Final Conductor Next To Insulator Having Lateral Composition Or Doping Variation, Or Being Formed Laterally By More Than One Deposition Step (epo) Patents (Class 257/E21.196)
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Patent number: 10756147Abstract: Provided are an organic light-emitting display panel and an electronic device. The organic light-emitting display panel includes a plurality of sub-pixel units and a plurality of pixel circuits. The sub-pixel units are defined by a bank, the plurality of sub-pixel units emits m different colors, any two adjacent sub-pixel units emit different colors, each of the plurality of sub-pixel units includes n sub-pixels emitting a same color, and each of the sub-pixels includes a first electrode, the first electrodes of any two sub-pixels are separated from each other, where m is 3 or 4, and n is an integer no less than 3. The pixel circuits are arranged in a rectangular array, the pixel circuits are in one-to-one correspondence with the sub-pixels, and each of the pixel circuits is electrically connected to the corresponding first electrode via a connecting wire.Type: GrantFiled: May 21, 2018Date of Patent: August 25, 2020Assignee: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.Inventors: Xiaobo Cai, Sitao Huo, Wenxin Jiang
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Patent number: 10522357Abstract: Both an improvement of on-current and suppression of leakage current of a transistor are achieved. A transistor includes a drain, a source, a gate, and a gate insulating film. In the transistor, the gate insulating film is disposed between the source and the drain. In addition, in the transistor, the gate has a plurality of regions provided on a surface of the gate insulating film. In addition, in the gate, the plurality of regions provided on the gate insulating film have different work functions.Type: GrantFiled: December 10, 2015Date of Patent: December 31, 2019Assignee: Sony Semiconductor Solutions CorporationInventors: Katsuhiko Fukasaku, Takaaki Tatsumi
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Patent number: 10497868Abstract: A memory element can include a first electrode; at least one switching layer formed over the first electrode; a second electrode layer; and at least one conductive cap layer formed over the second electrode layer having substantially no grain boundaries extending through to the second electrode layer; wherein the at least one switching layer is programmable between different impedance states by application of electric fields via that first and second electrode. Methods of forming such memory elements are also disclosed.Type: GrantFiled: April 6, 2017Date of Patent: December 3, 2019Assignee: Adesto Technologies CorporationInventors: John Ross Jameson, III, Jeffrey Allan Shields, Kuei-Chang Tsai
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Patent number: 10304799Abstract: BGA packages with a LGA package extension. First lands on a substrate are populated with solder balls, while only solder paste is dispensed on second lands that are surrounded by the first lands. Differences in solder stand-off may accommodate non-planarity in a package or the insertion of an LGA extension component, such as an IC or one or more discrete devices. Where an LGA extension component is attached to the second lands, solder paste may be further dispensed on third lands located on a package-side of the extension component. A BGA package is then attached to the first lands and third lands. The larger volume BGA solder connections maintaining mechanical reliability, particularly where the solder ball interconnects form a perimeter surrounding the low-volume solder interconnects.Type: GrantFiled: December 28, 2016Date of Patent: May 28, 2019Assignee: Intel CorporationInventors: Tyler Leuten, Min-Tih Lai
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Patent number: 10276596Abstract: Some embodiments of the present disclosure relate to deceasing off-state leakage current within a metal-oxide-semiconductor field-effect transistor (MOSFET). The MOSFET includes source and drain regions. The source and drain regions are separated by a channel region. A gate is arranged over the channel region. The gate has a first gate region adjacent to the source region and a second gate region adjacent to the drain region. The first gate region is selectively doped adjacent the source region. The second gate region is undoped or lightly-doped. The undoped or lightly-doped second gate region reduces the electric field between the gate and the drain region, and hence reduces a gate induced drain leakage (GIDL) current between the gate and drain region. The undoped or lightly-doped region of the gate can reduce the GIDL current within the MOSFET by about three orders of magnitude. Other embodiments are also disclosed.Type: GrantFiled: August 6, 2014Date of Patent: April 30, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chen-Liang Chu, Chih-Wen Albert Yao, Ruey-Hsin Liu, Ming-Ta Lei
