For Electrical Parameters, E.g., Resistance, Deep-levels, Cv, Diffusions By Electrical Means (epo) Patents (Class 257/E21.531)
  • Patent number: 8168472
    Abstract: A semiconductor device having a semiconductor chip having an active surface with flip-chip contacts and a passive surface is disclosed. In one embodiment, the flip-chip contacts are surrounded by an electrically insulating layer as underfill material, the layer having a UV B-stageable material. The UV B-stageable material is applied on the active surface of the semiconductor wafer.
    Type: Grant
    Filed: October 11, 2011
    Date of Patent: May 1, 2012
    Assignee: Infineon Technologies AG
    Inventors: Michael Bauer, Edward Fuergut
  • Publication number: 20120094399
    Abstract: A photovoltaic cell manufacturing method includes: forming a photoelectric converter including a plurality of compartment elements, the compartment elements adjacent to each other being electrically connected; determining the compartment element having a structural defect in the photoelectric converter; narrowing down a region in which the structural defect exists in the compartment element based on a resistance distribution which is obtained by measuring resistances of a plurality of portions between the compartment elements adjacent to each other, image-capturing the inside of the narrowed region in which the structural defect exists by use of an image capturing section, accurately determining a position of the structural defect from the obtained image so that a portion in which the structural defect exists in the compartment element is restricted; and removing the structural defect by irradiating the portion in which the structural defect exists with a laser beam.
    Type: Application
    Filed: June 18, 2009
    Publication date: April 19, 2012
    Applicant: ULVAC, INC.
    Inventors: Kazuhiro Yamamuro, Seiichi Sato, Mitsuru Yahagi, Junpei Yuyama, Kyuzo Nakamura
  • Patent number: 8159076
    Abstract: A method of producing an electronic connection device, including: a) formation, in a plane of a support substrate, of at least one first contact element and, in a direction approximately perpendicular to the plane, of at least one second contact element having a first end in electrical contact with the first contact element or elements and a second end, the second contact element or elements including one or more metal tracks standing up along the direction perpendicular to the surface of the substrate; b) then positioning at least one electrical or electronic component in contact with the first contact element or elements; and c) encapsulation of the component(s) and of the first and second contact elements, at least the second end or ends of the second contact element or elements being flush with the surface of the encapsulating material.
    Type: Grant
    Filed: June 5, 2008
    Date of Patent: April 17, 2012
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Francois Baleras, Jean-Charles Souriau, David Henry
  • Publication number: 20120083055
    Abstract: The present invention discloses a structure and method for determining a defect in integrated circuit manufacturing process, wherein the structure comprises a plurality of normal active areas formed in a plurality of first arrays and a plurality of defective active areas formed in a plurality of second arrays. The first arrays and second arrays are interlaced, and the defect is determined by monitoring a voltage contrast from a charged particle microscope image of the active areas.
    Type: Application
    Filed: December 12, 2011
    Publication date: April 5, 2012
    Applicant: Hermes-Microvision, Inc.
    Inventors: Hong XIAO, Jack Y. JAU, Chang Chun YEH
  • Publication number: 20120083052
    Abstract: In one embodiment, a packaging solution for an application integrated circuit (IC) and one or more other ICs is provided. The packaging solution may support both chip-on-chip packaging of the application IC (in flip-chip connection to a package substrate) and other ICs (in non-flip chip orientation), and package-on-package packaging of the application IC and the other ICs. The package substrate may include a first set of pads proximate to the application IC to support chip-on-chip connection to the other ICs. The pads may be connected to conductors that extend underneath the application IC, to connect to the application IC. A second set of pads may be connected to package pins for package-on-package solutions. If the chip-on-chip solution proves reliable, support for the package-on-package solution may be eliminated and the package substrate may be reduced in size.
    Type: Application
    Filed: December 12, 2011
    Publication date: April 5, 2012
    Inventor: Vincent R. von Kaenel
  • Patent number: 8148798
    Abstract: The semiconductor device includes a capacitor 36 formed over a semiconductor substrate 10 and including a lower electrode 30, a dielectric film 32 and an upper electrode 34; a first insulation film 58 formed above the capacitor 36; a first interconnection 88a formed over the first insulation film 68; a second insulation film 90 formed over the first insulation film 68 and over the first interconnection 88a; an electrode pad 102 formed over the second insulation film 90: and a monolithic conductor 100 buried in the second insulation film 90 immediately below the electrode pad 102 and buried through the second insulation film 90 down to a part of at least the first insulation layer 68.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: April 3, 2012
    Assignee: Fujitsu Semiconductor Limited
    Inventor: Takahiro Yamagata
  • Publication number: 20120074401
    Abstract: A method of detecting manufacturing defects at a memory array may include disposing an active area of a first width in communication with a first conductive member of the memory array to define a grounded conductive member, disposing an isolation structure of a second width in communication with a second conductive member of the memory array to define a floating conductive member, and providing an alternating arrangement of floating and grounded conductive members including arranging a plurality of the grounded and floating conductive members adjacent to each other to define a sequence of alternating floating and grounded conductive members. A corresponding test device is also provided.
