Of Electronic Circuit Chip Or Board Patents (Class 348/126)
  • Patent number: 7894658
    Abstract: An apparatus for processing a defect candidate image, including: an imager for taking an enlarged image of a specimen; an image processor for processing the image taken by the imager to detect defect candidates existing on the specimen and classify the detected defect candidates into one of plural defect classes; a memory for storing information of the defect candidates including the images of the defect candidates and the classified defect class data outputted from the image processor; and a display unit having a display screen for displaying information stored in the memory, wherein the display unit displays an image of the defect candidates together with the defect class data stored in the memory and the displayed defect class data is changeable on the display screen, and the memory changes the stored defect class data of the displayed defect candidate to the changed defect class data.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: February 22, 2011
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai, Asahiro Kuni, Yasuhiko Nara
  • Publication number: 20100328446
    Abstract: An apparatus for inspecting pattern defects, the apparatus including: an image acquisition unit which acquires an image of a specimen and stores the acquired image in an image memory; a defect candidate extraction unit which performs a defect candidate extraction process by using the acquired image, which is read from the image memory; and a defect detection unit which performs a defect detection process and a defect classification process based on a partial image containing a defect candidate that is extracted by the defect candidate extraction unit, wherein the processes performed by the defect detection unit is performed off-line asynchronously with an image acquisition process that is performed by the image acquisition unit.
    Type: Application
    Filed: September 7, 2010
    Publication date: December 30, 2010
    Inventors: Kaoru SAKAI, Shunji Maeda, Takafumi Okabe
  • Publication number: 20100321491
    Abstract: Systems and methods are provided for achieving convergent light rays emitted by a planar array of light sources. In one embodiment, an imaging device is provided for inspecting semiconductors or other objects. The imaging device includes one or more imaging lens for imaging light reflected from an object. The imaging device also includes a first light source attached to a planar circuit board and a second light source attached to the planar circuit board. The imaging device further includes a first Fresnel prism for directing light from the first light source toward the object from a first direction and a second Fresnel prism for directing light from the second light source toward the object from a second direction. In one embodiment, the imaging device also includes one or more optical elements for increasing or decreasing the divergence of the light.
    Type: Application
    Filed: August 26, 2010
    Publication date: December 23, 2010
    Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.
    Inventor: Leo Baldwin
  • Patent number: 7853068
    Abstract: The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.
    Type: Grant
    Filed: July 9, 2008
    Date of Patent: December 14, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Shigeru Matsui, Katsuya Suzuki
  • Patent number: 7847818
    Abstract: The present invention is directed to eliminate mistaken recognition of the presence of the disc even when displaying the presence of the disc with one light emitting element. In a television incorporating a slot-in type disc loader in which an LED emits light with a pulse signal output from an output terminal of the microcomputer when the power is turned OFF, which light of the LED is interrupted by the insertion of the disc thereby turning ON the power, the display control signal fixed to “L” is output from the output terminal when the pulse signal “L/H” is input to the input terminal of the microcomputer from the disc detecting section when the power is turned OFF and the disc is not inserted. The light emitting diode does not flash and is in a light out state by the display control signal, and thus the fact that the disc is not present in the slot is accurately notified.
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: December 7, 2010
    Assignee: Funai Electric Co., Ltd.
    Inventor: Kimiharu Asami
  • Publication number: 20100302360
    Abstract: Provided is a defect correcting device for an electronic circuit pattern, which is capable of making a defect seed obvious, and normalizing a pixel or forming a pixel into a semi-black spot. A defect correcting device for an electronic circuit pattern includes: an imaging unit for irradiating a defective portion of the electronic circuit pattern with irradiation light having a wavelength of a visible light region and a wavelength of an infrared light region, and receiving reflected light having the wavelength of the visible light region and the wavelength of the infrared light region from the electronic circuit pattern; a signal processing unit for extracting the defective portion from a picked-up image, and determining a correcting method; a laser irradiating unit for irradiating the defective portion with laser light; and a correction determining unit for determining success or failure of defect correction before and after laser irradiation.
