Amorphous Semiconductor Is Alloy Or Contains Material To Change Band Gap (e.g., Si X Ge 1-x , Sin Y ) Patents (Class 257/55)
  • Patent number: 8189131
    Abstract: A thin-film transistor (TFT) includes a gate electrode, a semiconductor pattern, a source electrode, and a drain electrode. The semiconductor pattern includes an active layer being overlapped with the gate electrode and a low band gap portion having a lower energy band gap than the active layer. The source and drain electrodes are spaced apart from each other to be overlapped with the semiconductor pattern. Therefore, the semiconductor pattern includes a low band gap portion having a lower energy band gap than the active layer, so that electron mobility may be increased in a channel formed along the low band gap portion so that electric characteristics of the TFT may be enhanced.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: May 29, 2012
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kap-Soo Yoon, Sung-Hoon Yang, Sung-Ryul Kim, Hwa-Yeul Oh, Jae-Ho Choi, Yong-Mo Choi
  • Patent number: 8183659
    Abstract: The present invention provides for nanostructures grown on a conducting or insulating substrate, and a method of making the same. The nanostructures grown according to the claimed method are suitable for interconnects and/or as heat dissipators in electronic devices.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: May 22, 2012
    Inventor: Mohammad Shafiqul Kabir
  • Patent number: 8164092
    Abstract: Provided herein are PIN structures including a layer of amorphous n-type silicon, a layer of intrinsic GaAs disposed over the layer of amorphous n-type silicon, and a layer of amorphous p-type silicon disposed over the layer of intrinsic GaAs. The layer of intrinsic GaAs may be engineered by the disclosed methods to exhibit a variety of structural properties that enhance light absorption and charge carrier mobility, including oriented polycrystalline intrinsic GaAs, embedded particles of intrinsic GaAs, and textured surfaces. Also provided are devices incorporating the PIN structures, including photovoltaic devices.
    Type: Grant
    Filed: January 12, 2011
    Date of Patent: April 24, 2012
    Assignee: The University of Utah Research Foundation
    Inventors: Ashutosh Tiwari, Makarand Karmarkar, Nathan Wheeler Gray
  • Patent number: 8154024
    Abstract: An amorphous oxide containing hydrogen (or deuterium) is applied to a channel layer of a transistor. Accordingly, a thin film transistor having superior TFT properties can be realized, the superior TFT properties including a small hysteresis, normally OFF operation, a high ON/OFF ratio, a high saturated current, and the like. Furthermore, as a method for manufacturing a channel layer made of an amorphous oxide, film formation is performed in an atmosphere containing a hydrogen gas and an oxygen gas, so that the carrier concentration of the amorphous oxide can be controlled.
    Type: Grant
    Filed: April 19, 2011
    Date of Patent: April 10, 2012
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tatsuya Iwasaki
  • Publication number: 20120033161
    Abstract: A photosensor includes a substrate, a gate line, and a data line disposed on the substrate. A thin film transistor is connected to the gate line and the data line. A first photo-sensing member is disposed on the substrate, and a first electrode is connected to the thin film transistor and the first photo-sensing member. A second photo-sensing member is disposed on the first photo-sensing member, and a second electrode is connected to the first electrode and the second photo-sensing member.
    Type: Application
    Filed: December 3, 2010
    Publication date: February 9, 2012
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-Youn HAN, Sung-Hoon YANG, Suk-Won JUNG, Kyung-Sook JEON, Seung Mi SEO, Mi-Seon SEO
  • Patent number: 8044445
    Abstract: A photoelectric conversion device includes a thin film transistor that is placed on a substrate, a photodiode that is connected to a drain electrode of the thin film transistor and includes an upper electrode, a lower electrode and a photoelectric conversion layer placed between the upper and lower electrodes, a first interlayer insulating film that covers at least the upper electrode, a second interlayer insulating film that is placed in an upper layer of the first interlayer insulating film and covers the thin film transistor and the photodiode, and a line that is connected to the upper electrode through a contact hole disposed in the first interlayer insulating film and the second interlayer insulating film.
    Type: Grant
    Filed: September 9, 2009
    Date of Patent: October 25, 2011
    Assignee: Mitsubishi Electric Corporation
    Inventors: Masami Hayashi, Takashi Miyayama
  • Patent number: 8026535
    Abstract: In a thin film transistor, a semiconductor layer containing Si and Ge is applied, a Ge concentration of this semiconductor layer is high at the side of the insulating substrate, and crystalline orientation of the semiconductor layer indicates a random orientation in a region of 20 nm from the side of the insulating substrate, and indicates a (111), (110) or (100) preferential orientation at the film surface side of the semiconductor layer.