    Type: Application
    Filed: September 28, 2010
    Publication date: March 29, 2012
    Inventors: Che-Lun Hung, Hsiang-Chou Liao, Tuung Luoh, Ling-Wu Yang
  • Publication number: 20120074438
    Abstract: A method for manufacturing a light emitting device includes forming a plurality of light emitting elements on a light emitting element substrate. an identification portion is formed on each of the light emitting elements to allow a pertinent light emitting element to be distinguishable from other light emitting elements. The light emitting elements are separated to form a plurality of light emitting devices. The identification portion may have an external appearance allowing each of the light emitting elements to be distinguishable from the other light emitting elements.
    Type: Application
    Filed: September 23, 2011
    Publication date: March 29, 2012
    Inventors: Seong Deok HWANG, Young Hee Song, Seong Jae Hong, Il Woo Park
  • Publication number: 20120070918
    Abstract: A method of manufacturing a semiconductor device may include, but is not limited to the following processes. First and second grooves are formed in a semiconductor substrate having a first surface. The first and second grooves have substantially the same vertical dimension. The first surface has first and second regions surrounded by the first and second grooves, respectively. An actual resistance value of the semiconductor substrate between a first point on the first region and a second point on the second region is measured. The vertical dimension of the first and second grooves is calculated with reference to the actual resistance value.
    Type: Application
    Filed: September 14, 2011
    Publication date: March 22, 2012
    Applicant: ELPIDA MEMORY, INC.
    Inventor: Osamu Fujita
  • Publication number: 20120068174
    Abstract: An apparatus and method for electrical mask inspection is disclosed. A scan chain is formed amongst two metal layers and a via layer. One of the three layers is a functional layer under test, and the other two layers are test layers. A resistance measurement of the scan chain is used to determine if a potential defect exists within one of the vias or metal segments comprising the scan chain.
    Type: Application
    Filed: September 21, 2010
    Publication date: March 22, 2012
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Arvind Kumar, Anthony I-Chih Chou, Shreesh Narasimha
  • Publication number: 20120069530
    Abstract: According to one embodiment, a semiconductor device includes a stacked chip includes semiconductor chips which are stacked, the semiconductor chips comprises semiconductor substrates and through electrodes formed in the semiconductor substrates, respectively, the through electrodes being electrically connected, and deactivating circuits provided in the semiconductor chips, respectively, and configured to deactivate a failed semiconductor chip.
    Type: Application
    Filed: September 16, 2011
    Publication date: March 22, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Satoshi Inoue, Kazushige Kanda, Yuui Shimizu
  • Publication number: 20120064645
    Abstract: A method for manufacturing a semiconductor device according to the present invention comprises: forming a semiconductor circuit including a first transistor with a first threshold voltage and a first drain-source current; applying a stress voltage to the first transistor to make at least one of a change from the first threshold voltage a second threshold voltage and a change from the first drain-source current to a second drain-source current; and shipping the semiconductor circuit while the first transistor is presenting one of the second threshold voltage and the second drain-source current.
    Type: Application
    Filed: August 22, 2011
    Publication date: March 15, 2012
    Inventors: Peter LEE, Yasuhiro Nanba
  • Publication number: 20120061777
    Abstract: Embodiments relate to micromachine structures. In one embodiment, a micromachine structure includes a first electrode, a second electrode, and a sensing element. The sensing element is mechanically movable and is disposed intermediate the first and second electrodes and adapted to oscillate between the first and second electrodes. Further, the sensing element includes a FinFET structure having a height and a width, the height being greater than the width.
    Type: Application
    Filed: August 26, 2011
    Publication date: March 15, 2012
    Inventors: Stefan Kolb, Reinhard Mahnkopf, Christian Pacha, Bernhard Winkler, Werner Weber
  • Publication number: 20120065906
    Abstract: A test system that provides an output signal for analysis without requiring the test hardware to be idle during a settling interval. The test system includes a preprocessor that identifies the near-DC drift that occurs in the output signal and then adjusts the output signal to remove the near-DC drift. A set of values representing the near-DC drift at each of multiple times during the acquisition of a signal for analysis may be computed and used to model a settling profile of the signal by fitting a curve to the set of values. The model of the settling profile may then be subtracted from samples representing the output signal to provide an adjusted signal for further analysis.
