Abstract: In one aspect the system serves as a transmitter and comprises an optics system; a plurality of source elements positioned on the focal plane; and, a small angle beam steerer. The plurality of source elements are each capable of providing a point source of radiation to the optics system. The optics system provides a collimated output. The small angle beam steerer receives the collimated output and redirects the collimated output through a small angular deviation. The redirected output is thus transmitted in a desired direction without a need for mechanical gimbals and is capable of covering a large angular range with respect to the optical axis of the optics system. The system can also be implemented as a receiver.

Abstract: Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.

Abstract: An optical lithography system comprises a light source, a spatial light modulator, imaging optics and means for continuously moving a photosensitive substrate relative to the spatial light modulator. The spatial light modulator comprises at least one array of individually switchable elements. The spatial light modulator is continuously illuminated and an image of the spatial light modulator is continuously projected on the substrate; consequently, the image is constantly moving across the surface of the substrate. While the image is moving across the surface, elements of the spatial light modulator are switched such that a pixel on the surface of the substrate receives, in serial, doses of energy from multiple elements of the spatial light modulator, thus forming a latent image on the substrate surface. The imaging optics is configured to project a blurred image of the spatial light modulator on the substrate, enabling sub-pixel resolution feature edge placement.

Abstract: An optical switch, wherein the first and second output ports (optical fibers) are disposed on the opposite sides of the input port (optical fiber) so as to form acute angles with respect to the input port, the input port and the first output port are optically coupled to each other through a first mirror surface, and the input port and the second output port are optically coupled to each other through a second mirror surface. The incident angles of an incident light beam with respect to the mirror surfaces are equalized, and optical path lengths between the input port and the first and second output ports are equalized. The actuator inserts and withdraws the second mirror surface on a position at the front of the first mirror surface.

Abstract: An optical add and drop multiplexer system comprising a first module for providing a first signal; a second module for providing a second signal; and a modulator for receiving a channel of the first signal at a first location, the first location configured to actuate between a first configuration and a second configuration, wherein the modulator directs the channel of the first signal as an output signal when the first location is in the first configuration. The modulator may direct the channel of the first signal as a dropped signal when the first location is in the second configuration. The modulator may also receive a channel of the second signal from the second module at a second location configured to independently actuate between the first configuration and the second configuration.

Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

Abstract: The use of spatial light modulators to steer light beams and/or vary a field of view is disclosed. A dual frequency liquid crystal spatial light modulator can be controlled so as to form a blazed phase grating thereon that effects desire deflection of incident light. A dual frequency liquid crystal spatial light modulator can also be controlled so as to communicate light from a desired field of view to an imaging device or the like.

Abstract: Bearing portions having an approximately arc shape are provided on a lower surface of a plate-shaped member. In the bearing portions, stoppers of a regulating member are embedded. With the engagement of the lower surface of the plate-shaped member and the apex of a pivot member and the engagement of an inner surface of the bearing portions and a lower surface of the stoppers, the plate-shaped member is rotatably supported with the apex of the pivot member as a center. With a side surface of the regulating member 109 facing a side surface of the bearing portions, the position of the plate-shaped member in a rotation axis direction is regulated.

Abstract: There is provided a micromirror, which is provided with a reflection mirror, a first pair of torsion bars formed to protrude from the reflection mirror, a first supporting frame that supports the reflection mirror such that the reflection mirror is torsionally rotatable about a first rotation axis via the first pair of torsion bars, a second pair of torsion bars formed to protrude from the first supporting frame in a direction substantially perpendicular to a direction in which the first pair of torsion bars are extended, and a second supporting frame that supports the first supporting frame such that the first supporting frame is torsionally rotatable about a second rotation axis substantially perpendicular to the first rotation axis via the second pair of torsion bars. In this configuration, each of the second pair of torsion bars includes two separate conductive members.

Abstract: Modulation device for laser radiation, having at least one modulation means which can change at least in part the laser radiation which passes through the modulation device, the modulation device having splitter means which can split the laser radiation into at least two component beams of radiation, the device furthermore in the direction of beam propagation downstream of the beam splitter means having beam combining means which can recombine at least two of the component beams of radiation, and at least one modulation means being located between the beam splitter means and beam combining means such that at least one of the component beams can be changed by at least one modulation means such that the laser radiation which has been combined by the beam combining means or in the area of the beam combining means at least in a given area of space has the desired modulation as a result of the interference of at least two component beams.