    Type: Grant
    Filed: January 24, 2008
    Date of Patent: September 27, 2011
    Assignees: Hitachi, Ltd., Tokyo Institute of Technology
    Inventors: Masatoshi Wakagi, Junichi Hanna
  • Patent number: 8013424
    Abstract: A semiconductor device according to an embodiment includes: a semiconductor substrate; a gate electrode formed on the semiconductor substrate via a gate insulating film; a channel region formed in a region of the semiconductor substrate below the gate electrode; an epitaxial crystal layer containing a conductive impurity, which is formed sandwiching the channel region and has a function as a source region and a drain region, and formed on a recess in the semiconductor substrate; and a growth suppressing portion formed on the recess in the semiconductor substrate, and configured to suppress an epitaxial growth of a crystal in the epitaxial layer from the semiconductor substrate.
    Type: Grant
    Filed: August 19, 2008
    Date of Patent: September 6, 2011
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hiroki Okamoto
  • Patent number: 7999250
    Abstract: In accordance with one or more embodiments, a semiconductor structure includes a semiconductor substrate, a first semiconductor material over the semiconductor substrate, and a second semiconductor material over a portion the first semiconductor material, wherein the second semiconductor material comprises silicon-germanium-carbon (SiGeC) and wherein the first semiconductor material is a silicon epitaxial layer. The semiconductor structure further includes an active device, wherein a portion of the active device is formed in the second semiconductor material and a dielectric structure extending from the first surface of the first semiconductor material into the semiconductor substrate through the first semiconductor material.
    Type: Grant
    Filed: February 27, 2009
    Date of Patent: August 16, 2011
    Assignee: HVVi Semiconductors, Inc.
    Inventors: Bishnu Prasanna Gogoi, Robert Bruce Davies
  • Patent number: 7993947
    Abstract: Highly uniform silica nanoparticles can be formed into stable dispersions with a desirable small secondary particle size. The silican particles can be surface modified to form the dispersions. The silica nanoparticles can be doped to change the particle properties and/or to provide dopant for subsequent transfer to other materials. The dispersions can be printed as an ink for appropriate applications. The dispersions can be used to selectively dope semiconductor materials such as for the formation of photovoltaic cells or for the formation of printed electronic circuits.
    Type: Grant
    Filed: January 21, 2011
    Date of Patent: August 9, 2011
    Assignee: NanoGram Corporation
    Inventors: Henry Hieslmair, Shivkumar Chiruvolu, Hui Du
  • Patent number: 7973384
    Abstract: A memory cell includes a first electrode, a second electrode, and a first portion of phase-change material contacting the first electrode. The memory cell includes a second portion of phase-change material contacting the second electrode and a third portion of phase-change material between the first portion and the second portion. A phase-change material composition of the third portion and the second portion gradually transitions from the third portion to the second portion.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: July 5, 2011
    Assignee: Qimonda AG
    Inventors: Thomas Happ, Jan Boris Philipp
  • Patent number: 7960646
    Abstract: In order to improve photoelectric conversion properties of a silicon-based thin-film photoelectric converter to which a conductive SiOx layer is inserted to obtain an optical confinement effect, the silicon-based thin-film photoelectric converter according to the present invention includes an i-type photoelectric conversion layer of hydrogenated amorphous silicon or an alloy thereof, an i-type buffer layer made of hydrogenated amorphous silicon, and an n-type Si1-xOx layer (x is 0.25-0.6) stacked successively, wherein the buffer layer has a higher hydrogen concentration at its interface with and as compared with the photoelectric conversion layer and has a thickness of at least 5 nm and at most 50 nm. Accordingly, generation of silicon crystal phase parts and reduction of resistivity are promoted in the n-type Si1-xOx layer, contact resistance at the interface is reduced, and FF of the photoelectric converter is improved, so that the photoelectric converter achieves improved properties.
    Type: Grant
    Filed: July 25, 2006
    Date of Patent: June 14, 2011
    Assignee: Kaneka Corporation
    Inventors: Toshiaki Sasaki, Kenji Yamamoto
  • Patent number: 7956361
    Abstract: An amorphous oxide containing hydrogen (or deuterium) is applied to a channel layer of a transistor. Accordingly, a thin film transistor having superior TFT properties can be realized, the superior TFT properties including a small hysteresis, normally OFF operation, a high ON/OFF ratio, a high saturated current, and the like. Furthermore, as a method for manufacturing a channel layer made of an amorphous oxide, film formation is performed in an atmosphere containing a hydrogen gas and an oxygen gas, so that the carrier concentration of the amorphous oxide can be controlled.