    Type: Application
    Filed: September 15, 2010
    Publication date: March 15, 2012
    Inventor: LAWRENCE B. LUCE
  • Publication number: 20120056177
    Abstract: The present application discloses a 3D integrated circuit structure and a method for detecting whether there is misalignment between chip structures.
    Type: Application
    Filed: February 23, 2011
    Publication date: March 8, 2012
    Inventor: Huilong Zhu
  • Publication number: 20120043539
    Abstract: A method of manufacturing is provided that includes applying a thermal interface tape to a side of a semiconductor wafer that includes at least one semiconductor chip. The thermal interface material tape is positioned on the at least one semiconductor chip. The at least one semiconductor chip is singulated from the semiconductor wafer with at least a portion of the thermal interface tape still attached to the semiconductor chip.
    Type: Application
    Filed: August 20, 2010
    Publication date: February 23, 2012
    Inventors: Seth Prejean, Dales Kent, Ronnie Brandon, Gamal Refai-Ahmed, Michael Z. Su, Michael Bienek, Joseph Siegel, Bryan Black
  • Publication number: 20120043558
    Abstract: An active device array substrate and a fabricating method thereof are provided. A first patterned conductive layer including separated scan line patterns is formed on a substrate. Each scan line pattern includes a first and second scan lines adjacent to each other. Both the first and the second scan lines have first and second contacts. An open inspection on the scan line patterns is performed. Channel layers are formed on the substrate. A second patterned conductive layer including data lines interlaced with the first and second scan lines, sources and drains located above the channel layers, and connectors is formed on the substrate. The sources electrically connect the data lines correspondingly. At least one of the connectors electrically connects the first and second scan lines, so as to form a loop in each scan line pattern. Pixel electrodes electrically connected to the drains are formed.
    Type: Application
    Filed: November 11, 2010
    Publication date: February 23, 2012
    Applicant: AU OPTRONICS CORPORATION
    Inventors: Po-Lin Lai, Ying-Fa Huang, Chun-Ming Yang, Wen-Bin Wu, Wen-Yi Lin
  • Publication number: 20120034714
    Abstract: A method for fabricating a wafer-level light emitting diode structure is provided. The method includes: providing a substrate, wherein a first semiconductor layer, a light emitting layer, and a second semiconductor layer are sequentially disposed on the substrate; subjecting the first semiconductor layer, the light emitting layer, and the second semiconductor layer with a patterning process to form a first depressed portion, a second depressed portion, a stacked structure disposed on the second depressed portion and a remained first semiconductor layer disposed on the depressed portion, wherein the stacked structure comprises a patterned second semiconductor layer, a patterned emitting layer, and a patterned first semiconductor layer; forming a first electrode on the remained first semiconductor layer of the first depressed portion; and forming a second electrode correspondingly disposed on the patterned second semiconductor layer of the second depressed portion.
    Type: Application
    Filed: August 3, 2011
    Publication date: February 9, 2012
    Applicant: INDUTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Yao-Jun TSAI, Chen-Peng HSU, Kuo-Feng LIN, Hsun-Chih LIU, Hung-Lieh HU, Chien-Jen SUN
  • Publication number: 20120032225
    Abstract: The object of the invention is to improve the visual inspection yield of a semiconductor light emitting device. To achieve the object, a semiconductor light emitting device includes a semiconductor layer, a pad electrode on the layer, and a protection film covering at least the layer. The device includes at least one stopper arranged on a peripheral part of the pad electrode surface away from the film. The stopper has a semicircular arc shape opening toward the center of the pad electrode. In electrical/optical property inspection, if sliding on the pad electrode, a probe needle can be guided into the concave surface of the semicircular arc shape. The stopper can reliably hold the needle. It is avoidable that the needle contacts the film. It is preferable that each of positive/negative electrodes have the pad electrode, and a pair of stoppers be arranged in positions on the electrodes facing each other.
    Type: Application
    Filed: March 5, 2011
    Publication date: February 9, 2012
    Inventors: Yasutaka Hamaguchi, Yoshiki Inoue, Takahiko Sakamoto
  • Publication number: 20120028382
    Abstract: A semiconductor device having a semiconductor chip having an active surface with flip-chip contacts and a passive surface is disclosed. In one embodiment, the flip-chip contacts are surrounded by an electrically insulating layer as underfill material, the layer having a UV B-stageable material. The UV B-stageable material is applied on the active surface of the semiconductor wafer.