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Patent number: 10008597Abstract: A method includes forming a hardmask over one or more gate structures. The method further includes forming a photoresist over the hardmask. The method further includes forming an opening in the photoresist over at least one of the gate structures. The method further includes stripping the hardmask that is exposed in the opening and which is over the at least one of the gate structures. The method further includes removing the photoresist. The method further includes providing a halo implant on a side of the least one of the at least one of the gate structures.Type: GrantFiled: October 3, 2014Date of Patent: June 26, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Darshana N. Bhagat, Thomas J. Dunbar, Yen L. Lim, Jed H. Rankin, Eva S. Holmes
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Patent number: 9702039Abstract: A method for forming a base film of a graphene includes: forming a metal film as a base film of a graphene on a substrate by chemical vapor deposition (CVD) of an organic metal compound using a hydrogen gas and an ammonia gas; heating the substrate to a temperature at which impurities included in the formed metal film are eliminated as a gas; and heating the substrate to a temperature at which crystal grains of metal are grown in the metal film, wherein the temperature of the substrate in the heating the substrate to a temperature at which crystal grains of metal are grown in the metal film is higher than the temperature of the substrate in the heating the substrate to a temperature at which impurities included in the formed metal film are eliminated as a gas.Type: GrantFiled: August 5, 2015Date of Patent: July 11, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Daisuke Nishide, Takashi Matsumoto, Munehito Kagaya, Ryota Ifuku
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Patent number: 8865531Abstract: A post-planarization recess etch process is employed in combination with a replacement gate scheme to enable formation of multi-directional wiring in gate electrode lines. After formation of disposable gate structures and a planarized dielectric layer, a trench extending between two disposable gate structures are formed by a combination of lithographic methods and an anisotropic etch. End portions of the trench overlap with the two disposable gate structures. After removal of the disposable gate structures, replacement gate structures are formed in gate cavities and the trench simultaneously. A contiguous gate level structure can be formed which include portions that extend along different horizontal directions.Type: GrantFiled: September 10, 2013Date of Patent: October 21, 2014Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Michael A. Guillorn, Isaac Lauer, Jeffrey W. Sleight
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Patent number: 8330184Abstract: In one embodiment, a bidirectional voltage-regulator diode includes first to fifth semiconductor layers formed on an inner surface of a first recess formed in a semiconductor substrate of an N-type in the order. The first semiconductor layer of the N-type has a first impurity concentration lower than an impurity concentration of the semiconductor substrate. The second semiconductor layer of a P-type has a second impurity concentration. The third semiconductor layer of the P-type has a third impurity concentration higher than the second impurity concentration. The fourth semiconductor layer of the P-type has a fourth impurity concentration lower than the third impurity concentration. The fifth semiconductor layer of the N-type has a fifth impurity concentration.Type: GrantFiled: March 17, 2011Date of Patent: December 11, 2012Assignee: Kabushiki kaisha ToshibaInventor: Tetsuro Nozu
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Patent number: 8268672Abstract: An assembly (100) is provided comprising a first chip (20) and a second chip (30) which are interconnected through solder connections. These comprise, at the first chip, an underbump metallization and a solder bump, and, at the second chip, a metallization. In this case the solder bump is provided as a fluid layer with a contact angle of less than 90° C., and an intermetallic compound is formed on the basis of the metallization at the second chip, and at least one element of the composition is applied as the solder bump.Type: GrantFiled: April 28, 2005Date of Patent: September 18, 2012Assignee: NXP B.V.Inventors: Nicolaas Johannes Anthonius Van Veen, Hendrik Pieter Hochstenbach