    Type: Grant
    Filed: July 9, 2010
    Date of Patent: June 7, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tatsuya Iwasaki
  • Patent number: 7935582
    Abstract: An amorphous oxide containing hydrogen (or deuterium) is applied to a channel layer of a transistor. Accordingly, a thin film transistor having superior TFT properties can be realized, the superior TFT properties including a small hysteresis, normally OFF operation, a high ON/OFF ratio, a high saturated current, and the like. Furthermore, as a method for manufacturing a channel layer made of an amorphous oxide, film formation is performed in an atmosphere containing a hydrogen gas and an oxygen gas, so that the carrier concentration of the amorphous oxide can be controlled.
    Type: Grant
    Filed: July 9, 2010
    Date of Patent: May 3, 2011
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tatsuya Iwasaki
  • Patent number: 7915520
    Abstract: A photoelectric conversion device comprising: a pin-type photoelectric conversion layer constituted of a p-type semiconductor layer, an i-type semiconductor layer and an n-type semiconductor layer, wherein the p-type semiconductor layer contains silicon atoms and nitrogen atoms, which is possible to improve photoelectric conversion efficiency.
    Type: Grant
    Filed: March 24, 2005
    Date of Patent: March 29, 2011
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Kazuhito Nishimura, Yoshiyuki Nasuno, Hiroshi Yamamoto, Yoshitaka Sugita
  • Patent number: 7884354
    Abstract: Germanium on insulator (GOI) semiconductor substrates are generally described. In one example, a GOI semiconductor substrate comprises a semiconductor substrate comprising an insulative surface region wherein a concentration of dopant in the insulative surface region is less than a concentration of dopant in the semiconductor substrate outside of the insulative surface region and a thin film of germanium coupled to the insulative surface region of the semiconductor substrate wherein the thin film of germanium and the insulative surface region are simultaneously formed by oxidation anneal of a thin film of silicon germanium (Si1-xGex) deposited to the semiconductor substrate wherein x is a value between 0 and 1 that provides a relative amount of silicon and germanium in the thin film of Si1-xGex.
    Type: Grant
    Filed: July 31, 2008
    Date of Patent: February 8, 2011
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Been-Yih Jin, Willy Rachmady, Marko Radosavljevic
  • Patent number: 7872259
    Abstract: An object of the present invention is to provide a new light-emitting device with the use of an amorphous oxide. The light-emitting device has a light-emitting layer existing between first and second electrodes and a field effect transistor, of which the active layer is an amorphous.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: January 18, 2011
    Assignees: Canon Kabushiki Kaisha, Tokyo Institute of Technology
    Inventors: Tohru Den, Tatsuya Iwasaki, Hideo Hosono, Toshio Kamiya, Kenji Nomura
  • Patent number: 7863518
    Abstract: A photovoltaic device capable of improving output characteristics is provided. This photovoltaic device comprises a crystalline semiconductor member, a substantially intrinsic first amorphous semiconductor layer formed on the front surface of the crystalline semiconductor member and a first conductivity type second amorphous semiconductor layer formed on the front surface of the first amorphous semiconductor layer, and has a hydrogen concentration peak in the first amorphous semiconductor layer. Thus, the quantity of hydrogen atoms in the first amorphous semiconductor layer is so increased that the hydrogen atoms increased in quantity can be bonded to dangling bonds of silicon atoms forming defects in the first amorphous semiconductor layer for inactivating the dangling bonds.
    Type: Grant
    Filed: March 8, 2004
    Date of Patent: January 4, 2011
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Akira Terakawa, Toshio Asaumi
  • Patent number: 7855127
    Abstract: A method for manufacturing a semiconductor substrate including: epitaxially growing a silicon germanium (SiGe) film on a silicon (Si) substrate by a chemical vapor deposition method; subjecting a heat treatment to the SiGe film at a temperature of not less than 700° C. and not more than 1200° C.; implanting hydrogen ions into a surface of the SiGe film; subjecting a surface activation treatment to a main surface of at least one of the SiGe film and a support substrate; bonding main surfaces of the SiGe film and the support substrate at a temperature of not less than 100° C. and not more than 400° C.; and applying an external impact to a bonding interface between the SiGe film and the support substrate to delaminate the SiGe crystal along a hydrogen ion implanted interface of the SiGe film, thereby forming a SiGe thin film on the main surface of the support substrate.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: December 21, 2010
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventors: Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka
  • Patent number: 7855384
    Abstract: A SiC semiconductor device includes: a SiC substrate having a drain layer, a drift layer and a source layer stacked in this order; multiple trenches penetrating the source layer and reaching the drift layer; a gate layer on a sidewall of each trench; an insulation film on the sidewall of each trench covering the gate layer; a source electrode on the source layer; and a diode portion in or under the trench contacting the drift layer to provide a diode. The drift layer between the gate layer on the sidewalls of adjacent two trenches provides a channel region. The diode portion is coupled with the source electrode, and insulated from the gate layer with the insulation film.
