Complementary Vertical Transistors (epo) Patents (Class 257/E21.612)
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Patent number: 11798937Abstract: A bipolar transistor includes a collector region having a first doped portion located in a substrate and a second doped portion covering and in contact with an area of the first doped portion. The collector region has a doping profile having a peak in the first portion and a decrease from this peak up to in the second portion.Type: GrantFiled: October 18, 2021Date of Patent: October 24, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Edoardo Brezza, Alexis Gauthier
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Patent number: 11742352Abstract: A semiconductor device includes first and second source/drain structures, a channel layer, a gate structure, and an epitaxial layer. The channel layer is above the first source/drain structure. The second source/drain structure is above the channel layer. The gate structure is on a first side surface of the channel layer. The epitaxial layer forms a P-N junction with a second side surface of the channel layer.Type: GrantFiled: May 26, 2022Date of Patent: August 29, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hung-Li Chiang, Szu-Wei Huang, Chih-Chieh Yeh, Yee-Chia Yeo
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Patent number: 11664368Abstract: A transient voltage suppressor (TVS) device uses a punch-through silicon controlled rectifier (SCR) structure for the low-side steering diode where the punch-through SCR structure realizes low capacitance at the protected node. In some embodiments, the punch-through silicon controlled rectifier of the low-side steering diode includes a first doped region formed in a first epitaxial layer, a first well formed spaced apart from the first doped region where the first well is not biased to any electrical potential, and a second doped region formed in the first well. The first doped region, the first epitaxial layer, the first well and the second doped region form the punch-through silicon controlled rectifier, with the first doped region forming the anode and the second doped region forming the cathode of the punch-through silicon controlled rectifier.Type: GrantFiled: September 25, 2020Date of Patent: May 30, 2023Assignee: Alpha & Omega Semiconductor (Cayman) Ltd.Inventor: Shekar Mallikarjunaswamy
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Patent number: 11600667Abstract: A method for producing a 3D semiconductor device including: providing a first level, the first level including a first single crystal layer; forming first alignment marks and control circuits in and/or on the first level, where the control circuits include first single crystal transistors and at least two interconnection metal layers; forming at least one second level disposed above the control circuits; performing a first etch step into the second level; forming at least one third level disposed on top of the second level; performing additional processing steps to form first memory cells within the second level and second memory cells within the third level, where each of the first memory cells include at least one second transistor, where each of the second memory cells include at least one third transistor, performing bonding of the first level to the second level, where the bonding includes oxide to oxide bonding.Type: GrantFiled: August 29, 2022Date of Patent: March 7, 2023Assignee: MONOLITHIC 3D INC.Inventors: Deepak C. Sekar, Zvi Or-Bach
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Patent number: 10340342Abstract: A semiconductor device and its manufacturing method are presented. The semiconductor device includes a collection region, a base region adjacent to the collection region, an emission region adjacent to the base region, and a doped semiconductor layer on the emission region. The width of the doped semiconductor layer is larger than the width of the emission region, a conductive type (e.g., P-type or N-type) of the doped semiconductor layer is the same as a conductive type of the emission region. In this inventive concept, the width of the doped semiconductor layer on the emission region is larger than the width of the emission region, that equivalently increases the width of the emission region, which in turn increases the DC amplification factor (?) and therefore improves the overall performance of the semiconductor device.Type: GrantFiled: January 5, 2018Date of Patent: July 2, 2019Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATIONInventors: JianXiang Cai, YiQi Wang, WeiLi Zhao, XiaoFang Yang, JingGuo Jia
