Characterized By Shape Of Semiconductor Body (epo) Patents (Class 257/E29.022)
E Subclasses
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Publication number: 20110108960Abstract: A trench structure and an integrated circuit comprising sub-lithographic trench structures in a substrate. In one embodiment the trench structure is created by forming sets of trenches with a lithographic mask and filling the sets of trenches with sets of step spacer blocks comprising two alternating spacer materials which are separately removable from each other. In one embodiment, the trench structures formed are one-nth the thickness of the lithographic mask's feature size. The size of the trench structures being dependent on the thickness and number of spacer material layers used to form the set of step spacer blocks. The number of spacer material layers being n/2 and the thickness of each spacer material layer being one-nth of the lithographic mask's feature size.Type: ApplicationFiled: January 13, 2011Publication date: May 12, 2011Applicant: International Business Machines CorporationInventors: Chung H. Lam, Hemantha K. Wickramasinghe
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Patent number: 7939918Abstract: This invention discloses a crystalline substrate based device including a crystalline substrate having formed thereon a microstructure; and at least one packaging layer which is sealed over the microstructure by means of an adhesive and defines therewith at least one gap between the crystalline substrate and the at least one packaging layer. A method of producing a crystalline substrate based device is also disclosed.Type: GrantFiled: October 26, 2006Date of Patent: May 10, 2011Assignee: Tessera Technologies Ireland LimitedInventor: Avner Pierre Badehi
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Publication number: 20110101473Abstract: This invention relates to a junction device, especially a p-n junction device. This invention also relates to a backward current decoupler which is also a good sensor. An induced backward current by forward current input can be decoupled by the backward current decoupler. The new p-n junction device has built-in damper and better capacitive property so that less power is consumed. The new sensor can be interactable with thermal, magnetic, optical, force or electrical fields.Type: ApplicationFiled: November 3, 2009Publication date: May 5, 2011Inventors: Yen-Wei Hsu, Whei-Chyou Wu
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Publication number: 20110101464Abstract: A shallow trench isolation structure for integrated circuits includes a semiconductor substrate having a trench and a buffered oxide layer overlying the semiconductor substrate. A pad nitride layer is overlying the buffered oxide layer. An implanted region is formed around a perimeter of the trench. The trench has a bottom width of less than 0.13 microns and an upper width of less than 0.13 microns. A rounded edge is surrounding a periphery of the trench. The rounded edge has a radius of curvature greater than about 0.02 um. A planarized high density plasma fill material is formed within the trench. The structure has a P-well region within the semiconductor substrate and bordering a vicinity of the trench region. A channel region is within the P-well region within the semiconductor substrate. The implanted region has an impurity concentration of more than double an amount of impurities in the channel region.Type: ApplicationFiled: January 7, 2011Publication date: May 5, 2011Applicant: Semiconductor Manufacturing International (Shanghai) CorporationInventor: Hae Wang Yang
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Publication number: 20110068438Abstract: In inlets used for ID tags and the like, a defective connection between an integrated circuit part and an antenna is suppressed by improvement of tolerance for a bending or a pressing pressure. The integrated circuit part includes a semiconductor chip and a multilayer substrate having a concave portion. The semiconductor chip is mounted on the bottom of the concave portion. The multilayer substrate includes a connection electrode at the top surface and a connection electrode connected to the semiconductor chip on the bottom of the concave portion. The connection electrode on the bottom of the concave portion is connected to the connection electrode at the top surface by a penetration electrode inside a multilayer substrate. By such a configuration, the semiconductor chip is connected to the antenna.Type: ApplicationFiled: November 23, 2010Publication date: March 24, 2011Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Shunpei YAMAZAKI, Yasuyuki ARAI
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Patent number: 7880201Abstract: The present invention is a method and an apparatus for optical modulation, for example for use in optical communications links. In one embodiment, an apparatus for optical modulation includes a first silicon layer having one or more trenches formed therein, a dielectric layer lining the first silicon layer, and a second silicon layer disposed on the dielectric layer and filling the trenches.Type: GrantFiled: November 9, 2006Date of Patent: February 1, 2011Assignee: International Business Machines CorporationInventors: Yurii A. Vlasov, Fengnian Xia