    Type: Grant
    Filed: April 10, 2007
    Date of Patent: December 21, 2010
    Assignees: DENSO CORPORATION, Hitachi Ltd.
    Inventors: Tsuyoshi Yamamoto, Toshio Sakakibara, Hiroki Nakamura, Toshiyuki Morishita, Takasumi Ooyanagi, Atsuo Watanabe
  • Patent number: 7847180
    Abstract: A photovoltaic nanostructure according to one embodiment of the present invention includes an electrically conductive nanocable coupled to a first electrode, a second electrode extending along at least two sides of the nanocable, and a photovoltaically active p-n junction formed between the nanocable and the second electrode. A photovoltaic array according to one embodiment includes a plurality of photovoltaic nanostructures as recited above. Methods for forming nanostructures are also presented.
    Type: Grant
    Filed: August 22, 2006
    Date of Patent: December 7, 2010
    Assignees: Q1 Nanosystems, Inc., The Regents Of The University of California
    Inventors: Brian Argo, Ruxandra Vidu, Pieter Stroeve, John Argo, Saif Islam, Jie-Ren Ku, Michael Chen
  • Patent number: 7791106
    Abstract: Gallium nitride material-based semiconductor structures are provided. In some embodiments, the structures include a composite substrate over which a gallium nitride material region is formed. The gallium nitride material structures may include additional features, such as strain-absorbing layers and/or transition layers, which also promote favorable stress conditions. The reduction in stresses may reduce defect formation and cracking in the gallium nitride material region, as well as reducing warpage of the overall structure. The gallium nitride material-based semiconductor structures may be used in a variety of applications such as transistors (e.g. FETs) Schottky diodes, light emitting diodes, laser diodes, SAW devices, and sensors, amongst others devices.
    Type: Grant
    Filed: February 1, 2008
    Date of Patent: September 7, 2010
    Assignee: Nitronex Corporation
    Inventors: Edwin L. Piner, Pradeep Rajagopal, John C. Roberts, Kevin J. Linthicum
  • Patent number: 7791074
    Abstract: An amorphous oxide containing hydrogen (or deuterium) is applied to a channel layer of a transistor. Accordingly, a thin film transistor having superior TFT properties can be realized, the superior TFT properties including a small hysteresis, normally OFF operation, a high ON/OFF ratio, a high saturated current, and the like. Furthermore, as a method for manufacturing a channel layer made of an amorphous oxide, film formation is performed in an atmosphere containing a hydrogen gas and an oxygen gas, so that the carrier concentration of the amorphous oxide can be controlled.
    Type: Grant
    Filed: September 5, 2006
    Date of Patent: September 7, 2010
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tatsuya Iwasaki
  • Patent number: 7777291
    Abstract: The present invention provides for nanostructures grown on a conducting or insulating substrate, and a method of making the same. The nanostructures grown according to the claimed method are suitable for interconnects and/or as heat dissipators in electronic devices.
    Type: Grant
    Filed: August 28, 2006
    Date of Patent: August 17, 2010
    Assignee: Smoltek AB
    Inventor: Mohammad Shafiqul Kabir
  • Patent number: 7750338
    Abstract: A semiconductor includes a semiconductor substrate, a gate stack on the semiconductor substrate, and a stressor having at least a portion in the semiconductor substrate and adjacent to the gate stack. The stressor includes a first stressor region and a second stressor region on the first stressor region, wherein the second stressor region extends laterally closer to a channel region underlying the gate stack than the first stressor region.
    Type: Grant
    Filed: December 5, 2006
    Date of Patent: July 6, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Yin-Pin Wang
  • Patent number: 7741639
    Abstract: A multi-chambered excimer or molecular halogen gas discharge laser system comprising at least one oscillator chamber and at least one amplifier chamber producing oscillator output laser light pulses that are amplified in the at least one power chamber, having a fluorine injection control system and a method of using same is disclosed, which may comprise: a halogen gas consumption estimator: estimating the amount of halogen gas that has been consumed in one of the at least one oscillator chamber based upon at least a first operating parameter of one of the least one oscillator chamber and the at least one amplifier chamber, and the difference between a second operating parameter of the at least one oscillator chamber and the at least one amplifier chamber, and estimating the amount of halogen gas that has been consumed in the other of the at least one oscillator chamber and the at least one amplifier chamber based upon at least a third operating parameter of the other of the at least one oscillator chamber and
    Type: Grant
    Filed: September 29, 2004
    Date of Patent: June 22, 2010
    Assignee: Cymer, Inc.