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Patent number: 8810030Abstract: A MEMS device (20) with stress isolation includes elements (28, 30, 32) formed in a first structural layer (24) and elements (68, 70) formed in a second structural layer (26), with the layer (26) being spaced apart from the first structural layer (24). Fabrication methodology (80) entails forming (92, 94, 104) junctions (72, 74) between the layers (24, 26). The junctions (72, 74) connect corresponding elements (30, 32) of the first layer (24) with elements (68, 70) of the second layer (26). The fabrication methodology (80) further entails releasing the structural layers (24, 26) from an underlying substrate (22) so that all of the elements (30, 32, 68, 70) are suspended above the substrate (22) of the MEMS device (20), wherein attachment of the elements (30, 32, 68, 70) with the substrate (22) occurs only at a central area (46) of the substrate (22).Type: GrantFiled: February 3, 2012Date of Patent: August 19, 2014Assignee: Freescale Semiconductor, Inc.Inventor: Aaron A. Geisberger
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Patent number: 8519475Abstract: A semiconductor device includes a first insulating film formed between a gate electrode and a first flat semiconductor layer, and a sidewall-shaped second insulating film formed to surround an upper sidewall of a first columnar silicon layer while contacting an upper surface of the gate electrode and to surround a sidewall of the gate electrode and the first insulating film. The semiconductor device further includes a metal-semiconductor compound formed on each of an upper surface of a first semiconductor layer of the second conductive type formed in the entirety or the upper portion of the first flat semiconductor layer, and an upper surface of the second semiconductor layer of the second conductive type formed in the upper portion of the first columnar semiconductor layer.Type: GrantFiled: November 4, 2011Date of Patent: August 27, 2013Assignee: Unisantis Electronics Singapore Pte Ltd.Inventors: Fujio Masuoka, Hiroki Nakamura, Shintaro Arai, Tomohiko Kudo, Navab Singh, Kavitha Devi Buddharaju, Shen Nansheng, Rukmani Devi Sayanthan
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Publication number: 20120025320Abstract: A fabricating method of CMOS transistor includes following steps. A first gate and a second gate are formed on a substrate. A gate insulator is formed on the substrate to cover the first and second gates. A first source, a first drain, a second source, and a second drain are formed on the gate insulator. The first source and the first drain are above the first gate. The second source and the second drain are above the second gate. A first channel layer and a mask layer are formed on the gate insulator. The mask layer is on the first channel layer. The first channel layer is above the first gate and contacts with the first source and the first drain. A second channel layer is formed on the gate insulator. The second channel layer is above the second gate and contacts with the second source and the second drain.Type: ApplicationFiled: November 10, 2010Publication date: February 2, 2012Applicant: AU OPTRONICS CORPORATIONInventors: Chung-Tao Chen, Ta-Wei Chiu, Yu-Pu Lin, Yi-Wei Chen
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Publication number: 20110140233Abstract: A parasitic vertical PNP bipolar transistor in BiCMOS process comprises a collector, a base and an emitter. The collector is formed by active region with p-type ion implanting layer (P type well in NMOS). It connects a P-type conductive region, which formed in the bottom region of shallow trench isolation (STI). The collector terminal connection is through the P-type buried layer and the adjacent active region. The base is formed by N type ion implanting layer above the collector which shares a N-type lightly doped drain (NLDD) implanting of NMOS. Its connection is through the N-type poly on the base region. The emitter is formed by the P-type epitaxy layer on the base region with heavy p-type doped, and connected by the extrinsic base region of NPN bipolar transistor device. This invention also includes the fabrication method of this parasitic vertical PNP bipolar transistor in BiCMOS process.Type: ApplicationFiled: December 8, 2010Publication date: June 16, 2011Inventors: Wensheng QIAN, Jun Hu, Donghua Liu
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Patent number: 7781276Abstract: A CMOS integrated circuit has NMOS and PMOS transistors therein and an insulating layer extending on the NMOS transistors. The insulating layer is provided to impart a relatively large tensile stress to the NMOS transistors. In particular, the insulating layer is formed to have a sufficiently high internal stress characteristic that imparts a tensile stress in a range from about 2 gigapascals (2 GPa) to about 4 gigapascals (4 GPa) in the channel regions of the NMOS transistors.Type: GrantFiled: January 14, 2009Date of Patent: August 24, 2010Assignee: Samsung Electronics Co., Ltd.Inventors: Kyoung-woo Lee, Ja-hum Ku, Seung-man Choi
