Magnetic Field Patents (Class 257/421)
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Patent number: 11825751Abstract: A manufacturing method of a memory device includes the following steps. Memory units are formed on a substrate. Each of the memory units includes a first electrode, a second electrode, and a memory material layer. The second electrode is disposed above the first electrode in a vertical direction. The memory material layer is disposed between the first electrode and the second electrode in the vertical direction. A conformal spacer layer is formed on the memory units. A non-conformal spacer layer is formed on the conformal spacer layer. A first opening is formed penetrating through a sidewall portion of the non-conformal spacer layer and a sidewall portion of the conformal spacer layer in the vertical direction.Type: GrantFiled: July 15, 2021Date of Patent: November 21, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Wei Kuo, Chung-Yi Chiu
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Patent number: 11818963Abstract: An apparatus is provided which comprises: a magnetic junction including: a stack of structures including: a first structure comprising a magnet with an unfixed perpendicular magnetic anisotropy (PMA) relative to an x-y plane of a device, wherein the first structure has a first dimension along the x-y plane and a second dimension in the z-plane, wherein the second dimension is substantially greater than the first dimension. The magnetic junction includes a second structure comprising one of a dielectric or metal; and a third structure comprising a magnet with fixed PMA, wherein the third structure has an anisotropy axis perpendicular to the plane of the device, and wherein the third structure is adjacent to the second structure such that the second structure is between the first and third structures; and an interconnect adjacent to the third structure, wherein the interconnect comprises a spin orbit material.Type: GrantFiled: January 18, 2022Date of Patent: November 14, 2023Assignee: Intel CorporationInventors: Sasikanth Manipatruni, Kaan Oguz, Chia-Ching Lin, Christopher Wiegand, Tanay Gosavi, Ian Young
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Patent number: 11810702Abstract: The disclosed technology relates generally to the field of magnetic devices, in particular to magnetic memory devices or logic devices. The disclosed technology presents a magnetic structure for a magnetic device, wherein the magnetic structure comprises a magnetic reference layer (RL); a spacer provided on the magnetic RL, the spacer comprising a first texture breaking layer provided on the magnetic RL, a magnetic bridge layer provided on the first texture breaking layer, and a second texture breaking layer provided on the magnetic bridge layer. Further, the magnetic structure comprising a magnetic pinned layer (PL) or hard layer (HL) provided on the spacer, wherein the magnetic RL and the magnetic PL or HL are magnetically coupled across the spacer through direct exchange interaction.Type: GrantFiled: December 8, 2020Date of Patent: November 7, 2023Assignee: IMEC vzwInventors: Robert Carpenter, Johan Swerts
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Patent number: 11812669Abstract: A magnetoresistive random access memory (MRAM), including a bottom electrode layer on a substrate, a magnetic tunnel junction stack on the bottom electrode layer, a top electrode layer on the magnetic tunnel junction stack, and a hard mask layer on said top electrode layer, wherein the material of top electrode layer is titanium nitride, a material of said hard mask layer is tantalum or tantalum nitride, and the percentage of nitrogen in the titanium nitride gradually decreases from the top surface of top electrode layer to the bottom surface of top electrode layer.Type: GrantFiled: June 9, 2022Date of Patent: November 7, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Lin Wang, Chen-Yi Weng, Chin-Yang Hsieh, Yi-Hui Lee, Ying-Cheng Liu, Yi-An Shih, Jing-Yin Jhang, I-Ming Tseng, Yu-Ping Wang, Chien-Ting Lin, Kun-Chen Ho, Yi-Syun Chou, Chang-Min Li, Yi-Wei Tseng, Yu-Tsung Lai, Jun Xie
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Patent number: 11800811Abstract: A MTJ stack is deposited on a bottom electrode. A metal hard mask is deposited on the MTJ stack and a dielectric mask is deposited on the metal hard mask. A photoresist pattern is formed on the dielectric mask, having a critical dimension of more than about 65 nm. The dielectric and metal hard masks are etched wherein the photoresist pattern is removed. The dielectric and metal hard masks are trimmed to reduce their critical dimension to 10-60 nm and to reduce sidewall surface roughness. The dielectric and metal hard masks and the MTJ stack are etched wherein the dielectric mask is removed and a MTJ device is formed having a small critical dimension of 10-60 nm, and having further reduced sidewall surface roughness.Type: GrantFiled: August 2, 2021Date of Patent: October 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Dongna Shen, Yi Yang, Jesmin Haq, Yu-Jen Wang
