With Bipolar Transistor Structure Patents (Class 257/517)
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Patent number: 7982282Abstract: A semiconductor amplifier is provided comprising, a substrate and one or more unit amplifying cells (UACs) formed on the substrate, wherein each UAC is laterally surrounded by a first lateral dielectric filled trench (DFT) isolation wall extending at least to the substrate and multiple UACs are surrounded by a second lateral DFT isolation wall of similar depth outside the first isolation walls, and further semiconductor regions lying between the first isolation walls when two or more unit cells are present, and/or lying between the first and second isolation walls, are electrically floating with respect to the substrate. This reduces the parasitic capacitance of the amplifying cells and improves the power added efficiency. Excessive leakage between buried layer contacts when using high resistivity substrates is avoided by providing a further semiconductor layer of intermediate doping between the substrate and the buried layer contacts.Type: GrantFiled: April 25, 2008Date of Patent: July 19, 2011Assignee: Freescale Semiconductor, Inc.Inventors: Dragan Zupac, Brian D. Griesbach, Theresa M. Keller, Joel M. Keys, Sandra J. Wipf, Evan F. Yu
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Publication number: 20110115047Abstract: Methods and structures for a semiconductor device can use mask openings of varying widths to form structures of different depths, different materials, and different functionality. For example, processes and structures for forming shallow trench isolation, deep isolation, trench capacitors, base, emitter, and collector, among other structures for a lateral bipolar transistor are described.Type: ApplicationFiled: June 4, 2010Publication date: May 19, 2011Inventors: Francois Hebert, Aaron Gibby, Stephen Joseph Gaul
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Patent number: 7944022Abstract: In a semiconductor device of the present invention, a first base region 16 is extended to a part under a gate electrode 7 while having a vertical concentration profile of an impurity that increases from the surface of a semiconductor layer 3 and becomes maximum under an emitter region 5, and the length in the lateral direction from a point where the impurity concentration becomes maximum located under an end of the gate electrode 7 to the boundary with a second base region 15 is not smaller than the length in the vertical direction from the point where the impurity concentration becomes maximum to the boundary with the second base region 15.Type: GrantFiled: April 28, 2010Date of Patent: May 17, 2011Assignee: Panasonic CorporationInventors: Teruhisa Ikuta, Yoshinobu Sato
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Patent number: 7923810Abstract: A semiconductor device may include a semiconductor region of a semiconductor substrate wherein a P-N junction is defined between the semiconductor region and a bulk of the semiconductor substrate. An insulating isolation structure in the semiconductor substrate may surround sidewalls of the semiconductor region. An interlayer insulating layer may be on the semiconductor substrate, on the semiconductor region, and on the insulating isolation structure, and the interlayer insulating layer may have first and second spaced apart element holes exposing respective first and second portions of the semiconductor region. A first semiconductor pattern may be in the first element hole on the first exposed portion of the semiconductor region, and a second semiconductor pattern may be in the second element hole on the second exposed portion of the semiconductor region.Type: GrantFiled: October 17, 2008Date of Patent: April 12, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Dae-Won Ha, Sang-Yoon Kim
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Publication number: 20110062548Abstract: High performance bipolar transistors with raised extrinsic self-aligned base are integrated into a BiCMOS structure containing CMOS devices. By forming pad layers and raising the height of an intrinsic base layer relative to the source and drain of preexisting CMOS devices and by forming an extrinsic base through selective epitaxy, the effect of topographical variations is minimized during a lithographic patterning of the extrinsic base. Also, by not employing any chemical mechanical planarization process during the fabrication of the bipolar structures, complexity of process integration is reduced. Internal spacers or external spacers may be formed to isolate the base from the emitter. The pad layers, the intrinsic base layer, and the extrinsic base layer form a mesa structure with coincident outer sidewall surfaces.Type: ApplicationFiled: November 18, 2010Publication date: March 17, 2011Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Natalie B. Feilchenfeld, Bradley A. Orner, Benjamin T. Voegeli
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Patent number: 7902630Abstract: An isolated bipolar transistor formed in a P-type semiconductor substrate includes an N-type submerged floor isolation region and a filled trench extending downward from the surface of the substrate to the floor isolation region. Together the floor isolation region and the filled trench form an isolated pocket of the substrate which contains the bipolar transistor. The collector of the bipolar transistor may comprise the floor isolation region. The substrate does not contain an epitaxial layer, thereby overcoming the many problems associated with fabricating the same.Type: GrantFiled: February 14, 2008Date of Patent: March 8, 2011Assignee: Advanced Analogic Technologies, Inc.Inventors: Donald R. Disney, Richard K. Williams