    Type: Application
    Filed: May 21, 2010
    Publication date: December 2, 2010
    Inventors: Takeshi Arai, Nobuaki Nakasu
  • Publication number: 20100295938
    Abstract: An apparatus (1) for the optical inspection of wafers is disclosed, which comprises an assembly unit (10) which carries optical elements (30, 31, 32, 33) of at least one illumination path (3) for a bright field illumination and optical elements (50, 51, 52, 60, 61, 62, 70, 71, 72, 80, 81, 82) of at least one illumination path (5, 6, 7, 8) for a dark field illumination. The assembly unit (10) furthermore carries plural optical elements (91, 92, 93, 94, 95, 96, 97, 98, 99, 100) of at least one detection path (91, 92). An imaging optical element (32) of the at least one illumination path (3) for the bright field illumination (30), imaging optical elements (51, 61, 71, 81) of the at least one illumination path for the dark field illumination, and imaging optical elements (91, 95, 96) of the at least one detection path (9) are designed in such a way that all illumination paths (3, 5, 6, 7, 8) and all detection paths (91, 92) are telecentric.
    Type: Application
    Filed: March 3, 2010
    Publication date: November 25, 2010
    Applicant: KLA-TENCOR MIE GMBH
    Inventors: Kurt Hahn, Roland Hedrich, Gerhard Hoppen, Lambert Danner, Albert Kreh, Wolfgang Vollrath, Alexander Büttner, Christof Krampe-Zadler, Henning Backhauss, Hermann Bittner
  • Publication number: 20100289891
    Abstract: In a board inspection system, a line sensor of a first scanning unit scans, via a telecentric lens, the image of the surface to be inspected on a board, viewed in a perpendicular direction. A line sensor of a second scanning unit scans the image of the surface to be inspected on the board, viewed at an angle, which is tilted toward a first direction by a first angle ? from the direction perpendicular to the surface to be inspected. A line sensor of a third scanning unit scans the image of the surface to be inspected on the board, viewed at an angle, which is tilted toward a second direction by a second angle ? from the direction perpendicular to the surface to be inspected. A determination unit computes the height of the surface to be inspected on the board with use of image data acquired by a first scanning unit, a second scanning unit, and a third scanning unit.
    Type: Application
    Filed: January 14, 2009
    Publication date: November 18, 2010
    Inventor: Yoshihiro Akiyama
  • Patent number: 7835564
    Abstract: Non-destructive, below-surface defect rendering of an IC chip using image intensity analysis is disclosed. One method includes providing an IC chip delayered to a selected layer; determining a defect location below a surface of the selected layer using a first image of the IC chip obtained using an CPIT in a first mode; generating a second image of the IC chip with the CPIT in a second mode, the second image representing charged particle signal from the defect below the surface of the selected layer; and rendering the defect by comparing an image intensity of a reference portion of the second image not including the defect with the image intensity of a defective portion of the second image including the defect, wherein the reference portion and the defective portion are of structures expected to be substantially identical.
    Type: Grant
    Filed: April 30, 2007
    Date of Patent: November 16, 2010
    Assignee: International Business Machines Corporation
    Inventors: Delia R. Bearup, Andrew S. Dalton, James J. Demarest, Loren L. Hahn, Bruce J. Redder, Francis R. Wallingford
  • Patent number: 7813638
    Abstract: A system for generating a camera trigger that causes a camera to capture image data includes a memory for storing a plurality of trigger values. Each trigger value corresponds to a position of a moving stage. The system includes a controller for receiving position information indicative of a current position of the moving stage, generating a current position value based on the position information, comparing the current position value to at least one of the trigger values, and generating a camera trigger if the current position value matches one of the trigger values.
    Type: Grant
    Filed: June 6, 2005
    Date of Patent: October 12, 2010
    Assignee: Rudolph Technologies, Inc.
    Inventors: Cory Watkins, David Bocek
  • Patent number: 7792352
    Abstract: An apparatus for inspecting pattern defects, the apparatus including: a defect candidate extraction unit configured to perform a defect candidate extraction process by comparing a detected image signal with a reference image signal; and a defect detection unit configured to perform a defect detection process and a defect classification process based on a partial image containing a defect candidate that is extracted by the defect candidate extraction unit, wherein the processes performed by the defect candidate extraction unit and/or the defect detection unit are performed asynchronously with an image acquisition process.