    Inventors: Herve A. Besaucele, Wayne J. Dunstan, Toshihiko Ishihara, Robert N. Jacques, Fedor B. Trintchouk
  • Patent number: 7693360
    Abstract: On the back surface of a transparent plate having a light extracting part for outputting lights to the outside, an electrode for wiring, and an electrode for an electromagnetic shield, an optical device is flip-chip mounted right under the light extracting part, an a driver IC is flip-chip mounted at a desired position with metal bumps. When currents driving the optical device flow from the driver IC according to an electric logical signal from the outside, an optical signal is emitted from the optical device, and is output to the outside through the light extracting part. The light extracting part may be provided with a light coupling material or an optical axis converter.
    Type: Grant
    Filed: April 18, 2003
    Date of Patent: April 6, 2010
    Assignee: NEC Corporation
    Inventors: Takanori Shimizu, Takara Sugimoto, Jun-ichi Sasaki, Kazuhiko Kurata
  • Patent number: 7675055
    Abstract: The present invention provides CMOS structures including at least one strained pFET that is located on a rotated semiconductor substrate to improve the device performance. Specifically, the present invention utilizes a Si-containing semiconductor substrate having a (100) crystal orientation in which the substrate is rotated by about 45° such that the CMOS device channels are located along the <100> direction. Strain can be induced upon the CMOS structure including at least a pFET and optionally an nFET, particularly the channels, by forming a stressed liner about the FET, by forming embedded stressed wells in the substrate, or by utilizing a combination of embedded stressed wells and a stressed liner. The present invention also provides methods for fabricating the aforesaid semiconductor structures.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: March 9, 2010
    Assignee: International Business Machines Corporation
    Inventors: Meikei Ieong, Qiging C. Ouyang, Kern Rim
  • Patent number: 7525131
    Abstract: Disclosed is a photoelectric surface including: a first group III nitride semiconductor layer that produces photoelectrons according to incidence of ultraviolet rays; and a second group III nitride semiconductor layer provided adjacent to the first group III nitride semiconductor layer and made of a thin-film crystal having c-axis orientation in a thickness direction, the second group III nitride semiconductor layer having an Al composition higher than that of the first group III nitride semiconductor layer.
    Type: Grant
    Filed: August 29, 2006
    Date of Patent: April 28, 2009
    Assignees: National University Corporation Shizuoka University, Hamamatsu Photonics K.K.
    Inventors: Masatomo Sumiya, Shunro Fuke, Tokuaki Nihashi, Minoru Hagino
  • Patent number: 7518212
    Abstract: The present invention provides a design for a PCRAM element which incorporates multiple metal-containing germanium-selenide glass layers of diverse stoichiometries. The present invention also provides a method of fabricating the disclosed PCRAM structure.
    Type: Grant
    Filed: August 3, 2005
    Date of Patent: April 14, 2009
    Assignee: Micron Technology, Inc.
    Inventors: John T. Moore, Terry L. Gilton, Kristy A. Campbell
  • Patent number: 7492988
    Abstract: Planar AWG circuits and systems are disclosed that use air trench bends to increase planar circuit compactness.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: February 17, 2009
    Inventors: Gregory P. Nordin, Yongbin Lin, Seunghyun Kim
  • Patent number: 7482616
    Abstract: In one embodiment, a phase-change memory device has an oxidation barrier layer to protect against memory cell contamination or oxidation and a method of manufacturing the same. In one embodiment, a semiconductor memory device comprises a molding layer overlying a semiconductor substrate. The molding layer has a protrusion portion vertically extending from a top surface thereof. The device further includes a phase-changeable material pattern adjacent the protrusion portion and a lower electrode electrically connected to the phase-changeable material pattern.