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Patent number: 7898060Abstract: A variety of isolation structures for semiconductor substrates include a trench formed in the substrate that is filled with a dielectric material or filled with a conductive material and lined with a dielectric layer along the walls of the trench. The trench may be used in combination with doped sidewall isolation regions. Both the trench and the sidewall isolation regions may be annular and enclose an isolated pocket of the substrate. The isolation structures are formed by modular implant and etch processes that do not include significant thermal processing or diffusion of dopants so that the resulting structures are compact and may be tightly packed in the surface of the substrate.Type: GrantFiled: July 30, 2008Date of Patent: March 1, 2011Assignees: Advanced Analogic Technologies, Inc., Advanced Analogic Technologies (Hong Kong) LimitedInventors: Richard K. Williams, Donald Ray Disney, Wai Tien Chan
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Patent number: 7872326Abstract: A process for manufacturing an array of bipolar transistors, wherein deep field insulation regions of dielectric material are formed in a semiconductor body, thereby defining a plurality of active areas, insulated from each other and a plurality of bipolar transistors are formed in each active area. In particular, in each active area, a first conduction region is formed at a distance from the surface of the semiconductor body; a control region is formed on the first conduction region; and, in each control region, at least two second conduction regions and at least one control contact region are formed. The control contact region is interposed between the second conduction regions and at least two surface field insulation regions are thermally grown in each active area between the control contact region and the second conduction regions.Type: GrantFiled: February 26, 2008Date of Patent: January 18, 2011Assignee: STMicroelectronics S.r.l.Inventors: Michele Magistretti, Fabio Pellizzer, Augusto Benvenuti
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Publication number: 20100314712Abstract: A semiconductor device includes a lower substrate, a thin semiconductor layer and an insulating layer formed between the lower substrate and the semiconductor layer. An active transistor area is formed with a base formed along a surface of the semiconductor layer, an emitter region formed in the base, a buried collector in the thin semiconductor layer to contact the insulating layer, a collector contacting the buried collector, and emitter, collector and base contacts. The active transistor area is configured to operate at an emitter current at least in the order of mA (milli-ampere). An isolation trench extends through the semiconductor layer to the insulating layer and surrounds the active transistor area with a distance in the order of ?m (micron) from the active transistor area and with a space area of more than 50 ?m2 between the active transistor area and the isolation trench.Type: ApplicationFiled: April 13, 2010Publication date: December 16, 2010Inventors: Mitsuru Arai, Shinichiro Wada, Hideaki Nonami
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Patent number: 7838909Abstract: A semiconductor device includes a common diffusion structure formed in each region of a substrate in which semiconductor components are formed. The diffusion structures are separated into sections by trenches to form semiconductor components. The trenches define sizes of the semiconductor components and isolate the semiconductor components from the surrounding area.Type: GrantFiled: September 28, 2006Date of Patent: November 23, 2010Assignee: Denso CorporationInventors: Hiroaki Himi, Takashi Nakano, Shoji Mizuno
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Patent number: 7821097Abstract: A lateral passive device is disclosed including a dual annular electrode. The annular electrodes form an anode and a cathode. The annular electrodes allow anode and cathode series resistances to be optimized to the lowest values at a fixed device area. In addition, the parasitic capacitance to a bottom plate (substrate) is greatly reduced. In one embodiment, a device includes a first annular electrode surrounding a second annular electrode formed on a substrate, and the second annular electrode surrounds an insulator region. A related method is also disclosed.Type: GrantFiled: June 5, 2006Date of Patent: October 26, 2010Assignee: International Business Machines CorporationInventors: David S. Collins, Jeffrey B. Johnson, Xuefeng Liu, Bradley A. Orner, Robert M. Rassel, David C. Sheridan
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Patent number: 7816264Abstract: A wafer processing method having a step of reducing the thickness of a wafer in only a device forming area where semiconductor chips are formed by grinding and etching the back side of the wafer to thereby form a recess on the back side of the wafer. At the same time, an annular projection is formed around the recess to thereby ensure the rigidity of the wafer. Accordingly, handling in shifting the wafer from the back side recess forming step to a subsequent step of forming a back side rewiring layer can be performed safely and easily.Type: GrantFiled: July 7, 2008Date of Patent: October 19, 2010Assignee: Disco CorporationInventors: Keiichi Kajiyama, Kazuhisa Arai