    Type: Grant
    Filed: May 19, 2008
    Date of Patent: September 7, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kaoru Sakai, Shunji Maeda, Takafumi Okabe
  • Publication number: 20100220186
    Abstract: An inspection method comprises receiving light emanating from a first surface of a wafer substantially along a first axis for obtaining a first image of the first surface therefrom, the wafer having a crack formed therein and the first image containing at least one portion of the crack. The inspection method also comprises receiving light emanating from the first surface of the wafer substantially along a second axis for obtaining a second image of the first surface therefrom, the second image containing at least one second portion of the crack, the first surface extending substantially parallel a plane, and the orthographic projection of the first axis on the plane being substantially perpendicular the orthographic projection of the second axis on the plane. The inspection method further comprises constructing a third image from the at least one first portion of the crack and the least one second portion of the crack of the first and second images respectively.
    Type: Application
    Filed: May 14, 2009
    Publication date: September 2, 2010
    Applicant: BLUPLANET PTE LTD
    Inventor: Sok Leng Chan
  • Patent number: 7769226
    Abstract: A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.
    Type: Grant
    Filed: January 19, 2006
    Date of Patent: August 3, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Teppei Oguni, Tatsuji Nishijima, Akiharu Miyanaga
  • Publication number: 20100182421
    Abstract: Methods and apparatus for integrated, in-line metrology of solar cells involve three distinct inspection and testing operations, prior to string and module assembly. Two of the inspections are performed by image analysis using bright field illumination. The third inspection involves electroluminescence imaging, where luminescence in the solar cell is achieved by inducing a forward bias in the solar cell, and analyzing a resulting grayscale image for defects.
    Type: Application
    Filed: January 20, 2010
    Publication date: July 22, 2010
    Inventors: Mahendran T. Chidambaram, S. Daniel Miller, Gerald Schock
  • Patent number: 7760930
    Abstract: The present disclosure provides a system and method for recognizing a defect image associated with a semiconductor substrate. In one example, the method includes collecting defect data of the defect image by testing and measuring the semiconductor substrate, extracting a pattern from the defect data, normalizing a location, orientation, and size of the pattern, and identifying the pattern after the pattern is normalized.
    Type: Grant
    Filed: February 21, 2006
    Date of Patent: July 20, 2010
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Ting Lin, Chih-Cheng Chou, Chih-Hung Wu, Chia-Hua Chang
  • Publication number: 20100157046
    Abstract: The invention relates to a method for analyzing a group of at least two masks for photolithography, wherein each of the masks comprises a substructure of a total structure, which is to be introduced in a layer of the wafer in the lithographic process, and the total structure is introduced in the layer of the wafer by introducing the substructures in sequence. In this method, a first aerial image of a first one of the at least two masks is recorded, digitized and stored in a data structure. Then, a second aerial image of a second one of the at least two masks is recorded, digitized and stored in a data structure. A combination image is generated from the data of the first and second aerial images, which combination image is represented and/or evaluated.
    Type: Application
    Filed: July 11, 2008
    Publication date: June 24, 2010
    Inventors: Oliver Kienzle, Rigo Richter, Norbert Rosenkranz, Yuji Kobiyama, Thomas Scheruebl
  • Patent number: 7738693
    Abstract: A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.
    Type: Grant
    Filed: May 30, 2003
    Date of Patent: June 15, 2010
    Assignee: Lam Research Corporation
    Inventor: Jorge Luque
  • Patent number: 7734082
    Abstract: The present invention relates to a defect detection or observation method that detects fine defects in the course of defect inspection and observation, does not detect locations not constituting defects, or classifies a defect candidate as a grain phenomenon or other phenomenon that does not affect a product.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: June 8, 2010
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Toshifumi Honda, Hirohito Okuda
  • Publication number: 20100128119
    Abstract: A defect review apparatus includes a storage device which stores data about a defect of an inspection target object; a first imaging device which captures an image located in a position on a surface of the inspection target object, the position being specified by information regarding the position of the inspection target object which has been input; and a control device which controls the first imaging device. The storage device stores: first defect detection data including a defect number as which the defect of the inspection target object detected by a first defect detection process is labeled, and information regarding the position of the defect; and second defect data including a defect number as which the defect of the inspection target object detected by a second defect detection process is labeled, and information regarding its position.
