Testing Or Measuring During Manufacture Or Treatment Or Reliability Measurement, I.e., Testing Of Parts Followed By No Processing Which Modifies Parts As Such (epo) Patents (Class 257/E21.521)
E Subclasses
- Additional lead-in metallization on device, e.g., additional pads or lands, lines in scribe line, sacrificed conductors, sacrificed frames (EPO) (Class 257/E21.523)
- Circuit for characterizing or monitoring manufacturing process, e.g., whole test die, wafer filled with test structures, onboard devices incorporated on each die, process/product control monitors or PCM, devices in scribe-line/kerf, drop-in devices (EPO) (Class 257/E21.524)
- Connection or disconnection of subentities or redundant parts of device in response to measurement, e.g., wafer scale, memory devices (EPO) (Class 257/E21.526)
- Optical enhancement of defects or not directly visible states, e.g., selective electrolytic deposition, bubbles in liquids, light emission, color change (EPO) (Class 257/E21.527)
- Acting in response to ongoing measurement without interruption of processing, e.g., endpoint detection, in-situ thickness measurement (EPO) (Class 257/E21.528)
- For structural parameters, e.g., thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (EPO) (Class 257/E21.53)
- For electrical parameters, e.g., resistance, deep-levels, CV, diffusions by electrical means (EPO) (Class 257/E21.531)