    Type: Grant
    Filed: May 27, 2005
    Date of Patent: January 27, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yoon-Jong Song, Young-Nam Hwang, Sang-Don Nam, Sung-Lae Cho, Gwan-Hyeob Koh, Choong-Man Lee, Bong-Jin Kuh, Yong-Ho Ha, Su-Youn Lee, Chang-Wook Jeong, Ji-Hye Yi, Kyung-Chang Ryoo, Se-Ho Lee, Su-Jin Ahn, Soon-Oh Park, Jang-Eun Lee
  • Patent number: 7420207
    Abstract: A photo-detecting device includes a buried doping layer of a first conductivity type and disposed at an upper portion of a silicon substrate. A first silicon epitaxial layer of first conductivity type is disposed on the buried doping layer, and a second silicon epitaxial layer of second conductivity type is disposed on the first silicon epitaxial layer. An isolation doping layer doped of first conductivity type is disposed at a predetermined region of the second silicon epitaxial layer to define a body region of second conductivity type. A silicon germanium epitaxial layer of second conductivity type is disposed on the body region.
    Type: Grant
    Filed: December 19, 2005
    Date of Patent: September 2, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Tae-Jin Kim, Kwang-Joon Yoon, Phil-Jae Chang, Kye-Won Maeng, Young-Jun Park
  • Patent number: 7417248
    Abstract: A method of manufacturing a transistor and a structure thereof, wherein a very shallow region having a high dopant concentration of germanium is implanted into a channel region of a transistor at a low energy level, forming an amorphous germanium implantation region in a top surface of the workpiece, and forming a crystalline germanium implantation region beneath the amorphous germanium implantation region. The workpiece is annealed using a low-temperature anneal to convert the amorphous germanium region to a crystalline state while preventing a substantial amount of diffusion of germanium further into the workpiece, also removing damage to the workpiece caused by the implantation process. The resulting structure includes a crystalline germanium implantation region at the top surface of a channel, comprising a depth below the top surface of the workpiece of about 120 ? or less. The transistor has increased mobility and a reduced effective oxide thickness (EOT).
    Type: Grant
    Filed: June 5, 2006
    Date of Patent: August 26, 2008
    Assignee: Infineon Technologies AG
    Inventor: Hong-Jyh Li
  • Publication number: 20080128698
    Abstract: A CMOS image sensor with a many million pixel count. Applicants have developed techniques for combining its continuous layer photodiode CMOS sensor technology with CMOS integrated circuit lithography stitching techniques to provide digital cameras with an almost unlimited number of pixels. A preferred CMOS stitching technique exploits the precise alignment accuracy of CMOS stepper processes by using specialized mask sets to repeatedly produce a single pixel array pattern many times on a single silicon wafer with no pixel array discontinuities. The single array patterns are stitched together lithographically to form a pixel array of many million pixels. A continuous multilayer photodiode layer is deposited over the top of the many million pixel array to provide a many million pixel sensor with a fill factor of 100 percent or substantially 100 percent.
    Type: Application
    Filed: September 28, 2007
    Publication date: June 5, 2008
    Inventors: Peter Martin, Paul Johnson, Chris Sexton
  • Patent number: 7361420
    Abstract: To provide a filmy structure of a nanometer size having a phase-separated structure effective for the case where a compound can be formed between two kinds of materials. A structure constituted by a first member containing a compound between an element A except both Si and Ge and SinGe1-n (where 0?n?1) and a second member containing one of the element A and SinGe1-n (where 0?n?1), in which one of the first member and the second member is a columnar member, formed on a substrate, whose side face is surrounded by the other member, the ratio Dl/Ds of an average diameter Dl in the major axis direction to an average diameter Ds in the minor axis direction of a transverse sectional shape of the columnar member is less than 5, and the element A is one of Li, Na, Mg, K, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Rb, Sr, Y, Zr, Nb, Mo, Ru, Rh, Pd, Cs, Ba, La, Hf, Ta, W, Re, Os, Ir, Pt, Ce, Pr, Nd, Sm, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and B.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: April 22, 2008
    Assignee: Canon Kabushiki Kaisha
    Inventors: Nobuhiro Yasui, Ryoko Horie, Toru Den
  • Patent number: 7339188
    Abstract: The present invention is related to a polycrystalline silicon film containing Ni which is formed by crystallizing an amorphous silicon layer containing nickel. The present invention includes a polycrystalline silicon film wherein the polycrystalline film contains Ni atoms of which density ranges from 2×1017 to 5×1019 atoms/cm3 on average and comprises a plurality of needle-shaped silicon crystallites. In another aspect, the present invention includes a polycrystalline silicon film wherein the polycrystalline film contains Ni atoms of which density ranges from 2×1017 to 5×1019 atoms/cm3, comprises a plurality of needle-shaped silicon crystallites and is formed on an insulating substrate. Such a polysilicon film according to the present invention avoids metal contamination usually generated in a conventional method of metal induced crystallization.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: March 4, 2008
    Assignee: LG.Philips LCD Co., Ltd.