    Type: Application
    Filed: November 9, 2009
    Publication date: May 27, 2010
    Applicant: FUJITSU MICROELECTRONICS LIMITED
    Inventor: Naohiro Takahashi
  • Patent number: 7692144
    Abstract: A method and apparatus for assessing a height of a specimen includes an electron beam unit having an electron beam source, lenses, a table for setting a specimen and controllable in a height direction, and a detector, and a height detection system for detecting height of the specimen set on the table while the specimen is irradiated by an electron beam. The height detection system further includes an illumination system, a collection system, first and second detectors, a device configured to receive output signals from the first and second detectors while the specimen is irradiated by the electron beam and to generate a comparison signal from the output signals, wherein the comparison signal is responsive to the height of the specimen.
    Type: Grant
    Filed: October 26, 2007
    Date of Patent: April 6, 2010
    Assignee: Hitachi, Ltd.
    Inventors: Masahiro Watanabe, Takashi Hiroi, Maki Tanaka, Hiroyuki Shinada, Yasutsugu Usami
  • Patent number: 7664306
    Abstract: In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, by using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a circumscribing rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at a high accuracy irrespectively of a low cost.
    Type: Grant
    Filed: April 15, 2009
    Date of Patent: February 16, 2010
    Assignee: NEC Electronics Corporation
    Inventors: Yoshihiro Sasaki, Masahiko Nagao
  • Patent number: 7653236
    Abstract: Disclosed is a surface inspection device that performs a defect inspection throughout a surface of a wafer. In the defect detection using a defect review SEM, an X-Y coordinate system is set throughout a surface (excluding a round end face) of a product wafer to allow the inspection throughout the surface of the product wafer. Therefore, the defect detection can be performed also in an area other than an effective chip area. Further, the inspection results of the area are stored in relation to the coordinates in a position where the inspection results are acquired. Therefore, the inspection results can be effectively used for an analysis and a defect cause can be investigated with a higher degree of accuracy. As a result, the quality and yield of chips can be improved.
    Type: Grant
    Filed: February 16, 2005
    Date of Patent: January 26, 2010
    Assignee: Fujitsu Microelectronics Limited
    Inventor: Naohiro Takahashi
  • Publication number: 20090315988
    Abstract: An inspection device is configured having: an illumination unit that illuminates a wafer with illumination light having a plurality of kinds of wavelengths; a photographing unit that photographs the image of the wafer illuminated with the illumination light; and an image processing unit that generates an inspection image of the wafer photographed by the photographing unit, by performing a predetermined weighting for each of the plurality of kinds of wavelengths, and judges whether any defect is present in the wafer based on the generated inspection image.
    Type: Application
    Filed: August 27, 2009
    Publication date: December 24, 2009
    Inventor: Kazuhiko FUKAZAWA
  • Patent number: 7629993
    Abstract: A defect inspection system for the semiconductor and microelectronics industry. More particularly, the present invention relates to an automated defect inspection system for wafers or other semiconductor or electronic substrates of any kind or type that are transparent, translucent, opaque or otherwise capable of allowing at least some light to pass through.
    Type: Grant
    Filed: September 30, 2002
    Date of Patent: December 8, 2009
    Assignee: Rudolph Technologies, Inc.
    Inventors: Mark Harless, Jeremy Jenum, Willard Charles Raymond
  • Patent number: 7627241
    Abstract: An objective lens system opposing an imaged surface of semiconductor device, and imaging lens system arranged between this objective lens system and image sensor is used to inspect a lower component of the semiconductor device without being influence by an upper component. The F value of objective lens system is made into 1.5 or less, and an imaged surface is photographed and inspected. The imaging lens system also has several lenses with different focal distances. According to the desired magnification, a predetermined lens among the plurality of lenses is arranged in the predetermined location of an optical axis, and the other lenses are evacuated from an optical axis.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: December 1, 2009
    Assignee: Renesas Technology Corp.
    Inventors: Takanori Okita, Kouichi Suzuki
  • Patent number: 7576348
    Abstract: A method for imaging a surface includes generating a traveling lens in an acousto-optic material and incorporating a traveling mask into a portion of the traveling lens so as to produce a composite traveling lens. The method further includes irradiating the composite traveling lens so as to produce a composite focused beam having a spatial variation across the composite focused beam. The composite focused beam is directed onto a region of the surface so as to generate radiation characteristic of the region from the region. The radiation is imaged onto a detector so as to generate a signal characteristic of the region, responsively to the spatial variation.
    Type: Grant
    Filed: September 11, 2007
    Date of Patent: August 18, 2009
    Assignee: Applied Materials, Israel, Ltd.