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Publication number: 20110017991Abstract: In this junction element 1, when a forward voltage is applied, a depletion layer is formed in a semiconductor layer 2, prohibiting electrons present in an electrode layer 4 to move into the semiconductor layer 2. For this reason, a majority of holes in a semiconductor layer 3 do not disappear by recombination with conduction electrons in the semiconductor layer 2, but reach the electrode layer 4 while diffusing into the semiconductor layer 2. Accordingly, the junction element 1 can serve as a good conductor for holes, while avoiding the influence of a resistance value, and allows a current to flow therethrough at a level equal to or more than that achieved by a semiconductor element formed of a Si or SiC semiconductor.Type: ApplicationFiled: February 27, 2009Publication date: January 27, 2011Inventors: Satoshi Tanimoto, Norihiko Kiritani, Toshiharu Makino, Masahiko Ogura, Norio Tokuda, Hiromitsu Kato, Hideyo Okushi, Satoshi Yamasaki
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Publication number: 20110006284Abstract: A photonic structure includes a plurality of annealed, substantially smooth-surfaced ellipsoids arranged in a matrix. Additionally, a method of producing a photonic structure is provided. The method includes providing a semiconductor material, providing an etch mask comprising a two-dimensional hole array, and disposing the etch mask on at least one surface of the semiconductor material. The semiconductor material is then etched through the hole array of the etch mask to produce holes in the semiconductor material and thereafter applying a passivation layer to surfaces of the holes. Additionally, the method includes repeating the etching and passivation-layer application to produce a photonic crystal structure that contains ellipsoids within the semiconductor material and annealing the photonic crystal structure to smooth the surfaces of the ellipsoids.Type: ApplicationFiled: July 13, 2009Publication date: January 13, 2011Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.Inventors: Hans S. Cho, David A. Fattal, Theodore I. Kamins
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Patent number: 7868335Abstract: A bipolar junction transistor having an emitter, a base, and a collector includes a stack of one or more layer sets adjacent the collector. Each layer set includes a first material having a first band gap, wherein the first material is highly doped, and a second material having a second band gap narrower than the first band gap, wherein the second material is at most lightly doped.Type: GrantFiled: August 18, 2008Date of Patent: January 11, 2011Assignee: HRL Laboratories, LLCInventors: James Chingwei Li, Marko Sokolich, Tahir Hussain, David H. Chow
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Patent number: 7863674Abstract: In one aspect, the present invention teaches a multiple-gate transistor 130 that includes a semiconductor fin 134 formed in a portion of a bulk semiconductor substrate 132. A gate dielectric 144 overlies a portion of the semiconductor fin 134 and a gate electrode 146 overlies the gate dielectric 144. A source region 138 and a drain region 140 are formed in the semiconductor fin 134 oppositely adjacent the gate electrode 144. In the preferred embodiment, the bottom surface 150 of the gate electrode 146 is lower than either the source-substrate junction 154 or the drain-substrate junction 152.Type: GrantFiled: December 26, 2006Date of Patent: January 4, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yee-Chia Yeo, Fu-Liang Yang, Chenming Hu
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Publication number: 20100327258Abstract: Disclosed is a method for producing core-shell nanowires in which an insulating film is previously patterned to block the contacts between nanowire cores and nanowire shells. According to the method, core-shell nanowires whose density and position is controllable can be produced in a simple manner. Further disclosed are nanowires produced by the method and a nanowire device comprising the nanowires. The use of the nanowires leads to an increase in the light emitting/receiving area of the device. Therefore, the device exhibits high luminance/efficiency characteristics.Type: ApplicationFiled: October 31, 2007Publication date: December 30, 2010Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Eun Kyung LEE, Jai Yong HAN, Byoung Lyong CHOI, Kyung Sang CHO
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Publication number: 20100320574Abstract: A method of forming a semiconductor device includes forming a first chip region, a second chip region, and a scribe lane region between the first and second chip regions in a wafer, the wafer having a first surface and a second surface facing the first surface, and forming a penetrating extension hole and a scribe connector in the scribe lane region, the penetrating extension hole penetrating the wafer from the first surface to the second surface and extending along the scribe lane region, wherein the scribe connector connects the first and second chip regions spaced apart from each other by the penetrating extension hole.Type: ApplicationFiled: August 26, 2010Publication date: December 23, 2010Inventor: YOUNG-HO KIM
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Patent number: 7851260Abstract: A method for manufacturing a semiconductor device is disclosed. As a part of the method, one surface of a substrate is molded with resin where the substrate and the resin are heated in a first heating process and maintained in a flat condition. The substrate and the resin are returned to room temperature while being maintained in the flat condition after the first heating process. The resin is cut after the substrate and the resin are returned to room temperature from a surface of the resin that is opposite the surface of the resin where the substrate contacts the resin. The substrate is left intact when the resin is cut. Thereafter, the substrate is separated.Type: GrantFiled: December 10, 2008Date of Patent: December 14, 2010Assignee: Spansion LLCInventors: Junji Tanaka, Kouichi Meguro, Yasuhiro Shinma