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Patent number: 11800812Abstract: An integrated circuit includes a dielectric layer, a memory device, and a resistor. The memory device includes a bottom electrode via, a bottom electrode, a resistance switching element, and a top electrode. The bottom electrode via is in the dielectric layer. The dielectric layer has a first portion extending along sidewalls of the bottom electrode via, a second portion extending laterally from the first portion, and a third portion. The bottom electrode is over the bottom electrode via. The resistance switching element is over the bottom electrode. The top electrode is over the resistance switching element. The resistor is over the third portion of the dielectric layer. A thickness of the third portion of the dielectric layer is greater than a thickness of the second portion of the dielectric layer.Type: GrantFiled: March 7, 2022Date of Patent: October 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tai-Yen Peng, Chien-Chung Huang, Yu-Shu Chen, Sin-Yi Yang, Chen-Jung Wang, Han-Ting Lin, Chih-Yuan Ting, Jyu-Horng Shieh, Hui-Hsien Wei
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Patent number: 11793087Abstract: The disclosure is directed to spin-orbit torque (“SOT”) magnetoresistive random-access memory (“MRAM”) (“SOT-MRAM”) structures and methods. A SOT channel of the SOT-MRAM includes multiple heavy metal layers and one or more dielectric dusting layers each sandwiched between two adjacent heavy metal layers. The dielectric dusting layers each include discrete molecules or discrete molecule clusters of a dielectric material scattered in or adjacent to an interface between two adjacent heavy metal layers.Type: GrantFiled: July 13, 2021Date of Patent: October 17, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shy-Jay Lin, Mingyuan Song
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Patent number: 11793001Abstract: A spin-orbit torque magnetoresistive random-access memory device formed by fabricating a spin-Hall-effect (SHE) layer above and in electrical contact with a transistor, forming a spin-orbit-torque (SOT) magnetoresistive random access memory (MRAM) cell stack disposed above and in electrical contact with the SHE rail, wherein the SOT-MRAM cell stack comprises a free layer, a tunnel junction layer, a reference layer, and a diode structure, forming a write line disposed in electrical contact with the SHE rail, forming a protective dielectric layer covering a portion of the SOT-MRAM cell stack, and forming a read line disposed above and adjacent to the diode structure.Type: GrantFiled: August 13, 2021Date of Patent: October 17, 2023Assignee: International Business Machines CorporationInventors: Eric Raymond Evarts, Virat Vasav Mehta, Oscar van der Straten
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Patent number: 11785863Abstract: A method for fabricating a magnetic tunneling junction (MTJ) structure is described. A first dielectric layer is deposited on a bottom electrode and partially etched through to form a first via opening having straight sidewalls, then etched all the way through to the bottom electrode to form a second via opening having tapered sidewalls. A metal layer is deposited in the second via opening and planarized to the level of the first dielectric layer. The remaining first dielectric layer is removed leaving an electrode plug on the bottom electrode. MTJ stacks are deposited on the electrode plug and on the bottom electrode wherein the MTJ stacks are discontinuous. A second dielectric layer is deposited over the MTJ stacks and polished to expose a top surface of the MTJ stack on the electrode plug. A top electrode layer is deposited to complete the MTJ structure.Type: GrantFiled: June 1, 2021Date of Patent: October 10, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi Yang, Dongna Shen, Yu-Jen Wang
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Patent number: 11778920Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a cap layer adjacent to and directly contacting the MTJ, a first inter-metal dielectric (IMD) layer around the MTJ, a top electrode on the MTJ, a metal interconnection under the MTJ, and a second IMD layer around the metal interconnection. Preferably, the cap layer is a single layer structure made of dielectric material and an edge of the cap layer contacts the first IMD layer directly.Type: GrantFiled: May 5, 2022Date of Patent: October 3, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
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Patent number: 11778924Abstract: A magnetic memory device includes a magnetic tunnel junction (MTJ) stack, a spin-orbit torque (SOT) induction wiring disposed over the MTJ stack, a first terminal coupled to a first end of the SOT induction wiring, a second terminal coupled to a second end of the SOT induction wiring, and a selector layer coupled to the first terminal.Type: GrantFiled: August 10, 2022Date of Patent: October 3, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: MingYuan Song, Shy-Jay Lin, William J. Gallagher, Hiroki Noguchi
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Patent number: 11778918Abstract: A method for manufacturing a memory device includes forming a via trench in a substrate and forming a via in the via trench. A lower portion of the via includes a first metal and an upper portion of the via includes a second metal that is different from the first metal. The method further includes forming a magnetic tunneling junction over the via and forming a top electrode over the magnetic tunneling junction.Type: GrantFiled: August 20, 2020Date of Patent: October 3, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsiang-Ku Shen, Liang-Wei Wang, Dian-Hau Chen
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Patent number: 11770978Abstract: A magnetization rotational element includes a spin-orbit torque wiring, and a first ferromagnetic layer which is located in a first direction with respect to the spin-orbit torque wiring and in which spins are injected from the spin-orbit torque wiring. The spin-orbit torque wiring has a plurality of spin generation layers and insertion layers located between the plurality of spin generation layers in the first direction. The insertion layers have a lower electrical resistivity than the spin generation layers.Type: GrantFiled: November 25, 2020Date of Patent: September 26, 2023Assignee: TDK CORPORATIONInventors: Yugo Ishitani, Tomoyuki Sasaki, Yohei Shiokawa