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Patent number: 7800143Abstract: A memory cell and methods of making and operating the same are provided. In one aspect, a method of forming a memory cell is provided that includes forming a MOS transistor that has a gate, a source region and a drain region. A bipolar transistor is formed that has a collector, a base and an emitter. The emitter of the bipolar transistor is formed to serve as the source region for the MOS transistor and the base of the bipolar transistor is formed to serve as a capacitive charge storage region for the memory cell.Type: GrantFiled: December 24, 2006Date of Patent: September 21, 2010Assignee: GlobalFoundries Inc.Inventor: Hyun-Jin Cho
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Patent number: 7759764Abstract: A semiconductor structure includes a substrate; an isolation structure in the substrate, wherein the isolation structure defines a region therein; a first semiconductor region having at least a portion in the region defined by the isolation structure, wherein the first semiconductor region is of a first conductivity type; a second semiconductor region on the first semiconductor region, wherein the second semiconductor region is of a second conductivity type opposite the first conductivity type; and a third semiconductor region of the first conductivity type on the second semiconductor region, wherein the third semiconductor region has at least a portion higher than a top surface of the isolation structure.Type: GrantFiled: January 26, 2007Date of Patent: July 20, 2010Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chuan-Ying Lee, Denny Duan-lee Tang
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Patent number: 7719086Abstract: In a semiconductor device of the present invention, a first base region 16 is extended to a part under a gate electrode 7 while having a vertical concentration profile of an impurity that increases from the surface of a semiconductor layer 3 and becomes maximum under an emitter region 5, and the length in the lateral direction from a point where the impurity concentration becomes maximum located under an end of the gate electrode 7 to the boundary with a second base region 15 is not smaller than the length in the vertical direction from the point where the impurity concentration becomes maximum to the boundary with the second base region 15.Type: GrantFiled: November 21, 2007Date of Patent: May 18, 2010Assignee: Panasonic CorporationInventors: Teruhisa Ikuta, Yoshinobu Sato
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Patent number: 7709897Abstract: A method of fabricating a semiconductor-on-insulator device including: providing a first semiconductor wafer having an about 200 angstrom thick oxide layer thereover; etching the first semiconductor wafer to raise a pattern therein; doping the raised pattern of the first semiconductor wafer through the about 200 angstrom thick oxide layer; providing a second semiconductor wafer having an oxide thereover; and, bonding the first semiconductor wafer oxide to the second semiconductor wafer oxide at an elevated temperature.Type: GrantFiled: May 8, 2008Date of Patent: May 4, 2010Assignee: Kulite Semiconductor Products, Inc.Inventors: Anthony D. Kurtz, Alexander A. Ned
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Patent number: 7704824Abstract: The present invention provides a highly doped semiconductor layer. More specifically, the present invention provides a semiconductor layer that includes at least two impurities. Each impurity is introduced at a level below its respective degradation concentration. In this manner, the two or more impurities provide an additive conductivity to the semiconductor layer at a level above the conductivity possible with any one of the impurities alone, due to the detrimental effects that would be created by increasing the concentration of any one impurity beyond its degradation concentration.Type: GrantFiled: May 11, 2004Date of Patent: April 27, 2010Assignee: RF Micro Devices, Inc.Inventors: Matthew L. Seaford, Arthur E. Geiss, Wayne Lewis, Larry W. Kapitan, Thomas J. Rogers
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Patent number: 7692214Abstract: A semiconductor device includes: a semiconductor substrate; an IGBT cell; and a diode cell. The substrate includes a first layer on a first surface, second and third layers adjacently arranged on a second surface of the substrate and a fourth layer between the first layer and the second and third layers. The first layer provides a drift layer of the IGBT cell and the diode cell. The second layer provides a collector layer of the IGBT cell. The third layer provides one electrode connection layer of the diode cell. A resistivity ?1 and a thickness L1 of the first layer, a resistivity ?2 and a thickness L2 of the fourth layer, and a half of a minimum width W2 of the second layer on a substrate plane have a relationship of (?1/?2)×(L1·L2/W22)<1.6.Type: GrantFiled: March 20, 2007Date of Patent: April 6, 2010Assignee: DENSO CORPORATIONInventors: Norihito Tokura, Yukio Tsuzuki, Kenji Kouno
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Publication number: 20090267178Abstract: Device structure for active devices fabricated in a semiconductor-on-insulator (SOI) substrate and design structures for a radiofrequency integrated circuit. The device structure includes a first isolation region in the semiconductor layer that extends from a top surface of a semiconductor layer to a first depth, a second isolation region in the semiconductor layer that extends from the top surface of the semiconductor layer to a second depth greater than the first depth, and a first doped region in the semiconductor layer. The first doped region is disposed vertically between the first isolation region and an insulating layer disposed between the semiconductor layer and a handle wafer of the SOI substrate. The device structure may be included in a design structure embodied in a machine readable medium for designing, manufacturing, or testing an integrated circuit.Type: ApplicationFiled: April 24, 2008Publication date: October 29, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Wagdi W. Abadeer, Kiran V. Chatty, Robert J. Gauthier, JR., Jed H. Rankin, Robert R. Robison, William R. Tonti