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Publication number: 20100308445Abstract: A semiconductor device includes a semiconductor layer stacked on a substrate, a stripe-shaped ridge formed on a surface of the semiconductor layer, and electrode formed on an upper surface of the ridge and a protective film disposed on each side of the ridge. The electrode includes a flat portion having a flat surface substantially parallel to the upper surface of the ridge and sloped portions on both sides of the flat portion with each of the sloped portions having a sloped surface that is sloped with respect to the upper surface of the ridge. The protective film covers a region from a side surface of the ridge to the sloped surface of the sloped portion of the electrode.Type: ApplicationFiled: June 1, 2010Publication date: December 9, 2010Applicant: NICHIA CORPORATIONInventors: Atsuo MICHIUE, Yasuhiro KAWATA
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Publication number: 20100301460Abstract: Methods are provided for packaging a semiconductor die having a first surface. In accordance with an exemplary embodiment, a method comprises the steps of forming a trench in the first surface of the die, electrically and physically coupling the die to a packaging substrate, forming a sealant layer on the first surface of the die, forming an engagement structure within the trench, and infusing underfill between the sealant layer and the engagement structure and the packaging substrate.Type: ApplicationFiled: May 27, 2009Publication date: December 2, 2010Applicant: GLOBALFOUNDRIES INC.Inventors: Zhen ZHANG, Frank KUECHENMEISTER, Jaime BRAVO, Michael SU, Ranjit GANNAMANI, Kevin LIM
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Patent number: 7834349Abstract: A nanowire, nanosphere, metallized nanosphere, and methods for their fabrication are outlined. The method of fabricating nanowires includes fabricating the nanowire under thermal and non-catalytic conditions. The nanowires can at least be fabricated from metals, metal oxides, metalloids, and metalloid oxides. In addition, the method of fabricating nanospheres includes fabricating nanospheres that are substantially monodisperse. Further, the nanospheres are fabricated under thermal and non-catalytic conditions. Like the nanowires, the nanospheres can at least be fabricated from metals, metal oxides, metalloids, and metalloid oxides. In addition, the nanospheres can be metallized to form metallized nanospheres that are capable as acting as a catalyst.Type: GrantFiled: June 6, 2006Date of Patent: November 16, 2010Assignee: Georgia Tech Research CorporationInventors: James L. Gole, John D. Stout, Mark G. White
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Patent number: 7834452Abstract: A device made of single-crystal silicon having a first side, a second side which is situated opposite to the first side, and a third side which extends from the first side to the second side, the first side and the second side each extending in a 100 plane of the single-crystal silicon, the third side extending in a first area in a 111 plane of the single-crystal silicon. The third side extends in a second area in a 110 plane of the single-crystal silicon. Furthermore, a production method for producing a device made of single-crystal silicon is described.Type: GrantFiled: June 27, 2008Date of Patent: November 16, 2010Assignee: Robert Bosch GmbHInventors: Arnd Kaelberer, Helmut Baumann, Roland Scheuerer, Heribert Weber
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Publication number: 20100258914Abstract: A semiconductor bridge die may have an “H-design” or “trapezoidal” configuration in which a center bridge segment is flanked by one or more angled walls on each side of the bridge segment. Each wall is plated with a conductive material, thereby providing a continuous conductive path across the top surface of the die. A bottom surface of the die may be connected to a top surface of a header by epoxy in various configurations. The plated angled walls facilitate the solderable connection of the walls to a plated top surface of each of several pins on a top surface of the header, thereby providing a continuous electrical connection between the pins and the die. Also, a method is provided for manufacturing a semiconductor bridge die in accordance with the various embodiments of the die.Type: ApplicationFiled: April 6, 2010Publication date: October 14, 2010Applicant: ENSIGN-BICKFORD AEROSPACE & DEFENSE COMPANYInventors: Bernardo Martinez-Tovar, Craig J. Boucher
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Publication number: 20100224964Abstract: Epitaxially coated silicon wafers have a rounded and polished edge region and a region adjacent to the edge having a width of 3 mm on the front and rear sides, a surface roughness in edge region of 0.1-1.5 nm RMS relative to a spatial wavelength range of 10-80 ?m, and a variation of surface roughness of 1-10%. The wafer edges, after polishing, are examined for defects and roughness at the edge and surrounding region. Silicon wafers having a surface roughness of less than 1 nm RMS are pretreated in single wafer epitaxy reactors, first in a hydrogen atmosphere at a flow rate of 1-100 slm and in a second step, an etching medium with a flow rate of 0.5-5 slm is conducted onto the edge region of the wafer by a gas distribution device. The wafer is then epitaxially coated.Type: ApplicationFiled: February 16, 2010Publication date: September 9, 2010Applicant: Siltronic AGInventors: Friedrich Passek, Frank Laube, Martin Pickel, Reinhard Schauer