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Patent number: 11770979Abstract: A memory device includes a bottom electrode, a conductive layer such as an alloy including ruthenium and tungsten above the bottom electrode and a perpendicular magnetic tunnel junction (pMTJ) on the conductive layer. In an embodiment, the pMTJ includes a fixed magnet, a tunnel barrier above the fixed magnet and a free magnet on the tunnel barrier. The memory device further includes a synthetic antiferromagnetic (SAF) structure that is ferromagnetically coupled with the fixed magnet to pin a magnetization of the fixed magnet. The conductive layer has a crystal texture which promotes high quality FCC <111> crystal texture in the SAF structure and improves perpendicular magnetic anisotropy of the fixed magnet.Type: GrantFiled: June 29, 2018Date of Patent: September 26, 2023Assignee: Intel CorporationInventors: Daniel Ouellette, Justin Brockman, Tofizur Rahman, Angeline Smith, Andrew Smith, Christopher Wiegand, Oleg Golonzka
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Patent number: 11770937Abstract: A magnetic memory device includes a substrate including a cell region and a peripheral circuit region, lower contact plugs on the cell region, data storage structures on the lower contact plugs, and a peripheral interconnection structure on the peripheral circuit region. The peripheral interconnection structure includes a line portion extending in a direction parallel to a top surface of the substrate, and contact portions extending from the line portion toward the substrate. A height of each of the contact portions is less than a height of each of the lower contact plugs.Type: GrantFiled: August 30, 2021Date of Patent: September 26, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Han-Na Cho, Bok-Yeon Won, Oik Kwon
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Patent number: 11770981Abstract: Provided are a magnetoresistance effect element and a magnetic memory having a shape magnetic anisotropy and using a recording layer having an anti-parallel coupling. A first magnetic layer (3) and a second magnetic layer (5) of the magnetoresistance effect element include a ferromagnetic substance, have a magnetization direction variable to the direction perpendicular to a film surface and are magnetically coupled in an anti-parallel direction, and a junction size D (nm), which is a length of the longest straight line on an end face perpendicular to the thickness direction of the first magnetic layer (3) and the second magnetic layer (5), a film thickness t1 (nm) of the first magnetic layer (3), and a film thickness t2 (nm) of the second magnetic layer (5) satisfy relationships D<t1 and D?t1 or D?t1 and D<t2.Type: GrantFiled: February 19, 2019Date of Patent: September 26, 2023Assignee: TOHOKU UNIVERSITYInventors: Hiroaki Honjo, Tetsuo Endoh, Shoji Ikeda, Hideo Sato, Koichi Nishioka
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Patent number: 11765980Abstract: Various embodiments of the present disclosure are directed towards a method for forming a memory cell. In some embodiments, a memory film is deposited over a substrate and comprises a bottom electrode layer, a top electrode layer, and a data storage film between the top and bottom electrode layers. A hard mask film is deposited over the memory film and comprises a conductive hard mask layer. The top electrode layer and the hard mask film are patterned to respectively form a top electrode and a hard mask over the top electrode. A trimming process is performed to decrease a sidewall angle between a sidewall of the hard mask and a bottom surface of the hard mask. An etch is performed into the data storage film with the hard mask in place after the trimming process to form a data storage structure underlying the top electrode.Type: GrantFiled: October 23, 2020Date of Patent: September 19, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Min-Yung Ko, Chern-Yow Hsu, Chang-Ming Wu, Shih-Chang Liu
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Patent number: 11758821Abstract: A magnetic memory structure includes a heavy-metal layer, a plurality of magnetic tunneling junction (MTJ) layer, a conductive layer and an insulation layer. In an example, the pinned-layer of the MTJ layers are arranged in a string form and disposed over the barrier-layer. In an example also disclosed, the pinned-layer, the free-layer of the MTJ layers are arranged in a string form. Whereas the pinned-layers are disposed over the barrier-layer and the free-layers are disposed over the heavy-metal layer. The conductive layer is formed under the heavy-metal layer and includes a first conductive portion and a second conductive portion separated from each other and connected with two end of the heavy-metal layer respectively. The insulation layer fills up an interval between the first conductive portion and the second conductive portion. The conductive layer has an electric conductivity higher than that of the heavy-metal layer.Type: GrantFiled: December 8, 2021Date of Patent: September 12, 2023Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Ziaur Rahaman Shakh, I-Jung Wang, Jeng-Hua Wei