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Patent number: 7586130Abstract: A vertical field effect transistor includes: an active region with a bundle of linear structures functioning as a channel region; a lower electrode, functioning as one of source and drain regions; an upper electrode, functioning as the other of the source and drain regions; a gate electrode for controlling the electric conductivity of at least a portion of the bundle of linear structures included in the active region; and a gate insulating film arranged between the active region and the gate electrode to electrically isolate the gate electrode from the bundle of linear structures. The transistor further includes a dielectric portion between the upper and lower electrodes. The upper electrode is located over the lower electrode with the dielectric portion interposed and includes an overhanging portion sticking out laterally from over the dielectric portion. The active region is located right under the overhanging portion of the upper electrode.Type: GrantFiled: February 1, 2006Date of Patent: September 8, 2009Assignee: Panasonic CorporationInventors: Takahiro Kawashima, Tohru Saitoh, Takeshi Takagi
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Publication number: 20090206335Abstract: The invention relates to a BiCMOS device comprising a substrate having a first type of conductivity and a number of active regions that are provided therein and are delimited in a lateral direction by flat field-insulating regions. Vertical npn bipolar epitaxial base transistors are disposed in a first partial number of the active regions while vertical pnp bipolar epitaxial base transistors are arranged in a second partial number of the active regions of the BiCMOS device. One transistor type or both transistor types are provided with both a collector region and a collector contact region in one and the same respective active region. In order to improve the high frequency characteristics, an insulation doping region that is configured so as to electrically insulate the collector and the substrate is provided between the collector region and the substrate exclusively in a first transistor type in which the type of conductivity of the substrate corresponds to that of the collector region.Type: ApplicationFiled: December 1, 2004Publication date: August 20, 2009Inventors: Bernd Heinemann, Jürgen Drews, Steffen Marschmayer, Holger Rücker
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Patent number: 7541250Abstract: A method for forming a self-aligned twin well region is provided. The method includes implanting a first well type doping species into the DHL such that its distribution remains stopped in the DHL above the silicon substrate, etching away a portion of the DHL using a photoresist mask, implanting a second well type doping species into the portions of the silicon substrate exposed by the etching, and moving a portion of the first well type doping species into the silicon substrate.Type: GrantFiled: March 7, 2006Date of Patent: June 2, 2009Assignee: Atmel CorporationInventors: Gayle W. Miller, Jr., Bryan D. Sendelweck
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Patent number: 7476941Abstract: A semiconductor integrated circuit includes an n-channel MOS transistor and a p-channel MOS transistor formed respectively in first and second device regions of a substrate, the n-channel MOS transistor including a first gate electrode carrying sidewall insulation films on respective sidewall surfaces thereof, the p-channel MOS transistor including a second gate electrode carrying sidewall insulation films on respective sidewall surfaces thereof, wherein there is provided a stressor film on the substrate over the first and second device regions such that the stressor film covers the first gate electrode including the sidewall insulation films thereof and the second gate electrode including the sidewall insulation films thereof, wherein the stressor film has a decreased film thickness in the second device region at least in the vicinity of a base part of the second gate electrode.Type: GrantFiled: March 1, 2007Date of Patent: January 13, 2009Assignee: Fujitsu Microelectronics LimitedInventors: Masashi Shima, Yosuke Shimamune, Akiyoshi Hatada, Akira Katakami, Naoyoshi Tamura
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Patent number: 7276754Abstract: A memory structure having a vertically oriented access transistor with an annular gate region and a method for fabricating the structure. More specifically, a transistor is fabricated such that the channel of the transistor extends outward with respect to the surface of the substrate. An annular gate is fabricated around the vertical channel such that it partially or completely surrounds the channel. A buried annular bitline may also be implemented. After the vertically oriented transistor is fabricated with the annular gate, a storage device may be fabricated over the transistor to provide a memory cell.Type: GrantFiled: August 4, 2005Date of Patent: October 2, 2007Assignee: Micron Technology, Inc.Inventors: Lucien J. Bissey, Kevin G. Duesman