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Publication number: 20100155906Abstract: Provided are a method of forming patterns for a semiconductor device in which a pattern density is doubled by performing double patterning in a part of a device region while patterns having different widths are being simultaneously formed, and a semiconductor device having a structure to which the method is easily applicable. The semiconductor device includes a plurality of line patterns extending parallel to each other in a first direction. A plurality of first line patterns are alternately selected in a second direction from among the plurality of line patterns and each have a first end existing near the first side. A plurality of second line patterns are alternately selected in the second direction from among the plurality of line patterns and each having a second end existing near the first side. The first line patterns alternate with the second line patterns and the first end of each first line pattern is farther from the first side than the second end of each second line pattern.Type: ApplicationFiled: October 5, 2009Publication date: June 24, 2010Inventors: Young-ho Lee, Jae-hwang Sim, Young-seop Rah
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Publication number: 20100148319Abstract: A three-dimensional thin-film semiconductor substrate having a plurality of ridges on the surface of the semiconductor substrate which define a base opening of an inverted pyramidal cavity and walls defining the inverted pyramidal cavity is provided. And a fabrication method for a 3-D TFSS by forming a porous silicon layer on a silicon template having a top surface aligned along a (100) crystallographic orientation plane of the silicon template and a plurality of walls each aligned along a (111) crystallographic orientation plane of the silicon template and forming an inverted pyramidal cavity. The porous silicon layer forms substantially conformal on the silicon template. Then forming a substantially conformal epitaxial silicon layer on the porous silicon layer and releasing the epitaxial silicon layer from the silicon template.Type: ApplicationFiled: November 13, 2009Publication date: June 17, 2010Applicant: SOLEXEL, INC.Inventors: David Xuan-Qi Wang, Mehrdad M. Moslehi
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Patent number: 7723795Abstract: A semiconductor memory device includes a first active region formed having a first portion extending laterally and second portion extendedly vertically upward from a central portion of the first portion; a second active region formed spaced from the first active region, the second active region having a third portion extending laterally, fourth and fifth portions extending vertically downwardly at distal end portions of the third portion, and a sixth portion extending vertically downwardly at a central portion of the third portion; a first gate formed extending vertically and overlapping the first portion of the first active region and the third portion of the second active regions; a second gate formed extending vertically and overlapping the first portion of the first active region and the third portion of the second active regions; a third gate formed extending in a direction perpendicular to the first and second gates and overlapping of the fourth and fifth portions of the second active region; and a plurType: GrantFiled: September 22, 2008Date of Patent: May 25, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Ji-Ho Hong
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Patent number: 7714397Abstract: A semiconductor device comprising a semiconductor body having a top surface and laterally opposite sidewalls is formed on an insulating substrate. A gate dielectric layer is formed on the top surface of the semiconductor body and on the laterally opposite sidewalls of the semiconductor body. A gate electrode is formed on the gate dielectric on the top surface of the semiconductor body and is formed adjacent to the gate dielectric on the laterally opposite sidewalls of the semiconductor body. A thin film is then formed adjacent to the semiconductor body wherein the thin film produces a stress in the semiconductor body.Type: GrantFiled: July 25, 2006Date of Patent: May 11, 2010Assignee: Intel CorporationInventors: Scott A. Hareland, Robert S. Chau, Brian S. Doyle, Suman Datta, Been-Yih Jin
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Publication number: 20100108132Abstract: Disclosed herein is a nanodevice. Disclosed herein too is a method of manufacturing a nanodevice. In one embodiment the nanodevice includes a first substrate; a second substrate; a nanowire; the nanowire contacting the first substrate and the second substrate; the nanowire comprising a metal, a semi-conductor or a combination thereof.Type: ApplicationFiled: October 30, 2008Publication date: May 6, 2010Applicant: GENERAL ELECTRIC COMPANYInventors: Loucas Tsakalakos, Bastiaan Arie Korevaar, Joleyn Eileen Balch, Jody Fronheiser, Bo Li, Anis Zribi
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Patent number: 7709932Abstract: A conveyance system for a semiconductor wafer can be used without any change before and after a support plate is adhered to the wafer. Also, the finish accuracy of the wafer and the positioning accuracy between the wafer and the support plate can be relaxed, thus improving the manufacturing efficiency. The wafer is formed on its peripheral portion with a stepped portion, which is deeper than a finished thickness obtained by partial removal of the rear surface thereof and which can be eliminated by the partial removal of the wafer rear surface. The separation portion has a length which extends radially outward from a flat surface, and which is greater than a total sum of a maximum-minimum difference between the finish allowances of the diameters of the wafer and the support plate, and a maximum value of a positioning error between the wafer and the support plate generated upon adhesion thereof.Type: GrantFiled: October 7, 2005Date of Patent: May 4, 2010Assignee: Renesas Technology Corp.Inventors: Yoshihiko Nemoto, Masahiro Sunohara, Kenji Takahashi