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Patent number: 11751481Abstract: A Magnetic Tunnel Junction (MTJ) device can include a reference magnetic layer having one or more trenches disposed therein. One or more sections of a tunnel barrier layer can be disposed on the walls of the one or more trenches. One or more sections of a free magnetic layer can be disposed on the one or more sections of the tunnel barrier layer in the one or more trenches. One or more sections of a conductive layer can be disposed on the one or more sections of the free magnetic layer in the one or more trenches. One or more insulator blocks can be disposed between corresponding sections of the tunnel barrier layer, corresponding sections of the free magnetic layer and corresponding sections of the conductive layer in the one or more trenches.Type: GrantFiled: August 16, 2021Date of Patent: September 5, 2023Assignee: Integrated Silicon Solution, (Cayman) Inc.Inventor: Satoru Araki
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Patent number: 11751486Abstract: A device including a templating structure and a magnetic layer is described. The templating structure includes D and E. A ratio of D to E is represented by D1-xEx, with x being at least 0.4 and not more than 0.6. E includes a main constituent. The main constituent includes at least one of Al, Ga, and Ge. E includes at least fifty atomic percent of the main constituent. D includes at least one constituent that includes Ir. D includes at least 50 atomic percent of the at least one constituent. The magnetic layer is on the templating structure and includes at least one of a Heusler compound and an L10 compound. The magnetic layer is in contact with the templating structure and being magnetic at room temperature.Type: GrantFiled: November 20, 2020Date of Patent: September 5, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Jaewoo Jeong, Panagiotis Charilaos Filippou, Yari Ferrante, Chirag Garg, Stuart Stephen Papworth Parkin, Mahesh Samant
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Patent number: 11744083Abstract: A semiconductor device structure includes a metallization stack comprising one or more patterned metal layers. A bi-layer dielectric cap is disposed on and in contact with the metallization stack. At least one memory device is disposed on the bi-layer dielectric cap. A method for forming the metallization stack includes receiving a structure comprising a metallization layer and a first dielectric cap layer formed over the metallization layer. The metallization layer includes a logic area and a memory area. At least one memory stack is formed over the first dielectric cap layer. A self-assembled monolayer is formed over and in contact with the memory stack. A second dielectric cap layer is formed on and in contact with the first dielectric cap layer. The second dielectric cap layer is not formed on the self-assembled monolayer.Type: GrantFiled: April 12, 2019Date of Patent: August 29, 2023Assignee: International Business Machines CorporationInventors: Ashim Dutta, Ekmini Anuja De Silva, Chih-Chao Yang
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Patent number: 11729996Abstract: An embedded eMRAM device for eFlash replacement including an MTJ pillar located between a top electrode and a bottom electrode for forming an MRAM array. The bottom electrode is disposed above a substrate and surrounded by a first dielectric spacer, while the top electrode is disposed above the MTJ pillar and surrounded by a second dielectric spacer. A bottom metal plate is disposed on opposing sides of the bottom electrode between first and second dielectric layers and is electrically separated from the bottom electrode by the first dielectric spacer. A top metal plate is disposed on opposing sides of the top electrode between third and fourth dielectric layers and is electrically separated from the top electrode by the second dielectric spacer. A bias voltage applied to the top metal plate and the bottom metal plate generates an external electric field on the MTJ pillar for creating a VCMA effect.Type: GrantFiled: July 30, 2021Date of Patent: August 15, 2023Assignee: International Business Machines CorporationInventors: Heng Wu, Ruilong Xie, Julien Frougier, Bruce B. Doris
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Patent number: 11723216Abstract: According to one embodiment, a magnetic memory device includes: a plurality of first films and a plurality of second films stacked alternately; a first insulating layer passing through the plurality of first and second films; a second insulating layer passing through the plurality of first and second films and in contact with a surface of the first insulating layer; a first magnet including a first pillar portion provided between the second insulating layer and the plurality of first and second films, and a first terrace portion coupled to one end of the first pillar portion; a first interconnect layer coupled to the other end of the first pillar portion of the first magnet; and a first magnetoresistance effect element coupled to the first terrace portion of the first magnet.Type: GrantFiled: August 28, 2020Date of Patent: August 8, 2023Assignee: Kioxia CorporationInventor: Yasuhito Yoshimizu
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Patent number: 11711925Abstract: A magnetic memory of an embodiment includes: a first magnetic member including a first and second portions and extending in a first direction; a first and second wirings disposed to be apart from the first magnetic member and extending in a second direction intersecting the first direction, the first and the second wirings being separated from each other in a third direction intersecting the first and second directions, the first magnetic member being disposed to be apart from a region between the first wiring and the second wiring in the first direction; and a second magnetic member surrounding at least parts of the first and second wirings, the second magnetic member including a third portion located to be more distant from the first magnetic member, a fourth portion located to be closer to the first magnetic member, and a fifth portion located in the region.Type: GrantFiled: March 1, 2021Date of Patent: July 25, 2023Assignee: Kioxia CorporationInventors: Hiroki Tokuhira, Tsuyoshi Kondo, Mutsumi Okajima, Yoshihiro Ueda