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Patent number: 7582948Abstract: Integrated transistor and method for the production is disclosed. An explanation is given of, inter alia, a transistor having an electrically insulating isolating trench extending from a main area in the direction of a connection region remote from the main area. Moreover, the transistor contains an auxiliary trench extending from the main area as far as the connection region remote from the main area. The transistor requires a small chip area and has outstanding electrical properties.Type: GrantFiled: July 14, 2006Date of Patent: September 1, 2009Assignee: Infineon Technologies AGInventors: Karlheinz Müller, Klaus Röschlau
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Publication number: 20090115018Abstract: A transient voltage-suppressing (TVS) device supported on a semiconductor substrate is applied to protect an electronic device from a transient voltage. The TVS device includes a clamp diode functions with a high-side and a low side diodes for clamping a transient voltage disposed on a top layer of the semiconductor substrate insulated by a insulation layer constituting a TVS on silicon-on-insulator (SOI) device. In an exemplary embodiment, the insulator layer further includes a thick body oxide (BOX) layer having a thickness in the range of 250 Angstroms to 1 micrometer to sustain an application with a breakdown voltage higher than 25 volts. In another exemplary embodiment, the clamp diode further surrounded by a P-well and the P-well is formed on top of a P?/P+ substrate layer disposed above the insulator layer.Type: ApplicationFiled: November 1, 2007Publication date: May 7, 2009Inventor: Shekar Mallikarjunaswamy
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Patent number: 7524730Abstract: A method of fabricating a bipolar junction transistor is provided herein. An isolation structure is formed on a first conductive type substrate. A second conductive type deep well is formed in the first conductive type substrate to serve as a collector. Thereafter, a second conductive type well is formed in the substrate and then a first conductive type well is formed in the substrate to serve as a base. A buffer region is formed underneath a portion of the isolation structure and between the base and the second conductive well. The buffer region together with the isolation structure isolates the base from the second conductive type well. A second conductive type emitter and a second conductive type collector pick-up region are selectively formed on the surface of the first conductive type substrate. Thereafter, a first conductive type base pick-up region is selectively formed.Type: GrantFiled: April 16, 2007Date of Patent: April 28, 2009Assignee: United Microelectronics Corp.Inventor: Mingshang Tsai
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Publication number: 20090102012Abstract: A semiconductor device may include a semiconductor region of a semiconductor substrate wherein a P-N junction is defined between the semiconductor region and a bulk of the semiconductor substrate. An insulating isolation structure in the semiconductor substrate may surround sidewalls of the semiconductor region. An interlayer insulating layer may be on the semiconductor substrate, on the semiconductor region, and on the insulating isolation structure, and the interlayer insulating layer may have first and second spaced apart element holes exposing respective first and second portions of the semiconductor region. A first semiconductor pattern may be in the first element hole on the first exposed portion of the semiconductor region, and a second semiconductor pattern may be in the second element;hole on the second exposed portion of the semiconductor region.Type: ApplicationFiled: October 17, 2008Publication date: April 23, 2009Inventors: Dae-Won Ha, Sang-Yoon Kim
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Patent number: 7521772Abstract: A heterostructure bipolar transistor (HBT) and related methods are disclosed. In one embodiment, the HBT includes a heterostructure bipolar transistor (HBT) including: a substrate; a monocrystalline emitter atop the substrate; a collector in the substrate; at least one isolation region adjacent to the collector; a monocrystalline silicon germanium (SiGe) intrinsic base extending over each isolation region; and a monocrystalline silicon extrinsic base. A method may include forming the intrinsic and extrinsic base and the emitter as monocrystalline, with the extrinsic base (and emitter) formed in a self-aligned fashion utilizing selective-epitaxial growth on porous silicon. As a result, some mask levels can be omitted, making this an inexpensive alternative to conventional processing.Type: GrantFiled: November 8, 2006Date of Patent: April 21, 2009Assignee: International Business Machines CorporationInventors: Thomas N Adam, Thomas A. Wallner