    Inventors: Jin Jang, Seong-Jin Park
  • Patent number: 7335950
    Abstract: To provide a thin film transistor having a low OFF characteristic and to provide P-channel type and N-channel type thin film transistors where a difference in characteristics of the P-channel type and the N-channel type thin film transistors is corrected, a region 145 having a P-type behavior more potential than that of a drain region 146 is arranged between a channel forming region 134 and the drain region 146 in the P-channel type thin film transistor whereby the P-channel type thin film transistor having the low OFF characteristic can be provided and a low concentration impurity region 136 is arranged between a channel forming region 137 and a drain region 127 in the N-channel type thin film transistor whereby the N-channel type thin film transistor having the low OFF characteristic and where deterioration is restrained can be provided.
    Type: Grant
    Filed: October 8, 2004
    Date of Patent: February 26, 2008
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hongyong Zhang, Satoshi Teramoto
  • Patent number: 7303949
    Abstract: A semiconductor device and method of manufacturing a semiconductor device. The semiconductor device includes channels for a pFET and an nFET. A SiGe layer is selectively grown in the source and drain regions of the pFET channel and a Si:C layer is selectively grown in source and drain regions of the nFET channel. The SiGe and Si:C layer match a lattice network of the underlying Si layer to create a stress component. In one implementation, this causes a compressive component in the pFET channel and a tensile component in the nFET channel.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: December 4, 2007
    Assignee: International Business Machines Corporation
    Inventors: Huajie Chen, Dureseti Chidambarrao, Omer H Dokumaci
  • Patent number: 7271333
    Abstract: The present invention relates to light-weight thin-film photovoltaic cells, methods for making cells, modules made from cells, and methods for making modules from cells. The invention teaches a manner in which individual cells may be bonded to one another, eliminating the need for an additional support substrate and interconnecting leads, thus reducing the overall weight and thickness of individual cells and modules of the cells.
    Type: Grant
    Filed: July 19, 2002
    Date of Patent: September 18, 2007
    Assignee: Ascent Solar Technologies, Inc.
    Inventors: Leon B. Fabick, Alan W. Yehle
  • Patent number: 7262428
    Abstract: A process of making a strained silicon-on-insulator structure is disclosed. A recess is formed in a substrate to laterally isolate an active area. An undercutting etch forms a bubble recess under the active area to partially vertically isolate the active area. A thermal oxidation completes the vertical isolation by use of a minifield oxidation process. The recess is filled to form a shallow trench isolation structure. An active device is also disclosed that is achieved by the process. A system is also disclosed that uses the active device.
    Type: Grant
    Filed: November 3, 2004
    Date of Patent: August 28, 2007
    Assignee: Micron Technology, Inc.
    Inventor: Leonard Forbes
  • Publication number: 20070187668
    Abstract: A single crystal substrate and method of fabricating the same are provided. The single crystal substrate includes an insulator having a window exposing a portion of a substrate, a selective epitaxial growth layer formed on the portion of the substrate exposed through the window and a single crystalline layer formed on the insulator and the selective epitaxial growth layer using the selective epitaxial growth layer as an epitaxial seed layer.
    Type: Application
    Filed: November 13, 2006
    Publication date: August 16, 2007
    Inventors: Takashi Noguchi, Hans S. Cho, Wenxu Xianyu, Huaxiang Yin
  • Patent number: 7214971
    Abstract: A semiconductor light-receiving device has a substrate including upper, middle and lower regions in its front side. A p-type layer on the lower region has a top surface including a portion on a level with the middle region. An electrode covers at least part of the boundary between the portion of the p-type layer and the middle region. An n-type layer on the p-type layer has a top surface including a portion on a level with the upper region. Another electrode covers at least part of the boundary between the portion of the n-type layer and the upper region.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: May 8, 2007
    Assignee: Hamamatsu Photonics K.K.
    Inventors: Minoru Niigaki, Kazutoshi Nakajima
  • Patent number: 7202511
    Abstract: Electromagnetic energy is detected with high efficiency in the spectral range having wavelengths of about 1–2 microns by coupling an absorber layer having high quantum efficiency in the spectral range having wavelengths of about 1–2 microns to an intrinsic semiconducting blocking region of an impurity band semiconducting device included in a solid state photon detector.
    Type: Grant
    Filed: August 18, 2004
    Date of Patent: April 10, 2007
    Assignee: DRS Sensors & Targeting Systems, Inc.