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Patent number: 7692254Abstract: Disclosed herein are embodiments of a multiple fin fin-type field effect transistor (i.e., a multiple fin dual-gate or tri-gate field effect transistor) in which the multiple fins are partially or completely merged by a highly conductive material (e.g., a metal silicide). Merging the fins in this manner allow series resistance to be minimized with little, if any, increase in the parasitic capacitance between the gate and source/drain regions. Merging the semiconductor fins in this manner also allows each of the source/drain regions to be contacted by a single contact via as well as more flexible placement of that contact via.Type: GrantFiled: July 16, 2007Date of Patent: April 6, 2010Assignee: International Business Machines CorporationInventors: Brent A. Anderson, Andres Bryant, John J. Ellis-Monaghan, Edward J. Nowak
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Publication number: 20100072577Abstract: The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.Type: ApplicationFiled: September 22, 2009Publication date: March 25, 2010Applicant: The Board of Trustees of the University of IllinoisInventors: Ralph G. NUZZO, John A. ROGERS, Etienne MENARD, Keon Jae LEE, Dahl-Young Khang, Yugang SUN, Matthew MEITL, Zhengtao ZHU
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Patent number: 7651882Abstract: The present description describes back-end processes, the use of which may help overcome these problems and limitations of the prior art. In one optional embodiment, the back-end process includes depositing a layer over a wafer. The wafer contains a plurality of circuit die for respective RFID tags. The wafer also has exposed metallic regions. The exposed metallic regions include first regions having electrical contacts to the plurality of circuit die and second regions having electrical contacts to the wafer's electrical test sites. The method includes forming exposed first regions and unexposed second regions by etching the layer over the first regions but not over the second regions. The method also includes plating metallic bumps on the exposed first regions.Type: GrantFiled: August 9, 2007Date of Patent: January 26, 2010Assignee: Impinj, Inc.Inventors: Cameron Bockorick, Ronald E. Paulsen, Andrew E. Horch
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Publication number: 20100006865Abstract: In order to collect a plurality of semiconductor elements easily from a semiconductor module where a plurality of rod-like semiconductor elements for power generation or light emission are built in and to reuse or repair them, two split modules 61 are arranged in series in a containing case 62 in a semiconductor module 60. In each split module 61, power generating semiconductor elements 1 arranged in a matrix of a plurality of rows and columns, and a conductive connection mechanism for connecting the plurality of semiconductor elements 1 in each row in series and the plurality of semiconductor elements 1 in each column in parallel are molded with transparent synthetic resin, and a connection conductor 67 is allowed to project at the end. A conductive waved spring 70 and an external terminal 76 are provided on the end side of the containing case 62, and series connection of the two split modules 61 is ensured by mechanical pressing force of the conductive waved spring 70.Type: ApplicationFiled: August 7, 2006Publication date: January 14, 2010Inventor: Josuke Nakata
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Publication number: 20090315101Abstract: A method of forming a notched-base spacer profile for non-planar transistors includes providing a semiconductor fin having a channel region on a substrate and forming a gate electrode adjacent to sidewalls of the channel region and on a top surface of the channel region, the gate electrode having on a top surface a hard mask. a spacer layer is deposited over the gate and the fin using a enhanced chemical vapor deposition (PE-CVD) process. A multi-etch process is applied to the spacer layer to form a pair of notches on laterally opposite sides of the gate electrode, wherein each notch is located adjacent to sidewalls of the fin and on the top surface of the fin.Type: ApplicationFiled: June 24, 2008Publication date: December 24, 2009Inventors: Willy Rachmady, Jack Kavalieros
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Publication number: 20090309193Abstract: Problems with a conventional mesa type semiconductor device, which are deterioration in a withstand voltage and occurrence of a leakage current caused by reduced thickness of an insulation film on an inner wall of a mesa groove corresponding to a PN junction, are solved using an inexpensive material, and a mesa type semiconductor device of high withstand voltage and high reliability is offered together with its manufacturing method. A stable protection film made of a thermal oxide film is formed on the inner wall of the mesa groove in the mesa type semiconductor device to cover and protect the PN junction, and an insulation film having negative electric charges is formed to fill a space in the mesa groove covered with the thermal oxide film so that an electron accumulation layer is not easily formed at an interface between an N? type semiconductor layer and the thermal oxide film.Type: ApplicationFiled: June 9, 2009Publication date: December 17, 2009Applicants: SANYO Electric Co., Ltd., SANYO Semiconductor Manufacturing Co., Ltd.Inventors: Katsuyuki SEKI, Naofumi TSUCHIYA, Akira SUZUKI, Kikuo OKADA