Abstract: A method and apparatus for the multi-dimensional control of a light source's brightest point over a targeted area is disclosed. Control and drive electronics are presented to the beam-steering device causing the beam-steering component to steer the spot of light toward a targeted area in at least a two-dimensional scanning pattern about a vertical and horizontal axis. The result is an illuminated pattern displayed on a targeted area that appears to be a solid, uniformly illuminated light pattern, having the intensity of a spot beam and the area of a broad beam.

Abstract: The present invention provides a fast optical shutter function by use of the fast movement of the micromirrors. In a micromirror array lens (MMAL), all the micromirrors reflect the incident light to form an image on the image plane. If the micromirrors reflect the incident light out of the optical sensor area, then the optical sensor can not have any optical signal just like the incident light blocked. By just changing the beam path by MMAL motion, the micromirror array lens has a function for optical shutter.

Abstract: A photopolymerisable system is disclosed which can be polymerised by exposure to UV light, for example, to form a solid, light-transmitting sheet material having volume refractive index variations defining an optical diffuser or a hologram, for example. The system includes a silicone monomer, prepolymer, macromonomer or co-monomer capable of undergoing free radical initiated polymerization and further includes a photoinitiator.

Abstract: A lighting system operating using a digital mirror as its operative device. The digital mirror is used to shape the light which is a passed through advanced optical devices in order to produce an output.

Abstract: Disclosed herein is a display device using an optical modulator equipped with a lens system having an improved numerical aperture. The display device includes numerical aperture reducer for reducing a numeral aperture by causing +1st order diffracted light and corresponding ?1st order diffracted light of a diffracted light, which have passed through a relay lens system, to approach each other.

Abstract: A digital micromirror device (“DMD”) is used to alter the shape of light that is projected onto a stage. The DMD selectively reflects some light, thereby shaping the light that is projected onto the stage. The control for the alteration is controlled by an image. That image can be processed, thereby carrying out image processing effects on the shape of the light that is displayed. One preferred application follows the shape of the performer and illuminates the performer using a shape that adaptively follows the performer's image. This results in a shadowless follow spot.

Abstract: A microelectromechanical systems (MEMS) apparatus (100) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member (101) that can be stopped at either of at least two positions by electrically neutral stops (105, 107). Depending upon the needs of a given application, these stops may all be fabricated using materials deposition and removal techniques or some, though not all, may comprise an attached component.

Abstract: A microelectrical mechanical system (MEMS) actuator having electrically conductive coils that create first magnetic fields that are opposed by a second magnetic field is disclosed. The actuator includes two coils having dual, interspersed Archimedean spirals. Within an actuator, one coil is arranged with spirals that proceed clockwise, while the other coil is provided with spirals that proceed counterclockwise. An electrically conductive bridge mechanically couples the two coils of each actuator to a mirror. Opposing magnetic fields are created to provide a force that urges the coils to expand so that the outermost portions of the coil extend upward, away from the substrate, and lift the bridge and mirror. Control current may then be modulated to increase and decrease the coil's magnetic field strength thereby increasing and decreasing the coil's extension to raise and lower relative to the substrate.

Abstract: Method of deflecting light includes the steps of providing a substrate and forming a supporting member on the substrate. Next forming step forms electrodes at predetermined positions on the substrate. Next forming step forms a plate-like-shaped thin film member including light reflecting means. Placing step places the plate-like-shaped thin film member on the supporting member so that an opposite surface thereof faces the electrodes. Forming step forms space regulating members on edges of the substrate for regulating a space formed above the substrate in which the plate-like-shaped thin film member is freely movable. Applying step applies predetermined voltages to the electrodes to change a tilt direction of the plate-like-shaped thin film member in accordance with the voltages applied to deflect the input light in an arbitrary direction.