    Inventors: Maryn G. Stapelbroek, Henry H. Hogue, Arvind I. D'Souza
  • Patent number: 7196351
    Abstract: Phase change memories may exhibit improved properties and lower cost in some cases by forming the phase change material layers in a planar configuration. A heater may be provided below the phase change material layers to appropriately heat the material to induce the phase changes. The heater may be coupled to an appropriate conductor.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: March 27, 2007
    Assignee: Ovonyx, Inc.
    Inventors: Chien Chiang, Charles Dennison, Tyler Lowrey
  • Patent number: 7176504
    Abstract: A semiconductor device is provided. The semiconductor device comprises a substrate, a gate structure, a spacer, a SixGey layer and a SixGey protection layer. The gate structure is deposited on the substrate and the spacer is deposited on the sidewalls of the gate structure. The SixGey layer is deposited in the substrate on both sides of the spacer and extended to a portion beneath part of the spacer. In addition, the top level of the SixGey layer is higher than the surface of the substrate. Moreover, the SixGey protection layer is deposited on the SixGey layer and the SixGey protection layer comprises Six1Gey1, where 0?y1<y.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: February 13, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Huan-Shun Lin, Hung-Lin Shih, Hsiang-Ying Wang, Jih-Shun Chiang, Min-Chi Fan
  • Patent number: 7164150
    Abstract: In a photovoltaic device of the present invention, junction characteristics are improved by enhancing interface characteristics between a crystalline silicon semiconductor and an amorphous silicon semiconductor. In the photovoltaic device, an n-type crystalline substrate (11) and a p-type amorphous silicon thin film (13) are laminated with an i-type amorphous silicon thin film (12) interposed as well as an n-type amorphous silicon thin film (15) is provided on a rear surface of the crystalline silicon substrate (11) by interposing an i-type amorphous silicon thin film (14) between them. Oxygen atoms exist at interfaces between the crystalline silicon substrate (11) and the i-type amorphous silicon thin films (12), (14) in a higher concentration than that in the i-type amorphous silicon thin films (12), (14).
    Type: Grant
    Filed: March 5, 2003
    Date of Patent: January 16, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventors: Akira Terakawa, Toshio Asaumi
  • Patent number: 7157349
    Abstract: A method of manufacturing a semiconductor device comprising a silicon body (1) having a surface (4) provided with field isolation regions (2) enclosing active regions (3). In this method, on the surface of the silicon body there is formed an auxiliary layer (5) of a material on which, during an oxidation treatment, a thicker layer of silicon oxide is formed than on the silicon of the silicon body. Here, an auxiliary layer comprising silicon and germanium is formed on the surface, said auxiliary layer preferably being a layer of SixGe1?x?yCy, where 0.70<x<0.95 and y<0.05. Next, at the location of the field isolation regions to be formed, windows (9) are formed in the auxiliary layer and trenches (11) are formed in the silicon body. Next, on the walls (12) of the trenches, a silicon oxide layer (13) is provided and on the walls (10) of the windows a silicon oxide layer (14) is provided, both being formed by an oxidation treatment. The auxiliary layer is not oxidized throughout its thickness.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: January 2, 2007
    Assignee: NXP B.V.
    Inventors: Jurriaan Schmitz, Claire Ravit, Rita Victoire Theodosie Rooyackers
  • Patent number: 7145175
    Abstract: According to the invention, a plurality of semiconductor devices which are required to have conformance are formed from crystalline semiconductor films having uniform crystallinity on the same line, and a semiconductor circuit in which variation between semiconductor devices is small can be provided, and a semiconductor integrated circuit having high conformance can be provided. The invention is characterized in that, in a part or whole of thin film transistors which configure an analog circuit such as a current mirror circuit, a differential amplifier circuit, or an operational amplifier, in which high conformance is required for semiconductor devices included therein, channel forming regions have crystalline semiconductor films on the same line. High conformance can be expected for an analog circuit which has the crystalline semiconductor films on the same line formed using the invention as the channel forming regions of the thin film transistors.
    Type: Grant
    Filed: September 7, 2004
    Date of Patent: December 5, 2006
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Kiyoshi Kato, Tomoaki Atsumi, Atsuo Isobe
  • Patent number: 7138668
    Abstract: An aspect of the present invention provides a semiconductor device that includes a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type, having a different band gap from the first semiconductor region and forming a heterojunction with the first semiconductor region.
    Type: Grant
    Filed: July 26, 2004
    Date of Patent: November 21, 2006
    Assignee: Nissan Motor Co., Ltd.
    Inventors: Tetsuya Hayashi, Hideaki Tanaka, Masakatsu Hoshi, Saichirou Kaneko