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Patent number: 7498654Abstract: A transistor apparatus includes a silicon substrate and a barrier structure extending substantially from generally adjacent the silicon substrate to a locus displaced from the silicon substrate. The barrier structure generally surrounds a volume containing connection loci for the transistor apparatus and a buried layer in a silicon medium. The connection loci and the buried layer occupy a space generally presenting a first lateral expanse generally parallel with the silicon substrate. The volume presents a second lateral expanse generally parallel with the silicon substrate. The second lateral expanse is greater than the first lateral expanse within a predetermined distance of the substrate.Type: GrantFiled: April 21, 2006Date of Patent: March 3, 2009Assignee: Texas Instruments IncorporatedInventors: Leland Scott Swanson, Gregory E. Howard
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Patent number: 7459766Abstract: A semiconductor device including a bipolar transistor in which the collector resistance. The bipolar transistor includes a first conduction type semiconductor substrate having a main surface. A second conduction type collector region is formed in the semiconductor substrate. A shallow trench isolation structure isolates the main surface of the semiconductor substrate into two insulated active regions. A collector leading portion is formed in one of the active regions. A first conduction type base region and a second conduction type emitter region are formed on the other one of the active regions. The collector region has a first depth from the main surface immediately below the shallow trench isolation structure, and the collector region has a second depth from the main surface immediately below the two active regions. The first depth is less than the second depth.Type: GrantFiled: March 30, 2006Date of Patent: December 2, 2008Assignee: Sanyo Electric Co., Ltd.Inventor: Shuji Fujiwara
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Publication number: 20080237783Abstract: A bipolar transistor is formed in an isolation structure comprising a floor isolation region, a dielectric filled trench above the floor isolation region and a sidewall isolation region extending downward from the bottom of the trench to the floor isolation region. This structure provides a relatively deep isolated pocket in a semiconductor substrate while limiting the depth of the trench that must be etched in the substrate.Type: ApplicationFiled: December 17, 2007Publication date: October 2, 2008Applicants: Advanced Analogic Technologies, Inc., Advanced Analogic Technologies (Hong Kong) LimitedInventors: Richard K. Williams, Donald Ray Disney, Wai Tien Chan
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Patent number: 7420228Abstract: A bipolar transistor comprising a collector region of a first conduction type, and a subcollector region of the first conduction type at a first side of the collector region. The transistor further includes a base region of the second conduction type provided at a second side of the collector region, and an emitter region of the first conduction type which is provided above the base region on the side remote from the collection region. A carbon-doped semiconductor region is provided on the first side alongside the collector region. The bipolar transistor is characterized in that the carbon-doped semiconductor region has a carbon concentration of 1019-1021 cm?3 and the base region has a smaller cross section than the collector region and the collector region has, in the overlap region with the base region, a region having an increased doping compared with the remaining region.Type: GrantFiled: October 7, 2005Date of Patent: September 2, 2008Assignee: Infineon Technologies AGInventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
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Publication number: 20080203379Abstract: A process for manufacturing an array of bipolar transistors, wherein deep field insulation regions of dielectric material are formed in a semiconductor body, thereby defining a plurality of active areas, insulated from each other and a plurality of bipolar transistors are formed in each active area. In particular, in each active area, a first conduction region is formed at a distance from the surface of the semiconductor body; a control region is formed on the first conduction region; and, in each control region, at least two second conduction regions and at least one control contact region are formed. The control contact region is interposed between the second conduction regions and at least two surface field insulation regions are thermally grown in each active area between the control contact region and the second conduction regions.Type: ApplicationFiled: February 26, 2008Publication date: August 28, 2008Applicant: STMICROELECTRONICS S.R.L.Inventors: Michele Magistretti, Fabio Pellizzer, Augusto Benvenuti
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Patent number: 7358545Abstract: A bipolar junction transistor is provided. A p-type well region surrounds an n-type emitter and connects with the bottom of the emitter to serve as a base. A p-type base pick-up region connects with the base and surrounds the emitter. An n-type deep well, connected to the bottom of the base and the bottom of the n-type well, is used as a collector. The n-type well surrounds the base and connects with the n-type deep well. An n-type collector pick-up region connects with the n-type well and surrounds the base. An isolation structure is disposed between the emitter and the base and between a portion of the base and a portion of the n-type well. A buffer region is disposed under a portion of the isolation structure. Furthermore, the buffer region together with a portion of the isolation structure isolates the p-type base from the n-type well.Type: GrantFiled: August 10, 2005Date of Patent: April 15, 2008Assignee: United Microelectronics Corp.Inventor: Mingshang Tsai