    Type: Application
    Filed: October 11, 2011
    Publication date: February 2, 2012
    Applicant: Infineon Technologies AG
    Inventors: Michael Bauer, Edward Fuergut
  • Publication number: 20120028381
    Abstract: A solar battery panel inspection apparatus is an apparatus for inspecting a solar battery panel including a transparent insulating substrate having a main surface, and a transparent electrode layer, a semiconductor photoelectric conversion layer and a back electrode layer which are sequentially stacked and having an outer circumferential insulating region in which the main surface is exposed, to check the insulation performance of the outer circumferential insulating region.
    Type: Application
    Filed: April 12, 2010
    Publication date: February 2, 2012
    Inventors: Shinsuke Tachibana, Akira Shimizu
  • Patent number: 8106395
    Abstract: A technique of manufacturing a semiconductor device capable of performing a probe test by a common test apparatus as normal LSI chips even for large-area chips is provided. A chip comprising a device formed on a device area by a semiconductor process and including a plurality of test areas sectioned by chip areas is prepared. Next, pads to be electrically connected to the device are formed at corresponding positions on the respective plurality of test areas. Subsequently, the respective test areas are tested by a same probe card via the plurality of pads.
    Type: Grant
    Filed: May 1, 2008
    Date of Patent: January 31, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Shuntaro Machida, Takashi Kobayashi
  • Publication number: 20120018723
    Abstract: A test structure including at least one ground pad, an input pad, at least one first through-silicon via (TSV), at least one second TSV and an output pad is disclosed. The ground pad receives a ground signal during a test mode. The input pad receives a test signal during the test mode. The first TSV is coupled to the input pad. The output pad is coupled to the second TSV. No connection line occurs between the first and the second TSVs. During the test mode, a test result is obtained according to the signal of at least one of the first and the second TSVs, and structural characteristics can be obtained according to the test result.
    Type: Application
    Filed: December 14, 2010
    Publication date: January 26, 2012
    Inventors: Keng-Li SU, Chih-Sheng Lin, Wen-Pin Lin, John H. Lau
  • Publication number: 20120013349
    Abstract: A measurement terminal is arranged at an edge of a semiconductor wafer to be apart from a gate electrode and a source electrode formed in a surface portion on one side in a thickness direction of a semiconductor wafer so that an electrode contact portion is in contact with a drain electrode on the other side in the thickness direction of the semiconductor wafer and that a terminal contact portion is exposed to the one side in the thickness direction of the semiconductor wafer. A probe terminal is brought into contact with the terminal contact portion of the measurement terminal and the probe terminal is brought into contact with the gate electrode and the source electrode, to thereby measure electrical characteristics of a MOSFET.
    Type: Application
    Filed: March 10, 2011
    Publication date: January 19, 2012
    Applicant: MITSUBISHI ELECTRIC CORPORATION
    Inventor: Atsushi Narazaki
  • Publication number: 20120009695
    Abstract: The semiconductor device is formed by forming a first metal film over a first main surface of a semiconductor wafer having a first thickness, performing back grinding to a second main surface of the semiconductor wafer thereby making a second thickness thinner than the first thickness and forming an insulation film pattern having a first insulation film and containing an annular insulation film pattern along the periphery of a second main surface of the semiconductor wafer over the second main surface along the periphery thereof. The second main surface of the semiconductor wafer is bonded to a pressure sensitive adhesive sheet thereby holding the device semiconductor wafer by way of the pressure sensitive adhesive sheet to a dicing frame in a state where the insulation film pattern is present.
    Type: Application
    Filed: September 20, 2011
    Publication date: January 12, 2012
    Applicant: RENESAS ELECTRONICS CORPORATION
    Inventors: Haruo Amada, Kenji Shimazawa
  • Publication number: 20120009691
    Abstract: A pixel includes an organic light emitting diode, a first transistor having a source coupled to a first power source, a control gate coupled to a first node, and a drain coupled to a second node, wherein the first transistor includes a floating gate and an insulating layer between the floating gate and the control gate, a second transistor having a source coupled to a data line, a drain coupled to the first node, and a gate coupled to a scan line, a third transistor having a source coupled to the second node, a drain coupled to the organic light emitting diode, and a gate coupled to one of a light emitting control line and the scan line, and a capacitor coupled between the first power source and the first node.
    Type: Application
    Filed: September 22, 2011
    Publication date: January 12, 2012
    Applicant: SAMSUNG MOBILE DISPLAY CO., LTD.