    Inventors: Haim Feldman, Doron Meshulach, Eyal Angel
  • Patent number: 7570798
    Abstract: An apparatus for three dimensional inspection of an electronic part which has a camera and illuminator for imaging a first view of the electronic part. An optical element is positioned to reflect a different view of the electronic part into the camera, and the camera thus provides an image of the electronic part having differing views of the electronic part. An image processor applies calculations on the differing views to calculate a three dimensional position of at least one portion of the electronic part.
    Type: Grant
    Filed: April 16, 2007
    Date of Patent: August 4, 2009
    Inventors: Elwin M. Beaty, David P. Mork
  • Publication number: 20090161094
    Abstract: An imaging sensor for capturing images of the beveled surface of a wafer edge is herein disclosed. The imaging sensor is aligned with the edge of a wafer to maximize the area of the bevel that is encompassed by the depth of view of the imaging sensor. One or more sensors may be used to capture images of the wafer edge.
    Type: Application
    Filed: April 3, 2007
    Publication date: June 25, 2009
    Inventor: Cory M. Watkins
  • Patent number: 7551769
    Abstract: Described are methods and systems for providing improved defect detection and analysis using infrared thermography. Test vectors heat features of a device under test to produce thermal characteristics useful in identifying defects. The test vectors are timed to enhance the thermal contrast between defects and the surrounding features, enabling IR imaging equipment to acquire improved thermographic images. In some embodiments, a combination of AC and DC test vectors maximize power transfer to expedite heating, and therefore testing. Mathematical transformations applied to the improved images further enhance defect detection and analysis. Some defects produce image artifacts, or “defect artifacts,” that obscure the defects, rendering difficult the task of defect location. Some embodiments employ defect-location algorithms that analyze defect artifacts to precisely locate corresponding defects.
    Type: Grant
    Filed: September 21, 2006
    Date of Patent: June 23, 2009
    Assignee: Marena Systems Corporation
    Inventors: Marian Enachescu, Sergey Belikov
  • Publication number: 20090153657
    Abstract: A method for processing the image data of the surface of a wafer (2) recorded by at least one camera (5) is disclosed, wherein an image field (15) is defined for each camera (5) in such a way that the recorded image content is repeated after N recorded images. In an evaluation electronics (18) M utility programs (19) are determined, wherein M is equal to the number of recorded images after which the image content is repeated. The number M of utility programs (19) is adapted to the number N of images. Each of the M utility programs (19) of the plurality of recorded images is only fed with images having the same image contents in order to detect defects on the basis of the image contents of the images of the surface of the wafer. The results of the M utility programs (19) are respectively forwarded to a central program (20) in a sequential manner, which compiles a distribution of the defects present on the surface of the wafer (2) from the individual results of the M utility programs (19).
    Type: Application
    Filed: December 4, 2008
    Publication date: June 18, 2009
    Applicant: VISTEC Semiconductor Systems GmbH
    Inventor: Detlef Michelsson
  • Patent number: 7545970
    Abstract: In a visual inspection method and apparatus, a picture processing unit converts an original picture, obtained by taking a photograph of a BGA illuminated by a ring illuminator from above, using a camera, and labels a binary picture obtained by this binary conversion. Then, it forms a rectangle circumscribing an outer circumference of a labeling picture obtained by the labeling, and inverts a labeling picture within the formed circumscribing rectangle, and removes a portion of a region formed by the outer circumference and the circumscribing rectangle in a picture obtained by the inversion, and then generates an inspection picture by adding a picture obtained by the removal to the labeling picture, and accordingly judges a pass or rejection of the inspection target sample based on the generated inspection picture. Thus, the inspection can be carried out at high accuracy irrespectively of a low cost.
    Type: Grant
    Filed: August 18, 2005
    Date of Patent: June 9, 2009
    Assignee: NEC Electronics Corporation
    Inventors: Yoshihiro Sasaki, Masahiko Nagao
  • Patent number: 7522664
    Abstract: A system for inspecting a substrate. An inspector includes a sensor that inspects the substrate and produces a video stream. A control interface sends and receives a control stream, and a network receives and transports the video stream and the control stream as two separate data streams. A desktop receives the video stream and the control stream as two separate data streams. The desktop has a display that presents the video stream, and a user interface controls that control the operation of the inspector, using the control stream across the network.