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Patent number: 7354840Abstract: According to an exemplary embodiment, a method includes providing a silicon-on-insulator substrate including a buried oxide layer situated over a bulk silicon substrate and a silicon layer situated over the buried oxide layer. A trench is formed in the silicon layer and the buried oxide layer, where the trench exposes a portion of the bulk silicon substrate, and where the trench is situated adjacent to an optical region of said silicon-on-insulator substrate. According to this exemplary embodiment, an epitaxial layer is formed on the exposed portion of the bulk silicon substrate in the trench. The epitaxial layer and the bulk silicon substrate form a bulk silicon electronic region of the silicon-on-insulator substrate.Type: GrantFiled: March 28, 2007Date of Patent: April 8, 2008Assignee: Newport Fab, LLCInventor: Paul Kempf
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Patent number: 7339254Abstract: According to an exemplary embodiment, a structure includes a silicon-on-insulator substrate including a buried oxide layer situated over a bulk silicon substrate and a silicon layer situated over the buried oxide layer. The structure further includes a trench formed in the silicon layer and the buried oxide layer, where the trench has a bottom surface and a first and a second sidewall, and where the trench is situated adjacent to an optical region of the silicon-on-insulator substrate. According to this exemplary embodiment, the structure further includes an epitaxial layer situated in the trench and situated on the bulk silicon substrate, where the epitaxial layer and the bulk silicon substrate form a bulk silicon electronic region of the silicon-on-insulator substrate. The structure further includes a base of a bipolar transistor situated on the epitaxial layer, where the base can be silicon-germanium.Type: GrantFiled: December 20, 2004Date of Patent: March 4, 2008Assignee: Newport Fab, LLCInventor: Paul H. Kempf
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Patent number: 7319263Abstract: A semiconductor component is described. In one embodiment, the semiconductor component includes a switching element integrated in the semiconductor component between two functional element semiconductor regions, configured to reduce a parasitic current flow through the semiconductor component.Type: GrantFiled: October 28, 2004Date of Patent: January 15, 2008Assignee: Infineon Technologies AGInventor: Wolfgang Horn
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Publication number: 20070267716Abstract: Present invention proposes a dramatic improvement of CMOS IC technology by providing high speed bipolar current amplifiers compatible with CMOS technological process while retaining the footprint compatible to one of standard CMOS devices. This invention promises further increase of speed of ICs as well as a reduction of power dissipation.Type: ApplicationFiled: May 20, 2006Publication date: November 22, 2007Inventors: SERGEY ANTONOV, ALEXEI I ANTONOV
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Patent number: 7288827Abstract: A self-aligned oxide mask is formed utilizing differential oxidation rates of different materials. The self-aligned oxide mask is formed on a CVD grown base NPN base layer which compromises single crystal Si (or Si/SiGe) at active area and polycrystal Si (or Si/SiGe) on the field. The self-aligned mask is fabricated by taking advantage of the fact that poly Si (or Si/SiGe) oxidizes faster than single crystal Si (or Si/SiGe). An oxide film is formed over both the poly Si (or Si/siGe) and the single crystal Si (or Si/siGe) by using an thermal oxidation process to form a thick oxidation layer over the poly Si (or Si/siGe) and a thin oxidation layer over the single crystal Si (or Si/siGe), followed by a controlled oxide etch to remove the thin oxidation layer over the single crystal Si (or Si/siGe) while leaving the self-aligned oxide mask layer over the poly Si (or Si/siGe). A raised extrinsic base is then formed following the self-aligned mask formation.Type: GrantFiled: October 20, 2004Date of Patent: October 30, 2007Assignee: International Business Machines CorporationInventors: Huajie Chen, Kathryn T. Schonenberg, Gregory G. Freeman, Andreas D. Stricker, Jae-Sung Rieh
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Patent number: 7247923Abstract: A semiconductor device realizes a high electrostatic discharge withstanding capability and a high surge withstanding capability within the narrow chip area of a lateral MOSFET used in integrated intelligent switching devices, double-integration-type signal input and transfer IC's, and combined power IC's. The semiconductor device includes a vertical bipolar transistor in which a base is electrically connected to an emitter and a collector, and a lateral MOSFET including a drain electrode connected to a surface electrode. The vertical bipolar transistor absorbs electrostatic discharge or surge energy when a high electrostatic discharge voltage or a high surge voltage is applied and limits the electrostatic discharge voltage or the surge voltage to be lower than the breakdown voltage of the lateral MOSFET.Type: GrantFiled: September 26, 2005Date of Patent: July 24, 2007Assignee: Fuji Electric Co., Ltd.Inventors: Kazuhiko Yoshida, Takeshi Ichimura, Tatsuhiko Fujihira, Naoki Kumagai