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Patent number: 8241985Abstract: A high breakdown voltage MOS transistor capable of reducing a leakage current while reducing an element size as compared with conventional ones is realized. On a P type well, with a channel area ch in between, an N type first impurity diffusion area including a drain area and drain side drift area, and an N type second impurity diffusion area including a source area and a source side drift area are formed. Moreover, a gate electrode is formed, via a gate oxide film, above a part of the first impurity diffusion area, above the channel area and above a part of the second impurity diffusion area. The gate electrode is doped with an N type, and an impurity concentration of portions located above the first and the second impurity diffusion areas is lower than an impurity concentration of a portion located above the channel area.Type: GrantFiled: March 11, 2010Date of Patent: August 14, 2012Assignee: Sharp Kabushiki KaishaInventor: Satoshi Hikida
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Patent number: 8133814Abstract: Methods are provided for fabricating a semiconductor device. One embodiment includes forming an insulator layer overlying a semiconductor substrate and depositing a layer of polycrystalline silicon overlying the insulator layer. Conductivity determining impurity ions are implanted into at least an upper portion of the layer of polycrystalline silicon. At least the upper portion of the layer of polycrystalline silicon is etched using a first anisotropic etch chemistry to expose an edge portion of the upper portion. An oxide barrier is formed on the edge portion and a further portion of the layer of polycrystalline silicon is etched using the first anisotropic etch chemistry. Then a final portion of the layer of polycrystalline silicon is etched using a second anisotropic etch chemistry.Type: GrantFiled: December 3, 2010Date of Patent: March 13, 2012Assignee: GLOBALFOUNDRIES Inc.Inventors: Steffen Laufer, Gunter Grasshoff
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Patent number: 8124515Abstract: Improved semiconductor devices comprising metal gate electrodes are formed with reduced performance variability by reducing the initial high dopant concentration at the top portion of the silicon layer overlying the metal layer. Embodiments include reducing the dopant concentration in the upper portion of the silicon layer, by implanting a counter-dopant into the upper portion of the silicon layer, removing the high dopant concentration portion and replacing it with undoped or lightly doped silicon, and applying a gettering agent to the upper surface of the silicon layer to form a thin layer with the gettered dopant, which layer can be removed or retained.Type: GrantFiled: May 20, 2009Date of Patent: February 28, 2012Assignee: GLOBALFOUNDRIES Inc.Inventors: Man Fai Ng, Rohit Pal
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Patent number: 7989900Abstract: A semiconductor structure, such as a CMOS structure, includes a gate electrode that has a laterally variable work function. The gate electrode that has the laterally variable work function may be formed using an angled ion implantation method or a sequential layering method. The gate electrode that has the laterally variable work function provides enhanced electrical performance within an undoped channel field effect transistor device.Type: GrantFiled: August 20, 2009Date of Patent: August 2, 2011Assignee: International Business Machines CorporationInventors: Wilfried Haensch, Steven Koester, Amlan Majumdat
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Patent number: 7858479Abstract: An object is to provide a semiconductor device in which uniform properties are intended and high yields are provided. Process steps are provided in which variations are adjusted in doping and annealing process steps that are subsequent process steps so as to cancel in-plane variations in a substrate caused by dry etching to finally as well provide excellent in-plane consistency in a substrate.Type: GrantFiled: May 12, 2005Date of Patent: December 28, 2010Assignee: Panasonic CorporationInventors: Bunji Mizuno, Yuichiro Sasaki, Ichiro Nakayama, Hiroyuki Ito, Tomohiro Okumura, Cheng-Guo Jin, Katsumi Okashita, Hisataka Kanada
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Patent number: 7838371Abstract: A method of manufacturing a FET gate with a plurality of materials includes depositing a dummy region 8, and then forming a plurality of metallic layers 16, 18, 20 on gate dielectric 6 by conformally depositing a layer of each metallic layer and then anisotropically etching back to leave the metallic layer on the sides 10 of the dummy region. The dummy region is then removed leaving the metallic layers 16,18, 20 as the gate over the gate dielectric 6.Type: GrantFiled: October 25, 2007Date of Patent: November 23, 2010Assignee: NXP B.V.Inventors: Gerben Doornbos, Radu Surdeanu
