled: October 25, 2007Date of Patent: March 22, 2011Assignee: International Business Machines CorporationInventors: Xiangdong Chen, Shang-Bin Ko, Dae-Gyu Park
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Patent number: 7906819Abstract: The semiconductor device includes the concentration of the impurity of the first conductivity type in a doped channel layer of a first conductivity type in the pass transistor is set at a relatively low value, and pocket regions of the first conductivity type in a pass transistor are formed so as to be relatively shallow with a relatively high impurity concentration.Type: GrantFiled: January 8, 2009Date of Patent: March 15, 2011Assignee: Fujitsu Semiconductor LimitedInventors: Akihiro Usujima, Hideyuki Kojima
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Patent number: 7906800Abstract: A semiconductor integrated circuit has a first substrate of a first polarity to which a first substrate potential is given, a second substrate of the first polarity to which a second substrate potential different from the first substrate potential is given, and a third substrate of a second polarity different from the first polarity. The first substrate is insulated from a power source or ground to which a source of a MOSFET formed on the substrate is connected. The third substrate is disposed between the first and second substrates in adjacent relation to the first and second substrates. A circuit element is formed on the third substrate.Type: GrantFiled: April 24, 2009Date of Patent: March 15, 2011Assignee: Panasonic CorporationInventor: Masaya Sumita
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Publication number: 20110049642Abstract: In sophisticated manufacturing techniques, the work function and thus the threshold voltage of transistor elements may be adjusted in an early manufacturing stage by providing a work function adjusting species within the high-k dielectric material with substantially the same spatial distribution in the gate dielectric materials of different thickness. After the incorporation of the work function adjusting species, the final thickness of the gate dielectric materials may be adjusted by selectively forming an additional dielectric layer so that the further patterning of the gate electrode structures may be accomplished with a high degree of compatibility to conventional manufacturing techniques. Consequently, extremely complicated processes for re-adjusting the threshold voltages of transistors having a different thickness gate dielectric material may be avoided.Type: ApplicationFiled: August 2, 2010Publication date: March 3, 2011Inventors: Thilo Scheiper, Andy Wei, Martin Trentzsch
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Publication number: 20110042756Abstract: A semiconductor device having an MOSFET serving as an element to be protected, and an electrostatic protection MOSFET element mounted on the same substrate is produced with the small number of steps while implementing a high protection ability. Low concentration regions and gate electrodes are formed and then an insulation film is formed on a whole surface. Then, etching is performed using a resist pattern as a mask to leave the insulation film in a region from a part of the gate electrode to a part of the low concentration region in each of regions A1 and A3, and on a side wall of the gate electrode in a region A2. Then, a high concentration ion implantation is performed using the gate electrodes and the insulation films as masks, and then a silicide layer is formed.Type: ApplicationFiled: August 10, 2010Publication date: February 24, 2011Inventor: Satoshi Hikida
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Patent number: 7892925Abstract: A method of forming a semiconductor device is provided. A hollowed portion is formed over an active region of a semiconductor substrate. The bottom of the hollowed portion is lowered in level than the surface of an isolation region of the substrate. A first mask is formed in the hollowed portion, except on a side region that is adjacent to the boundary between the active region and the isolation region. A trench is formed in the side region of the active region by using the first mask and the isolation region as a mask.Type: GrantFiled: September 16, 2008Date of Patent: February 22, 2011Assignee: Elpida Memory, Inc.Inventor: Hiroshi Kujirai
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Patent number: 7893502Abstract: An epitaxial semiconductor layer may be formed in a first area reserved for p-type field effect transistors. An ion implantation mask layer is formed and patterned to provide an opening in the first area, while blocking at least a second area reserved for n-type field effect transistors. Fluorine is implanted into the opening to form an epitaxial fluorine-doped semiconductor layer and an underlying fluorine-doped semiconductor layer in the first area. A composite gate stack including a high-k gate dielectric layer and an adjustment oxide layer is formed in the first and second area. P-type and n-type field effect transistors (FET's) are formed in the first and second areas, respectively. The epitaxial fluorine-doped semiconductor layer and the underlying fluorine-doped semiconductor layer compensate for the reduction of the decrease in the threshold voltage in the p-FET by the adjustment oxide portion directly above.Type: GrantFiled: May 14, 2009Date of Patent: February 22, 2011Assignees: International Business Machines Corporation, Chartered Semiconductor Manufacturing, Ltd., Infineon Technologies AGInventors: Weipeng Li, Dae-Gyu Park, Melanie J. Sherony, Jin-Ping Han, Yong Meng Lee
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Patent number: 7888747Abstract: A semiconductor device includes a semiconductor substrate; a first impurity diffusion suppression layer and a thicker second impurity diffusion suppression layer formed on the semiconductor substrate in first and second isolated transistor regions; first and second crystal layers formed on the first and second impurity diffusion suppression layers; first and second gate electrodes formed on the first and second crystal layers; first and second p-type channel regions formed in the semiconductor substrate, the first impurity diffusion suppression layer and respective of the first and second crystal layers below the first and second gate electrodes; and first and second source/drain regions formed on both sides of the first and second channel region; wherein the first and second p-type channels have lower impurity concentrations in respective of the first and second crystal layers than in the semiconductor substrate.Type: GrantFiled: April 9, 2009Date of Patent: February 15, 2011Assignee: Kabushiki Kaisha ToshibaInventor: Akira Hokazono