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Patent number: 11693068Abstract: An exchange-coupled film includes a antiferromagnetic layer and a pinned magnetic layer including a ferromagnetic layer stacked together, the antiferromagnetic layer having a structure including an IrMn layer, a first PtMn layer, a PtCr layer, and a second PtMn layer stacked in that order, the IrMn layer being in contact with the pinned magnetic layer. The second PtMn layer preferably has a thickness of more than 0 ? and less than 60 ?, in some cases. The PtCr layer preferably has a thickness of 100 ? or more, in some cases. The antiferromagnetic layer preferably has a total thickness of 200 ? or less, in some cases.Type: GrantFiled: June 24, 2021Date of Patent: July 4, 2023Assignee: ALPS ALPINE CO., LTD.Inventors: Masamichi Saito, Fumihito Koike
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Patent number: 11675028Abstract: A magnetic sensor comprises a magnetoresistive effect element including a first side surface and a second side surface facing in opposite directions along a first axis and a first end surface and a second end surface facing in opposite directions along a second axis substantially orthogonal to the first axis. The sensor has a sensitivity axis extending in a direction of the first axis, a first yoke unit provided adjacent to the first side surface of the magnetoresistive effect element, and a first bias magnetic field generation unit provided adjacent to the first end surface of the magnetoresistive effect element. The first bias magnetic field generation unit is provided to be capable of applying a bias magnetic field on the magnetoresistive effect element and the first yoke unit.Type: GrantFiled: October 24, 2022Date of Patent: June 13, 2023Assignee: TDK CorporationInventors: Kenichi Takano, Tsuyoshi Umehara, Yuta Saito, Hiraku Hirabayashi
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Patent number: 11678588Abstract: A Hall effect device includes a semiconductor region and at least three contacts to the semiconductor region, which are arranged in the semiconductor region substantially along a line or curve. The line or curve functionally separates the semiconductor region in a first region and a second region. The Hall effect device further including a first electrode that is electrically isolated against the first region and a second electrode that is electrically isolated against the second region. Two of the at least three contacts supply electric energy to the first region and to the second region, and the remaining at least one contact taps an output signal of the first region and/or the second region that responds to a magnetic field component.Type: GrantFiled: September 30, 2020Date of Patent: June 13, 2023Assignee: Infineon Technologies AGInventor: Udo Ausserlechner
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Patent number: 11665973Abstract: A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) stack on a substrate; forming a top electrode on the MTJ stack; performing a first patterning process to remove the MTJ stack for forming a first MTJ; forming a first inter-metal dielectric (IMD) layer around the first MTJ; and performing a second patterning process to remove the first MTJ for forming a second MTJ and a third MTJ.Type: GrantFiled: May 3, 2022Date of Patent: May 30, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Hui-Lin Wang, Po-Kai Hsu, Hung-Yueh Chen, Yu-Ping Wang
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Patent number: 11665975Abstract: An apparatus is provided which comprises: a bit-line; a first word-line; a second word-line; and a source-line; a magnetic junction comprising a free magnet; an interconnect comprising spin orbit material, wherein the interconnect is adjacent to the free magnet of the magnetic junction; and a first device (e.g., a selector device) coupled at one end of the interconnect and to the second word-line; and a second device coupled to the magnetic junction, the first word-line and the source-line.Type: GrantFiled: June 19, 2018Date of Patent: May 30, 2023Assignee: Intel CorporationInventors: Tanay Gosavi, Chia-Ching Lin, Sasikanth Manipatruni, Ian Young
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Patent number: 11641782Abstract: The present disclosure relates to a spin-orbit torque-based switching device and a method of fabricating the same. The spin-orbit torque-based switching device of the present disclosure includes a spin torque generating layer provided with a tungsten-vanadium alloy thin film exhibiting perpendicular magnetic anisotropy (PMA) characteristics and a magnetization free layer formed on the spin torque generating layer.Type: GrantFiled: October 8, 2020Date of Patent: May 2, 2023Assignee: Korea University Research and Business FoundationInventors: Young Keun Kim, Gyu Won Kim