    Inventor: Kyung-hoon CHUNG
  • Patent number: 8093074
    Abstract: An analysis method for a semiconductor device is described. The semiconductor device having an abnormal region is provided. Thereafter, a focused ion beam microscope analysis process is performed to the abnormal region, wherein the result of the focused ion beam microscope analysis process shows that the abnormal region has a defect therein. After the focused ion beam microscope analysis process, an electrical property measurement step is performed to the abnormal region, so as to determine whether the defect in the abnormal region is a device failure root cause or not.
    Type: Grant
    Filed: December 18, 2009
    Date of Patent: January 10, 2012
    Assignee: United Microelectronics Corp.
    Inventors: Chih-Chung Chang, Jian-Chang Lin, Wen-Sheng Wu, Ching-Lin Chang, Chih-Yang Tsai
  • Publication number: 20120001349
    Abstract: A semiconductor module having an integrated structure is manufactured by mounting a semiconductor chip on the side of a surface of a cooling plate via an insulating material, and by molding the semiconductor chip and the cooling plate by a resin-molded member. This method includes the steps of: (a) forming a sprayed insulating film as the insulating material on a surface of the cooling plate; (b) forming a sprayed conductive film on a face of the sprayed insulating film opposite to a face where the cooling plate is provided; (c) checking whether the sprayed conductive film is insulated from the cooling plate by using the sprayed conductive film and the cooling plate as electrodes and applying voltage therebetween; and (d) mounting the semiconductor chip on the upper side of the sprayed conductive film when the sprayed conductive film is insulated, and then resin-molding the semiconductor chip and the cooling plate.
    Type: Application
    Filed: June 30, 2011
    Publication date: January 5, 2012
    Applicants: TOYOTA JIDOSHA KABUSHIKI KAISHA, DENSO CORPORATION
    Inventors: Daisuke HARADA, Hiroshi ISHIYAMA, Takahisa KANEKO, Yoshikazu SUZUKI
  • Publication number: 20110318851
    Abstract: Provided is a test method by which a transistor whose reliability is low can be detected with low stress and high accuracy in a shorter period of time than a BT test. Provided is to detect a transistor whose reliability is high in a shorter period of time than a BT test and manufacture an electronic device with high reliability efficiently. Hysteresis characteristics revealed in the result of the Vg-Id measurement with light irradiation to the transistor correlate with the result of a BT test; whether the reliability of the transistor is Good or Not-Good can be judged. Accordingly, the test method by which a transistor whose reliability is low can be detected with low stress and high accuracy in a shorter period of time than a BT test can be provided.
    Type: Application
    Filed: June 17, 2011
    Publication date: December 29, 2011
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Hiromichi GODO, Shuhei YOSHITOMI
  • Publication number: 20110315198
    Abstract: A photoelectric conversion module and a method of manufacturing the same are disclosed. The photoelectric conversion module may include a light-receiving substrate in which a first functional layer having a photoelectrode is formed, a counter substrate that faces the light-receiving substrate and is electrically coupled to the light-receiving substrate and in which a second functional layer having a counter electrode is formed. The photoelectric conversion module may include a sealant formed between the light-receiving substrate and the counter substrate and positioned so as to divide a plurality of unit photoelectric cells formed between the light-receiving substrate and the counter substrate. The photoelectric conversion module may include a plurality of interconnection units electrically connecting adjacent unit photoelectric cells.
    Type: Application
    Filed: March 9, 2011
    Publication date: December 29, 2011
    Applicant: SAMSUNG SDI CO., LTD.
    Inventors: Hyun-Chul Kim, Jung-Suk Song
  • Publication number: 20110315962
    Abstract: Electrical devices comprised of nanowires are described, along with methods of their manufacture and use. The nanowires can be nanotubes and nanowires. The surface of the nanowires may be selectively functionalized Nanodetector devices are described.
    Type: Application
    Filed: April 11, 2011
    Publication date: December 29, 2011
    Applicant: President and Fellows of Harvard College
    Inventors: Charles M. Lieber, Hongkun Park, Qingqiao Wei, Yi Cui, Wenjie Liang
  • Publication number: 20110309505
    Abstract: A semiconductor device includes a semiconductor integrated circuit device (1). In the semiconductor integrated circuit device (1), a semiconductor integrated circuit (5) is formed on a center of the surface of a semiconductor substrate (3), and a plurality of electrode terminals (71, 73, . . . ) are provided on the surface of the semiconductor substrate (3). A protection film (9) is provided on the surface of the semiconductor substrate (3) such that the surfaces of the electrode terminals (71, 73) are exposed. The electrode terminals (71, 73, . . . ) include an electrode terminal (73) having a thin portion (74). The surface of the thin portion (74) is located below the surfaces of the electrode terminals except for the electrode terminal (73) having the thin portion (74) among the electrode terminals (71, 73, . . . ).