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Forming fine pattern of semiconductor device using three mask layers and CMP of spin-on carbon layer
Patent number: 7615497Abstract: A method for forming a fine pattern of a semiconductor device includes forming a deposition film over a substrate having an underlying layer. The deposition film includes first, second, and third mask films. The method also includes forming a photoresist pattern over the third mask film, patterning the third mask film to form a deposition pattern, and forming an amorphous carbon pattern at sidewalls of the deposition pattern. The method further includes filling a spin-on-carbon layer over the deposition pattern and the amorphous carbon pattern, polishing the spin-on-carbon layer, the amorphous carbon pattern, and the photoresist pattern to expose the third mask pattern, and performing an etching process to expose the first mask film with the amorphous carbon pattern as an etching mask. The etching process removes the third mask pattern and the exposed second mask pattern.Type: GrantFiled: December 27, 2007Date of Patent: November 10, 2009Assignee: Hynix Semiconductor Inc.Inventors: Cheol Kyu Bok, Keun Do Ban -
Patent number: 7611925Abstract: An external terminal is formed on an interconnect pattern formed on a substrate by using a soldering material. Subsequently, a chip component having an electrode is mounted on the substrate. An interconnect for electrically connecting the electrode and the interconnect pattern is formed at a temperature lower than a melting point of the soldering material.Type: GrantFiled: November 30, 2007Date of Patent: November 3, 2009Assignee: Seiko Epson CorporationInventor: Nobuaki Hashimoto
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Publication number: 20090267100Abstract: A nitride-based semiconductor device includes a substrate, a first step portion formed on a main surface side of a first side end surface of the substrate, a second step portion formed on the main surface side of a second side end surface substantially parallel to the first side end surface on an opposite side of the first side end surface and a nitride-based semiconductor layer whose first side surface is a (000-1) plane starting from a first side wall of the first step portion and a second side surface starting from a second side wall of the second step portion on the main surface.Type: ApplicationFiled: April 24, 2009Publication date: October 29, 2009Applicant: Sanyo Electric Co., Ltd.Inventors: Yasuto Miyake, Ryoji Hiroyama, Masayuki Hata, Yasumitsu Kuno
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Publication number: 20090261456Abstract: A multiplicity of silicon wafers polished at least on their front sides are provided and successively coated individually in an epitaxy reactor by a procedure whereby one of the wafers is placed on a susceptor in the epitaxy reactor, is pretreated under a hydrogen atmosphere at a first hydrogen flow rate, and with addition of an etching medium to the hydrogen atmosphere at a reduced hydrogen flow rate in a second step, is subsequently coated epitaxially on its polished front side, and removed from the reactor. An etching treatment of the susceptor follows a specific number of epitaxial coatings. Silicon wafers produced thereby have a global flatness value GBIR of 0.07-0.3 ?m relative to an edge exclusion of 2 mm.Type: ApplicationFiled: June 29, 2009Publication date: October 22, 2009Applicant: SILTRONIC AGInventors: Reinhard Schauer, Norbert Werner
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Publication number: 20090256134Abstract: A process is provided for etching a silicon-containing substrate to form nanowire arrays. In this process, one deposits nanoparticles and a metal film onto the substrate in such a way that the metal is present and touches silicon where etching is desired and is blocked from touching silicon or not present elsewhere. One submerges the metallized substrate into an etchant aqueous solution comprising HF and an oxidizing agent. In this way arrays of nanowires with controlled diameter and length are produced.Type: ApplicationFiled: April 14, 2009Publication date: October 15, 2009Inventors: Brent A. Buchine, Faris Modawar, Marcie R. Black
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Publication number: 20090236697Abstract: A semiconductor device includes a super junction region that has a first-conductivity-type first semiconductor pillar region and a second-conductivity-type second semiconductor pillar region alternately provided on the semiconductor substrate. The first semiconductor pillar region and the second semiconductor pillar region in a termination region have a lamination form resulting from alternate lamination of the first semiconductor pillar region and the second semiconductor pillar region on the top surface of the semiconductor substrate. The first semiconductor pillar region and/or the second semiconductor pillar region at a corner part of the termination region exhibit an impurity concentration distribution such that a plurality of impurity concentration peaks appear periodically.Type: ApplicationFiled: March 13, 2009Publication date: September 24, 2009Applicant: Kabushiki Kaisha ToshibaInventors: Syotaro ONO, Wataru SAITO, Nana HATANO, Masaru IZUMISAWA, Yasuto SUMI, Hiroshi OHTA, Wataru SEKINE, Miho WATANABE
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Publication number: 20090236629Abstract: The present invention provides a substrate and a semiconductor light emitting device. Convexes having a curved surface are formed on the substrate. The semiconductor light emitting device comprises a substrate on which convexes having a curved surface are formed and a semiconductor layer on the substrate.Type: ApplicationFiled: July 5, 2006Publication date: September 24, 2009Applicant: SUMITOMO CHEMICAL COMPANY, LIMITEDInventors: Naohiro Nishikawa, Kazumasa Ueda, Kenji Kasahara, Yoshihiko Tsuchida