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Patent number: 11631781Abstract: A method of manufacturing display device is disclosed. A substrate includes a basal layer and metal contacts on the top surface. An insulation layer is disposed on the top surface and includes a first mounting surface and a bottom surface. Multiple grooves are formed on the insulation layer and each extends from the first mounting surface to the bottom surface. The grooves respectively correspond to the metal contacts and expose respective metal contacts. An electromagnetic force is provided with a direction from the basal layer toward the insulation layer. A droplet containing multiple micro components is provided on the first mounting surface. A configuration of an electrode of the micro component corresponds to a configuration of one of the grooves. The electrode is attracted to the corresponding groove by the electromagnetic force so as to electrically contact the metal contact.Type: GrantFiled: February 21, 2021Date of Patent: April 18, 2023Assignee: PlayNitride Inc.Inventors: Tzu-Yu Ting, Yu-Hung Lai, Hsiang-Wen Tang, Yi-Chun Shih
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Patent number: 11631804Abstract: A perpendicular magnetization type three-terminal SOT-MRAM that does not need an external magnetic field is provided. A magnetoresistance effect element where a first magnetic layer/nonmagnetic spacer layer/recording layer are disposed in order, and the first magnetic layer and the nonmagnetic spacer layer are provided to a channel layer.Type: GrantFiled: February 13, 2019Date of Patent: April 18, 2023Assignee: TOHOKU UNIVERSITYInventors: Yoshiaki Saito, Shoji Ikeda, Hideo Sato, Tetsuo Endoh
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Patent number: 11605778Abstract: A magnetic field magnetic field sensor and method of making the sensor. The sensor and method of making the sensor may comprise a material or structure that prevents the admission of light in certain wavelengths to enhance the stability of the magnetic field sensor over a period of time. The sensor and method of making the sensor may comprise an adsorption prevention layer which protects the semiconductor portion of the magnetic. The sensor may also comprise an insulating layer formed between semiconductor layers and a substrate layer.Type: GrantFiled: February 7, 2020Date of Patent: March 14, 2023Assignee: Lake Shore Cryotronics, Inc.Inventors: David Daughton, Patrick Gleeson, Bo-Kuai Lai, Daniel Hoy
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Patent number: 11600660Abstract: An ultra-fast magnetic random access memory (MRAM) comprises a three terminal bottom-pinned composite SOT magnetic tunneling junction (bCSOT-MTJ) element including (counting from top to bottom) a magnetic flux guide (MFG) having a very high magnetic permeability, a spin Hall channel (SHC) having a large positive spin Hall angle, an in-plane magnetic memory (MM) layer, a tunnel barrier (TB) layer, and a magnetic pinning stack (MPS) having a synthetic antiparallel coupling pinned by an antiferromagnetic material. The magnetic writing is significantly boosted by a combined effort of enhanced spin orbit torque (SOT) and Lorentz force generated by current-flowing wire (CFW) in the SHC layer and spin transfer torque (STT) by a current flowing through the MTJ stack, and further enhanced by a magnetic close loop formed at the cross section of MFG/SHC/MM tri-layer.Type: GrantFiled: April 15, 2020Date of Patent: March 7, 2023Inventors: Rongfu Xiao, Yimin Guo, Jun Chen
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Patent number: 11588101Abstract: A Hall sensor includes a Hall well, such as an implanted region in a surface layer of a semiconductor structure, and four doped regions spaced apart from one another in the implanted region. The implanted region and the doped regions include majority carriers of the same conductivity type. The sensor also includes a dielectric layer that extends over the implanted region, and an electrode layer over the dielectric layer to operate as a control gate to set or adjust the sensor performance. A first supply circuit provides a first bias signal to a first pair of the terminals, and a second supply circuit provides a second bias signal to the electrode layer.Type: GrantFiled: March 30, 2019Date of Patent: February 21, 2023Assignee: Texas Instruments IncorporatedInventor: Keith Ryan Green
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Patent number: 11587708Abstract: In one aspect, the disclosed technology relates to a magnetic device, which may be a magnetic memory and/or logic device. The magnetic device can comprise a seed layer; a first free magnetic layer provided on the seed layer; an interlayer provided on the first free magnetic layer; a second free magnetic layer provided on the interlayer; a tunnel barrier provided on the second free magnetic layer; and a fixed magnetic layer. The first free magnetic layer and the second free magnetic layer can be ferromagnetically coupled across the interlayer through exchange interaction.Type: GrantFiled: September 30, 2020Date of Patent: February 21, 2023Assignees: IMEC vzw, Katholieke Universiteit LeuvenInventors: Van Dai Nguyen, Sebastien Couet, Olivier Bultynck, Danny Wan, Eline Raymenants
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Patent number: 11569295Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).Type: GrantFiled: July 8, 2020Date of Patent: January 31, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Kuo-Hsing Lee, Sheng-Yuan Hsueh, Te-Wei Yeh, Chien-Liang Wu