Abstract: In one embodiment, a light modulator includes a substrate and a number of modulator elements disposed above and spaced apart from the substrate. Each modulator element has an optically active portion adapted to receive light incident thereon, and a support portion on either side of the active portion to support the modulator element above the substrate. The modulator elements include at least one deflectable modulator element. To shorten damping time, the deflectable modulator element has a lower surface in the support portion that is closer to the substrate than a lower surface under the optically active portion.

Abstract: The present invention provides a real-time three-dimensional pattern recognition imaging system having a variable focal length, a wide depth of field, a high depth resolution, a fast acquisition time, a variable magnification, a variable optical axis for tracking, and capability of compensating various optical distortions and aberrations, which enables pattern recognition systems to be more accurate as well as more robust to environmental variation. The imaging system for pattern recognition comprises one or more camera system, each of which has at least one micromirror array lens(MMAL), a two-dimensional image senor, and an image processing unit. A MMAL has unique features including a variable focal length, a variable optical axis, and a variable magnification.

Abstract: An optical apparatus which is reduced in the number of optical devices arranged on a main optical signal transmission path, thereby reducing the size and cost of the device, and which is improved in optical transmission quality. An optical amplifier includes an amplification medium, which is doped with an active material for optical amplification and to which pump light is introduced, for amplifying an optical signal to be output. A reflection-type variable optical attenuator includes a reflecting mirror for reflecting an input light to generate a reflected light, and a magneto-optical crystal arranged in a position where the input and reflected lights pass. The magneto-optical crystal is applied with a magnetic field to induce a Faraday rotation angle therein and thereby vary an attenuation amount of the amplified optical signal, and part of light transmitted through the reflecting mirror is converted, as input monitor light, into an electrical signal.

Abstract: In one embodiment disclosed, a light modulator can be configured to have a substantially flat optically active modulator element portion while deflected. The modulator can include a plurality of modulator elements arranged substantially in parallel, with each modulator element including an optically active portion and a support portion on either side of the optically active portion. Further, the optically active portion can have a narrower width than the support portion. In another embodiment disclosed, a movable membrane for light modulation includes a substantially circular optically active portion and a released membrane portion surrounding the circular optically active portion. The substantially circular optically active portion can also include a plurality of gaps configured to expose a lower surface. Further, the substantially circular optically active portion can be essentially flat while in a deflected state.

Abstract: The invention relates to a method and a device for light modulation, wherein the intensity of light can be altered by means of electrically chargeable or charged particles (5). The aim of the invention is to obtain light modulation in an economical, fast and reliably reproducible manner. According to the invention, a gas or vacuum is provided wherein the particles (5) can be displaced; a granular gas (6) is produced using said gas or vacuum between at least two electrodes (1, 2) in such a manner that electrically charged particles (5) in the electric field between the electrodes (1, 2) can be moved backwards and forth and the light which is to be modulated is guided through the granular gas (6) between the electrodes (1, 2).

Abstract: An optical deflector including a support substrate, a movable member, a reflective face, and a mounting structure for fixing the support substrate thereto. The movable member is rotatably or swingingly supported by the support substrate through elastic support members. The reflective face is provided on the movable member and deflects light incident thereon when the movable member is swung relatively to the support substrate. In the optical deflector, neutral surfaces of bending in a direction of a normal to the reflective face in the elastic support member and the movable member are not present in the same plane, and the support substrate is fixed to the mounting structure at a face of the support substrate on a side of the neutral surface in the movable member opposite to a side of the neutral surface in the elastic support member.

Abstract: A lighting system, particularly for use in extreme ultraviolet (EUV) lithography, comprising a projection lens for producing semiconductor elements for wavelengths ?193 nm is provided with a light source, an object plane, an exit pupil, a first optical element having first screen elements for producing light channels, and with a second optical element having second screen elements. A screen element of the second optical element is assigned to each light channel that is formed by one of the first screen elements of the first optical element. The screen elements of the first optical element and of the second optical element can be configured or arranged so that they produce, for each light channel, a continuous beam course from the light source up to the object plane. The angles of the first screen elements of the first optical element can be adjusted in order to modify a tilt.

Abstract: An optical interference display unit with a first electrode, a second electrode and support structures located between the two electrodes is provided. The second electrode has at least a first material layer and a second material layer. At least one material layer of the two is made from conductive material and the second conductive layer is used as a mask while an etching process is performed to etch the first material layer to define the second electrode.