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Patent number: 7790556Abstract: Methods are provided herein for forming electrode layers over high dielectric constant (“high k”) materials. In the illustrated embodiments, a high k gate dielectric, such as zirconium oxide, is protected from reduction during a subsequent deposition of silicon-containing gate electrode. In particular, a seed deposition phase includes conditions designed for minimizing hydrogen reduction of the gate dielectric, including low hydrogen content, low temperatures and/or low partial pressures of the silicon source gas. Conditions are preferably changed for higher deposition rates and deposition continues in a bulk phase. Desirably, though, hydrogen diffusion is still minimized by controlling the above-noted parameters. In one embodiment, high k dielectric reduction is minimized through omission of a hydrogen carrier gas. In another embodiment, higher order silanes, aid in reducing hydrogen content for a given deposition rate.Type: GrantFiled: June 9, 2005Date of Patent: September 7, 2010Assignee: ASM America, Inc.Inventors: Christophe F. Pomarede, Michael E. Givens, Eric J. Shero, Michael A. Todd
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Patent number: 7781288Abstract: A semiconductor structure, such as a CMOS structure, includes a gate electrode that has a laterally variable work function. The gate electrode that has the laterally variable work function may be formed using an angled ion implantation method or a sequential layering method. The gate electrode that has the laterally variable work function provides enhanced electrical performance within an undoped channel field effect transistor device.Type: GrantFiled: February 21, 2007Date of Patent: August 24, 2010Assignee: International Business Machines CorporationInventors: Wilfried Haensch, Steven Koester, Amlan Majumdar
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Patent number: 7667253Abstract: The present invention relates to a non-volatile memory device having conductive sidewall spacers and a method for fabricating the same. The non-volatile memory device includes: a substrate; a gate insulation layer formed on the substrate; a gate structure formed on the gate insulation layer; a pair of sidewall spacers formed on sidewalls of the gate structure; a pair of conductive sidewall spacers for trapping/detrapping charges formed on the pair of sidewall spacers; a pair of lightly doped drain regions formed in the substrate disposed beneath the sidewalls of the gate structure; and a pair of source/drain regions formed in the substrate disposed beneath edge portions of the pair of conductive sidewall spacers.Type: GrantFiled: April 30, 2007Date of Patent: February 23, 2010Assignee: Hynix Semiconductor, Inc.Inventors: Kwan-Yong Lim, Heung-Jae Cho, Yong-Soo Kim, Se-Aug Jang, Hyun-Chul Sohn
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Publication number: 20080308864Abstract: An asymmetrical MOS transistor having characteristics of a variable resistor and a transistor is provided. The asymmetrical MOS transistor comprises a substrate, a gate structure, a pair of spacers, a pair of offset spacers, a source region, a drain region, and an extension region. Herein, the extension region is disposed in the substrate under apportion of the gate structure and one of the pair of spacers. And, the extension region connects one of the source region or the drain region. The extension region is a heavily doping region.Type: ApplicationFiled: June 18, 2007Publication date: December 18, 2008Applicant: UNITED MICROELECTRONICS CORP.Inventor: Hung-Sung Lin
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Patent number: 7217624Abstract: The present invention relates to a non-volatile memory device having conductive sidewall spacers and a method for fabricating the same. The non-volatile memory device includes: a substrate; a gate insulation layer formed on the substrate; a gate structure formed on the gate insulation layer; a pair of sidewall spacers formed on sidewalls of the gate structure; a pair of conductive sidewall spacers for trapping/detrapping charges formed on the pair of sidewall spacers; a pair of lightly doped drain regions formed in the substrate disposed beneath the sidewalls of the gate structure; and a pair of source/drain regions formed in the substrate disposed beneath edge portions of the pair of conductive sidewall spacers.Type: GrantFiled: December 30, 2004Date of Patent: May 15, 2007Assignee: Hynix Semiconductor Inc.Inventors: Kwan-Yong Lim, Heung-Jae Cho, Yong-Soo Kim, Se-Aug Jang, Hyun-Chul Sohn