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Patent number: 7026690Abstract: The invention includes BIFETRAM devices. Such devices comprise a bipolar transistor in combination with a field effect transistor (FET) in a three-dimensional stacked configuration. The memory devices can be incorporated within semiconductor-on-insulator (SOI) constructions. The base region of the bipolar device can be physically and electrically connected to one of the source/drain regions of the FET to act as a storage node for the memory cell. The semiconductor material of the SOI constructions can comprise Si/Ge, and the active region of the FET can extend into the Si/Ge. The SOI constructions can be formed over any of a number of substrates, including, for example, semiconductive materials, glass, aluminum oxide, silicon dioxide, metals and/or plastics.Type: GrantFiled: February 12, 2003Date of Patent: April 11, 2006Assignee: Micron Technology, Inc.Inventor: Arup Bhattacharyya
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Patent number: 6989557Abstract: A bipolar junction transistor (BJT) includes a dielectric layer formed on a predetermined region of a substrate, an opening formed in the dielectric layer and a portion of the substrate being exposed, a heavily doped polysilicon layer formed on a sidewall of the opening to define a self-aligned base region in the opening, an intrinsic base doped region formed within the substrate and in a bottom of the opening by implanting through the self-aligned base region, a spacer formed on the heavily doped polysilicon layer to define a self-aligned emitter region in the opening, and an emitter conductivity layer being filled with the self-aligned emitter region and a PN junction being formed between the emitter conductivity layer and the intrinsic base doped region.Type: GrantFiled: May 14, 2004Date of Patent: January 24, 2006Assignee: United Microelectronics Corp.Inventor: Anchor Chen
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Patent number: 6977425Abstract: A semiconductor device realizes a high electrostatic discharge withstanding capability and a high surge withstanding capability within the narrow chip area of a lateral MOSFET used in integrated intelligent switching devices, double-integration-type signal input and transfer IC's, and combined power IC's. The semiconductor device includes a vertical bipolar transistor in which a base is electrically connected to an emitter and a collector, and a lateral MOSFET including a drain electrode connected to a surface electrode. The vertical bipolar transistor absorbs electrostatic discharge or surge energy when a high electrostatic discharge voltage or a high surge voltage is applied and limits the electrostatic discharge voltage or the surge voltage to be lower than the breakdown voltage of the lateral MOSFET.Type: GrantFiled: May 21, 2003Date of Patent: December 20, 2005Assignee: Fuji Electric Co., Ltd.Inventors: Kazuhiko Yoshida, Takeshi Ichimura, Tatsuhiko Fujihira, Naoki Kumagai
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Patent number: 6972466Abstract: Complementary metal-oxide-semiconductor (CMOS) integrated circuits with bipolar transistors and methods for fabrication are provided. A bipolar transistor may have a lightly-doped base region. To reduce the resistance associated with making electrical contact to the lightly-doped base region, a low-resistance current path into the base region may be provided. The low-resistance current path may be provided by a base conductor formed from heavily-doped epitaxial crystalline semiconductor. Metal-oxide-semiconductor (MOS) transistors with narrow gates may be formed on the same substrate as bipolar transistors. The MOS gates may be formed using a self-aligned process in which a patterned gate conductor layer serves as both an implantation mask and as a gate conductor. A base masking layer that is separate from the patterned gate conductor layer may be used as an implantation mask for defining the lightly-doped base region.Type: GrantFiled: February 23, 2004Date of Patent: December 6, 2005Assignee: Altera CorporationInventors: Minchang Liang, Yow-Juang Liu, Fangyun Richter
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Quasi self-aligned single polysilicon bipolar active device with intentional emitter window undercut
Patent number: 6972472Abstract: An emitter stack for a quasi-self-aligned bipolar (NPN or PNP) transistor is formed where two layers over the emitter of a silicon substrate are windowed in a manner to under cut the top layer thereby exposing the substrate material. The emitter polysilicon structure is then formed over the window and conformally extends into the undercut region thereby widening the emitter region and so reducing the distance between the edge of the emitter and the extrinsic base (the base link distance) and therefore reducing the total base resistance of the transistor.Type: GrantFiled: March 24, 2003Date of Patent: December 6, 2005Assignee: Fairchild Semiconductor CorporationInventors: Steven M. Leibiger, Daniel J. Hahn, Laurence M. Szendrei -
Patent number: 6964907Abstract: In a BJT, the extrinsic base to collector capacitance is reduced by forming a lateral trench between the extrinsic base region and collector. This is typically done by using an anisotropic wet etch process in a <110> direction of a <100> orientation wafer.Type: GrantFiled: November 17, 2003Date of Patent: November 15, 2005Assignee: National Semiconductor CorporationInventors: Peter J. Hopper, Alexei Sadovnikov, Vladislav Vashchenko, Peter Johnson