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Patent number: 11569438Abstract: A method of manufacturing a magnetic tunnel junction device is provided. The method includes forming an MTJ stack including a reference layer, a tunnel barrier layer formed on the reference layer, a free layer formed on the barrier layer, and a cap layer formed on the free layer. The method also includes performing ion beam etching (IBE) through each layer of the MTJ stack to form at least one MTJ pillar. The method also includes forming an isolation layer on sidewalls of at least the tunnel barrier layer, the isolation layer comprising a same material as that of the tunnel barrier layer. A combined width of the isolation layer and the tunnel barrier layer is equal to or greater than a width of at least one of the reference layer and the free layer.Type: GrantFiled: March 23, 2020Date of Patent: January 31, 2023Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Matthias Georg Gottwald, Pouya Hashemi, Bruce B. Doris
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Patent number: 11569153Abstract: A leadframe includes leads or lead terminals, a plurality of folded features including i) support features positioned within an area defined in at least one dimension by the leads or the lead terminals configured for supporting at least one of a die pad and a first pad and a second pad spaced apart from one another, or ii) current carrying features. At least one of the folded features includes a planar portion and a folded edge structure that curves upwards at an angle of at least 45° relative to the planar portion. The folded features are configured to provide an effective increase in thickness to reduce the deformation observed in assembly.Type: GrantFiled: March 16, 2020Date of Patent: January 31, 2023Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Enis Tuncer, John Paul Tellkamp
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Patent number: 11569437Abstract: An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.Type: GrantFiled: April 22, 2020Date of Patent: January 31, 2023Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: Yanping Shen, Halting Wang, Sipeng Gu
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Patent number: 11563168Abstract: A magnetic memory device includes a magnetoresistance effect element including a first, second, and third ferromagnetic layer, a first non-magnetic layer between the first and second ferromagnetic layer, and a second non-magnetic layer between the second and third ferromagnetic layer. The second ferromagnetic layer is between the first and third ferromagnetic layer. The third ferromagnetic layer includes a fourth ferromagnetic layer in contact with the second non-magnetic layer, a third non-magnetic layer, and a fourth non-magnetic layer between the fourth ferromagnetic layer and the third non-magnetic layer. The first non-magnetic layer includes an oxide including magnesium (Mg). A melting point of the fourth non-magnetic layer is higher than the third non-magnetic layer.Type: GrantFiled: September 9, 2020Date of Patent: January 24, 2023Assignee: KIOXIA CORPORATIONInventors: Kazuya Sawada, Young Min Eeh, Tadaaki Oikawa, Eiji Kitagawa, Taiga Isoda
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Patent number: 11563171Abstract: A magnetic tunneling junction (MTJ) structure comprises a pinned layer on a bottom electrode. a barrier layer on the pinned layer, wherein a second metal re-deposition layer is on sidewalls of the barrier layer and the pinned layer, a free layer on the barrier layer wherein the free layer has a first width smaller than a second width of the pinned layer, a top electrode on the free layer having a same first width as the free layer wherein a first metal re-deposition layer is on sidewalls of the free layer and top electrode, and dielectric spacers on sidewalls of the free layer and top electrode covering the first metal re-deposition layer wherein the free layer and the top electrode together with the dielectric spacers have a same the second width as the pinned layer wherein the dielectric spacers prevent shorting between the first and second metal re-deposition layers.Type: GrantFiled: March 29, 2021Date of Patent: January 24, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi Yang, Dongna Shen, Yu-Jen Wang
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Patent number: 11563054Abstract: A memory element and methods of constructing the memory element are described. The memory element may include a bottom electrode structure having an uppermost portion of a first dimension. The memory element may further include a MTJ pillar having a bottommost portion forming an interface with the uppermost portion of the bottom electrode structure. The bottommost portion of the MTJ pillar may have a second dimension that is less than the first dimension. The memory element may further include oxidized metal particles located on an outermost sidewall of the MTJ pillar. The memory element may further include a top electrode structure located in the MTJ pillar.Type: GrantFiled: March 21, 2019Date of Patent: January 24, 2023Assignee: International Business Machines CorporationInventors: Dimitri Houssameddine, Chandrasekharan Kothandaraman, Bruce B. Doris
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Patent number: 11561112Abstract: Methods and apparatus for a current sensor having an elongate current conductor having an input and an output and a longitudinal axis. First, second, third and fourth magnetic field sensing elements are coupled in a bridge configuration and positioned in a plane parallel to a surface of the current conductor such that the second and fourth magnetic field sensing elements comprise inner elements and the first and third magnetic field sensing elements comprise outer elements. Embodiments of the sensor reduce the effects of stray fields on the sensor.Type: GrantFiled: March 13, 2020Date of Patent: January 24, 2023Assignee: Allegro MicroSystems, LLCInventors: Robert A. Briano, Paul A. David