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Patent number: 7888151Abstract: An array substrate for an LCD device includes a first TFT including a first semiconductor layer, a first gate electrode, wherein the first gate electrode is directly over the first semiconductor layer; a first protrusion extending from the first gate electrode along an edge of the first semiconductor layer; a second TFT including a second semiconductor layer, a second gate electrode, wherein the second gate electrode is directly over the second semiconductor layer; a second protrusion extending from the second gate electrode along an edge of the second semiconductor layer; a third TFT connected to crossed data and gate lines including a third semiconductor layer, a third gate electrode, wherein the third gate electrode is directly over the third semiconductor layer; a third protrusion extending from the third gate electrode along an edge of the third semiconductor layer; and a pixel electrode.Type: GrantFiled: December 23, 2008Date of Patent: February 15, 2011Assignee: LG Display Co., Ltd.Inventors: Su Hyuk Kang, Dai Yun Lee, Yong In Park, Young Joo Kim
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Publication number: 20110031952Abstract: According to one embodiment, a semiconductor apparatus includes a substrate, a semiconductor layer of a first conductivity type, a first semiconductor region of a second conductivity type, a first main electrode, a second semiconductor layer of the second conductivity type, a third semiconductor layer of the first conductivity type, a second main electrode, a gate insulating film, and a gate electrode. An electron injected from the first semiconductor region into the semiconductor layer is recombined with an electron hole injected from the third semiconductor region into the semiconductor layer in a state of a body diode is biased in a forward direction. The body diode includes the semiconductor layer, the first semiconductor region, and the third semiconductor region.Type: ApplicationFiled: August 5, 2010Publication date: February 10, 2011Applicant: KABUSHIKI KAISHA TOSHIBAInventor: Kazutoshi NAKAMURA
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Patent number: 7880202Abstract: A semiconductor field effect transistor can be used with RF signals in an amplifier circuit. The transistor includes a source region and a drain region with a channel region interposed in between the source and drain regions. The transistor is structured such that the threshold voltage for current flow through the channel region varies at different points along the width direction, e.g., to give an improvement in the distortion characteristics of the transistor.Type: GrantFiled: November 27, 2006Date of Patent: February 1, 2011Assignee: Infineon Technologies AGInventor: Peter Baumgartner
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Publication number: 20110018068Abstract: An integrated device includes: a semiconductor body having a first, depressed, portion and second portions which project from the first portion; a STI structure, extending on the first portion of the semiconductor body, which delimits laterally the second portions and has a face adjacent to a surface of the first portion; low-voltage CMOS components, housed in the second portions, in a first region of the semiconductor body; and a power component, in a second region of the semiconductor body. The power component has at least one conduction region, formed in the first portion of the semiconductor body, and a conduction contact, connected to the conduction region and traversing the STI structure in a direction perpendicular to the surface of the first portion of the semiconductor body.Type: ApplicationFiled: July 20, 2010Publication date: January 27, 2011Applicant: STMICROELECTRONICS S.R.LInventors: Riccardo DEPETRO, Stefano MANZINI
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Patent number: 7872898Abstract: A one time programmable read only memory disposed on a substrate of a first conductive type is provided. A gate structure is disposed on the substrate. A first doped region and a second doped region are disposed in the substrate at respective sides of the gate structure, and the first doped region and the second doped region are of a second conductive type which is different from the first conductive type. A third doped region of the first conductive type is disposed in the substrate and is adjacent to the second doped region, and a junction is formed between the third doped region and the second doped region. A metal silicide layer is disposed on the substrate. An clearance is formed in the metal silicide layer, and the clearance at least exposes the junction.Type: GrantFiled: April 15, 2009Date of Patent: January 18, 2011Assignee: eMemory Technology Inc.Inventors: Wen-Hao Ching, Shih-Chen Wang, Tsung-Mu Lai
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Patent number: RE42180Abstract: A semiconductor device includes a semiconductor substrate, an element-isolating region formed in the semiconductor substrate, a real element region formed in the semiconductor substrate and outside the element-isolating region and having a metal silicide layer formed on the surface thereof, and a dummy element region formed in the semiconductor substrate and outside the element-isolating region and having a metal silicide layer formed on the surface thereof. The ratio of the sum of pattern areas of the real element region and dummy element region occupied in a 1 ?m-square range of interest including the element region is 25% or more.Type: GrantFiled: September 17, 2008Date of Patent: March 1, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Hisato Oyamatsu, Kenji Honda