    Type: Grant
    Filed: September 10, 2003
    Date of Patent: April 21, 2009
    Inventors: Krishnamurthy Bhaskar, Mark J. Roulo, Michael Van Riet, Stewart K. Hill
  • Patent number: 7519216
    Abstract: Disclosed is a method of operating a manufacturing facility. A processor detects whether abnormal first image data exists at a first common location for each of the last N wafers of the first set of wafers to be placed on a platform, excluding any abnormal image data at a location for wafers that previously had abnormal image data at the location; and detects whether abnormal second image data exists at as second common location for each of the last N wafers of the second set to be placed on the platform, excluding any abnormal image data at a location for wafers that previously had abnormal image data at the location. A decision is made whether to clean the platform depending on results from the processor.
    Type: Grant
    Filed: April 30, 2008
    Date of Patent: April 14, 2009
    Assignee: International Business Machines Corporation
    Inventors: Marc J. Postiglione, James V. Iannucci
  • Patent number: 7505619
    Abstract: A dark field surface inspection tool and system are disclosed herein. The tool includes an illumination source capable of scanning a light beam onto an inspection surface. Light scattered by each inspection point is captured as image data by a photo detector array arranged at a fourier plane. The images captured are adaptively filtered to remove a portion of the bright pixels from the images to generate filtered images. The filtered images are then analyzed to detect defects in the inspection surface. Methods of the invention include using die-to-die comparison to identify bright portions of scattering patterns and generate unique image filters associated with those patterns. The associated images are then filtered to generate filtered images which are then used to detect defects. Also, data models of light scattering behavior can be used to generate filters.
    Type: Grant
    Filed: December 20, 2005
    Date of Patent: March 17, 2009
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Evan R. Mapoles, Grace H. Chen, Christopher F. Bevis, David W. Shortt
  • Patent number: 7466854
    Abstract: A pair of edges that are located at ends as viewed in the widthwise direction of a design pattern are recognized. On the basis of the edge direction in which the paired edges are recognized, edge points on the design pattern are detected as sub-pixels. The widthwise dimension of the design pattern is calculated on the basis of the edge points. In addition, the widthwise dimension of a circuit pattern is calculated at the same position as the widthwise dimension of the design pattern. On the basis of the calculated widthwise dimensions, the semiconductor wafer circuit pattern is checked.
    Type: Grant
    Filed: August 5, 2005
    Date of Patent: December 16, 2008
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Eiji Sawa, Hiromu Inoue
  • Patent number: 7457455
    Abstract: The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.
    Type: Grant
    Filed: November 24, 2004
    Date of Patent: November 25, 2008
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Shigeru Matsui, Katsuya Suzuki
  • Patent number: 7457453
    Abstract: A pattern inspection apparatus including: an image detecting part for detecting a digital image of an object substrate; a display having a screen on which the digital image of the object substrate and/or a distribution of defect candidates in a map form are displayable; an input device for inputting information of a non-inspection region to be masked on the object substrate by defining a region on the screen on which said distribution of defect candidates is displayed in a map form; a memory part for storing coordinate data, pattern data or feature quantity data of the non-inspection region to be masked on the object substrate inputted on the screen by the input device; and a defect judging part in which the digital image detected by the image detecting part is examined in a state that a region matching with a condition stored in the memory part is masked and a defect is detected in a region other than said masked region.
    Type: Grant
    Filed: July 24, 2007
    Date of Patent: November 25, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai, Asahiro Kuni, Yasuhiko Nara
  • Patent number: 7412090
    Abstract: A method of managing wafer defects includes inspecting each chip in a wafer to generate a unit of wafer defect raw data, using a server to integrate the unit of wafer defect raw data to generate a unit of wafer defect distribution data for recording positions, types, and sizes of defects, using the server to generate a corresponding drawing file according to the unit wafer defect distribution data to show all kinds of defect distributions, and transmitting the drawing file to a terminal such that terminal users can view the defect distributions without receiving the unit of wafer defect raw data.
    Type: Grant
    Filed: September 9, 2004
    Date of Patent: August 12, 2008
    Assignee: Powerchip Semiconductor Corp.