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Patent number: 11557717Abstract: A memory apparatus is provided which comprises: a stack comprising a magnetic insulating material and a transition metal dichalcogenide (TMD), wherein the magnetic insulating material has a first magnetization. The stack behaves as a free magnet. The apparatus includes a fixed magnet with a second magnetization. An interconnect is further provided which comprises a spin orbit material, wherein the interconnect is adjacent to the stack.Type: GrantFiled: November 16, 2018Date of Patent: January 17, 2023Assignee: Intel CorporationInventors: Chia-Ching Lin, Tanay Gosavi, Sasikanth Manipatruni, Dmitri Nikonov, Ian Young
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Patent number: 11552243Abstract: A memory device is provided that includes at least one MTJ pillar which can have a ternary program state as compared to a binary program state in a conventional device. The MTJ pillar contains a lower MTJ structure that includes at least a first magnetic reference material, a first tunnel barrier and a first magnetic free layer material, and an upper MTJ structure that includes at least a second magnetic reference material, a second tunnel barrier and a second magnetic free layer material; the upper MTJ structure is stacked atop the lower MTJ structure. The first and second magnetic free layer materials have different designs and/or compositions resulting in different switching voltages.Type: GrantFiled: April 24, 2020Date of Patent: January 10, 2023Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Bahman Hekmatshoartabari, Michael Rizzolo, Ravi Nair
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Patent number: 11551737Abstract: A magnetic storage element and an electronic apparatus having a reduced writing current while retaining a magnetism retention property of a storage layer. The magnetic storage element includes a spin orbit layer extending in one direction, a writing line that is electrically coupled to the spin orbit layer, and allows a current to flow in an extending direction of the spin orbit layer, a tunnel junction element including a storage layer, an insulator layer, and a magnetization fixed layer that are stacked in order on the spin orbit layer, and a non-magnetic layer having a film thickness of 2 nm or less, and disposed at any stack position between the spin orbit layer and the insulator layer.Type: GrantFiled: January 15, 2018Date of Patent: January 10, 2023Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATIONInventors: Naoki Hase, Masanori Hosomi, Yutaka Higo, Hiroyuki Ohmori, Hiroyuki Uchida, Yo Sato
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Patent number: 11538857Abstract: The present invention is directed to a magnetic memory cell including a magnetic tunnel junction (MTJ) memory element and a two-terminal bidirectional selector coupled in series between two conductive lines. The MTJ memory element includes a magnetic free layer, a magnetic reference layer, and an insulating tunnel junction layer interposed therebetween. The two-terminal bidirectional selector includes bottom and top electrodes, first and third volatile switching layers interposed between the bottom and top electrodes, and a second volatile switching layer interposed between the first and third volatile switching layers. The bottom and top electrodes each independently include one of titanium nitride or iridium. The first and third volatile switching layers each include tantalum oxide and silver. The second volatile switching layer includes hafnium oxide and has a higher electrical resistance than the first and third volatile switching layers.Type: GrantFiled: April 1, 2020Date of Patent: December 27, 2022Assignee: Avalanche Technology, Inc.Inventors: Zhiqiang Wei, Hongxin Yang
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Patent number: 11527707Abstract: A method for forming a memory device that includes providing a free layer of an alloy of cobalt (Co), iron (Fe) and boron (B) overlying a reference layer; and forming metal layer comprising a boron (B) sink composition atop the free layer. Boron (B) may be diffused from the free layer to the metal layer comprising the boron sink composition. At least a portion of the metal layer including the boron (B) sink composition is removed. A metal oxide is formed atop the free layer. The free layer may be a crystalline cobalt and iron alloy. An interface between the metal oxide and free layer can provide perpendicular magnetic anisotropy character.Type: GrantFiled: November 18, 2019Date of Patent: December 13, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Stephen L. Brown, Guohan Hu, Jonathan Z. Sun, Daniel C. Worledge
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Patent number: 11527708Abstract: An ultra-fast magnetic random access memory (MRAM) comprises a three terminal composite SOT magnetic tunneling junction (CSOT-MTJ) element including a magnetic flux guide (MFG) having a very high magnetic permeability, a spin Hall channel (SHC) having a large positive spin Hall angle, an in-plane magnetic memory (MM) layer, a tunnel barrier (TB) layer, and a magnetic pinning stack (MPS) having a synthetic antiparallel coupling pinned by an antiferromagnetic material. The magnetic writing is significantly boosted by a combined effort of enhanced spin orbit torque (SOT) and Lorentz force generated by current-flowing wire (CFW) in the SHC layer and spin transfer torque (STT) by a current flowing through the MTJ stack, and further enhanced by a magnetic close loop formed at the cross section of MFG/SHC/MM tri-layer.Type: GrantFiled: April 15, 2020Date of Patent: December 13, 2022Inventors: Yimin Guo, Rongfu Xiao, Jun Chen