    Type: Application
    Filed: August 30, 2011
    Publication date: December 22, 2011
    Applicant: PANASONIC CORPORATION
    Inventor: Kouji TAKEMURA
  • Publication number: 20110309507
    Abstract: The present disclosure relates to a structure comprising 1. an electrically conductive substrate having carbon nanotubes grown thereon; 2. a cured polymeric fill matrix comprising at least one latent photoacid generator embedded around the carbon nanotubes but allowing tips of the carbon nanotubes to be exposed; 3. a layer of patterned and cured photosensitive dielectric material on the cured polymeric fill matrix, wherein tips of the carbon nanotubes are exposed within the patterns; and 4. an electrically conductive material filled into the interconnect pattern and in contact with the exposed tips of the carbon nanotubes; and to methods of making the structure and using the structure to measure the electrical characteristics of carbon nanotubes.
    Type: Application
    Filed: June 22, 2010
    Publication date: December 22, 2011
    Applicant: International Business Machines Corp.
    Inventors: Maxime Darnon, Gerald W. Gibson, Pratik P. Joshi, Qinghuang Lin
  • Publication number: 20110312108
    Abstract: Various embodiments of the present invention include a semiconductor device and a fabrication method therefor, the semiconductor device including a first semiconductor chip disposed on a substrate, a first sealing resin sealing the first semiconductor chip, a built-in semiconductor device disposed on the first sealing resin, and a second sealing resin sealing the first sealing resin and the built-in semiconductor device and covering a side surface of the substrate. According to an aspect of the present invention, it is possible to provide a high-quality semiconductor device and a fabrication method therefor, in which downsizing and cost reduction can be realized.
    Type: Application
    Filed: December 10, 2010
    Publication date: December 22, 2011
    Inventors: Masanori ONODERA, Kouichi MEGURO, Junji TANAKA
  • Publication number: 20110284841
    Abstract: A semiconductor device according to one embodiment of this invention includes: a semiconductor chip; a plurality of external connection pads and a plurality of first test pads, both of which are formed in a central region of a top surface of the semiconductor chip; a plurality of external connection electrodes each formed on a corresponding one of the external connection pads, the external connection electrodes being for connecting the external connection pads and an outside of the semiconductor device.
    Type: Application
    Filed: February 28, 2011
    Publication date: November 24, 2011
    Applicant: PANASONIC CORPORATION
    Inventor: Hideaki KONDOU
  • Patent number: 8062911
    Abstract: A probe having a sufficient height is manufactured by selectively depositing, over the main surface of a wafer, a copper film in a region in which a metal film is to be formed and a region which will be outside an adhesion ring when a probe card is fabricated; forming the metal film, polyimide film, interconnect, another polyimide film, another interconnect and a further polyimide film; and then removing the wafer and copper film. According to the present invention, when probe testing is performed using a prober (thin film probe) having the probe formed in the above-described manner while utilizing the manufacturing technology of semiconductor integrated circuit devices, it is possible to prevent breakage of the prober and a wafer to be tested.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: November 22, 2011
    Assignee: Renesas Electronics Corporation
    Inventors: Akio Hasebe, Yasuhiro Motoyama, Yasunori Narizuka, Seigo Nakamura, Kenji Kawakami
  • Publication number: 20110281377
    Abstract: [Problems] There are provided a chip separation method and a chip transfer method using features of dry etching. [Means for Solving the Problems] In the chip separation method, a multiple number of semiconductor devices or semiconductor integrated circuits are separated from a wafer 100 on which the multiple number of semiconductor devices or semiconductor integrated circuits are formed. The method includes forming, on a surface of the wafer 100, a mask layer through which a line-shaped pattern to be removed for separating the semiconductor devices or semiconductor integrated circuits is exposed; and etching the exposed pattern to a depth equal to or larger than about ? of a thickness of the wafer. One group of separated semiconductor devices or semiconductor integrated circuits has a distinguishable shape from another group of separated semiconductor devices or semiconductor integrated circuits.