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Patent number: 6911715Abstract: A bipolar transistor in which the occurrence of Kirk effect is suppressed when a high current is injected into the bipolar transistor and a method of fabricating the bipolar transistor are described. The bipolar transistor includes a first collector region of a first conductive type having high impurity concentration, a second collector region of a first conductive type which has high impurity concentration and is formed on the first collector region, a base region of a second conductive type being formed a predetermined portion of the second collector region, and an emitter region of a first conductive type being formed in the base region. The bipolar transistor further includes the third collector region, which has higher impurity concentration than the second collector region, at the bottom of the base region.Type: GrantFiled: September 5, 2003Date of Patent: June 28, 2005Assignee: Fairchild Korea Semiconductor LtdInventors: Chan-ho Park, Jin-myung Kim, Kyeong-seok Park, Dong-ho Hyun
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Patent number: 6903386Abstract: A transistor includes a means for providing a non-silicon-based emitter with a flexible structure to relieve lattice mis-match between the emitter and the base.Type: GrantFiled: June 14, 2002Date of Patent: June 7, 2005Assignee: Hewlett-Packard Development Company, L.P.Inventors: Hung Liao, Bao-Sung Bruce Yeh
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Patent number: 6853048Abstract: The present invention provides a bipolar transistor and a method of manufacture thereof. The bipolar transistor includes a dielectric region located in a semiconductor substrate and a collector located in the semiconductor substrate and at least partially over the dielectric region. The bipolar transistor device further includes a base located over and in contact with the dielectric region and at least partially about the collector and an emitter located over and in contact with the dielectric region and adjacent the base.Type: GrantFiled: August 11, 2000Date of Patent: February 8, 2005Assignee: Agere Systems Inc.Inventor: Ian Wylie
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Patent number: 6853017Abstract: A bipolar transistor structure includes trench isolation dielectric material formed in a semiconductor substrate to define a substrate active device region. A collector region is formed beneath the surface of the active device region. A base region is formed in the active device region above the collector region and extends to the surface of the active device region. A layer of dielectric material is formed to extend at least partially over the trench isolation and over the surface of the base region. A layer of doped polysilicon is formed over the layer of dielectric material and extends over the edge of the layer of dielectric material and over the surface of the base region. The doped polysilicon is patterned to define a polysilicon emitter region that extends over the edge of the layer of dielectric material to provide an ultra-small emitter contact on the surface of the base region.Type: GrantFiled: April 11, 2002Date of Patent: February 8, 2005Assignee: National Semiconductor CorporationInventor: Abdalla Aly Naem
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Patent number: 6847094Abstract: The forming of a contact with a deep region of a first conductivity type formed in a silicon substrate. The contact includes a doped silicon well region of the first conductivity type and an intermediary region connected between the deep layer and the well. This intermediary connection region is located under a trench. The manufacturing method enables forming of vertical devices, in particular fast bipolar transistors.Type: GrantFiled: September 6, 2002Date of Patent: January 25, 2005Assignee: STMicroelectronics S.A.Inventor: Thierry Schwartzmann
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Patent number: 6844594Abstract: A method of forming minimally spaced word lines is described. A double exposure technique is employed at the gate formation level. A small trench is defined through gate stack layers by using a tapered etch or spacers to achieve the desired width of the trench. A filler material fills the trench and forms a filler plug. The gate layers adjacent to the trench are then patterned and etched and the filler plug is removed to obtain gate stacks spaced apart by a distance of less than about 400 Angstroms.Type: GrantFiled: July 10, 2003Date of Patent: January 18, 2005Assignee: Micron Technology, Inc.Inventor: Werner Juengling
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Patent number: 6838709Abstract: A bipolar transistor includes the first group of transistors 610a, the second group of transistors 610b, the third group of transistors 610c and the fourth group of transistors 610d. The groups of transistors have unit transistors with emitters, bases and collectors that are connected electrically in parallel and the number of unit transistors is different from group to group and 2, 4, 8, and 16, respectively.Type: GrantFiled: October 9, 2003Date of Patent: January 4, 2005Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Shinichi Sonetaka, Yasuyuki Toyoda, Kazuhiro Arai, Yorito Ota
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Patent number: 6828649Abstract: The present invention provides a semiconductor device, a method of manufacture therefor, and an integrated circuit including the same. In one advantageous embodiment, the semiconductor device includes a doped layer located over a semiconductor substrate, and an isolation trench located in the doped layer and having a dielectric layer located on a sidewall thereof. The semiconductor device may further include a conductive material located within the isolation trench and an interconnect that electrically connects the conductive material and the doped layer.Type: GrantFiled: May 7, 2002Date of Patent: December 7, 2004Assignee: Agere Systems Inc.Inventors: John C. Desko, Thomas J. Krutsick, Chung-Ming Hsieh, Brian E. Thompson, Bailey Jones, Steve Wallace