Abstract: An electro-optical device is provided comprising an electro-optical material and means for applying an electric field to the electro-optical material, in which a plurality of pixel regions DR, DG and DB capable of separately controlling optical states of the electro-optical material are arranged and each pixel region is provided with a light transmitting portion (an aperture portion (212aR, 212aG, and 212aB)) and a light reflecting portion (a reflective surface (212R, 212G, and 212B)). At adjacent pixel regions that are arranged in a predetermined direction, end edges Ea and Eb of each of the light transmitting portions orthogonal to the predetermined arrangement direction are aligned with each other.

Abstract: The present invention provides a deflection mirror including a mirror substrate having a mirror face that reflects a light, a beam, and a supporting member that supports the mirror substrate through the beam. A movable electrode is formed at a free side of the mirror substrate. A fixed electrode is operably linked through the movable electrode at a gap that is formed in the supporting member. The mirror substrate is driven by electrostatic force between the movable electrode and the fixed electrode and vibrates centering of the beam. An end of at least one of the fixed electrode and the movable electrode is smaller in the thickness direction than the other end.

Abstract: A spatial light modulator includes a first region and a second region. A light-absorbing layer contacts at least a portion of the second region. The light absorbing layer includes a first layer and a second layer, the second layer having a reflectivity less than about 75%.

Abstract: A digital micromirror device (DMD) modified for use as a temporal light modulator. The DMD is modified so that the mirrors of the DMD have a preferential tilt direction. The inputs and outputs of the DMD are connected to common ground, except for the bias input lines. The latter are connected to a common excitation input, which is used to cyclically reposition the mirrors between tilted and flat states.

Abstract: A device for deflecting an incident radiation beam through a steering angle to produce a deflected radiation beam is described. The device comprises a photonic crystal receiving the incident radiation beam at a dynamically controlled incidence angle. The photonic crystal is configured to negatively refract the incident radiation beam such that relatively large controlled variations of the steering angle are provided by relatively small controlled variations of the incidence angle.

Abstract: An IR limiting device for a detector that is based on a micro-optomechanical cantilever array is disclosed. In the normal state, each microcantilever device in the array behaves like a mirror that reflects the infrared signal to the detector. The microcantilever device absorbs radiation outside the desired infrared region. When the radiation is stronger than a predetermined threshold, the microcantilever device bends as a result of thermo-mechanical forces, and it reflects the signal away from the detector, thereby limiting the radiation. The advantage of such a system is that each pixel in the detector can be addressed individually, and the limiting is localized.

Abstract: A method of fabricating an integrated spatial light modulator with contact structures. The method includes providing a first substrate having a bonding surface, providing a device substrate having a device surface, and depositing a first layer on the device surface, the first layer having an upper surface opposite the device surface. The method also includes patterning the first layer to define a plurality of contact structure openings, depositing a conductive layer on the upper surface of the first layer, reducing the thickness of the conductive layer, and removing at least a portion of the first layer to expose a plurality of contact structures. The method further includes depositing a standoff layer on the first layer, forming standoff structures from the standoff layer, and joining the bonding surface of the first substrate to the standoff structures to form a bonded substrate structure.

Abstract: A projection optical system includes a light source, a digital micromirror device (DMD), a projection lens and a first block sheet. The light source provides an illumination light. The DMD includes a plurality of micromirrors, and the angles of each micromirrors are changed individually according to an input signal for separating the illumination light reflected from the micromirrors into a signal light, a first stray light and a second stray light. The signal light passes through the projection lens and is further projected onto a screen. The first block sheet is disposed closely to the projection lens to allow the first stray light and the second stray light to be fully shielded off by the first block sheet and thus not to reach the projection lens.

Abstract: The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.

Abstract: An optical element which includes a reflection portion capable of reflecting a light beam in a desired direction is provided. The optical element comprises a substrate 21, a light reflection portion 101, and a support portion 102 which supports the light reflection portion 101 over the substrate 21. Each of the light reflection portion 101 and the support portion 102 is constructed of at least one film. The support portion 102 has one end 102c fixed to the substrate 21 and has the other end 102d joined with the film constructing the light reflection portion 101, and it bends from one end 102c toward the other end 102d, thereby to support the principal plane of the film constructing the light reflection portion 101, non-parallelly, for example, perpendicularly to the principal plane of the substrate 21.