    Inventors: Hung-En Tai, Chia-Yun Chen, Sheng-Jen Wang
  • Patent number: 7388979
    Abstract: The present invention relates to a pattern defect inspection method and apparatus that reveal ultramicroscopic defects on an inspection target in which ultramicroscopic circuit patterns are formed, and inspect the defects with high sensitivity and at a high speed. The present invention provides a pattern inspection apparatus for comparing the images of corresponding areas of two formed patterns that should be identical with each other, and judging any mismatched image area as a defect. The pattern inspection apparatus includes means for performing an image comparison process on a plurality of areas in a parallel manner. Further, the pattern inspection apparatus also includes means for converting the gradation of the image signals of compared images in each of a plurality of different processes. Therefore, the present invention can properly detect defects even if the same patterns of compared images differ in brightness.
    Type: Grant
    Filed: November 22, 2004
    Date of Patent: June 17, 2008
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kaoru Sakai, Shunji Maeda, Takafumi Okabe
  • Patent number: 7385687
    Abstract: A device for inspecting a substrate having at least one printed-on layer, including a guide carrier on which the substrate is supported. An inspection head is movable in at least two directions relative to the guide carrier and is provided with an illumination mechanism and an detection device for detecting electromagnetic radiation reflected from the substrate and conveying it to an evaluation device for detecting substrate errors. The detection device has a digital camera with optics for detecting a definition of less than 200 microns. A movement mechanism controls the relative movement between guide carrier and inspection head during an image-taking cycle during which sequential or overlapping individual images can be joined together to form an overall image of the substrate.
    Type: Grant
    Filed: January 24, 2005
    Date of Patent: June 10, 2008
    Assignee: Stratus Vision GmbH
    Inventor: Heinrich Stenger
  • Patent number: 7372632
    Abstract: An imaging method and imaging system for inspecting features located at a known inter-feature pitch on portions of a target surface. The system includes a lens array having a plurality of lenses wherein the lenses of the lens array have an inter-lens pitch and an inter-field of view pitch corresponding to the inter-feature pitch, and an array of imaging elements having an inter-element pitch corresponding to the inter-feature pitch, whereby the imaging system images only field of view areas of the target surface containing features.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: May 13, 2008
    Assignee: Hitachi Via Mechanics, Ltd.
    Inventor: Todd E. Lizotte
  • Publication number: 20080094469
    Abstract: A circuitry testing method, comprising: providing a circuit board needing testing; applying a potential(160) to the circuit board needing testing so that the circuit board works and operating elements of the circuit board needing testing emit infrared rays; testing an intensity of radiation of the infrared rays using an infrared sensor(110); converting the radiation intensity to RGB(red, green, blue) data signals in order to form a diagnostic infrared image, using a processor(130); providing a standard infrared image; comparing the diagnostic infrared image with the standard infrared image; and determining whether the circuit board is defective according to the comparison.
    Type: Application
    Filed: June 25, 2007
    Publication date: April 24, 2008
    Inventor: Shuo-Ting Yan
  • Patent number: 7316938
    Abstract: A film frame aligner for automatically aligning a film frame includes a film frame support, a film frame pusher for pushing the film frame, and a film frame location mechanism for locating at least one notch in the film frame.
    Type: Grant
    Filed: July 14, 2004
    Date of Patent: January 8, 2008
    Assignee: Rudolph Technologies, Inc.
    Inventors: Steve Herrmann, Willard Charles Raymond, Matthew LaBerge
  • Patent number: 7314403
    Abstract: An apparatus and method for fabricating a liquid crystal display panel are disclosed. In case of the single mode that liquid crystal display panels are fabricated with the same size on a large glass substrate, unit liquid crystal display panels are kept and discarded not to proceed with a follow-up process. Thus, a material waste is restrained and a yield can be improved. Meanwhile, in case of the multi-mode that liquid crystal display panels are fabricated with difference sizes on a large glass substrate, sub-models are kept, and then after completing the process for the main models, a follow-up process if performed on the sub-models. Thus, use efficiency of the glass substrate can be maximized to improve a productivity and a unit cost of the product can be reduced.
    Type: Grant
    Filed: December 18, 2006
    Date of Patent: January 1, 2008
    Assignee: LG.Philips LCD Co., Ltd.
    Inventors: Ji-Heum Uh, Sang-Sun Shin
  • Patent number: 7283660
    Abstract: A method for aligning an image to be recorded by a direct image scanner on an upper layer of a printed circuit board with an image recorded on a lower layer thereof, the method comprising: visually imaging a portion of the image on the lower layer; and recording a pattern on the upper layer, referenced to coordinates of the visual image of the portion.