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Patent number: 7582950Abstract: In a semiconductor chip A wherein an element layer 2 having transistors and the like is formed on the front face, and the back face is joined to an underlying member, such as a package substrate, the thickness T is made 100 ?m or less, and thereafter, a gettering layer 3 is formed on the back face of the semiconductor chip A. The gettering layer 3 is formed, for example, by polishing the back face of said semiconductor chip A using a polishing machine. Thereby, the yield of devices can be improved in the step for assembling the package.Type: GrantFiled: July 27, 2005Date of Patent: September 1, 2009Assignee: Renesas Technology Corp.Inventors: Kazuhito Matsukawa, Tsuyoshi Koga, Akio Nishida, Yoshiko Higashide, Jun Shibata, Hiroshi Tobimatsu
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Publication number: 20090194839Abstract: A high-density memory array. A plurality of word lines and a plurality of bit lines are arranged to access a plurality of memory cells. Each memory cell includes a first conductive terminal and an article in physical and electrical contact with the first conductive terminal, the article comprising a plurality of nanoscopic particles. A second conductive terminal is in physical and electrical contact with the article. Select circuitry is arranged in electrical communication with a bit line of the plurality of bit lines and one of the first and second conductive terminals. The article has a physical dimension that defines a spacing between the first and second conductive terminals such that the nanotube article is interposed between the first and second conducive terminals. A logical state of each memory cell is selectable by activation only of the bit line and the word line connected to that memory cell.Type: ApplicationFiled: November 19, 2008Publication date: August 6, 2009Inventors: Claude L. Bertin, Eliodor G. Ghenciu, Thomas Rueckes, H. M. Manning
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Publication number: 20090184389Abstract: A non-volatile nanotube switch and memory arrays constructed from these switches are disclosed. A non-volatile nanotube switch includes a conductive terminal and a nanoscopic element stack having a plurality of nanoscopic elements arranged in direct electrical contact, a first comprising a nanotube fabric and a second comprising a carbon material, a portion of the nanoscopic element stack in electrical contact with the conductive terminal. Control circuitry is provided in electrical communication with and for applying electrical stimulus to the conductive terminal and to at least a portion of the nanoscopic element stack. At least one of the nanoscopic elements is capable of switching among a plurality of electronic states in response to a corresponding electrical stimuli applied by the control circuitry to the conductive terminal and the portion of the nanoscopic element stack. For each electronic state, the nanoscopic element stack provides an electrical pathway of corresponding resistance.Type: ApplicationFiled: January 20, 2009Publication date: July 23, 2009Inventors: Claude L. BERTIN, Eliodor G. GHENCIU, Thomas RUECKES, H. Montgomery MANNING
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Publication number: 20090160034Abstract: The invention provides a mesa semiconductor device and a method of manufacturing the same which minimize the manufacturing cost and prevents contamination and physical damage of the device. An N? type semiconductor layer is formed on a front surface of a semiconductor substrate, and a P type semiconductor layer is formed thereon. An anode electrode is further formed on the P type semiconductor layer so as to be connected to the P type semiconductor layer, and a mesa groove is formed from the front surface of the P type semiconductor layer deeper than the N? type semiconductor layer so as to surround the anode electrode. Then, a second insulation film is formed from inside the mesa groove onto the end portion of the anode electrode. The second insulation film is made of an organic insulator such as polyimide type resin or the like. The lamination body made of the semiconductor substrate and the layers laminated thereon is then diced along a scribe line.Type: ApplicationFiled: December 18, 2008Publication date: June 25, 2009Applicants: SANYO Electric Co., Ltd., SANYO Semiconductor Co., Ltd., SANYO Semiconductor Manufacturing Co., Ltd.Inventors: Akira Suzuki, Katsuyuki Seki, Keita Odajima
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Publication number: 20090152682Abstract: An element capable of manufacturing various devices of any shape having plasticity or flexibility without being limited by shape and a method for manufacturing thereof are provided. An element characterized by that a circuit element is formed continuously or intermittently in the longitudinal direction. An element characterized by that a cross section having a plurality of areas forming a circuit is formed continuously or intermittently in the longitudinal direction.Type: ApplicationFiled: January 5, 2009Publication date: June 18, 2009Applicant: IDEAL STAR INC.Inventors: Yasuhiko KASAMA, Satoshi Fujimoto, Kenji Omote