Abstract: An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.

Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror.

Abstract: A method to improve an extinction ratio of an optical device, the method includes positioning at least a majority of a plurality of micro-mirrors in an off-state position. A mirror assembly includes the plurality of micro-mirrors. The method also includes selectively positioning at least one of the plurality of micro-mirrors in an on-state position. In one particular embodiment, the at least one of the plurality of micro-mirrors positioned in the on-state position operates to improve an extinction ratio of an optical device.

Abstract: An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.

Abstract: An array of micromirror array lenses is invented. The micromirror array lens consists of many micromirrors and actuating components. Each micromirror array lens is variable focal length lens with high speed focal length change. The lens can have arbitrary type and/or size as desired and desired arbitrary optical axis and can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known microelectronics technologies. The actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known microelectronics technologies remove the loss in effective reflective area due to electrode pads and wires.

Abstract: An apparatus for acting on an optical path, includes an at least partly opaque lever, and a bearance fulcrum about which at least a part of the lever is slewable at least partly in and out of the optical path by the use of a piezo-electric force.

Abstract: A pixel electrode and a thin film transistor connected to the electrode are provided above one substrate. A shading film is provided above another substrate. The shading film has an overhanging portion defining a corner cutting in an opening area of each pixel in the crossing area where the data line and the scan line cross with each other. A channel region of the thin film transistor is arranged in the crossing areas. Thus, light resistance is enhanced and a high-grade image is displayed in an electro-optical apparatus.

Abstract: A micromirror array comprises micromirrors of different properties for use particularly in display systems. Micromirrors of different properties can be arranged within the micromirror array according to a predetermined pattern, or randomly. However, it is advantageous to arrange the micromirrors with different properties within the micromirror array neither in complete order nor complete in random.

Abstract: Electromechanical shutter and display comprising a two-dimensional matrix of such shutters are proposed, in which the membrane under the force of electrostatic attraction moves from its original position parallel to the substrate plane into a final position normal to the substrate plane, thereby transferring the shutter, or display pixel, from its “off” state into its “on” state. To produce the “on” state, the electrostatic force is applied only to a narrow conductive strip placed on the side of the membrane and rotates the membrane around the torsion hinges attached to this strip. Two-and three-electrode shutter and pixel configurations are considered. Both versions provide a bi-stable membrane behavior, which implies that the voltage needed to transfer the membrane into the “on” state is larger than the voltage needed to maintain the membrane in this state. This feature of bi-stability allows realization of functions “pixel hold” and “pixel select” using a simple passive matrix architecture.

Abstract: A digital micromirror device (DMD) modified for use as a temporal light modulator. The DMD is modified so that the mirrors of the DMD have a preferential tilt direction. The inputs and outputs of the DMD are connected to common ground, except for the bias input lines. The latter are connected to a common excitation input, which is used to cyclically reposition the mirrors between tilted and flat states.

Abstract: The present invention provides a transmissive-diffractive light modulator in which a substrate having the same structure as that of a conventional diffractive light modulator has a light transmittance gate or is made of a transparent material, thus diffracting incident light while the incident light passes through the substrate.

Abstract: To operate an optical device comprising an SLM with a two-dimensional array of controllable phase-modulating elements groups of individual phase-modulating elements are delineated, and control data selected from a store for each delineated group of phase-modulating elements. The selected control data are used to generate holograms at each group and one or both of the delineation of the groups and the selection of control data is/are varied. In this way upon illumination of the groups by light beams, light beams emergent from the groups are controllable independently of each other.

Abstract: A spatial light modulator is provided. The spatial light modulator includes a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals, and a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes. The spatial light modulator also includes a mirror plate electrically coupled to the bias grid and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes. The spatial light modulator further includes a landing post support structure coupled to the first substrate and electrically coupled to the bias grid and a landing post coupled to the landing post support structure. The landing post is electrically coupled to the bias grid and adapted to make contact with the mirror plate positioned at the first orientation.