    Type: Grant
    Filed: November 7, 2001
    Date of Patent: October 16, 2007
    Assignee: Orbotech, Ltd.
    Inventors: Amnon Ganot, Hanan Gino, Golan Hanina, Zeev Kantor, Boris Kling, Shabtay Spinzi, Barry Ben-Ezra
  • Patent number: 7266235
    Abstract: A pattern inspection method in which an image can be detected without an image detection error caused by an adverse effect to be given by such factors as ions implanted in a wafer, pattern connection/non-connection, and pattern edge formation. A digital image of an object substrate is attained through microscopic observation thereof, the attained digital image is examined to detect defects, while masking a region pre-registered in terms of coordinates, or while masking a pattern meeting a pre-registered pattern, and an image of each of the defects thus detected is displayed. Further, each of the defects detected using the digital image attained through microscopic observation is checked to determine whether its feature meets a pre-registered feature or not. Defects having a feature that meets the pre-registered feature are so displayed that they can be turned on/off, or they are so displayed as to be distinguishable from the other defects.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: September 4, 2007
    Assignee: Hitachi, Ltd.
    Inventors: Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka, Hiroshi Miyai, Asahiro Kuni, Yasuhiko Nara
  • Patent number: 7254263
    Abstract: A reference mask generating part, inspecting mask generating part, defect detecting part are disposed in a control part of a defect detection apparatus. Based on a captured image of an inspection object substrate (an inspecting image data), the inspecting mask generating part performs a contour smoothing processing of a pad pattern to be inspected, and generates an inspecting mask data by carrying out the logical OR with a reference mask data generated by the reference mask generating part. Based on the inspecting mask data so generated, the inspecting image data is inspected. Further, the defect detecting part performs region join processing of a certain defect previously detected. In the case that micro defects are gathered so as to form a defect, the defect detecting part detects them as a defect, and then generates a defect data. Therefore, a miss of defect on the substrate is suppressed, while the image processing is performed at a high speed.
    Type: Grant
    Filed: June 2, 2003
    Date of Patent: August 7, 2007
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventor: Eiichi Ine
  • Patent number: 7236625
    Abstract: Systems and methods for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure. The system includes at least one light source positioned to emit light that illuminates a portion of the composite structure with bright field illumination and that also illuminates another portion of the composite structure with dark field illumination. The bright field illumination is reflected differently by defects in the composite structure than from portions of the composite structure that are defect free. The dark field illumination is reflected differently by FOD on the composition structure than from surfaces of the composite structure that are FOD free. The system also includes at least one camera for receiving images of the illuminated portions of the composite structure. The images received by the camera may be processed by a processor which then outputs a response identifying defects and foreign objects and debris based on the images.
    Type: Grant
    Filed: May 14, 2004
    Date of Patent: June 26, 2007
    Assignee: The Boeing Company
    Inventors: Roger W Engelbart, Reed Hannebaum, Steve Schrader, Scott T Holmes, Craig Walters
  • Patent number: 7199816
    Abstract: An image pickup camera is arranged, so that a plurality of components are adapted to be sequentially imaged by corresponding image pickup device with a timing whereby light for imaging is prevented from affecting the other image pickup operation while the components are let to pass above the image pickup camera. The hold posture of each of the plurality of components can be imaged separately without decreasing the cycle time.
    Type: Grant
    Filed: November 25, 2003
    Date of Patent: April 3, 2007
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Kazuhiro Ikurumi, Yutaka Mitsumoto, Eiichi Hachiya, Hideshi Ueda
  • Patent number: 7190822
    Abstract: A customizing method includes steps which consist in: a) determining on the basis of a circuit model, a set of vectors each corresponding to a theoretical operating time of the circuit when a predetermined sequence of tests is applied, the coefficients of each vector representing the state of a common set of elements of the circuit among which the element to be customized (12); b) defining on the basis of a comparison of vectors, a composite of logic operators applied on the vectors and enabling to extract the coefficient corresponding to the element to be customized (30); c) producing images of the operating circuit at times corresponding to the vectors whereon is applied the composite of logic operators (32); and d) graphically combining the images produced in accordance with a composite of graphic operators corresponding to the composite of logic operators (36).
    Type: Grant
    Filed: June 26, 2001
    Date of Patent: March 13, 2007
    Assignee: Centre National d'Etudes Spatiales
    Inventors: Romain Desplats, Philippe Perdu