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Publication number: 20090127540Abstract: The present invention is directed to systems and methods for nanowire growth. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial vertically oriented nanowire growth including providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber, introducing an etchant gas into the reaction chamber at a first temperature which gas aids in cleaning the surface of the substrate material, contacting the nucleating particles with at least a first precursor gas to initiate nanowire growth, and heating the alloy droplet to a second temperature, whereby nanowires are grown at the site of the nucleating particles. The etchant gas may also be introduced into the reaction chamber during growth of the wires to provide nanowires with low taper.Type: ApplicationFiled: November 6, 2007Publication date: May 21, 2009Applicant: NANOSYS, INC.Inventor: David Taylor
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Patent number: 7521754Abstract: A semiconductor device 1 is a vertical MOSFET, and includes a plurality of unit cells 10 and a gate electrode 20. Each unit cell 10 includes a back-gate region 12 formed in the semiconductor substrate and a source region 14 formed in the semiconductor substrate so as to adjacently surround the back-gate region 12 in a plan-view. A portion of the back-gate region 12 is adjacent to the gate electrode 20. More specifically, the back-gate region 12 is in a rectangular plan-view shape, and adjacent to the gate electrode 20 at a pair of opposing sides out of the four sides thereof.Type: GrantFiled: March 10, 2006Date of Patent: April 21, 2009Assignee: NEC Electronics CorporationInventors: Kinya Ohtani, Kenya Kobayashi
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Publication number: 20090091002Abstract: This invention provides methods for fabricating substantially continuous layers of group III nitride semiconductor materials having low defect densities. The methods include epitaxial growth of nucleation layers on a base substrate, thermally treatment of said nucleation layer and epitaxial growth of a discontinuous masking layer. The methods outlined promote defect reduction through masking, annihilation and coalescence, therefore producing semiconductor structures with low defect densities. The invention can be applied to a wide range of semiconductor materials, both elemental semiconductors, e.g., combinations of Si (silicon) with strained Si (sSi) and/or Ge (germanium), and compound semiconductors, e.g., group II-VI and group III-V compound semiconductor materials.Type: ApplicationFiled: July 25, 2008Publication date: April 9, 2009Inventors: Chantal ARENA, Subhash Mahajan, Ranjan Datta
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Publication number: 20090085118Abstract: A semiconductor memory device includes a first active region formed having a first portion extending laterally and second portion extendedly vertically upward from a central portion of the first portion; a second active region formed spaced from the first active region, the second active region having a third portion extending laterally, fourth and fifth portions extending vertically downwardly at distal end portions of the third portion, and a sixth portion extending vertically downwardly at a central portion of the third portion; a first gate formed extending vertically and overlapping the first portion of the first active region and the third portion of the second active regions; a second gate formed extending vertically and overlapping the first portion of the first active region and the third portion of the second active regions; a third gate formed extending in a direction perpendicular to the first and second gates and overlapping of the fourth and fifth portions of the second active region; and a plurType: ApplicationFiled: September 22, 2008Publication date: April 2, 2009Inventor: Ji-Ho Hong
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Publication number: 20090065902Abstract: A method of forming a low profile semiconductor package, and a semiconductor package formed thereby, is disclosed. The semiconductor die is formed with one or more sloped edges on which electrically conductive traces may be deposited to allow the semiconductor die to be coupled to another die and/or a substrate on which the die is mounted. Depositing the electrical traces directly on the surface and sloped edge of the die allows the die to be electrically coupled without bond wires, thereby allowing a reduction in the overall thickness of the package.Type: ApplicationFiled: September 11, 2007Publication date: March 12, 2009Inventors: Cheemen Yu, Chih-Chin Liao, Hem Takiar
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Publication number: 20090020747Abstract: A nanometric device comprising a substrate; a plurality of conductive spacers of a conductive material, each conductive spacer being arranged on top of and transverse to the substrate, the conductive spacers including respective pairs of conductive spacers defining respective hosting seats each of less than 30 nm wide; and a plurality of nanometric elements respectively accommodated in the hosting seats.Type: ApplicationFiled: September 4, 2008Publication date: January 22, 2009Applicant: STMICROELECTRONICS S.R.L.Inventors: Danilo Mascolo, Gianfranco Cerofolini, Gianguido Rizzotto
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Publication number: 20080276979Abstract: The present invention provides nanowires and nanoribbons that are well suited for use in thermoelectric applications. The nanowires and nanoribbons are characterized by a periodic longitudinal modulation, which may be a compositional modulation or a strain-induced modulation. The nanowires are constructed using lithographic techniques from thin semiconductor membranes, or “nanomembranes.Type: ApplicationFiled: May 7, 2007Publication date: November 13, 2008Inventors: Max G. Lagally, Paul G. Evans, Clark S. Ritz