    Type: Application
    Filed: April 19, 2011
    Publication date: November 17, 2011
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masahiro Yamada, Kenya Iwasaki, Hiroshi Nishikawa
  • Publication number: 20110278569
    Abstract: A wafer level integration module and method for forming are disclosed. A construction includes semiconductor functional device fabrication carried out after interconnect structures are processed on a bare wafer. Interconnect structures are formed in a first side of the wafer. An insulation layer is deposited on the first side of the wafer to insulate walls of the interconnect structures. A conductive layer is deposited on the insulation layer filling the interconnect structures so as to contact the insulation layer on the walls of the interconnect structures. The conductive layer forms interconnection contacts on the first side of the wafer and interconnection vias extending into the wafer. The first conductive layer including the interconnection contacts is exposed on the first side of the wafer and a semiconductor functional device is formed on the first side of the wafer. The semiconductor functional device is interconnected with the interconnection contacts during the fabricating.
    Type: Application
    Filed: July 12, 2011
    Publication date: November 17, 2011
    Inventor: Gautham Viswanadam
  • Publication number: 20110272795
    Abstract: Exemplary semiconductor device packaging structure and packaging method are provided. The packaging method uses an adhesive layer to bond multiple wafer pieces onto a first surface of a carrier substrate, each adjacent two of the wafer pieces having a gap formed therebetween for exposing a part of the adhesive layer. A packaging layer is filled in each of the gaps. At least one through silicon via is formed each of the wafer pieces to expose a bonding pad formed on an active surface of the wafer pieces. Redistribution circuit layers are formed on back surfaces of the respective wafer pieces and filled into the through silicon vias for electrical connection with the bonding pads. A sawing process is performed to saw starting from each of the packaging layers to a second surface of the carrier substrate, and thereby multiple semiconductor device packaging structures are obtained.
    Type: Application
    Filed: May 6, 2010
    Publication date: November 10, 2011
    Inventor: Wen-Hsiung CHANG
  • Publication number: 20110272024
    Abstract: Embodiments of the invention include a solar cell and methods of forming a solar cell. Specifically, the methods may be used to form a passivation/anti-reflection layer having combined functional and optical gradient properties on a solar cell substrate. The methods may include flowing a first process gas mixture into a process volume within a processing chamber generating plasma in the processing chamber at a power density of greater than 0.65 W/cm2 depositing a silicon nitride-containing interface sub-layer on a solar cell substrate in the process volume, flowing a second process gas mixture into the process volume, and depositing a silicon nitride-containing bulk sub-layer on the silicon nitride-containing interface sub-layer.
    Type: Application
    Filed: March 30, 2011
    Publication date: November 10, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Dongwon Choi, Michael P. Stewart, Li Xu, Hemant P. Mungekar, Sunhom Paak, Kenneth MacWilliams
  • Patent number: 8048690
    Abstract: A pressure-sensitive adhesive sheet according to the present invention is a pressure-sensitive adhesive sheet in which a pressure-sensitive adhesive layer is provided on a base film, in which the base film contains conductive fibers, and in which an electrically conductive path is formed between the pressure-sensitive adhesive layer and the base film. With this structure, an electrical continuity test can be performed even in a condition where a semiconductor wafer or a semiconductor chip formed by dicing the semiconductor wafer is applied, and deformation (warping) and damage of the semiconductor wafer and generation of flaws and scratches on the backside can be prevented in the test.
    Type: Grant
    Filed: October 9, 2008
    Date of Patent: November 1, 2011
    Assignee: Nitto Denko Corporation
    Inventors: Yoshio Terada, Fumiteru Asai, Hirokuni Hashimoto
  • Publication number: 20110250709
    Abstract: A method for manufacturing a thin film photoelectric conversion module comprising the steps of: (A) forming a plurality of divided strings by dividing a string, in which thin film photoelectric conversion elements provided by sequentially laminating a first electrode layer, a photoelectric conversion layer and a second electrode layer on the surface of an insulating substrate are electrically connected in series, into a plurality of strings by dividing grooves, electrically insulating and separating the first electrode layer and the second electrode layer one from the other and extending in a serial connection direction; and (B) performing reverse biasing by applying a reverse bias voltage to each of thin film photoelectric conversion elements of the divided string.
    Type: Application
    Filed: August 1, 2008
    Publication date: October 13, 2011
    Inventors: Shinsuke Tachibana, Takanori Nakano
  • Publication number: 20110250710
    Abstract: An electrical alignment mark set and the method for using the same is disclosed. The electrical alignment mark set includes at least a top mark and a bottom mark. The top mark includes multiple pads disposed on a top wafer and having first pads and second pads, and a monitoring via electrically connected to the first pads. The bottom mark includes a first bottom pad corresponding to the monitoring via and a second bottom pad corresponding to the second pads. Further the first bottom pad and the second bottom pad are electrically connected to each other so that the monitoring via maybe electrically connected to the second pads by means of the first bottom pad when the top mark and the bottom mark are aligned with each other.
    Type: Application
    Filed: April 8, 2010
    Publication date: October 13, 2011
    Inventor: Shing-Hwa Renn
  • Patent number: 8026120
    Abstract: A method of manufacturing an MEMS device includes: forming a covering structure having an MEMS structure and a hollow portion, which is located on a periphery of the MEMS structure and is opened to an outside, on a substrate; and performing surface etching for the MEMS structure in a gas phase by supplying an etching gas to the periphery of the MEMS structure from the outside.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: September 27, 2011
    Assignee: Seiko Epson Corporation
    Inventors: Ryuji Kihara, Shogo Inaba
  • Patent number: 8013332
    Abstract: Improved techniques to produce integrated circuit products are disclosed. The improved techniques permit smaller and less costly production of integrated circuit products. One aspect of the invention concerns covering test contacts (e.g., test pins) provided with the integrated circuit products using printed ink. Once covered with the ink, the test contacts are no longer electrically exposed. Hence, the integrated circuit products are not susceptible to accidental access or electrostatic discharge. Moreover, the integrated circuit products can be efficiently produced in a small form factor without any need for additional packaging or labels to electrically isolate the test contacts.
    Type: Grant
    Filed: October 20, 2006
    Date of Patent: September 6, 2011
    Assignee: SanDisk Technologies Inc.
    Inventors: Warren Middlekauff, Robert Miller, Charlie Centofante
  • Publication number: 20110212551
    Abstract: A contactor includes a contactor base material including a first material and a conductor film including a second material. The conductor film is formed only on a contact surface with an electrode of a semiconductor apparatus at a tip of the contactor film.
    Type: Application
    Filed: February 24, 2011
    Publication date: September 1, 2011
    Applicant: FUJITSU SEMICONDUCTOR LIMITED
    Inventors: Shigeyuki MARUYAMA, Yoshihiro Sekizawa, Tomohiro Suzuka
  • Publication number: 20110212549
    Abstract: The present invention relates generally to assembly techniques. According to the present invention, the alignment and probing techniques to improve the accuracy of component placement in assembly are described. More particularly, the invention includes methods and structures to detect and improve the component placement accuracy on a target platform by incorporating alignment marks on component and reference marks on target platform under various probing techniques. A set of sensors grouped in any array to form a multiple-sensor probe can detect the deviation of displaced components in assembly.
    Type: Application
    Filed: May 13, 2010
    Publication date: September 1, 2011
    Inventor: Kong C. Chen
  • Publication number: 20110210329
    Abstract: The present invention relates generally to assembly techniques. According to the present invention, the alignment and probing techniques to improve the accuracy of component placement in assembly are described. More particularly, the invention includes methods and structures to detect and improve the component placement accuracy on a target platform by incorporating alignment marks on component and reference marks on target platform under various probing techniques. A set of sensors grouped in any array to form a multiple-sensor probe can detect the deviation of displaced components in assembly.
    Type: Application
    Filed: May 13, 2010
    Publication date: September 1, 2011
    Inventor: Kong C. Chen
  • Publication number: 20110198748
    Abstract: A method of fabricating a semiconductor device includes: forming a semiconductor chip portion having an electrode on a main surface of a wafer; forming a first resist pattern having a first opening on the electrode; filling the first opening with a first electrically conductive material, thereby forming an electrically conductive post; removing the first resist pattern after said forming of the electrically conductive post; forming an interlayer dielectric film having a second opening positioned on the electrically conductive post; and forming an electrically conductive redistribution layer extending from an upper surface of the electrically conductive post over an upper surface of the interlayer dielectric film.
    Type: Application
    Filed: February 14, 2011
    Publication date: August 18, 2011
    Applicant: OKI SEMICONDUCTOR CO., LTD.
    Inventor: Osamu Koike
  • Publication number: 20110195530
    Abstract: A method including forming an intermediate product, the intermediate product being configured to include a wiring substrate including a plurality of first electrodes, a plurality of second electrodes and a plurality of test electrodes, a first semiconductor chip mounted over the wiring substrate and including a plurality of first pads electrically connected respectively to the first electrodes, and a second semiconductor chip stacked over the first semiconductor chip and including a plurality of second pads electrically connected respectively to the second electrodes; encapsulating the first and second semiconductor chips; and performing electrical tests on the first and second semiconductor chips by use of the test electrodes, after the encapsulating of the first and second semiconductor chips.
    Type: Application
    Filed: December 30, 2010
    Publication date: August 11, 2011
    Inventors: Masachika Masuda, Toshihiko Usami